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31. 发明申请

WO2012142368A1 OUT-OF-PLANE SPACER DEFINED ELECTRODE 审中-公开
标题翻译：平面外平面定义电极
公开(公告)号：WO2012142368A1
公开(公告)日：2012-10-18
申请号：PCT/US2012/033455
申请日：2012-04-13
申请人： ROBERT BOSCH GMBH , GRAHAM, Andrew, B. , YAMA, Gary , O'BRIEN, Gary
发明人： GRAHAM, Andrew, B. , YAMA, Gary , O'BRIEN, Gary
IPC分类号： B81C1/00
CPC分类号： B81B3/0021 , B81B2207/095 , B81C1/00301
摘要： In one embodiment, a method of forming an out-of-plane electrode includes providing an oxide layer above an upper surface of a device layer, providing a first cap layer portion above an upper surface of the oxide layer, etching a first electrode perimeter defining trench extending through the first cap layer portion and stopping at the oxide layer, depositing a first material portion within the first electrode perimeter defining trench, depositing a second cap layer portion above the first material portion, vapor releasing a portion of the oxide layer, depositing a third cap layer portion above the second cap layer portion, etching a second electrode perimeter defining trench extending through the second cap layer portion and the third cap layer portion, and depositing a second material portion within the second electrode perimeter defining trench, such that a spacer including the first material portion and the second material portion define out-of-plane electrode.
摘要翻译：在一个实施例中，形成平面外电极的方法包括在器件层的上表面上方提供氧化物层，在氧化物层的上表面上方提供第一覆盖层部分，蚀刻第一电极周界，沟槽延伸穿过第一盖层部分并在氧化物层处停止，在第一电极周界限定沟槽内沉积第一材料部分，在第一材料部分上方沉积第二盖层部分，释放氧化物层的一部分的蒸气，沉积在所述第二盖层部分上方的第三盖层部分，蚀刻延伸穿过所述第二盖层部分和所述第三盖层部分的第二电极周界限定沟槽，以及在所述第二电极周界限定沟槽内沉积第二材料部分，包括第一材料部分和第二材料部分的间隔件限定了平面外的电极。

32. 发明申请

WO2011072295A3 SYSTEM AND METHOD FOR ESTIMATING A STATE OF A BATTERY PACK 审中-公开
公开(公告)号：WO2011072295A3
公开(公告)日：2011-06-16
申请号：PCT/US2010/060112
申请日：2010-12-13
申请人： A123 SYSTEMS, INC. , O'BRIEN, Gary, R., Jr. , RUTKOWSKI, Brian, D. , BUTT, Shazad, M.
发明人： O'BRIEN, Gary, R., Jr. , RUTKOWSKI, Brian, D. , BUTT, Shazad, M.
IPC分类号： H01M10/48 , H01M10/052 , H01M2/10
摘要： A method for estimating the state of a battery having multiple cells is disclosed. In one embodiment, strain gauges are coupled to battery binding bands that hold cells of the battery together. The strain measured by the gauges may be related to the electrical charge stored by the battery. The method may improve estimates of battery state of charge during conditions when battery voltage changes little and the battery continues to accept charge.

