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    • 11. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF FORMING A SEMICONDUCTOR DEVICE
    • 半导体器件及形成半导体器件的方法
    • WO2006123105A2
    • 2006-11-23
    • PCT/GB2006001724
    • 2006-05-11
    • CAMBRIDGE SEMICONDUCTOR LTDUDREA FLORIN
    • UDREA FLORIN
    • H01L29/739H01L21/331H01L29/08
    • H01L29/7394H01L29/0839H01L29/7432H01L29/745H01L29/861H01L29/872
    • A bipolar high voltage/power semiconductor device (1) has a low voltage terminal and a high voltage terminal. The device (1) has a drift region (2) of a first conductivity type and having first and second ends. In one example, a region (5) of the second conductivity type is provided at the second end of the drift region (2) connected directly to the high voltage terminal. In another example, a buffer region (6) of the first conductivity type is provided at the second end of the drift region (2) and a region (5) of the second conductivity type is provided on the other side of the buffer region (6) and connected to the high voltage terminal. Plural electrically floating island regions (9) are provided within the drift region (2) at or towards the second end of the drift region (2), the plural electrically floating island regions (9) being of the first conductivity type and being more highly doped than the drift region (2) .
    • 双极高压/功率半导体器件(1)具有低电压端子和高压端子。 装置(1)具有第一导电类型的漂移区(2),并具有第一和第二端。 在一个示例中,第二导电类型的区域(5)设置在直接连接到高电压端子的漂移区域(2)的第二端。 在另一示例中,在漂移区域(2)的第二端设置第一导电类型的缓冲区域(6),并且在缓冲区域的另一侧设置第二导电类型的区域(5) 6)并连接到高压端子。 在漂移区域(2)内的或位于漂移区域(2)的第二端处的多个电浮岛区域(9)设置在漂移区域(2)内,多个电浮岛区域(9)是第一导电类型并且更高 掺杂比漂移区(2)。
    • 12. 发明申请
    • TRENCH DMOS DEVICE WITH IMPROVED TERMINATION STRUCTURE FOR HIGH VOLTAGE APPLICATIONS
    • 带有改进的终端结构的高电压应用的沟槽式DMOS器件
    • WO2012054686A2
    • 2012-04-26
    • PCT/US2011/057020
    • 2011-10-20
    • VISHAY GENERAL SEMICONDUCTOR LLCHSU, Chih-WeiUDREA, FlorinLIN, Yih-Yin
    • HSU, Chih-WeiUDREA, FlorinLIN, Yih-Yin
    • H01L29/78H01L21/336
    • H01L29/7811H01L29/0615H01L29/063H01L29/0661H01L29/407H01L29/66143H01L29/7813H01L29/872H01L29/8725
    • A termination structure for a power transistor includes a semiconductor substrate having an active region and a termination region. The substrate has a first type of conductivity. A termination trench is located in the termination region and extends from a boundary of the active region to within a certain distance of an edge of the semiconductor substrate. A doped region has a second type of conductivity disposed in the substrate below the termination trench. A MOS gate is formed on a sidewall adjacent the boundary. The doped region extends from below a portion of the MOS gate spaced apart from the boundary toward a remote sidewall of the termination trench. A termination structure oxide layer is formed on the termination trench and covers a portion of the MOS gate and extends toward the edge of the substrate. A first conductive layer is formed on a backside surface of the semiconductor substrate. A second conductive layer is formed atop the active region, an exposed portion of the MOS gate, and extends to cover at least a portion of the termination structure oxide layer.
    • 用于功率晶体管的终端结构包括具有有源区和终端区的半导体衬底。 衬底具有第一类型的导电性。 终止沟槽位于终止区域中并且从有源区域的边界延伸到半导体衬底的边缘的一定距离内。 掺杂区域具有设置在终止沟槽下方的衬底中的第二类型的导电性。 MOS栅极形成在与边界相邻的侧壁上。 掺杂区域从与边界间隔开的MOS栅极的一部分的下方朝向终端沟槽的远端侧壁延伸。 端接结构氧化物层形成在终端沟槽上并且覆盖MOS栅极的一部分并且朝向衬底的边缘延伸。 第一导电层形成在半导体衬底的背侧表面上。 第二导电层形成在MOS栅极的暴露部分的有源区顶上,并且延伸以覆盖终止结构氧化物层的至少一部分。
    • 16. 发明申请
    • GAS-SENSING SEMICONDUCTOR DEVICES
    • 气体传感半导体器件
    • WO2007026177A1
    • 2007-03-08
    • PCT/GB2006/050199
    • 2006-07-12
    • UNIVERSITY OF WARWICKGARDNER, Julian WilliamUDREA, FlorinIWAKI, TakaoCOVINGTON, James Anthony
    • GARDNER, Julian WilliamUDREA, FlorinIWAKI, TakaoCOVINGTON, James Anthony
    • G01N27/12G01N27/414G01N33/00
    • G01N33/0047G01N27/14G01N33/0031
    • Gas-Sensing Semiconductor Devices A gas-sensing semiconductor device 1' is fabricated on a silicon substrate 2' having a thin silicon dioxide insulating layer 3' in which a resistive heater 6 made of doped single crystal silicon formed simultaneously with source and drain regions of CMOS circuitry is embedded. The device 1' includes a sensing area provided with a gas-sensitive layer 9' separated from the heater 6' by an insulating layer 4'. As one of the final fabrication steps, the substrate 2' is back-etched so as to form a thin membrane in the sensing area. The heater 6' has a generally circular-shaped structure surrounding a heat spreading plate 16', and consists of two sets 20', 21' of meandering resistors having arcuate portions nested within one another and interconnected in labyrinthine form. The fabrication of the heater at the same time as the source and drain regions of CMOS circuitry is particularly advantageous in that the gas-sensing semiconductor device is produced without requiring any fabrication steps in addition to those already employed in the IC processing apart from a post-CMOS back etch and deposition of the gas-sensitive layer. The circular design is advantageous in that it is the best solution to minimise the size of the membrane at fixed power loss and heated area.
    • 气体感测半导体器件气体感测半导体器件1'制造在具有薄二氧化硅绝缘层3'的硅衬底2'上,其中由掺杂单晶硅制成的电阻加热器6与源极和漏极区域同时形成 嵌入CMOS电路。 装置1'包括具有通过绝缘层4'与加热器6'分离的气敏层9'的感测区域。 作为最终制造步骤之一,衬底2'被反蚀刻以在感测区域中形成薄膜。 加热器6'具有围绕散热板16'的大致圆形结构,并且由具有彼此嵌套并且以迷宫形式互连的弓形部分的曲折电阻器的两组20',21'组成。 与CMOS电路的源极和漏极区域同时地制造加热器是特别有利的,因为除了在后处理中已经用于IC处理中的那些之外,制造气体感测半导体器件不需要任何制造步骤 -CMOS背蚀刻和气敏层的沉积。 圆形设计是有利的,因为它是在固定功率损耗和加热面积下最小化膜尺寸的最佳解决方案。