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11. 发明申请

WO2005025767A1 ACOUSTIC DIFFUSERS FOR ACOUSTIC FIELD UNIFORMITY 审中-公开
标题翻译：声音扩散器用于声场均匀性
公开(公告)号：WO2005025767A1
公开(公告)日：2005-03-24
申请号：PCT/US2004/029577
申请日：2004-09-10
申请人： FSI INTERNATIONAL, INC. , CHRISTENSON, Kurt, K.
发明人： CHRISTENSON, Kurt, K.
IPC分类号： B08B3/12
CPC分类号： H01L21/67057 , B08B3/12 , G10K11/20
摘要： Apparatuses and methods for processing semiconductor wafers. In one embodiment, an apparatus includes an immersion processing tank (10) in which one or more wafers (16) are positioned in a processing liquid (18) during a treatment, at least one sound source (22) that is acoustically coupled to the processing liquid (18) and that produces a sound field in the processing liquid (18) contained in the processing tank (10) during a treatment, and a sound diffusing system (28) comprising a plurality of sound diffusing elements positioned in a manner effective to diffuse sound energy transferred from the source (22) to the processing liquid (18). In another embodiment, the sound diffusing system (28) includes at least one directionally phase modulating element positioned in a manner effective to reduce interference of sound energy in the processing liquid (18). Related methods are also described.
摘要翻译：用于处理半导体晶圆的设备和方法在一个实施例中，一种设备包括浸入式处理槽（10），其中在处理期间将一个或多个晶片（16）定位在处理液体（18）中，至少一个声源（22）声学耦合到处理液体（18），并且在处理中包含在处理罐（10）中的处理液体（18）中产生声场;以及声音扩散系统（28），包括以有效的方式定位的多个声音扩散元件以将从源（22）传送的声能扩散到处理液（18）。在另一个实施例中，声音扩散系统（28）包括至少一个方向相位调制元件，其以有效减少处理液体（18）中声能的干扰的方式定位。还描述了相关方法。

12. 发明申请

WO2003043059A2 ADVANCED PROCESS CONTROL FOR IMMERSION PROCESSING 审中-公开
标题翻译：高级加工过程控制
公开(公告)号：WO2003043059A2
公开(公告)日：2003-05-22
申请号：PCT/US2002/035748
申请日：2002-11-07
申请人： FSI INTERNATIONAL, INC.
发明人： SIEFERING, Kevin, L. , GROTHE, Phillip, A. , BECKER, David, S.
IPC分类号： H01L21/00
CPC分类号： H01L21/67253 , H01L21/67086 , Y10T137/2509
摘要： The present invention provides immersion chemical processing systems capable of providing a desired blend of at least two chemicals to an immersion bath as well as methods of treating substrates immersively. The system is capable of producing a blend with one or more desired properties extremely accurately due at least in part to the capability of the system to monitor at least one property of the blend or at least one parameter of the immersion process and to utilize the information gathered to provide dynamic closed-loop feedback control of one or more process parameters known to relate to the same.
摘要翻译：本发明提供能够提供至少两种化学物质至浸液的所需混合物的浸没式化学处理系统，以及沉浸式处理底物的方法。该系统能够至少部分地由于系统监测混合物的至少一个性质或浸入过程的至少一个参数的能力以及使用该信息而能够非常准确地产生具有一种或多种期望特性的混合物聚集以提供已知与之相关的一个或多个过程参数的动态闭环反馈控制。