33. 发明申请

WO2008134685A1 MECHANICAL PACKAGING OF SURFACE ACOUSTIC WAVE DEVICE FOR SENSING APPLICATIONS 审中-公开
标题翻译：用于感应应用的表面声波装置的机械包装
公开(公告)号：WO2008134685A1
公开(公告)日：2008-11-06
申请号：PCT/US2008/061934
申请日：2008-04-30
申请人： HONEYWELL INTERNATIONAL INC. , COOK, James D. , KUMAR, Sachin , O'BRIEN, Gary , QASIMI, Mohammed , SORENSON, Richard C. , MARSH, Brian J. , ARRAMESCU, Viorel V.
发明人： KUMAR, Sachin , O'BRIEN, Gary , QASIMI, Mohammed , SORENSON, Richard C. , MARSH, Brian J. , ARRAMESCU, Viorel V.
IPC分类号： G01L9/00 , H03H9/25
CPC分类号： G01L9/0025 , Y10T29/42
摘要： A method and apparatus, wherein a die is attached to a supporting base structure utilizing a rigid bond adhesive for a SAW (Surface Acoustic Wave) sensor. A rigid bond adhesive with a preferably high glass transition temperature (Tg) can be applied directly between the die and the die supporting structure in a pattern to eliminate time dependent gradual stress effects upon SAW sensor. The rigid bond adhesive can then be cured, which results in a high yield strength and a high young's modulus. The supporting base and the die material comprise a same co-efficient of thermal expansion in order to avoid die displacement over temperature.
摘要翻译：一种方法和装置，其中使用用于SAW（表面声波）传感器的刚性粘合剂将模具附接到支撑基座结构。具有优选高玻璃化转变温度（Tg）的刚性粘合剂可以以模式直接施加在模具和模具支撑结构之间，以消除对SAW传感器的时间依赖性渐变应力影响。然后刚性粘合剂可以固化，这导致高屈服强度和高的杨氏模量。支撑基底和模具材料包括相同的热膨胀系数，以避免在温度下的模具位移。

34. 发明申请

WO2007078747A2 ERROR COMPENSATION FOR A WIRELESS SENSOR USING A ROTATING MICROSTRIP COUPLER TO STIMULATE AND INTERROGATE A SAW DEVICE 审中-公开
标题翻译：使用旋转微型耦合器刺激和中断SAW器件的无线传感器的误差补偿
公开(公告)号：WO2007078747A2
公开(公告)日：2007-07-12
申请号：PCT/US2006047437
申请日：2006-12-12
申请人： HONEYWELL INT INC , MAGEE STEVEN J , ANDREWS RICHARD M , BUNYER SCOTT L , HINTZ FRED W , LIU JAMES Z T , O'BRIEN GARY
发明人： MAGEE STEVEN J , ANDREWS RICHARD M , BUNYER SCOTT L , HINTZ FRED W , LIU JAMES Z T , O'BRIEN GARY
CPC分类号： G01L3/106 , G01L25/003
摘要： Many mechanical systems contain rotating parts used to transfer power from one part of the system to another. The system's efficiency and longevity can be increased by measuring the speed and loading of the rotating parts. Passive, wireless sensors are ideal for instrumenting rotating parts because they require no connecting wires and no stored energy. The sensor measurements contain read errors when the stationary interrogation circuit and the rotating sensor are not ideally aligned. The read errors are a function of the angular offset between the stationary interrogation circuit and the passive sensor. As such, the read errors ,are deterministic. A measurement of the angular offset between the stationary interrogation circuit and the passive sensor is used to determine a correction factor that cancels out the read error to produce a compensated sensor signal.
摘要翻译：许多机械系统包含用于将电力从系统的一部分传递到另一部分的旋转部件。通过测量旋转部件的速度和载荷可以提高系统的效率和寿命。被动无线传感器是仪器旋转部件的理想选择，因为它们不需要连接线，也不需要存储能量。当固定询问电路和旋转传感器不理想地对准时，传感器测量包含读取错误。读取错误是静态询问电路和无源传感器之间的角度偏移的函数。因此，读错误是确定性的。使用静态询问电路和无源传感器之间的角度偏移的测量来确定校正因子，其消除读取误差以产生经补偿的传感器信号。

