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81. 发明申请

WO1996035957A1 GIMBALLED VIBRATING WHEEL GYROSCOPE HAVING STRAIN RELIEF FEATURES 审中-公开
标题翻译：具有应变消除特征的GIMBALLED VIBRATING轮式陀螺仪
公开(公告)号：WO1996035957A1
公开(公告)日：1996-11-14
申请号：PCT/US1996006426
申请日：1996-05-08
申请人： THE CHARLES STARK DRAPER LABORATORY, INC.
发明人： THE CHARLES STARK DRAPER LABORATORY, INC. , GREIFF, Paul , ANTKOWIAK, Bernard, M.
IPC分类号： G01P09/04
CPC分类号： G01C19/5712 , B81B3/0051 , B81B2201/0242 , B81B2203/056 , B81B2203/058 , G01P15/0802 , G01P15/125
摘要： A gimballed vibrating wheel gyroscope (10) for detecting rotational rates in inertial space. The gyroscope (10) includes a support (20) oriented in a first plane and a wheel assembly (12) disposed over the support (20) parallel to the first plane. The wheel assembly (12) is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis (32) for providing an output torque about a coplanar output axis (34). The gyroscope (10) also includes a post assembly (18a, 18b) extending between the support (20) and the wheel assembly (12) for supporting the wheel assembly (12). The wheel assembly (12) has an inner hub (24), an outer wheel (26), and spoke flexures (28a-28d) extending between the inner hub (24) and the outer wheel (26) and being stiff along both the input and output axes (32, 34). A flexure (22a, 22b) is incorporated in the post assembly (18a, 18b) between the support (20) and the wheel assembly inner hub (24) and is relatively flexible along the output axis (34) and relatively stiff along the input axis (32).
摘要翻译：用于检测惯性空间中的旋转速率的万向振动轮陀螺仪（10）。陀螺仪（10）包括在第一平面中定向的支撑件（20）和布置在平行于第一平面的支撑件（20）上方的轮组件（12）。车轮组件（12）适于在第一平面中以预定频率旋转振动，并且响应于围绕共面输入轴线（32）的旋转速度，以提供围绕共面输出轴线（34）的输出扭矩。陀螺仪（10）还包括在支撑件（20）和轮组件（12）之间延伸以支撑轮组件（12）的柱组件（18a，18b）。车轮组件（12）具有内轮毂（24），外轮（26）和在内轮毂（24）和外轮（26）之间延伸的轮辐弯曲件（28a-28d），并且沿两个输入和输出轴（32,34）。弯曲件（22a，22b）被并入在支撑件（20）和轮组件内毂（24）之间的柱组件（18a，18b）中，并且沿着输出轴线（34）相对柔性并沿输入相对较硬轴（32）。

82. 发明申请

WO1996004525A2 TWO AXIS NAVIGATION GRADE MICROMACHINED ROTATION SENSOR SYSTEM 审中-公开
标题翻译：双轴导航等级微型旋转传感器系统
公开(公告)号：WO1996004525A2
公开(公告)日：1996-02-15
申请号：PCT/US1995009533
申请日：1995-07-28
申请人： LITTON SYSTEMS, INC. , STEWART, Robert, E. , WYSE, Stanley, F. , FERSHT, Samuel, H.
发明人： LITTON SYSTEMS, INC.
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01P2015/084 , G01P2015/0842
摘要： A two axis closed loop angular rate sensor which provides a digital delta theta output signal. A drive member is formed of a single, silicon wafer having a pair of oppositely-facing planar surfaces. The drive member includes a frame and a drive member central portion connected to the frame and arranged to have rotational compliance between the frame and the central portion about an axis perpendicular to the planar surfaces of the silicon wafer. Drive signals are applied to a plurality of electrodes on the central portion to cause rotational oscillation of the drive member central portion about a drive axis perpendicular to the planar surfaces of the silicon wafer. A silicon sensing member is connected to the drive member. The sensing member has a central support member connected to the drive member central portion such that rotational oscillations of the drive member central portion are transmitted to the sensing member central portion. A sensing portion is connected to the sensing member central support member to allow the sensing portion to oscillate about the drive axis and to allow an input rotation rate about an axis perpendicular to the drive axis to produce out-of-plane oscillations of the sensing portions. Signal processing apparatus is connected to the sensing portion for producing a signal indicative of the input rotational rate as a function of the amplitude of the out-of-plane oscillations of the sensing portion.
摘要翻译：一个双轴闭环角速率传感器，提供一个数字deltaθ输出信号。驱动构件由具有一对相对的平面的单个硅晶片形成。驱动构件包括框架和连接到框架的驱动构件中心部分，并且布置成围绕垂直于硅晶片的平面的轴线具有框架和中心部分之间的旋转顺应性。驱动信号被施加到中心部分上的多个电极，以使得驱动构件中心部分围绕垂直于硅晶片平面的驱动轴的旋转振荡。硅感测构件连接到驱动构件。感测构件具有连接到驱动构件中心部分的中心支撑构件，使得驱动构件中心部分的旋转振动被传递到感测构件中心部分。感测部分连接到感测构件中心支撑构件，以允许感测部分围绕驱动轴线振荡并且允许围绕垂直于驱动轴线的轴的输入旋转速率产生感测部分的平面外振荡。信号处理装置连接到感测部分，用于产生表示作为感测部分的平面外振荡幅度的函数的输入转速的信号。

