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1. 发明申请

WO1995021383A1 METHOD OF MAKING A MICROMECHANICAL SILICON-ON-GLASS TUNING FORK GYROSCOPE 审中-公开
标题翻译：制造微波玻璃调理机的方法
公开(公告)号：WO1995021383A1
公开(公告)日：1995-08-10
申请号：PCT/US1995001330
申请日：1995-02-01
申请人： THE CHARLES STARK DRAPER LABORATORY, INC.
发明人： THE CHARLES STARK DRAPER LABORATORY, INC. , CHO, Steve, T.
IPC分类号： G01P09/04
CPC分类号： G01C19/5719 , Y10S438/924
摘要： A micromechanical tuning fork gyroscope (14) fabricated by a dissolved silicon wafer process whereby electrostatic bonding forms a hermetic seal between an etched glass substrate (12), metal electrodes (202) deposited thereon, and a silicon comb-drive tuning fork gyroscope (14). The dissolved silicon wafer process involves single-sided processing of a silicon substrate (100), including the steps of etching recesses (102), diffusing an etch resistant dopant (104) into the silicon substrate (100), and releasing various components of the silicon gyroscope (14) by etching through the diffusion layer (104) in desired locations (106). The glass substrate (12) also undergoes single-sided processing, including the steps of etching recesses, depositing a multi-metal system in the recesses (200), and selectively etching portions of the multi-metal system (202). One substrate (100) is inverted over the other (12) and aligned before anodic bonding of the two substrates is performed.
摘要翻译：通过溶解的硅晶片工艺制造的微机械音叉陀螺仪（14），由此静电接合在蚀刻的玻璃基板（12），沉积在其上的金属电极（202）和硅梳驱动音叉陀螺仪（14）之间形成气密密封）。溶解的硅晶片工艺涉及硅衬底（100）的单面处理，包括蚀刻凹槽（102），将耐蚀刻掺杂剂（104）扩散到硅衬底（100）中的步骤，以及释放硅陀螺仪（14）通过在所需位置（106）中蚀刻通过扩散层（104）。玻璃基板（12）也进行单面加工，包括蚀刻凹槽，在凹槽（200）中沉积多金属系统，以及选择性地蚀刻多金属系统（202）的部分的步骤。一个衬底（100）在另一个衬底（100）上被反转，并且在两个衬底的阳极接合之前进行对准。

2. 发明申请

WO1994008245A1 FERROELECTRIC THIN FILM TRAVELLING WAVE ROTATION SENSOR 审中-公开
标题翻译：铁电薄膜行驶波浪传感器
公开(公告)号：WO1994008245A1
公开(公告)日：1994-04-14
申请号：PCT/US1993004935
申请日：1993-05-24
申请人： BEI ELECTRONICS, INC.
发明人： BEI ELECTRONICS, INC. , WAN, Lawrence, A.
IPC分类号： G01P09/04
CPC分类号： G01C19/5684
摘要： A diaphragm (24) is disposed over a cavity (18) formed in a silicon base (14). A plurality of electrodes (22) are radially disposed about the diaphragm overlying the cavity, and a signal applying circuit (34) applies a signal to the plurality of electrodes so that portions of the diaphragm flex for establishing a net angular momentum (e.g., the flexing of the diaphragm simulates a traveling wave encircling the cavity). A deformation sensing circuit comprising a plurality of strain gages (42) interconnected to form a corresponding plurality of Wheatstone bridges (38) are disposed about the periphery of the cavity along orthogonal axes (X, Y) for sensing deformation of the structure about the orthogonal axes.
摘要翻译：隔膜（24）设置在形成在硅基底（14）中的空腔（18）之上。多个电极（22）围绕覆盖空腔的隔膜放射状设置，并且信号施加电路（34）向多个电极施加信号，使得隔膜的部分弯曲以建立净角动量（例如，隔膜的弯曲模拟围绕空腔的行波）。包括互连以形成对应的多个惠斯通电桥（38）的多个应变计（42）的变形感测电路围绕着沿着正交轴线（X，Y）的空腔的周边设置，用于感测关于正交的结构的变形轴。

