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    • 64. 发明申请
    • METHOD FOR DEPOSITING A THIN FILM ELECTRODE AND THIN FILM STACK
    • 沉积薄膜电极和薄膜堆叠的方法
    • WO2012055728A1
    • 2012-05-03
    • PCT/EP2011/068191
    • 2011-10-18
    • APPLIED MATERIALS, INC.PIERALISI, Fabio
    • PIERALISI, Fabio
    • H01L29/45H01L29/786
    • H01L29/45H01L29/78618H01L29/7869
    • A method for depositing at least one thin-film electrode (402, 403) onto a transparent conductive oxide film (405) is provided. At first, the transparent conductive oxide film (405) is deposited onto a substrate (101) to be processed. Then, the substrate (101) and the transparent conductive oxide film (405) are subjected to a processing environment containing a processing gas (207) acting as a donor material or an acceptor material with respect to the transparent conductive oxide film (405). The at least one thin-film electrode (402, 403) is deposited onto at least portions of the transparent conductive oxide film (405). A partial pressure of the processing gas (207) acting as the donor material or the acceptor material with respect to the transparent conductive oxide film (405) is varied while depositing the at least one thin-film electrode (402, 403) onto at least portions of the transparent conductive oxide film (405). Thus, a modified transparent conductive oxide film (410) having reduced interface resistance (408) and bulk resistance (409') can be obtained.
    • 提供了一种用于将至少一个薄膜电极(402,403)沉积到透明导电氧化膜(405)上的方法。 首先,将透明导电氧化物膜(405)沉积在待加工的基板(101)上。 然后,将基板(101)和透明导电氧化膜(405)进行处理环境,该处理环境含有相对于透明导电氧化物膜(405)作为施主材料或受主材料的处理气体(207)。 所述至少一个薄膜电极(402,403)沉积在所述透明导电氧化物膜(405)的至少一部分上。 在将至少一个薄膜电极(402,403)沉积到至少一个薄膜电极(402,403)上之后,改变用作施主材料或受体材料的处理气体(207)相对于透明导电氧化物膜(405)的分压 部分透明导电氧化物膜(405)。 因此,可以获得具有降低的界面电阻(408)和体电阻(409')的改性的透明导电氧化物膜(410)。
    • 69. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • WO2011111522A1
    • 2011-09-15
    • PCT/JP2011/053879
    • 2011-02-16
    • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.YAMAZAKI, Shunpei
    • YAMAZAKI, Shunpei
    • H01L29/786H01L27/146
    • H01L29/7869H01L27/11521H01L27/11524H01L27/1156H01L27/1225H01L27/124H01L29/41733H01L29/45H01L29/66969
    • An object is to provide a semiconductor device which achieves miniaturization as well as suppressing a defect. Further, another object is to provide a semiconductor device which achieves miniaturization as well as keeping favorable characteristics. Is provided a semiconductor device including: a source wiring and a drain wiring each of which include a first conductive layer and a second conductive layer having a smaller thickness than the first conductive layer; an insulating layer which has an opening portion and is provided over the source wiring and the drain wiring; an oxide semiconductor layer which is in contact with part of the second conductive layer of the source wiring or the drain wiring in the opening portion; a gate insulating layer provided over the oxide semiconductor layer; and a gate electrode provided over the gate insulating layer.
    • 目的在于提供实现小型化以及抑制缺陷的半导体装置。 此外,另一个目的是提供实现小型化以及保持有利特性的半导体器件。 提供一种半导体器件,包括:源极布线和漏极布线,其中每个包括具有比第一导电层小的厚度的第一导电层和第二导电层; 绝缘层,其具有开口部,设置在源极配线和漏极配线之上; 氧化物半导体层,其与所述源极配线的所述第二导电层的一部分或所述开口部的所述漏极配线接触; 设置在所述氧化物半导体层上的栅极绝缘层; 以及设置在栅绝缘层上的栅电极。