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    • 11. 发明申请
    • SENSOR MODULE WITH INTEGRATED SIGNAL PROCESSING
    • 带集成信号处理传感器模块
    • WO00050862A1
    • 2000-08-31
    • PCT/EP1999/001170
    • 1999-02-23
    • G01J5/04G05D23/27H05B6/68H05B6/80
    • H05B6/6447G01J5/02G01J5/0215G01J5/04G01J5/045G01J5/08G01J5/0815G01J2005/068G05D23/27
    • The invention relates to a sensor module with a radiation-sensitive sensor element (12), a sensor signal processing circuit (13, 41a, 44a) which receives the output signal of the sensor element (12) and converts it to a radiation-dependent first electric signal, a temperature-sensitive reference unit (14, 15, 41b, 43, 44b) which produces a temperature-dependent second electric signal, and a signal linking unit (16) for linking the two electric signals. The sensor signal processing circuit (13, 41a, 44a), the reference unit (14, 15, 41b, 43, 44b) and the linking unit (16) are configured on a single chip (20, 21). Said chip (20, 21) and the sensor element (12) are accommodated in a common housing (22, 62, 64).
    • 传感器模块具有一个辐射敏感的传感器元件(12),传感器信号调理电路(13,41A,44A),其接收所述传感器元件(12)的输出信号并把它提供一个依赖辐射第一电信号,一个温度敏感参考装置(14,15,41B,43, 44B),它提供依赖于温度的第二电信号,以及用于组合所述两个电信号的信号组合装置(16)。 传感器信号处理电路(13,41A,44A),所述参考装置(14,15,41B,43,44B)和所述连接装置(16)是形成在单个芯片(20,21)和所述芯片(20,21)和所述上 传感器元件(12)是在一个共同的壳体(22,62,64)被容纳。
    • 13. 发明申请
    • RADIATION CLINICAL THERMOMETER
    • 辐射临床温度计
    • WO99005489A1
    • 1999-02-04
    • PCT/JP1998/003333
    • 1998-07-27
    • A61B5/00A61B5/01A61B6/00G01J5/00G01J5/02G01J5/04G01J5/08G01J5/62G01K1/08G01K13/00
    • G01J5/02G01J5/025G01J5/026G01J5/027G01J5/04G01J5/046G01J5/049G01J5/06G01J5/08G01J5/0806G01J5/0815G01J5/0834G01J5/089G01J5/62G01J2005/0048G01J2005/068
    • A radiation clinical thermometer for making no-contact measurements of the temperature of the eardrum, comprising a light receiving section (17) for receiving only infrared rays radiated directly from the eardrum and/or its vicinity, a signal processing means (4) for calculating the temperature from the output of the light receiving section, and an annunciation means (18) for annunciating the calculated temperature. Because the thermometer is not influenced by the heat radiation from other than the eardrum and/or its vicinity, the temperature variation of the probe (1) does not cause measurement errors and therefore an accurate temperature measurement can be made. When viewed at the cross section of the thermometer including the optical axis of the light collecting element, the infrared light receiving element is placed in a triangle formed by three lines connecting three points, and an intersection between the optical axis of the light collecting element and an optical path where a line drawn from the edge of the light collecting element in such a way as to be tangent to the inner wall of the probe on the same side as the edge of the light collecting element with respect to the optical axis extends from an imaginary end where the line intersects the end surface of the probe and passes through the edge of the light collecting element on the same side as the imaginary end point with respect to the optical axis to reach an image point of the imaginary end point by the light collecting element. The remaining two points are two image points of the light collecting element at the imaginary end point.
    • 一种辐射体温计,用于对所述鼓膜的温度进行不接触测量,包括仅接收从所述鼓膜和/或其附近辐射的红外线的光接收部分(17),用于计算 来自光接收部的输出的温度,以及用于通知计算出的温度的通知装置(18)。 由于温度计不受来自鼓膜和/或其附近的热辐射的影响,探头(1)的温度变化不会导致测量误差,因此可以进行精确的温度测量。 当在包含集光元件的光轴的温度计的横截面上观察时,红外光接收元件被放置在由连接三个点的三条线形成的三角形中,并且光收集元件的光轴与 从光收集元件的边缘以与聚光元件相对于光轴的边缘相同侧相对于探针的内壁相切的方式的线的光路从 其中线与探针的端面相交的虚拟端部,并且相对于光轴在与虚拟端点相同的一侧上通过聚光元件的边缘,以到达虚拟端点的图像点 光收集元件 剩下的两点是在虚拟端点处的光收集元件的两个图像点。
    • 14. 发明申请
    • INFRARED RADIATION DETECTOR HAVING A REDUCED ACTIVE AREA
    • 具有减少活动区域的红外辐射探测器
    • WO1997021250A1
    • 1997-06-12
    • PCT/US1996019261
    • 1996-12-04
    • LOCKHEED-MARTIN IR IMAGING SYSTEMS, INC.
