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    • 1. 发明申请
    • SYSTEM FOR AND METHOD OF PROVIDING PRESSURE INSENSITIVE SELF VERIFYING MASS FLOW CONTROLLER
    • 提供压力敏感自我验证质量流量控制器的系统和方法
    • WO2015123008A1
    • 2015-08-20
    • PCT/US2015/012851
    • 2015-01-26
    • MKS INSTRUMENTS, INC.
    • DING, JunhuaL'BASSI, Michael
    • G05D7/06
    • G05D7/0635
    • A mass flow controller comprises: a pressure-based flow meter, a thermal-based flow meter, a control valve, and a system controller. The pressure-based flow meter and thermal-based flow meter each measure flow rate of mass through the mass flow controller. The control valve controls the flow rate in response to a control signal generated as a function of the flow rate as measured by thermal-based flow meter when the measured flow rate is relatively low, and as a function of the flow rate as measured by the pressure-based flow meter when the flow rate is relatively high. A comparison of the flow measurements of the two flow meters can be used to (a) sense pressure disturbances at low flow rates, and (b) sense when the thermal-based flow meter is out of calibration so that a zero offset signal can be applied to the thermal-based flow meter
    • 质量流量控制器包括:基于压力的流量计,基于热量的流量计,控制阀和系统控制器。 基于压力的流量计和热式流量计每个通过质量流量控制器测量质量流量。 控制阀响应于当测量的流量相对较低时根据由热能流量计测量的流量的函数产生的控制信号来控制流量,并且作为根据由流量计测得的流量的函数 压力流量计当流量比较高时。 可以使用两个流量计的流量测量的比较来(a)感测低流量下的压力扰动,和(b)当热基流量计失去校准时感测到零偏移信号可以是 应用于热式流量计
    • 2. 发明申请
    • LIGHTING CALIBRATION FOR INTENSITY AND COLOR
    • 强度和颜色的照明校准
    • WO2014150181A1
    • 2014-09-25
    • PCT/US2014/022506
    • 2014-03-10
    • LSI INDUSTRIES, INC.
    • MORRISSEAU, Marc
    • G02B21/18G01J1/32G01J1/42G01J3/50H04N17/00
    • H05B33/0842G01J1/32G01J1/42G01J3/506G01J2001/4247
    • Systems and methods for lighting calibration are disclosed. A brightness level for a first color, a brightness level for a second color, and a brightness level for a third color are detected for at least a portion of the plurality of light sources. A desired brightness value for the first color is determined based on the detected brightness level for the first color. A desired brightness value for the second color is determined based on the detected brightness level for the second color. A desired brightness value for the third color is determined based on the detected brightness level for the third color. One or more currents are adjusted at the plurality of light sources to set the plurality of light sources to the desired brightness value for the first color, the desired brightness value for the second color, and the desired brightness value for the third color.
    • 公开了用于照明校准的系统和方法。 对于多个光源的至少一部分,检测第一颜色的亮度水平,第二颜色的亮度水平和第三颜色的亮度水平。 基于检测到的第一颜色的亮度水平来确定用于第一颜色的期望亮度值。 基于检测到的第二颜色的亮度水平确定第二颜色的期望亮度值。 基于检测到的第三颜色的亮度水平确定第三颜色的期望亮度值。 在多个光源处调整一个或多个电流以将多个光源设置为用于第一颜色的所需亮度值,用于第二颜色的期望亮度值和用于第三颜色的期望亮度值。
    • 4. 发明申请
    • SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY
    • 快速脉冲气体输送系统及方法
    • WO2015138073A1
    • 2015-09-17
    • PCT/US2015/015363
    • 2015-02-11
    • MKS INSTRUMENTS, INC.
    • DING, JunhuaL'BASSI, MichaelLEE, Tseng-Chung
    • C23C16/455C23C16/52C23C16/448
    • C23C16/52C23C16/45523C23C16/45561G05D7/0635
    • A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.
    • 一种用于将期望质量的气体脉冲输送到工具的系统,包括:质量流量控制器,包括流量传感器,控制阀和专用控制器,其被配置和布置成接收用于打开和关闭控制的一系列步骤的配方 阀门,以作为配方的函数输送气体脉冲序列。 质量流量控制器被配置和布置成以至少两种模式中的任一种操作:作为传统质量流量控制器(MFC)模式或脉冲气体输送(PGD)模式。 此外,质量流量控制器包括被配置为接收输入信号的输入; 被配置为提供输出信号的输出; 通信端口,被配置为接收程序指令; 存储器被配置和布置成接收将质量流量控制器的编程配置确定为数字或模拟配置的编程数据; 以及用于根据编程配置操作质量流量控制器的处理器/控制器。
    • 6. 发明申请
    • LIGHT HARVESTING
    • 光收藏
    • WO2014109888A1
    • 2014-07-17
    • PCT/US2013/077023
    • 2013-12-20
    • LSI INDUSTRIES, INC.