35. 发明申请

WO2007075421A2 METHOD FOR IN-SYSTEM AUTO ZEROING OF A TORQUE SENSOR IN AN AUTOMATIC TRANSMISSION DRIVE TRAIN 审中-公开
标题翻译：自动变速器传动系列中的转矩传感器在系统自动调零的方法
公开(公告)号：WO2007075421A2
公开(公告)日：2007-07-05
申请号：PCT/US2006/047925
申请日：2006-12-14
申请人： HONEYWELL INTERNATIONAL INC. , TRANSENSE TECHNOLOGIES PLC , O'BRIEN, Gary, O. , BOWN, George, Edward
发明人： O'BRIEN, Gary, O. , BOWN, George, Edward
IPC分类号： F02D41/24 , G01L25/00 , F16H59/16
CPC分类号： G01L25/003 , F02D41/1404 , F02D41/2441 , F02D41/2474 , F02D2200/1002 , F16H59/16 , F16H2059/147 , Y10T477/679
摘要： The invention relates to torque sensors or more particularly to automotive torque sensors which measure the torque transmitted at one or more positions within an automotive power train. The invention provides a method for zeroing an automotive power train torque sensor while a vehicle is moving during the zero torque condition.
摘要翻译：本发明涉及扭矩传感器或更具体地涉及测量在汽车动力传动系内的一个或多个位置处传输的扭矩的汽车扭矩传感器。本发明提供了一种用于在车辆在零扭矩状态期间移动时对汽车动力传动系扭矩传感器进行调零的方法。

36. 发明申请

WO2007024857A3 TORQUE SENSOR PACKAGING SYSTEMS AND METHODS 审中-公开
标题翻译：扭矩传感器包装系统和方法
公开(公告)号：WO2007024857A3
公开(公告)日：2007-05-03
申请号：PCT/US2006032779
申请日：2006-08-22
申请人： HONEYWELL INT INC , BUNYER SCOTT L , HINTZ FRED W , MAGEE STEVEN J , HASKEN RANDALL J , LIU JAMES ZT , O'BRIEN GARY R , COOK JAMES D , ANDREWS RICHARD M , SHIFFER STEPHEN R
发明人： BUNYER SCOTT L , HINTZ FRED W , MAGEE STEVEN J , HASKEN RANDALL J , LIU JAMES ZT , O'BRIEN GARY R , COOK JAMES D , ANDREWS RICHARD M , SHIFFER STEPHEN R
IPC分类号： G01L3/10
CPC分类号： G01L3/10
摘要： A torque sensor packaging system and method includes a torque member (106) that includes one or more holes formed therein for receiving one or more respective fasteners (102,104) associated with a torque transducer package (109). The torque transducer package can be connected to the torque member and to a sensing element (110) in order to transfer torque associated with the torque member to the sensing element for torque sensing operations thereof . The sensing element can be made of a surface acoustic wave (SAW) chip.
摘要翻译：扭矩传感器封装系统和方法包括扭矩构件（106），其包括形成在其中的一个或多个孔，用于接收与扭矩传感器封装（109）相关联的一个或多个相应的紧固件（102,104）。转矩传感器组件可以连接到扭矩构件和感测元件（110），以便将与扭矩构件相关联的扭矩传递到感测元件以用于其扭矩传感操作。感测元件可以由表面声波（SAW）芯片制成。

37. 发明申请

WO2004097895A3 A METHOD OF ADDING MASS TO MEMS STRUCTURES 审中-公开
公开(公告)号：WO2004097895A3
公开(公告)日：2004-11-11
申请号：PCT/US2004/011867
申请日：2004-04-16
申请人： FREESCALE SEMICONDUCTOR, INC. , MCNEIL, Andrew, C. , LI, Gary , O'BRIEN, Gary, J.
发明人： MCNEIL, Andrew, C. , LI, Gary , O'BRIEN, Gary, J.
IPC分类号： B32B9/00
摘要： A proof mass (11) for a MEMS device is provided herein. The proof mass comprises a base (13) comprising a semiconductor material, and at least one appendage (15) adjoined to said base by way of a stem (21). The appendage (15) comprises a metal (17) or other such material that may be disposed on a semiconductor material (19). The metal increases the total mass of the proof mass (11) as compared to a proof mass of similar dimensions made solely from semiconductor materials, without increasing the size of the proof mass. At the same time, the attachment of the appendage (15) by way of a stem (21) prevents stresses arising from CTE differentials in the appendage from being transmitted to the base, where they could contribute to temperature errors.