13. 发明申请

WO1996035110A1 DYNAMIC CONTAMINANT EXTRACTION MEASUREMENT FOR CHEMICAL DISTRIBUTION SYSTEMS 审中-公开
标题翻译：化学分布系统的动态污染物提取测量
公开(公告)号：WO1996035110A1
公开(公告)日：1996-11-07
申请号：PCT/US1996006052
申请日：1996-05-01
申请人： FSI INTERNATIONAL, INC.
发明人： FSI INTERNATIONAL, INC. , GRANT, Donald, C.
IPC分类号： G01N11/00
CPC分类号： G01N1/2035 , G01N1/40 , Y10T137/2562 , Y10T137/6579 , Y10T137/8359 , Y10T137/86718
摘要： A method for qualifying a chemical distribution system (10) and one or more components used therein including tanks, valves, filters (20), pump (26), test component (24) and tubing to ensure that the quantity of surface and bulk contaminants extracted from the system by the liquid chemical is below a predetermined specification level. A known volume of the liquid chemical is continuously circulated through the system of the tank (12), pump (26), filter (20) and line (14), which causes a continuous circulation of the liquid chemical past the one or more components being qualified. The concentrations of extracted contaminants in the circulated chemical volume are periodically measured, and the contaminant extraction rate determined as a function of such concentration measurements. The system is qualified for production when the extraction rate has decreased to the specification level, as indicated by periodically removing samples of the liquid chemical from the line (14) out thru valve (28) for chemical analysis of each released sample.
摘要翻译：一种用于限定化学品分配系统（10）和其中使用的一种或多种组分的方法，包括罐，阀，过滤器（20），泵（26），测试部件（24）和管道，以确保表面和总体污染物的量通过液体化学品从系统中提取的含量低于预定规格水平。已知体积的液体化学品通过罐（12），泵（26），过滤器（20）和管线（14）的系统连续循环，这导致液体化学品的连续循环通过一个或多个部件合格周期性地测量循环化学体积中提取的污染物的浓度，并根据浓度测量确定污染物提取速率。当提取率降低到规格水平时，该系统符合生产要求，如通过阀（28）周期性地从管线（14）中除去液体化学品的样品所示，用于每个释放样品的化学分析。

14. 发明申请

WO2009139826A3 SUBSTRATE PROCESSING SYSTEMS AND RELATED METHODS 审中-公开
公开(公告)号：WO2009139826A3
公开(公告)日：2009-11-19
申请号：PCT/US2009/002671
申请日：2009-04-30
申请人： FSI INTERNATIONAL, INC. , CHRISTENSON, Kurt, K.
发明人： CHRISTENSON, Kurt, K.
IPC分类号： H01L21/00 , H01L21/68
摘要： A system for processing one or more substrates according to the present invention includes a diversion valve that can deliver two or more process fluids to a dispensing device through a common line/pipe. The present invention also includes related methods.

15. 发明申请

WO2009137032A2 TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING PROCESS CHAMBER DESIGNS THAT EASILY TRANSITION BETWEEN OPEN AND CLOSED MODES OF OPERATION 审中-公开
标题翻译：使用过程设计的微电子工作处理工具和方法，在开放和关闭操作模式之间轻松过渡
公开(公告)号：WO2009137032A2
公开(公告)日：2009-11-12
申请号：PCT/US2009/002768
申请日：2009-05-05
申请人： FSI INTERNATIONAL, INC. , LAUERHAAS, Jeffrey, M. , COLLINS, Jimmy, D. , GAST, Tracy, A. , ROSE, Alan, D.
发明人： LAUERHAAS, Jeffrey, M. , COLLINS, Jimmy, D. , GAST, Tracy, A. , ROSE, Alan, D.
IPC分类号： H01L21/00
CPC分类号： H01L21/67017 , Y10S134/902 , Y10T137/0363 , Y10T137/2599
摘要： Strategies for tool designs and their uses wherein the tools can operate in either closed or open modes of operation. The tools easily transition between open and closed modes on demand. According to one general strategy, environmentally controlled pathway(s) couple the ambient to one or more process chambers. Air amplification capabilities upstream from the process chamber(s) allow substantial flows of air to be introduced into the process chamber(s) on demand. Alternatively, the fluid pathways are easily closed, such as by simple valve actuation, to block egress to the ambient through these pathways. Alternative flows of nonambient fluids can then be introduced into the process chamber(s) via pathways that are at least partially in common with the pathways used for ambient air introduction. In other strategies, gap(s) between moveable components are sealed at least with flowing gas curtains rather than by relying only upon direct physical contact for sealing.
摘要翻译：工具设计及其用途的策略，其中工具可以以闭合或开放的操作模式运行。这些工具可以根据需要轻松地在开放和关闭模式之间转换。根据一个总体策略，环境控制的路径将环境耦合到一个或多个处理室。来自处理室上游的空气放大能力允许根据需要将大量的空气流引入处理室。或者，流体路径容易关闭，例如通过简单的阀门致动，以阻止通过这些路径流出到环境中。然后通过至少部分地与用于环境空气引入的路径共同的路径将非流体的替代流引入加工室。在其他策略中，可移动部件之间的间隙至少与流动的气帘密封，而不是仅依靠直接的物理接触进行密封。