83. 发明申请

WO2018022803A1 MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE 审中-公开
标题翻译：多轴，单传动惯性装置
公开(公告)号：WO2018022803A1
公开(公告)日：2018-02-01
申请号：PCT/US2017/044028
申请日：2017-07-26
申请人： LUMEDYNE TECHNOLOGIES INCORPORATED
发明人： ANAC, Ozan , HUANG, Xiaojun
IPC分类号： G01C19/574 , G01C19/5719 , G01P15/08
CPC分类号： G01C19/5712 , G01C19/5719 , G01C19/574 , G01C19/5762 , G01P15/036 , G01P15/0802 , G01P15/0888 , G01P15/097 , G01P15/125 , G01P15/18 , G01P2015/0837 , G01P2015/0857 , G01P2015/0862
摘要： Systems and methods are disclosed herein for multi-axis single-drive inertial devices. A multi-axis single drive inertial device can include a rotational drive configured to oscillate a plurality of accelerometer proof masses and a plurality of gyroscope proof masses about a z axis and signal processing circuitry configured for determining inertial parameters based on motion of the plurality of accelerometer proof masses and the plurality of gyroscope proof masses. The inertial parameters can include acceleration of the inertial device along an x axis perpendicular to the z axis and along a y axis perpendicular to each of the x and z axes, and rotation of the inertial device about each of the x, y, and z axes.
摘要翻译：这里公开了用于多轴单驱动惯性装置的系统和方法。多轴单驱动惯性设备可以包括被配置为使多个加速度计检测质量块和围绕z轴的多个陀螺仪检测质量块振荡的旋转驱动器以及被配置用于基于多个加速度计检测器的运动来确定惯性参数的信号处理电路质量和多个陀螺仪检测质量。惯性参数可以包括惯性装置沿垂直于z轴的x轴以及垂直于x轴和z轴中的每一个的y轴的加速度以及惯性装置围绕x，y和z轴中的每一个的旋转

