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    • 6. 发明授权
    • Optical position sensor with corner-cube and servo-feedback for scanning
microscopes
    • 具有角立方和光学位置传感器,用于扫描显微镜
    • US5196713A
    • 1993-03-23
    • US882581
    • 1992-05-13
    • Daniel R. Marshall
    • Daniel R. Marshall
    • G01J1/20G01N23/00G01Q70/00
    • G01Q10/04B82Y35/00G01Q10/065Y10S977/86Y10S977/868Y10S977/869Y10S977/871Y10S977/872
    • A scanning probe microscope includes a probe support carrying a scanning probe, a piezoelectric transducer having a free end connected to a stage on which the sample is supported, probe sensing circuitry connected to sense a signal indicating interaction between the tip of the probe and a point of the sample surface and producing in response thereto a Z control voltage so as to optimize the interaction and produce a Z coordinate representing the height of a presently scanned point of the sample surface. Optical sensing circuitry includes a light source connected in fixed relation to the sample stage, a position sensitive photodetector, and optics focusing lens for focusing a portion of the light onto a position sensitive detector to cause it to produce X and Y position signals. The light source includes a retroreflector attached to the piezoelectric transducer receiving a beam from a stationary laser and focused by a stationary lens onto the position sensitive detector. Feedback servo circuits are responsive to the X and Y position signals to apply X and Y control voltages to the piezoelectric transducer.
    • 扫描探针显微镜包括携带扫描探针的探针支架,具有连接到载体上的载物台的自由端的压电换能器,探针感测电路被连接以感测指示探针的尖端与点之间的相互作用的信号 并且响应于此产生Z控制电压,以便优化相互作用并产生代表样品表面的当前扫描点的高度的Z坐标。 光学感测电路包括以固定关系连接到样品台的光源,位置敏感光电检测器和用于将一部分光聚焦到位置敏感检测器以使其产生X和Y位置信号的光学聚焦透镜。 光源包括附接到压电换能器的后向反射器,该压电换能器接收来自固定激光器的光束并且由静止透镜聚焦到位置敏感检测器上。 反馈伺服电路响应于X和Y位置信号,以向压电换能器施加X和Y控制电压。
    • 8. 发明授权
    • Scanning tunneling microscope assembly, reactor, and system
    • 扫描隧道显微镜组件,反应器和系统
    • US08893309B2
    • 2014-11-18
    • US13388223
    • 2010-06-22
    • Feng TaoMiquel SalmeronGabor A. Somorjai
    • Feng TaoMiquel SalmeronGabor A. Somorjai
    • G01Q60/10G01Q30/18G01Q30/16G01Q60/16G01Q30/12G01Q60/00G21K5/10B82Y35/00
    • G01Q60/16B82Y35/00G01Q30/12G01Q30/16Y10S977/86Y10S977/861Y10S977/869Y10S977/871
    • An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.
    • 扫描隧道显微镜(STM)反应器的一个实施例包括压力容器,STM组件和三个弹簧耦合物体。 压力容器包括可密封的端口,内部和外部。 STM系统的实施例包括真空室,STM反应器和三个弹簧。 三个弹簧将STM反应器耦合到真空室,并且可操作以在STM反应器的操作期间将扫描隧道显微镜反应器悬挂在真空室内部。 STM组件的实施例包括粗排列布置,耦合到粗位移布置的压电精细位移扫描管和接收器。 压电精细位移扫描管耦合到粗排位置。 接收器耦合到压电扫描管并且可操作以接收尖端保持器,并且尖端保持器可操作以接收尖端。
    • 10. 发明授权
    • Methods of manufacturing diamond capsules
    • 制造金刚石胶囊的方法
    • US07309446B1
    • 2007-12-18
    • US11067600
    • 2005-02-25
    • Victor B. Kley
    • Victor B. Kley
    • B44C1/22
    • G01Q20/02G01Q30/02G01Q30/10G01Q70/14G01Q80/00G21B1/19Y02E30/16Y10S977/858Y10S977/871Y10S977/879
    • Capsules and similar objects are made from materials having diamond (sp3) lattice structures, including diamond materials in synthetic crystalline, polycrystalline (ordered or disordered), nanocrystalline and amorphous forms. The capsules generally include a hollow shell made of a diamond material that defines an interior region that may be empty or that may contain a fluid or solid material. Some of the capsules include access ports that can be used to fill the capsule with a fluid. Capsules and similar structures can be manufactured by growing diamond on suitably shaped substrates. In some of these methods, diamond shell sections are grown on substrates, then joined together. In other methods, a nearly complete diamond shell is grown around a form substrate, and the substrate can be removed through a relatively small opening in the shell.
    • 胶囊和类似物体由具有金刚石(sp 3+)晶格结构的材料制成,包括合成晶体,多晶(有序或无序),纳米晶体和无定形形式的金刚石材料。 胶囊通常包括由金刚石材料制成的中空壳,其限定可以是空的内部区域,或者可以包含流体或固体材料的内部区域。 一些胶囊包括可用于用流体填充胶囊的进入口。 胶囊和类似结构可以通过在合适形状的基底上生长金刚石来制造。 在这些方法中的一些方法中,金刚石壳部分在基底上生长,然后连接在一起。 在其他方法中,几乎完全的金刚石外壳生长在成形基板周围,并且基板可以通过外壳中较小的开口被移除。