16. 发明申请

WO2006107549A1 COMPACT DUCT SYSTEM INCORPORATING MOVEABLE AND NESTABLE BAFFLES FOR USE IN TOOLS USED TO PROCESS MICROELECTRONIC WORKPIECES WITH ONE OR MORE TREATMENT FLUIDS 审中-公开
标题翻译：适用于使用用于使用一种或多种处理流体加工微电子工具的工具中使用的可移动和可操作的焊盘的紧凑型管道系统
公开(公告)号：WO2006107549A1
公开(公告)日：2006-10-12
申请号：PCT/US2006/009325
申请日：2006-03-15
申请人： FSI INTERNATIONAL, INC. , ROSE, Alan, D. , CARR, Darian, D. , EPPES, James, M. , HANSON, Stephen, G.
发明人： ROSE, Alan, D. , CARR, Darian, D. , EPPES, James, M. , HANSON, Stephen, G.
IPC分类号： H01L21/00
CPC分类号： H01L21/67051 , H01L21/67017 , H01L21/6708 , Y10S134/902 , Y10T137/85938
摘要： Apparatuses, and related methods, for processing a workpiece that include particular baffle members or duct structures having an inlet proximal to an outer periphery of a workpiece and/or workpiece support.
摘要翻译：用于处理包括具有靠近工件和/或工件支撑件的外周边的入口的特定挡板构件或管道结构的工件的装置和相关方法。

17. 发明申请

WO2006055345A1 NOZZLE DESIGN FOR GENERATING FLUID STREAMS USEFUL IN THE MANUFACTURE OF MICROELECTRONIC DEVICES 审中-公开
标题翻译：用于生成微电子设备制造中使用的流体流的喷嘴设计
公开(公告)号：WO2006055345A1
公开(公告)日：2006-05-26
申请号：PCT/US2005/040454
申请日：2005-11-08
申请人： FSI INTERNATIONAL, INC. , WEYGAND, James, F. , KUNKEL, Pamela, A. , THOMES, Gregory, P.
发明人： WEYGAND, James, F. , KUNKEL, Pamela, A. , THOMES, Gregory, P.
IPC分类号： B05B1/20 , B24C1/00 , B24C3/32 , B24C5/04 , H01L21/00 , B08B7/00
CPC分类号： H01L21/67028 , B05B1/20 , B08B7/0092 , B24C1/003 , B24C3/322 , B24C5/04
摘要： Improved nozzle design that discharges fluid streams through a series of nozzle orifices distributed along a length of the nozzle. The present application may be incorporated into a wide range of microelectronic device manufacturing processes and equipment types for which an array of process streams are desired for treating microelectronic workpieces. The present application is particularly useful to cryogenically clean microelectronic workpieces.
摘要翻译：改进的喷嘴设计，其通过沿喷嘴长度分布的一系列喷嘴孔排出流体流。本申请可以被并入到广泛的微电子器件制造工艺和设备类型中，为了处理微电子工件，需要一系列工艺流。本申请对于低温清洁微电子工件特别有用。