84. 发明申请

WO2016020501A1 APPARATUS AND METHOD FOR MEASURING A BENDING ANGLE OF A WORKPIECE 审中-公开
标题翻译：测量工件弯曲角度的装置和方法
公开(公告)号：WO2016020501A1
公开(公告)日：2016-02-11
申请号：PCT/EP2015/068206
申请日：2015-08-06
申请人： SALVAGNINI ITALIA S.P.A.
发明人： GESUITA, Enzo
IPC分类号： G01B21/22 , B21D5/00
CPC分类号： G01B5/24 , B21D5/006 , G01B21/22 , G01C19/5712
摘要： An apparatus for measuring a bending angle (a) between two portions (51, 52) of a workpiece (50) in a bending machine (100; 110) comprises at least a motion sensor unit (2) provided with a gyroscope sensor (3), a processing unit (10) connected to said gyroscope sensor (3) and coupling means (12; 11; 211) for removably coupling said motion sensor unit (2) to a portion (51, 52) of said workpiece (50); during a bending operation of said workpiece (50) said gyroscope sensor (3) measures angular velocities (ωχ, ωγ, ωz) and calculates related rotation angles (θχ, θγ, θz) of said portion (51, 52) in a local coordinate system (X, Y, Z) of said gyroscope sensor (3) and said processing unit (10) receives from said gyroscope sensor (3) data regarding at least said rotation angles θχ, θγ, θz) so as to calculate, whatever a position and/or an orientation of said local coordinate system (X, Y, Z) is on said portion (51, 52), further rotation angles (θχ, θγ, θz) of said portion (51, 52) in a global coordinate system (x, y, z) associated to said bending machine (100; 110) in order to estimate said bending angle (a) as a function of said further rotation angles (θχ, θγ, θz).
摘要翻译：一种用于测量弯曲机（100,110）中的工件（50）的两个部分（51,52）之间的弯曲角度（a）的设备至少包括设置有陀螺仪传感器（3）的运动传感器单元（2）），连接到所述陀螺传感器（3）的处理单元（10）和用于将所述运动传感器单元（2）可移除地联接到所述工件（50）的部分（51,52）的联接装置（12; 11; 211） ; 在所述工件（50）的弯曲操作期间，所述陀螺仪传感器（3）测量角速度（ωχ，ωγ，ωz）并计算所述部分（51,52）的相对旋转角度（θχ，θγ，θz）所述陀螺传感器（3）和所述处理单元（10）的系统（X，Y，Z）从所述陀螺仪传感器（3）接收关于至少所述旋转角度θχ，θγ，θz的数据，以便计算，无论所述局部坐标系（X，Y，Z）的位置和/或方向在所述部分（51,52）上，所述部分（51,52）的全局坐标的另外的旋转角度（θχ，θγ，θz）与所述弯曲机（100; 110）相关联的系统（x，y，z），以便根据所述另外的旋转角度（θχ，θγ，θz）估计所述弯曲角度（a）。

85. 发明申请

WO2015121779A3 A drive circuitry for MEMS resonator startup 审中-公开
标题翻译：用于MEMS谐振器启动的驱动电路
公开(公告)号：WO2015121779A3
公开(公告)日：2015-12-10
申请号：PCT/IB2015050902
申请日：2015-02-06
申请人： MURATA MANUFACTURING CO
发明人： AALTONEN LASSE
IPC分类号： G01C19/5776 , H03B5/00
CPC分类号： G01C19/5712 , G01C19/5776 , H03B5/06 , H03B5/364
摘要： A drive circuitry for a MEMS resonator. The circuitry comprises closed loop means for detecting and amplifying a signal of the MEMS resonator, and means for feeding the detected and amplified signal as a feedback signal back to the MEMS resonator. The circuitry also comprises DC bias voltage means for generating for the MEMS resonator a first DC bias voltage, and a second DC bias voltage that is controlled according to measured amplitudes of the MEMS resonator, one of the DC bias voltages being summed into the feedback signal. The circuitry comprises also a start-up circuitry adapted to detect a start-up state, and in response to a detected start-up state change at last one of the DC bias voltages to a predefined level. The state of constant oscillation is achieved reliably and in short time.
摘要翻译：用于MEMS谐振器的驱动电路。电路包括用于检测和放大MEMS谐振器的信号的闭环装置，以及用于将检测和放大的信号作为反馈信号馈送回到MEMS谐振器的装置。电路还包括用于为MEMS谐振器产生第一DC偏置电压的DC偏置电压装置和根据MEMS谐振器的测量幅度来控制的第二DC偏置电压，将一个DC偏置电压加到反馈信号中。该电路还包括适于检测启动状态的启动电路，并且响应于检测到的最后一个DC偏置电压的启动状态改变到预定义的电平。恒定振荡的状态在短时间内可靠实现。