3. 发明申请

WO1993005401A1 MICROMECHANICAL TUNING FORK ANGULAR RATE SENSOR 审中-公开
标题翻译：微机械调速器角速率传感器
公开(公告)号：WO1993005401A1
公开(公告)日：1993-03-18
申请号：PCT/US1992007685
申请日：1992-09-11
申请人： THE CHARLES STARK DRAPER LABORATORY, INC. , GREIFF, Paul , BOXENHORN, Burton
发明人： THE CHARLES STARK DRAPER LABORATORY, INC.
IPC分类号： G01P09/04
CPC分类号： G01C19/5719 , G01P2015/0831
摘要： A micromechanical tuning fork gyroscope includes a suspended structure (14) comprising at least first and second vibratable structures (38, 40). Each vibratable structure is energizable to vibrate laterally, within a first plane, along an axis (42) normal to the rotation sensitive axis (44). The lateral or inplane vibration of the first and second vibratable structures effects simultaneous vertical or rotational movement of at least a portion of the suspended structure upon the occurence of angular rotation of the gyroscope about the rotation sensitive axis. Vertical or rotational movement of the suspended structure is sensed by electrodes (70, 72) and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.
摘要翻译：微机械音叉陀螺仪包括包括至少第一和第二可振动结构（38,40）的悬挂结构（14）。每个可振动结构可激励以沿着垂直于旋转敏感轴线（44）的轴线（42）在第一平面内横向振动。第一和第二可振动结构的横向或平面上的振动在陀螺仪围绕旋转敏感轴的角度旋转发生时，同时垂直或旋转移动悬架结构的至少一部分。通过电极（70,72）检测悬挂结构的垂直或旋转运动，并且产生与运动成比例的电压，以提供由陀螺仪检测到的角速度的指示。

4. 发明申请

WO1998022827A1 GUARD BANDS FOR TUNING FORK GYROSCOPES 审中-公开
标题翻译：用于调节运动员的保护套
公开(公告)号：WO1998022827A1
公开(公告)日：1998-05-28
申请号：PCT/US1997021000
申请日：1997-11-18
申请人： THE CHARLES STARK DRAPER LABORATORY, INC.
发明人： THE CHARLES STARK DRAPER LABORATORY, INC. , WEINBERG, Marc, S. , PINSON, John, C.
IPC分类号： G01P09/04
CPC分类号： G01C19/5719
摘要： Guard bands (20a, 20b, 20c, 20d) in a tuning fork gyroscope reduce or eliminate force and sensitivity associated with proof mass (13) motion normal to the substrate (22) as a result of voltage transients. The guard bands reduce the undesired effects of transient voltages on electrostatic coupling of interleaved comb electrodes (12a, 18a; 14a, 18b; 14b, 18c; 12d, 18d). The guard bands are biased to reduce the coupling ratio to zero and thereby enable starting and improved performance. Various configurations of guard bands may be employed including distinct inner (20b, 20c) and outer (20a, 20d) guard bands, distinct inner guard bands only, extended sense electrodes below inner sensing combs with no outer guards, distinct outer guard bands with extended sense electrodes, and sense electrodes extended beneath both drive and sensing combs.
摘要翻译：音叉陀螺仪中的保护带（20a，20b，20c，20d）由于电压瞬变而降低或消除与基板（22）垂直的检测质量（13）运动相关联的力和灵敏度。保护带减少了交替梳状电极（12a，18a; 14a，18b; 14b，18c; 12d，18d）对瞬态电压对静电耦合的不期望的影响。保护带被偏置以将耦合比降低到零，从而实现起动和改进的性能。可以采用保护带的各种配置，包括不同的内部（20b，20c）和外部（20a，20d）保护带，仅有不同的内部保护带，扩展的感应电极位于内部传感梳以下，没有外部保护，不同的外部保护带具有延伸感测电极，以及在驱动和感测梳下面延伸的感测电极。

5. 发明申请

WO1997006441A1 PENDULOUS OSCILLATING GYROSCOPIC ACCELEROMETER 审中-公开
标题翻译：垂直振动陀螺仪加速度计
公开(公告)号：WO1997006441A1
公开(公告)日：1997-02-20
申请号：PCT/US1995009928
申请日：1995-08-04
申请人： SAPUPPO, Michele, S.
IPC分类号： G01P09/04
CPC分类号： G01C19/42 , G01P15/13 , G01P15/14
摘要： A pendulous oscillating gyroscopic accelerometer (10) comprising an unbalanced pendulous mass (28), pivotable on an output axis, that is oscillated about a reference axis transverse to the output axis. The pendulous mass (28) is also oscillated about an input axis transverse to the reference axis using a control servo loop (40), and the acceleration force along the input axis is determined from at least one of those oscillations.
摘要翻译：一种下摆摆动陀螺加速度计（10），包括不平衡的下摆质量块（28），所述不平衡的下摆质量块（28）可在输出轴线上枢转，所述不平衡的下摆质量块围绕横向于所述输出轴线的参考轴线摆动。下摆质量（28）也使用控制伺服回路（40）围绕横向于参考轴的输入轴振荡，并且沿着输入轴的加速力由这些振荡中的至少一个确定。

