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1. 发明申请

US20160054724A1 METHOD OF EVALUATING A MACHINED SURFACE OF A WORKPIECE, A CONTROLLING APPARATUS AND A MACHINE TOOL 有权
标题翻译：工件加工表面的评估方法，控制装置和机器工具
公开(公告)号：US20160054724A1
公开(公告)日：2016-02-25
申请号：US14780943
申请日：2013-03-29
申请人： MAKINO MILLING MACHINE CO., LTD.
发明人： Mitsunari ODA
IPC分类号： G05B19/4069 , G01B11/30 , G01B17/08
CPC分类号： G05B19/4069 , G01B11/30 , G01B17/08 , G01N21/4738 , G05B19/4093 , G05B2219/32177 , G05B2219/32215 , G05B2219/32216 , G05B2219/35346 , G05B2219/37402 , Y02P90/22 , Y02P90/265
摘要： A worked surface of a workpiece is evaluated on the basis of how the surface is actually perceived by a person's (observer's) eyes (vision) or fingers (touch), and a work process whereby a workpiece is worked is changed on the basis of the evaluation.
摘要翻译：基于人（观察者）的眼睛（视觉）或手指（触摸）实际感知表面的情况来评估工件的加工表面，并且基于工作的工件改变工件的工作过程评估。

2. 发明授权

US06453207B1 Method, system and article of manufacture for operating a process 失效
标题翻译：用于操作过程的方法，系统和制造
公开(公告)号：US06453207B1
公开(公告)日：2002-09-17
申请号：US09345350
申请日：1999-07-01
申请人： Donald S. Holmes , Peter M. Holmes
发明人： Donald S. Holmes , Peter M. Holmes
IPC分类号： G05B1132
CPC分类号： G05B15/02 , G05B19/41885 , G05B2219/32147 , G05B2219/32216 , Y02P90/26
摘要： A complex industrial process is operated via computer control. Process control data regarding multiple process control variables is collected, along with output data regarding one or more process output properties. One or more of the process control variables is altered for a predetermined time in order to determine which of the process control variables are affecting the one or more process output properties. An effect on the one or more output properties due to the altering is determined, and, if necessary, a set point for the one or more process control variables is altered based on the effect in order to improve the process.
摘要翻译：复杂的工业过程通过计算机控制进行操作。收集关于多个过程控制变量的过程控制数据，以及关于一个或多个过程输出属性的输出数据。一个或多个过程控制变量被改变预定时间，以便确定哪一个过程控制变量影响一个或多个过程输出属性。确定由于改变对一个或多个输出属性的影响，并且如果需要，基于效果改变一个或多个过程控制变量的设定点，以便改进过程。

3. 发明申请

US20170053843A1 HYBRID CORRECTIVE PROCESSING SYSTEM AND METHOD 审中-公开
标题翻译：混合校正处理系统和方法
公开(公告)号：US20170053843A1
公开(公告)日：2017-02-23
申请号：US15242376
申请日：2016-08-19
申请人： TEL Epion Inc.
发明人： Joshua LaRose , Brian D. Pfeifer , Vincent Lagana-Gizzo , Noel Russell
IPC分类号： H01L21/66 , G05B23/02 , G05B19/19 , G05B19/406 , H01J37/32 , H01L21/3065
CPC分类号： H01L22/20 , G05B19/41875 , G05B2219/32216 , H01J37/32009 , H01J37/3244 , H01J37/32935 , H01J37/3299 , H01J2237/334 , H01L21/3065 , H01L22/12 , Y02P90/22
摘要： A system and method for performing corrective processing of a workpiece is described. The system and method includes receiving a first set of parametric data from a first source that diagnostically relates to at least a first portion of a microelectronic workpiece, and receiving a second set of parametric data from a second source different than the first source that diagnostically relates to at least a second portion of the microelectronic workpiece. Thereafter, a corrective process is generated, and a target region of the microelectronic workpiece is processed by applying the corrective process to the target region using a combination of the first set of parametric data and the second set of parametric data.
摘要翻译：描述用于对工件进行校正处理的系统和方法。所述系统和方法包括从第一源接收第一组参数数据，所述第一组在诊断上与微电子工件的至少第一部分相关，以及从不同于诊断相关的第一源的第二源接收第二组参数数据到微电子工件的至少第二部分。此后，产生校正过程，并且通过使用第一组参数数据和第二组参数数据的组合将校正过程应用于目标区域来处理微电子工件的目标区域。