86. 发明申请

WO2015128819A1 MICROELECTROMECHANICAL DEVICE WITH MOTION LIMITERS 审中-公开
标题翻译：具有运动限制的微电子器件
公开(公告)号：WO2015128819A1
公开(公告)日：2015-09-03
申请号：PCT/IB2015/051415
申请日：2015-02-26
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AHTEE, Ville , RYTKÖNEN, Ville-Pekka
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01C19/5712 , B81B3/0051 , B81B2201/0235 , B81B2203/0181 , B81B2203/058 , G01P15/125 , G01P2015/0831 , G01P2015/0871
摘要： A microelectromechanical device that comprises a first structural layer, and a movable mass suspended to a primary out- of plane motion relative the first structural layer. A cantilever motion limiter structure is etched into the movable mass, and a first stopper element is arranged on the first structural layer, opposite to the cantilever motion limiter structure. Improved mechanical robustness is achieved with optimal use of element space.
摘要翻译：一种微机电装置，其包括第一结构层和相对于第一结构层悬挂到主平面外运动的可移动质量块。悬臂运动限制器结构被蚀刻到可移动质量块中，并且第一结构层上设置有与悬臂运动限制器结构相对的第一止动件。通过优化元件空间来提高机械稳定性。

87. 发明申请

WO2015088725A1 OPTOMECHANICAL SENSOR FOR ACCELEROMETRY AND GYROSCOPY 审中-公开
标题翻译：光学传感器用于加速和陀螺仪
公开(公告)号：WO2015088725A1
公开(公告)日：2015-06-18
申请号：PCT/US2014/066463
申请日：2014-11-19
申请人： INTEL CORPORATION
发明人： HUTCHISON, David N. , HECK, John
IPC分类号： G01P15/14 , H01S3/101 , G02B6/42
CPC分类号： G01P15/093 , G01C19/5712 , G01C19/5733 , G01C19/5776 , G01P15/14 , G01P2015/0828 , G01P2015/084
摘要： Embodiments of the present disclosure are directed towards techniques and configurations for a MEMS device configured to determine inertial change applied to the device. In one instance, the device may comprise a laser arrangement configured to generate a light beam having a resonant wavelength, a waveguide configured to receive and output the light beam, and an optical resonator comprising a deformable closed loop and optically coupled to the waveguide to receive a portion of the light beam. A deformation of the optical resonator may result in a change of an optical path length of a portion of the light beam traveling through the optical resonator, causing a change in the resonant wavelength of the light beam outputted by the waveguide. Other embodiments may be described and/or claimed.
摘要翻译：本公开的实施例针对被配置为确定施加到该装置的惯性变化的MEMS装置的技术和配置。在一个实例中，该装置可以包括被配置为产生具有谐振波长的光束的激光装置，被配置为接收和输出光束的波导，以及包括可变形闭环的光学谐振器，并且光耦合到波导以接收一部分光束。光谐振器的变形可能导致光通过光谐振器的光束的一部分的光路长度的变化，导致波导输出的光束的谐振波长的变化。可以描述和/或要求保护其他实施例。

88. 发明申请

WO2014085675A1 CHIP LEVEL SENSOR WITH MULTIPLE DEGREES OF FREEDOM 审中-公开
标题翻译：具有多个自由度的芯片级传感器
公开(公告)号：WO2014085675A1
公开(公告)日：2014-06-05
申请号：PCT/US2013/072360
申请日：2013-11-27
申请人： ROBERT BOSCH GMBH , FEYH, Ando , CHEN, Po-Jui
发明人： FEYH, Ando , CHEN, Po-Jui
IPC分类号： G01P1/02 , G01P15/125 , G01P15/18 , G01C19/5755 , G01C19/5769 , B81B7/00 , G01P15/08
CPC分类号： G01C19/5712 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2207/053 , G01C19/5755 , G01C19/5769 , G01C25/00 , G01P15/123 , G01P15/125 , G01P15/18 , G01P2015/0808 , G01P2015/0814 , G01P2015/0848 , G01P2015/0882 , Y10T29/42
摘要： A sensing assembly device (100) includes a substrate (102), a chamber above the substrate, a first piezoelectric gyroscope sensor (104) positioned within the chamber, and a first accelerometer (106) positioned within the chamber (150). The environment within the chamber (150) is selected to provide damping to the first accelerometer (106) without unduly affecting the quality factor of the piezoelectric gyroscope (104).
摘要翻译：感测组件装置（100）包括衬底（102），衬底上方的腔室，位于室内的第一压电陀螺仪传感器（104）和定位在室（150）内的第一加速度计（106）。腔室150内的环境被选择成为第一加速度计（106）提供阻尼，而不会不利地影响压电陀螺仪（104）的品质因数。