    • LOCKHEED-MARTIN IR IMAGING SYSTEMS, INC.BLACKWELL, RichardBUTLER, Neal, R.MROCZKOWSKI, Jacek
    • H01L31/0232
    • G01J5/02G01J5/023G01J5/024G01J5/026G01J5/08G01J5/0806G01J5/0815G01J5/085G01J5/0859G01J5/20G01J2005/0077H01L31/02325H01L31/035281H04N5/33Y02E10/50
    • A microbridge detector is with an active area that is smaller than a pixel collection area of the microbridge detector. The microbridge detector includes a semiconductor substrate on a first level and a microbridge level disposed above the semiconductor substrate. The microbridge level includes the active area having the pixel collection area greater than a square area of the active area of the microbridge detector. In addition, downwardly extending leg portions are a continuation of the microbridge level and support the microbridge level above the semiconductor substrate so that a thermal isolation gap exists between the microbridge level and the semiconductor substrate. Further, electrically conductive paths are included within the downwardly extending leg portions and connect the active area in the microbridge level to the semiconductor substrate. With this apparatus, the microbridge detector is provided with a pixel collecting area that is larger than a fill factor of the microbridge detector and thus is provided with an enhanced optical collection sensitivity. In addition, with this apparatus, the microbridge detector device can be fabricated with a smaller active area without having to build a smaller microbridge level and thus is not limited by processing techniques.
    • 微桥检测器具有小于微桥检测器的像素收集区域的有源区域。 微桥检测器包括在第一级上的半导体衬底和设置在半导体衬底之上的微桥级。 微桥级别包括具有大于微桥检测器的有效区域的正方形面积的像素收集区域的有源区域。 此外,向下延伸的支脚部分是微桥级别的延续并且支撑半导体衬底上方的微桥级别,使得在微桥级和半导体衬底之间存在热隔离间隙。 此外,导电路径包括在向下延伸的腿部内,并将微桥级中的有源区域连接到半导体衬底。 利用该装置,微桥检测器设置有比微桥检测器的填充因子大的像素收集区域,因此具有增强的光学收集灵敏度。 此外,利用该装置,可以制造具有更小的有源面积的微桥检测器装置,而不必构建更小的微桥级,因此不受处理技术的限制。
    • 15. 发明申请
    • THERMOPILE INFRAROT-SENSORSTRUKTUR MIT HOHEM FÜLLGRAD
    • 具有高的填充度热电堆型红外线传感器结构
    • WO2013120652A1
    • 2013-08-22
    • PCT/EP2013/050881
    • 2013-01-18
    • HEIMANN SENSOR GMBH
    • HERRMANN, FrankSIMON, MarionLENEKE, WilhelmFORG, BodoSTORCK, KarlheinzMÜLLER, MichaelSCHIEFERDECKER, Jörg
    • G01J5/12G01J5/08G01J5/02
    • G01J5/12G01J5/023G01J5/06G01J5/0815G01J5/0853
    • Thermopile Infrarot-Sensorstruktur mit hohem Füllgrad in einem mit einem Medium (15) gefüllten Gehäuse, bestehend aus einem Trägersubstrat (11), das elektrische Verbindungen (28, 28') nach außen aufweist und das mit einer Optikbaugruppe (13) verschlossen ist und wobei auf dem Trägersubstrat (11) im Gehäuse ein Sensorchip (14) aufgebracht ist, das mehrere thermoelektrische Sensorelementstrukturen (16) trägt, deren sogenannten "heiße Kontakte" (10) sich auf individuellen Membranen (3) befinden, die über je einer Aushöhlung (9) in einem gut wärmeleitenden Siliziumtragkörper (24) aufgespannt sind, wobei sich die "kalten Kontakte" (25) auf oder in der Nähe des Siliziumtragkörpers (24) befinden. Aufgabe der Erfindung ist es, einen Thermopile-Infrarot-Array-Sensor (Sensorzelle) anzugeben, der bei kleiner Chipgröße ein hohes thermisches Auflösungsvermögen und einen besonders hohen Füllgrad aufweist. Dieser Sensor soll bevorzugt unter Gas mit Normaldruck oder reduziertem Druck betrieben werden und soll ohne aufwendige Technologien zum Gehäuseverschluss unter Höchst-Vakuum kostengünstig in Massenstückzahlen herstellbar sein. Erreicht wird das dadurch, dass sich über jeder individuellen Membran (3) der Sensorelementstrukturen (16), die eine Aushöhlung (9) überspannt, ein Strahlungskollektoraufbau (17) befindet.