4. 发明授权

US07575501B1 Advanced workpiece finishing 失效
标题翻译：高级工件加工
公开(公告)号：US07575501B1
公开(公告)日：2009-08-18
申请号：US11368295
申请日：2006-03-03
申请人： Charles J. Molnar
发明人： Charles J. Molnar
IPC分类号： B24B49/00 , B24B51/00
CPC分类号： B24B37/042 , B24B49/04 , G05B19/41875 , G05B2219/32216 , G05B2219/45232 , Y02P90/22 , Y02P90/86
摘要： An apparatus for processing, finishing, and planarizing is disclosed. A methods of processing are disclosed. New methods of control for processing are disclosed. The methods and apparatus, can help improve yield and lower the cost of manufacture for planarizing of workpieces having extremely close tolerances such as semiconductor wafers. Cost of manufacture parameters are used for control. Methods to determine preferred changes to process control parameters are disclosed. Use of a model for improving manufacture, cost of manufacture, and profitability is discussed.
摘要翻译：公开了一种用于加工，精加工和平面化的设备。公开了一种处理方法。公开了新的处理控制方法。这些方法和装置可以有助于提高产量并降低具有非常公差的工件的平面化（诸如半导体晶片）的制造成本。制造成本参数用于控制。公开了确定对过程控制参数的优选变化的方法。讨论了用于改进制造，制造成本和盈利能力的模型。

5. 发明授权

US07037172B1 Advanced wafer planarizing 失效
标题翻译：先进晶圆平面化
公开(公告)号：US07037172B1
公开(公告)日：2006-05-02
申请号：US10260458
申请日：2002-09-30
申请人： Charles J. Molnar
发明人： Charles J. Molnar
IPC分类号： B24B49/00 , B24B51/00
CPC分类号： G05B19/41875 , B24B37/042 , B24B49/00 , G05B2219/32216 , G05B2219/45232 , Y02P90/22 , Y02P90/86
摘要： An apparatus for planarizing is disclosed. A method of planarizing is disclosed. Methods of planarizing using frictional planarizing, chemical planarizing, tribochemical planarizing, CVD planarizing, and electrochemical planarizing and combinations thereof are disclosed. A planarizing chamber can be used. New methods of control are planarizing disclosed. The new planarizing methods and apparatus, can help improve yield and lower the cost of manufacture for planarizing of workpieces having extremely close tolerances such as semiconductor wafers. Cost of manufacture parameters are used for control. Methods to determine preferred changes to process control parameters are disclosed. Cost of manufacture models can be used and are disclosed. Process models can be used and are disclosed. A method to use business calculations combined with physical measurements to improve control is discussed. Use of business calculations to change the cost of finishing semiconductor wafers is discussed. The method can help cost of manufacture forecasting for pre-ramp-up, ramp-up, and commercial manufacture. Activity based accounting can be preferred for some applications. Planarizing fluids are preferred. Reactive planarizing aids are preferred. Electro-planarizing for adding and removing material is disclosed. New methods and new apparatus for non-steady state planarizing control are disclosed.
摘要翻译：公开了一种用于平坦化的装置。公开了一种平面化方法。公开了使用摩擦平坦化，化学平面化，摩擦化学平面化，CVD平面化和电化学平面化的平面化方法及其组合。可以使用平坦化室。新的控制方法是公开的。新的平面化方法和装置可以有助于提高产量并且降低具有非常公差的工件如半导体晶片的平面化的制造成本。制造成本参数用于控制。公开了确定对过程控制参数的优选变化的方法。可以使用和披露制造模型的成本。流程模型可以被使用和公开。讨论了使用业务计算与物理测量结合来改善控制的方法。讨论了使用业务计算来改变半导体晶片的成本。该方法可以帮助预先提升，上升和商业制造的制造预测成本。某些应用程序可以优先选择基于活动的会计。平面化流体是优选的。反应性平面化助剂是优选的。公开了用于添加和去除材料的电镀平面化。公开了用于非稳态平面化控制的新方法和新装置。