89. 发明申请

WO2013116522A1 MEMS MULTI-AXIS GYROSCOPE Z-AXIS ELECTRODE STRUCTURE 审中-公开
标题翻译： MEMS多轴陀螺仪Z轴电极结构
公开(公告)号：WO2013116522A1
公开(公告)日：2013-08-08
申请号：PCT/US2013/024149
申请日：2013-01-31
申请人： ACAR, Cenk
发明人： ACAR, Cenk
IPC分类号： G01C19/56 , G01C19/5719 , G01C19/5783
CPC分类号： G01C19/5712
摘要： Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
摘要翻译：各种示例包括用于感测运动的微机电模具，其包括与不对称定子电极相互指向的对称的证明质量电极。这些示例中的一些包括围绕垂直于其中布置电极的平面的轴线弯曲的电极。一个例子提供垂直弯曲，其以允许围绕水平轴线弯曲的方式将内万向架耦合到校验块。

90. 发明申请

WO2013091866A1 MULTIAXIAL MICRO-ELECTRONIC INERTIAL SENSOR 审中-公开
标题翻译：多相微电子惯性传感器
公开(公告)号：WO2013091866A1
公开(公告)日：2013-06-27
申请号：PCT/EP2012/005288
申请日：2012-12-20
申请人： TRONICS MICROSYSTEMS S.A.
发明人： LECLERC, Jacques
IPC分类号： G01C19/5712 , G01P15/18
CPC分类号： G01P15/18 , G01C19/5712 , G01P15/08 , G01P15/125 , G01P15/14 , G01P2015/0862
摘要： A resonator micro-electronic inertial sensor, preferably a micro-electromechanical system (MEMS) sensor (e.g. a gyro), for detecting linear accelerations and rotation rates in more than one axis comprises: ・a proof-mass system (21.1, 21.4) flexibly suspended above a substrate for performing a rotational in-plane vibration about a central axis (24,) • a drive electrode system (D 1,.... D4) for driving the proof-mass system (21.1,.... 21.4) to perform said rotational in-plane vibration, • and a sensing electrode system (S 1, S8) connected to the proof-mass system (21.1,.... 21.4) for detecting linear accelerations or rotation rates in more than one axis. Said proof-mass system (21.1 21.4) has more than two proof-mass elements flexibly coupled (25.1a, 25.1 b) to each other. Each proof-mass element (21.1, 21.2) is directly and flexibly connected (23. 1, 25.1 a, 25.1 b) to an anchor structure (22) on the substrate (32). The proof-mass elements (21.1,.... 21.4) are preferably arranged In a ring-shaped configuration between an inner and an outer radius (R1, R2) with respect to the central axis (24).
摘要翻译：谐振器微电子惯性传感器，优选微机电系统（MEMS）传感器（例如，陀螺仪），用于检测多于一个轴线中的线性加速度和旋转速率，包括：•灵敏的证明质量系统（21.1,21.4）悬挂在基板上方，用于围绕中心轴线（24）执行旋转的平面内振动。用于驱动校验质量系统（21.1，... 21.4）以执行所述旋转平面内振动的驱动电极系统（D 1，.... D4）。以及连接到校验质量系统（21.1，... 21.4）的检测电极系统（S1，S8），用于检测多于一个轴的线性加速度或旋转速度。所述证明质量系统（21.1 21.4）具有两个彼此柔性耦合（25.1a，25.1b）的证明质量元件。每个证明质量元件（21.1,21.2）直接和柔性地连接（23. 1，25.1 a，25.1 b）到衬底（32）上的锚结构（22）。证明质量元件（21.1，... 21.4）优选地以相对于中心轴线（24）的内半径（R 1，R 2）和外半径（R 1，R 2）之间的环形构造布置。

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