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2. 发明申请

WO1998028107A1 ROTATABLE AND TRANSLATABLE SPRAY NOZZLE 审中-公开
标题翻译：可旋转和可翻译的喷雾喷嘴
公开(公告)号：WO1998028107A1
公开(公告)日：1998-07-02
申请号：PCT/US1997023368
申请日：1997-12-19
申请人： FSI INTERNATIONAL, INC.
发明人： FSI INTERNATIONAL, INC. , WAGENER, Thomas, J. , SIEFERING, Kevin, L. , KUNKEL, Pamela, A. , WEYGAND, James, F. , THOMES, Gregory, P.
IPC分类号： B24C01/00
CPC分类号： H01L21/67051 , B05B1/005 , B05B1/20 , B24C1/003 , B24C3/322 , B24C5/04
摘要： A nozzle (18) having a series of orifices (40) along a longitudinal length of the nozzle for processing a substrate (1, 12) and which is rotatably adjustable. By the nozzle design of the present invention, liquid is properly distributed along the longitudinal length of the nozzle (18) independently of the angle of the aerosol spray. This allows for the generation of a uniform aerosol stream that is independent of spray angle. The nozzle design of the present invention improves the uniform distribution of liquid within the nozzle (18), which in addition to providing a more uniform liquid pooling, also substantially eliminates temporal non-uniformities across the nozzle length. Moreover, the present invention is also directed to a nozzle (18) that is translatable in the direction (B) toward or away from the substrate (1, 12) to be processed or parallel to the substrate surface. The nozzle (18) includes a series of impingement orifices (40) provided in a longitudinal direction along at least a part of the nozzle, wherein the nozzle has an interior longitudinally divided into first and second internal cavities (104, 106) with plural openings (108) between the first and second internal cavities (104, 106), and the openings (108) between the first and second cavities are oriented at a different radial angle from the longitudinal axis than the radial angle of the impingement orifices. Preferably, the nozzle (18) comprises an inner tube (100) and an outer tube (90) operatively supported and connected with respect to one another. The present invention is also directed to the combination of such a nozzle (18) that is rotationally (A) and translatable (B) adjustable independently from one another.
摘要翻译：一种喷嘴（18），其具有沿着所述喷嘴的纵向长度的一系列孔口（40），用于处理基板（1,2）并且可旋转地调节。通过本发明的喷嘴设计，独立于气溶胶喷雾的角度，液体沿着喷嘴（18）的纵向长度适当地分布。这允许产生独立于喷雾角度的均匀气溶胶流。本发明的喷嘴设计改善了喷嘴（18）内的液体的均匀分布，除了提供更均匀的液体汇集之外，基本上消除了喷嘴长度上的时间不均匀性。此外，本发明还涉及一种喷嘴（18），该喷嘴可以朝向或远离待处理或平行于衬底表面的衬底（1,2）的方向（B）移动。喷嘴（18）包括沿喷嘴的至少一部分沿长度方向设置的一系列冲击孔（40），其中喷嘴具有纵向分成具有多个开口的第一和第二内部空腔（104,106）的内部（108）在第一和第二内部空腔（104,106）之间，并且第一和第二空腔之间的开口（108）被定向成与所述纵向轴线不同于所述冲击孔的径向角度的径向角度。优选地，喷嘴（18）包括可操作地支撑并相对于彼此连接的内管（100）和外管（90）。本发明还涉及这样一种旋转（A）和可平移（B）的喷嘴（18）的组合，可以彼此独立地调节。

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