6. 发明申请

US20020032499A1 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece 有权
标题翻译：用于电化学处理微电子工件的反应器中的调谐电极
公开(公告)号：US20020032499A1
公开(公告)日：2002-03-14
申请号：US09849505
申请日：2001-05-04
发明人： Gregory J. Wilson , Paul R. McHugh , Robert A. Weaver , Thomas L. Ritzdorf
IPC分类号： G06F019/00
CPC分类号： G05B19/41875 , C25D7/123 , C25D17/001 , C25D21/12 , G05B2219/32182 , G05B2219/32216 , G05B2219/45031 , Y02P90/22 , Y02P90/265
摘要： A facility for selecting and refining electrical parameters for processing a microelectronic workpiece in a processing chamber is described. The facility initially configures the electrical parameters in accordance with either a numerical of the processing chamber or experimental data derived from operating the actual processing chamber. After a workpiece is processed with the initial parameter configuration, the results are measured and a sensitivity matrix based upon the numerical model of the processing chamber is used to select new parameters that correct for any deficiencies measured in the processing of the first workpiece. These parameters are then used in processing a second workpiece, which may be similarly measured, and the results used to further refine the parameters.
摘要翻译：描述了一种用于选择和精炼用于在处理室中处理微电子工件的电参数的设备。该设施最初根据处理室的数值或从操作实际处理室得到的实验数据来配置电参数。在用初始参数配置处理工件之后，测量结果，并且使用基于处理室的数值模型的灵敏度矩阵来选择校正在第一工件的处理中测量的任何缺陷的新参数。然后将这些参数用于处理可以类似地测量的第二工件，并且用于进一步改进参数的结果。

7. 发明授权

US10018989B2 Method of evaluating a machined surface of a workpiece, a controlling apparatus and a machine tool 有权
公开(公告)号：US10018989B2
公开(公告)日：2018-07-10
申请号：US14780943
申请日：2013-03-29
申请人： MAKINO MILLING MACHINE CO., LTD.
发明人： Mitsunari Oda
IPC分类号： G06F19/00 , G05B19/4069 , G05B19/4093 , G01N21/47 , G01B11/30 , G01B17/08
CPC分类号： G05B19/4069 , G01B11/30 , G01B17/08 , G01N21/4738 , G05B19/4093 , G05B2219/32177 , G05B2219/32215 , G05B2219/32216 , G05B2219/35346 , G05B2219/37402 , Y02P90/22 , Y02P90/265
摘要： A worked surface of a workpiece is evaluated on the basis of how the surface is actually perceived by a person's (observer's) eyes (vision) or fingers (touch), and a work process whereby a workpiece is worked is changed on the basis of the evaluation.

8. 发明授权

US07181355B2 Automatic quality control method for production line and apparatus therefor as well as automatic quality control program 有权
标题翻译：生产线及其设备的自动质量控制方法以及自动质量控制程序
公开(公告)号：US07181355B2
公开(公告)日：2007-02-20
申请号：US11293307
申请日：2005-12-05
申请人： Haruhiko Kondo , Tomoaki Kubo
发明人： Haruhiko Kondo , Tomoaki Kubo
IPC分类号： G06F19/00
CPC分类号： G06F17/30 , G05B19/41875 , G05B2219/32177 , G05B2219/32196 , G05B2219/32201 , G05B2219/32216 , Y02P90/22 , Y02P90/26 , Y02P90/265
摘要： Production condition data and product quality data in a production line are monitored and stored in a production history database. When a quality deterioration event in the production line is detected while checking the product quality data, the improvement contents of the quality deterioration factor and production conditions are extracted. The extracted results and pre-stored quality improvement history data are collated with each other in order to confirm the validity thereof, and a simulation of the phenomenon of the production line is executed in order to verify the correctness. When the validity and correctness are verified, the production condition for the production line are revised to improve the quality deterioration factor.
摘要翻译：生产线中的生产条件数据和产品质量数据被监控并存储在生产历史数据库中。当检查产品质量数据时检测到生产线中的质量劣化事件时，提取质量劣化因子和生产条件的改进内容。提取的结果和预存储的质量改进历史数据彼此整理以确认其有效性，并且执行生产线现象的模拟以验证正确性。验证有效性和正确性时，对生产线的生产条件进行修改，提高质量劣化因子。