18. 发明申请

WO2006034030A1 USING OZONE TO PROCESS WAFER LIKE OBJECTS 审中-公开
标题翻译：使用臭氧来处理类似物体的物体
公开(公告)号：WO2006034030A1
公开(公告)日：2006-03-30
申请号：PCT/US2005/033162
申请日：2005-09-13
申请人： FSI INTERNATIONAL, INC. , CHRISTENSON, Kurt, K. , CLARK, Philip, G.
发明人： CHRISTENSON, Kurt, K. , CLARK, Philip, G.
IPC分类号： H01L21/311
CPC分类号： H01L21/02063 , C11D7/02 , C11D7/3209 , C11D11/0047 , G03F7/423 , H01L21/02052 , H01L21/31116 , H01L21/31133 , H01L21/67051
摘要： The present invention relates to methods of processing wafer-like objects ( e.g. , having an exposed copper feature and/or including low-k dielectric material) with ozone. In certain preferred embodiments, a base is also used to process the wafer-like object(s).
摘要翻译：本发明涉及用臭氧处理晶片状物体（例如，具有暴露的铜特征和/或包括低k电介质材料）的方法。在某些优选实施例中，基底也用于处理晶片状物体。

19. 发明申请

WO2004104716A1 SCHEDULING MULTI-ROBOT PROCESSING SYSTEMS 审中-公开
标题翻译：调度多机器人处理系统
公开(公告)号：WO2004104716A1
公开(公告)日：2004-12-02
申请号：PCT/US2004/011205
申请日：2004-04-12
申请人： FSI INTERNATIONAL, INC. , THE UNIVERSITY OF TEXAS AT DALLAS
发明人： RAMANAN, Natarajan , GEISMAR, H., Neil , SRISKANDARAJAH, Chelliah
IPC分类号： G05B19/418
CPC分类号： H01L21/67276 , G06F19/00 , Y02P90/86
摘要： A robotic manufacturing system may include multiple robots for transporting materials between a series of stages in a manufacturing process. To provide enhanced efficiency, each of these robots may independently operate according to a reverse process flow, cyclical schedule of operation.
摘要翻译：机器人制造系统可以包括用于在制造过程中的一系列阶段之间运输材料的多个机器人。为了提供更高的效率，这些机器人中的每一个可以根据逆过程流程，循环的操作时间表独立地操作。

20. 发明申请

WO2003080479A2 SYSTEMS AND METHODS INCORPORATING AN END EFFECTOR WITH A ROTATABLE AND/OR PIVOTABLE BODY AND/OR AN OPTICAL SENSOR HAVING A LIGHT PATH THAT EXTENDS ALONG A LENGTH OF THE END EFFECTOR 审中-公开
标题翻译：将具有可旋转和/或可转动的身体和/或具有在最终效果的长度上延伸的光路的光学传感器并入终端效应的系统和方法
公开(公告)号：WO2003080479A2
公开(公告)日：2003-10-02
申请号：PCT/US2003/008372
申请日：2003-03-18
申请人： FSI INTERNATIONAL, INC.
发明人： SIMONDET, Sean, D.
IPC分类号： B65G
CPC分类号： H01L21/67766 , B25J9/1692 , B25J19/025 , H01L21/67265 , H01L21/67769 , H01L21/67778
摘要： Robot system incorporates a versatile end effector that can be used to transport wafers, map wafers, and autocalibrate the movements of the robotic system. Typically, the end effector of the invention is rotatably and/or pivotably coupled to a robotic arm and includes an optical sensor system whose light path preferably includes a directional component that extends along a lengthwise axis of the end effector. Preferably the end effector is independently movable about at least two axes. These characteristics, singly or in combination, allow the end effector to carry out transport, mapping, and autocalibration functions within a relatively small volume either horizontally, vertically, or at other desired orientations.
摘要翻译：机器人系统结合了多功能的末端执行器，可用于运输晶片，映射晶片，并自动校准机器人系统的运动。通常，本发明的末端执行器可旋转地和/或可枢转地耦合到机器臂并且包括光学传感器系统，其光路优选地包括沿着端部执行器的纵向轴线延伸的方向分量。优选地，末端执行器可以围绕至少两个轴线独立地移动。这些特征，单独或组合地允许末端执行器在水平，垂直或其他期望取向的相对较小的体积内执行运输，映射和自动校准功能。

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