6. 发明申请

WO1992014159A1 CORIOLIS INERTIAL RATE AND ACCELERATION SENSOR 审中-公开
标题翻译： CORIOLIS惯性速率和加速度传感器
公开(公告)号：WO1992014159A1
公开(公告)日：1992-08-20
申请号：PCT/US1992000918
申请日：1992-02-04
申请人： SUNDSTRAND CORPORATION
发明人： SUNDSTRAND CORPORATION , HULSING, Rand, H., II
IPC分类号： G01P09/04
CPC分类号： G01P15/18 , G01C19/5705 , G01P15/097
摘要： A sensor (10) for measuring angular rate and linear acceleration of the body, in which first and second rotors (30, 31), each carrying a plurality of accelerometers (44, 49), are mounted for counter-rotating dithering motion on opposite sides of a base plate (11). A single permanent magnet (70) is mounted centrally of the base plate, with one pole (71) disposed adjacent the first rotor and the other pole (72) disposed adjacent the second rotor. First and second X-shaped pole pieces (80, 81) are mounted at the respective opposite poles of the magnet, and a plurality of velocity sensing pick-off coils (86) are mounted on the arms (82, 83, 84 and 85) of the pole pieces for cooperation with flux splitting protrusions (34, 35 and 36) on the rotors. The arms of the pole pieces are associated with the flux splitting protrusions so that differential flux splitting is obtained as the rotors are rotated in opposite directions.

7. 发明申请

WO1996014584A1 OPTICALLY SENSED WIRE GYROSCOPE APPARATUS AND SYSTEM AND METHODS FOR MANUFACTURE AND CURSOR CONTROL 审中-公开
标题翻译：光感光电陀螺仪器及其制造及其光栅控制方法
公开(公告)号：WO1996014584A1
公开(公告)日：1996-05-17
申请号：PCT/US1995014224
申请日：1995-11-03
申请人： GYRATION, INC.
发明人： GYRATION, INC. , FIELD, John , HOTELLING, Steven, P.
IPC分类号： G01P09/04
CPC分类号： G01C19/5635 , Y10T74/1264
摘要： A wire gyroscope (11), for sensing orientation in various axes uses optical sensing in conjunction with a electromagnetic drive, includes at least one wire (13, 15) which are selectively torqued and stretched between respective magnetic fields and oscillating currents (33, 35) are supplied through the wire to induce harmonic motion oriented within the magnetic fields.
摘要翻译：用于感测各种轴线方位的线状陀螺仪（11）使用与电磁驱动相结合的光学感测，包括至少一根线（13,15），其被选择性地扭转并在相应的磁场和振荡电流之间拉伸（33,35 ）通过导线提供，以诱导在磁场内定向的谐波运动。

8. 发明申请

WO1992001941A1 MICRO-MECHANICAL ROTATIONAL-SPEED SENSOR 审中-公开
标题翻译：微机电转速传感器
公开(公告)号：WO1992001941A1
公开(公告)日：1992-02-06
申请号：PCT/DE1991000555
申请日：1991-07-08
申请人： ROBERT BOSCH GMBH , SEIPLER, Dieter , ROTHLEY, Manfred , ZABLER, Erich , PFAFF, Georg , ERHARDT, Rainer , MAREK, Jiri , WOLF, Jörg , BANTIEN, Frank
发明人： ROBERT BOSCH GMBH
IPC分类号： G01P09/04
CPC分类号： G01P15/0802 , G01C19/574 , G01C19/5769 , G01P2015/0828
摘要： Proposed is a rotational-speed sensor produced from a mono-crystalline silicon wafer and having at least a pair of oscillators which are connected by one or more strips to a fixed frame. The osciallators can oscillate in two mutually perpendicular directions. The sensor element is fitted with means for exciting the oscillators to oscillate in a first direction and means for detecting deviations in the oscillations of the oscillators in a second direction perpendicular to the first. In addition, the sensor element has at least one resist on which a fixed electrode designed as a plate-condensor electrode is mounted. Each oscillator forms an opposite electrode of this plate condensor. The connection strips also act as electrical lines for the oscillator exciter current and for leading the oscillator signals in and out.