    • 具有向外并与光学组件填充高度在一个与介质(15)壳体填充,由载体基板(11),所述电连接(28,28“)中的热电堆型红外线传感器结构(13)是封闭的,并且其中 在壳体中的载体基底(11)上的传感器芯片(14)被施加其承载多个热电传感器元件结构(16)的,所谓的“热接触”(10)向个别膜(3)的位置,从而(经由相应的模腔9 )被夹紧在一高导热性硅支撑体(24),用“冷接点”(25)或(在硅支撑体24的附近)的位置。 本发明的目的是提供一种具有高的热分辨能力和特别高的程度的小芯片尺寸的填充的热电堆红外线阵列传感器(传感器单元)。 该传感器应优选具有下常压或减压气体操作,并且应当是便宜的质量的数量和壳体封闭,以产生在高真空下,而无需复杂的技术。 实现跨越具有腔(9),所述传感器元件的结构(16)的每个单独的膜(3)跨越是一个辐射收集器结构(17),则。
    • 18. 发明申请
    • PLANAR THERMOPILE INFRARED MICROSENSOR
    • 平面热像红外微型传感器
    • WO2010029488A1
    • 2010-03-18
    • PCT/IB2009/053896
    • 2009-09-07
    • NXP B.V.BOUTCHICH, MohamedBATAILLOU, Benoit
    • BOUTCHICH, MohamedBATAILLOU, Benoit
    • G01J5/12
    • G01J5/12G01J5/022G01J5/0806G01J5/0815G01J5/0853
    • An IR sensor comprises a heat sink substrate (10) having portions (12) of relatively high thermal conductivity and portions (14) of relatively low thermal conductivity and a planar thermocouple layer (16) having a hot junction (18) and a cold junction (20), with the hot junction (18) located on a portion (14) of the heat sink substrate with relatively low thermal conductivity. A low thermal conductivity dielectric layer (22) is provided over the thermocouple layer (16), and has a via (24) leading to the hot junction (18). An IR reflector layer (26) covers the low thermal conductivity dielectric layer (22) and the side walls of the via (24). An IR absorber (30; 30') is within the via. This structure forms a planar IR microsensor which uses a structured substrate and a dielectric layer to avoid the need for any specific packaging. This design provides a higher sensitivity by providing a focus on the thermocouple, and also gives better immunity to gas conduction and convection.
    • IR传感器包括散热基板(10),散热基板(10)具有相对较高导热率的部分(12)和具有相对较低导热率的部分(14)和具有热接点(18)的平面热电偶层(16) (20),热接头(18)位于散热器衬底的一部分(14)上,导热系数相对较低。 在热电偶层(16)之上提供低导热介电层(22),并且具有通向热连接点(18)的通孔(24)。 IR反射器层(26)覆盖低导热介电层(22)和通孔(24)的侧壁。 IR吸收器(30; 30')在通孔内。 该结构形成平面的IR微传感器,其使用结构化基板和电介质层以避免对任何特定封装的需要。 该设计通过提供对热电偶的关注而提供更高的灵敏度,并且还对气体传导和对流提供更好的抗扰性。
    • 20. 发明申请
    • PYROMETER
    • 高温计
    • WO03029771A2
    • 2003-04-10
    • PCT/BE0200148
    • 2002-09-26
    • VESUVIUS CRUCIBLE COVAN DER MAAT PAULHANSE ERIC
    • VAN DER MAAT PAULHANSE ERIC
    • G01J5/08B22D2/00G01J1/00G01J5/00G01J5/04G01K1/10G01K1/12
    • G01J5/08B22D2/006G01J5/004G01J5/0044G01J5/041G01J5/046G01J5/0815G01J5/0887G01J5/0893G01K1/105G01K1/125
    • The invention provides an apparatus for measuring the temperature of a molten bath comprising a) a refractory mounting sleeve ( 1,1') having an outer surface (2) for contacting the molten bath and an inner cavity (3), said inner cavity having an inner surface (4), an outer opening (6) and an inner closed end (5); and b) an optical pyrometer (7) attached to the mounting sleeve and adapted to measure the thermal radiation emitted by a measurement zone (10) located inside the inner cavity of the mounting sleeve and under the molten bath level. The inner cavity outer opening (6) is adapted to receive fixedly the optical pyrometer (7). The apparatus is characterized in that the mounting plate (8) is adapted to engage in a complementary recess located at the inner cavity outer opening (6) of the mounting sleeve (1,1'). Thereby, the accuracy and reproducibility of the measure is greatly increased.
    • 本发明提供了一种用于测量熔池温度的装置,包括a)具有用于接触熔池的外表面(2)和内腔(3)的耐火材料安装套(1,1'),所述内腔具有 内表面(4),外开口(6)和内封闭端(5); 以及b)光学高温计(7),其附接到所述安装套筒并适于测量由位于所述安装套筒的内腔内和所述熔池水平面下方的测量区域(10)发射的热辐射。 内腔外开口(6)适于固定地接纳光学高温计(7)。 该装置的特征在于,安装板(8)适于接合位于安装套筒(1,1')的内腔外部开口(6)处的互补凹部。 因此,措施的准确性和可重复性大大提高。