9. 发明申请

US20070034516A1 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece 审中-公开
标题翻译：用于电化学处理微电子工件的反应器中的调谐电极
公开(公告)号：US20070034516A1
公开(公告)日：2007-02-15
申请号：US11392477
申请日：2006-03-28
申请人： Gregory Wilson , Paul McHugh , Robert Weaver , Thomas Ritzdorf
发明人： Gregory Wilson , Paul McHugh , Robert Weaver , Thomas Ritzdorf
IPC分类号： C25D21/12
CPC分类号： G05B19/41875 , C25D7/123 , C25D17/001 , C25D21/12 , G05B2219/32182 , G05B2219/32216 , G05B2219/45031 , Y02P90/22 , Y02P90/265
摘要： A facility for selecting and refining electrical parameters for processing a microelectronic workpiece in a processing chamber is described. The facility initially configures the electrical parameters in accordance with either a numerical of the processing chamber or experimental data derived from operating the actual processing chamber. After a workpiece is processed with the initial parameter configuration, the results are measured and a sensitivity matrix based upon the numerical model of the processing chamber is used to select new parameters that correct for any deficiencies measured in the processing of the first workpiece. These parameters are then used in processing a second workpiece, which may be similarly measured, and the results used to further refine the parameters.
摘要翻译：描述了一种用于选择和精炼用于在处理室中处理微电子工件的电参数的设备。该设施最初根据处理室的数值或从操作实际处理室得到的实验数据来配置电参数。在用初始参数配置处理工件之后，测量结果，并且使用基于处理室的数值模型的灵敏度矩阵来选择校正在第一工件的处理中测量的任何缺陷的新参数。然后将这些参数用于处理可以类似地测量的第二工件，并且用于进一步改进参数的结果。

10. 发明申请

US20060282186A1 Optimization of a production process 审中-公开
标题翻译：优化生产过程
公开(公告)号：US20060282186A1
公开(公告)日：2006-12-14
申请号：US11438744
申请日：2006-05-22
申请人： Preben Hansen , Marek Lipinski , Marc Schneider , Wilfried Schaefer , Jorg Sturm
发明人： Preben Hansen , Marek Lipinski , Marc Schneider , Wilfried Schaefer , Jorg Sturm
IPC分类号： G06F19/00
CPC分类号： B22D46/00 , G05B13/024 , G05B19/41885 , G05B2219/32017 , G05B2219/32216 , Y02P80/40 , Y02P90/26
摘要： A method or system for optimizing a process for producing a cast or molded product made by one or more production steps in respect of one or more predetermined parameters towards one or more optimal values, the process comprising the steps of: defining one or more technical requirements for the cast or molded product; providing a simulation of the casting or molding process; generating with each computer implemented process one or more solutions for the production step concerned that will lead to a cast product that will fulfill the technical requirements; and determining in a further computer implemented process which combination of the individual solutions results in an actual process or in a selected sub-set of production steps in which the predetermined parameter is closest to the optimal value.
摘要翻译：一种用于优化用于生产由一个或多个生产步骤针对一个或多个最佳值的一个或多个预定参数制成的铸造或模制产品的工艺的方法或系统，所述方法包括以下步骤：定义一个或多个技术要求用于铸造或模制产品; 提供铸造或模制过程的模拟; 每个计算机实施过程中产生一个或多个有关生产步骤的解决方案，将导致满足技术要求的铸造产品; 以及在进一步的计算机实现过程中确定各个解决方案的组合导致实际过程或选定的生产步骤子集，其中预定参数最接近最优值。

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