9. 发明申请

WO1987002468A1 SYNCHRONOUS FM DIGITAL DETECTOR 审中-公开
标题翻译：同步FM数字检测器
公开(公告)号：WO1987002468A1
公开(公告)日：1987-04-23
申请号：PCT/US1986002221
申请日：1986-10-20
申请人： SUNDSTRAND DATA CONTROL, INC.
发明人： SUNDSTRAND DATA CONTROL, INC. , PETERS, Rex, B.
IPC分类号： G01P09/04
CPC分类号： G01C19/5726
摘要： A system for determining angular rate of rotation of a body about a rate axis. In one arrangement, the system comprises first (10) and second (12) accelerometers, movement means and processing means. The first and second accelerometers have their sensitive axes (16, 18) parallel to a sensing axis that is in turn perpendicular to the rate axis. The first and second accelerometers are adapted to produce first and second output signals (a1, a2), each output signal having a frequency corresponding to the acceleration experienced by the respective accelerometer along its sensitive axis. The movement means includes means (68) for producing a periodic movement signal and means (14) responsive to the movement signal for periodically moving the accelerometers along a movement axis perpendicular to the rate and sensing axes, such that each output signal includes a periodic Coriolis component. The processing means includes means (75) for producing a reference signal that defines one or more first time periods during which the Coriolis components have one polarity and one or more second time periods during which the Coriolis components have the opposite polarity. The first and second time periods together span one or more complete periods of the movement signal. The processing means further comprises means (71, 72) for determining, for each output signal, a phase value representing the difference between the phase change of the output signal during the first time periods and the phase change of the output signal during the second time periods. The processing means further includes means (80) for determining from the phase values a value representing the angular rate of rotation of the body about the rate axis. In a second arrangement, a single accelerometer is periodically moved along the movement axis.
摘要翻译：用于确定身体围绕速率轴的旋转角度的系统。在一种布置中，系统包括第一加速度计（10）和第二加速度计（12），运动装置和处理装置。第一和第二加速度计具有与感测轴平行的敏感轴（16,18），感测轴又与速度轴垂直。第一和第二加速度计适于产生第一和第二输出信号（a1，a2），每个输出信号的频率对应于各加速度计沿其敏感轴所经历的加速度。移动装置包括用于产生周期性运动信号的装置（68）和响应于运动信号的装置（14），用于沿着垂直于速率和感测轴的运动轴周期性地移动加速度计，使得每个输出信号包括周期性科里奥利零件。处理装置包括用于产生参考信号的装置（75），该参考信号定义了科里奥利分量具有一个极性的一个或多个第一时间段，以及科里奥利分量具有相反极性的一个或多个第二时间段。第一和第二时间段一起跨越运动信号的一个或多个完整周期。处理装置还包括装置（71,72），用于为每个输出信号确定表示第一时间段期间输出信号的相位变化与第二时间期间输出信号的相位变化之间的差的相位值周期。处理装置还包括用于根据相位值确定表示身体围绕速率轴的角速度的值的装置（80）。在第二布置中，单个加速度计周期性地沿运动轴线移动。

10. 发明申请

WO1996035957A1 GIMBALLED VIBRATING WHEEL GYROSCOPE HAVING STRAIN RELIEF FEATURES 审中-公开
标题翻译：具有应变消除特征的GIMBALLED VIBRATING轮式陀螺仪
公开(公告)号：WO1996035957A1
公开(公告)日：1996-11-14
申请号：PCT/US1996006426
申请日：1996-05-08
申请人： THE CHARLES STARK DRAPER LABORATORY, INC.
发明人： THE CHARLES STARK DRAPER LABORATORY, INC. , GREIFF, Paul , ANTKOWIAK, Bernard, M.
IPC分类号： G01P09/04
CPC分类号： G01C19/5712 , B81B3/0051 , B81B2201/0242 , B81B2203/056 , B81B2203/058 , G01P15/0802 , G01P15/125
摘要： A gimballed vibrating wheel gyroscope (10) for detecting rotational rates in inertial space. The gyroscope (10) includes a support (20) oriented in a first plane and a wheel assembly (12) disposed over the support (20) parallel to the first plane. The wheel assembly (12) is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis (32) for providing an output torque about a coplanar output axis (34). The gyroscope (10) also includes a post assembly (18a, 18b) extending between the support (20) and the wheel assembly (12) for supporting the wheel assembly (12). The wheel assembly (12) has an inner hub (24), an outer wheel (26), and spoke flexures (28a-28d) extending between the inner hub (24) and the outer wheel (26) and being stiff along both the input and output axes (32, 34). A flexure (22a, 22b) is incorporated in the post assembly (18a, 18b) between the support (20) and the wheel assembly inner hub (24) and is relatively flexible along the output axis (34) and relatively stiff along the input axis (32).
摘要翻译：用于检测惯性空间中的旋转速率的万向振动轮陀螺仪（10）。陀螺仪（10）包括在第一平面中定向的支撑件（20）和布置在平行于第一平面的支撑件（20）上方的轮组件（12）。车轮组件（12）适于在第一平面中以预定频率旋转振动，并且响应于围绕共面输入轴线（32）的旋转速度，以提供围绕共面输出轴线（34）的输出扭矩。陀螺仪（10）还包括在支撑件（20）和轮组件（12）之间延伸以支撑轮组件（12）的柱组件（18a，18b）。车轮组件（12）具有内轮毂（24），外轮（26）和在内轮毂（24）和外轮（26）之间延伸的轮辐弯曲件（28a-28d），并且沿两个输入和输出轴（32,34）。弯曲件（22a，22b）被并入在支撑件（20）和轮组件内毂（24）之间的柱组件（18a，18b）中，并且沿着输出轴线（34）相对柔性并沿输入相对较硬轴（32）。

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