38. 发明申请

WO2016100504A3 A MEMS GAS CHROMATOGRAPH AND METHOD OF FORMING A SEPARATOR COLUMN FOR A MEMS GAS CHROMATOGRAPH 审中-公开
公开(公告)号：WO2016100504A3
公开(公告)日：2016-06-23
申请号：PCT/US2015/066076
申请日：2015-12-16
申请人： ROBERT BOSCH GMBH , FEYN, Ando , O'BRIEN, Gary , KIM, Bongsang , STEHLE, Jochen
发明人： FEYN, Ando , O'BRIEN, Gary , KIM, Bongsang , STEHLE, Jochen
IPC分类号： G01N30/60 , B81B7/00 , B81C1/00
摘要： A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.

39. 发明申请

WO2016094700A1 ANTI-GETTER: EXPANDABLE POLYMER MICROSPHERES FOR MEMS DEVICES 审中-公开
标题翻译：反射器：用于MEMS器件的可扩展的聚合物微结构
公开(公告)号：WO2016094700A1
公开(公告)日：2016-06-16
申请号：PCT/US2015/065061
申请日：2015-12-10
申请人： ROBERT BOSCH GMBH , SAMARAO, Ashwin, K. , O'BRIEN, Gary , FEYH, Ando
发明人： SAMARAO, Ashwin, K. , O'BRIEN, Gary , FEYH, Ando
IPC分类号： B81B7/02 , B81C1/00 , B81C3/00
CPC分类号： B81B7/0038 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C1/00285
摘要： A method of fabricating a MEMS device includes depositing an expandable material into a first recess of a cap wafer. The cap wafer includes a plurality of walls that surround and define the first recess and a second recess. The cap wafer is bonded to a MEMS wafer including a first MEMS device and a second MEMS device. The first MEMS device is encapsulated in the first recess, and the second MEMS device is encapsulated in the second recess. The expandable material is then heated to at least an activation temperature to cause the expandable material to expand after the first recess has been sealed. The expansion of the expandable material causes a reduction in volume of the first recess.
摘要翻译：制造MEMS器件的方法包括将可膨胀材料沉积到盖晶片的第一凹槽中。盖晶片包括围绕并限定第一凹部和第二凹部的多个壁。盖晶片结合到包括第一MEMS器件和第二MEMS器件的MEMS晶片。第一MEMS器件被封装在第一凹部中，并且第二MEMS器件封装在第二凹部中。然后将可膨胀材料加热至至少活化温度，以使可膨胀材料在第一凹槽已被密封之后膨胀。可膨胀材料的膨胀导致第一凹部的体积减小。

40. 发明申请

WO2015103220A1 ROBUST INERTIAL SENSORS 审中-公开
标题翻译：坚固的惯性传感器
公开(公告)号：WO2015103220A1
公开(公告)日：2015-07-09
申请号：PCT/US2014/072694
申请日：2014-12-30
申请人： ROBERT BOSCH GMBH , KIM, Bonsang , FEYH, Ando , GRAHAM, Andrew , O'BRIEN, Gary , BAUS, Michael , MAIER, Ralf , KOC, Mariusz
发明人： KIM, Bonsang , FEYH, Ando , GRAHAM, Andrew , O'BRIEN, Gary , BAUS, Michael , MAIER, Ralf , KOC, Mariusz
IPC分类号： G01P15/08 , G01D5/241
CPC分类号： G01C19/5769 , B81B7/0016 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2207/012 , G01P1/003 , G01P1/023 , G01P15/0802 , G01P15/18 , G01P2015/084 , G01P2015/0882 , H01L2224/48137 , H01L2924/16152
摘要： In one embodiment, a sensor includes a rigid wafer outer body, a first cavity located within the rigid wafer outer body, a first spring supported by the rigid wafer outer body and extending into the first cavity, a second spring supported by the rigid wafer outer body and extending into the first cavity, and a first sensor structure supported by the first spring and the second spring within the first cavity.
摘要翻译：在一个实施例中，传感器包括刚性晶片外部主体，位于刚性晶片外部主体内的第一腔体，由刚性晶片外部主体支撑并延伸到第一腔体中的第一弹簧，由刚性晶片外部支撑的第二弹簧并且延伸到第一腔体中，以及由第一弹簧和第二弹簧支撑在第一腔内的第一传感器结构。

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