    • FRODSHAM, TimVANWAGONER, MarkHERBST, Joseph E.
    • H05B37/02
    • H05B37/0218Y02B20/46
    • The current application is directed to control of lighting systems and utilization of ambient light levels for such control. One implementation comprises one or more lighting fixtures installed in a structure, at least one ambient light information source configured to provide brightness information of ambient light of the structure, and a controller configured to maintain a brightness level of an interior portion of the structure substantially the same as a brightness level of an exterior portion of the structure by controlling outputs of the lighting fixtures in response to the brightness information of the ambient light. The interior portion of the structure may include an entrance portion of the structure. The controller may be further configured to gradually reduce brightness levels of the outputs of the lighting fixtures from the entrance portion towards a center of the structure.
    • 目前的应用是针对照明系统的控制和对这种控制的环境光级的利用。 一个实施方案包括安装在结构中的一个或多个照明器具,至少一个环境光信息源被配置为提供该结构的环境光的亮度信息,以及控制器,被配置为将该结构的内部部分的亮度水平基本保持 通过响应于环境光的亮度信息控制照明器具的输出,与结构的外部部分的亮度水平相同。 结构的内部可以包括结构的入口部分。 控制器还可以被配置为逐渐地将照明器具的输出的亮度级别从入口部分朝向结构的中心减小。
    • 7. 发明申请
    • 3D SCREEN WITH MODULAR POLARIZED PIXELS
    • 具有模块化偏振像素的3D屏幕
    • WO2010104730A1
    • 2010-09-16
    • PCT/US2010/026159
    • 2010-03-04
    • LSI INDUSTRIES, INC.JALBOUT, Bassam, D.WONG, Brian
    • JALBOUT, Bassam, D.WONG, Brian
    • H04N13/00G09F9/33
    • H04N13/337H04N2213/001
    • Modular light source are described with polarized states and a video screen including a matrix of the modular light sources. Each modular light source may constitute a pixel of the screen. Each pixel may be controlled to emit light in a polarized state. As a result, the screen may generate images with different polarities at any pixel, at any time, in addition to generating non-polarized pixels or images if desired. Using a viewing device, such as glasses, having a lenses with different polarization characteristics, a viewer may perceive an image generated by the screen as having three dimensions. Related methods and computer program products are also described.
    • 用偏振状态描述模块化光源,以及包括模块化光源的矩阵的视频屏幕。 每个模块化光源可以构成屏幕的像素。 可以控制每个像素以发射偏振状态的光。 结果,如果需要,除了产生非偏振像素或图像之外,屏幕可以在任何时间在任何像素处生成具有不同极性的图像。 使用具有不同偏振特性的透镜的诸如眼镜的观察装置,观察者可以将由屏幕产生的图像感知为具有三维。 还描述了相关方法和计算机程序产品。
    • 9. 发明申请
    • MICRO-PIRANI VACUUM GAUGES
    • MICRO-PIRANI真空计
    • WO2015148005A2
    • 2015-10-01
    • PCT/US2015/015810
    • 2015-02-13
    • MKS INSTRUMENTS, INC.
    • GU, LeiBART, Stephen F.WENZEL, Ole
    • G01L21/12
    • G01L21/12G01L21/10
    • Micro-Pirani gauge vacuum gauges are described that use low-thermal conductivity support elements. A micro-Pirani gauge or vacuum sensor can include a heating element operative to heat a gas and to produce a signal corresponding to the pressure of the gas; a platform configured to receive the heating element, with the platform having a first coefficient of thermal conductivity; and a support element connected to a substrate and configured to support the platform with the heating element within an aperture disposed in the substrate, with the support element having a second coefficient of thermal conductivity, where the second coefficient of thermal conductivity is less than the first coefficient of thermal conductivity. Multimode pressure sensing including a micro-Pirani gauge are also described.
    • 描述了使用低热导率支撑元件的Micro-Pirani真空计真空计。 微皮拉尼计或真空传感器可包括加热元件,其可操作以加热气体并产生对应于气体压力的信号; 配置成接收加热元件的平台,其中平台具有第一导热系数; 以及支撑元件,所述支撑元件连接到衬底并且被配置为用设置在所述衬底中的孔内的所述加热元件支撑所述平台,所述支撑元件具有第二导热系数,其中所述第二导热系数小于所述第一导热系数 导热系数。 还介绍了包括微Pirani测量仪在内的多模式压力传感。