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1. 发明申请

US20190198317A1 METHOD AND COMPOSITION FOR SELECTIVELY MODIFYING BASE MATERIAL SURFACE 审中-公开
公开(公告)号：US20190198317A1
公开(公告)日：2019-06-27
申请号：US16288385
申请日：2019-02-28
申请人： JSR CORPORATION
发明人： Hiroyuki KOMATSU , Tomohiro Oda , Hitoshi Osaki , Masafumi Hori , Takehiko Naruoka
IPC分类号： H01L21/027 , C23C16/02 , H01L21/02 , H01L21/311 , C09D5/00 , C09D125/06 , C09D183/04 , C09D125/16 , C09D133/12 , C09D7/20
CPC分类号： H01L21/0271 , B05D3/02 , B05D7/00 , C09D5/008 , C09D7/20 , C09D125/06 , C09D125/16 , C09D133/12 , C09D183/04 , C23C16/0227 , H01L21/02118 , H01L21/02271 , H01L21/02282 , H01L21/02334 , H01L21/02359 , H01L21/3065 , H01L21/31133
摘要： A method for selectively modifying a base material surface, includes applying a composition on a surface of a base material to form a coating film. The coating film is heated. The base material includes a surface layer which includes a first region including silicon. The composition includes a first polymer and a solvent. The first polymer includes at an end of a main chain or a side chain thereof, a group including a first functional group capable of forming a bond with the silicon. The first region preferably contains a silicon oxide, a silicon nitride, or a silicon oxynitride. The base material preferably further includes a second region that is other than the first region and that contains a metal; and the method preferably further includes, after the heating, removing with a rinse agent a portion formed on the second region, of the coating film.

2. 发明申请

US20170293227A1 COATING LIQUID FOR RESIST PATTERN COATING 审中-公开
公开(公告)号：US20170293227A1
公开(公告)日：2017-10-12
申请号：US15512802
申请日：2015-09-18
申请人： NISSAN CHEMICAL INDUSTRIES, LTD.
发明人： Tokio NISHITA , Shuhei SHIGAKI , Noriaki FUJITANI , Takafumi ENDO , Rikimaru SAKAMOTO
IPC分类号： G03F7/40 , C08G77/14 , C08G8/04 , C09D125/16 , G03F7/039 , G03F7/16 , G03F7/11 , G03F7/20 , G03F7/38 , G03F7/32 , C09D7/00 , G03F7/09 , H01L21/027 , H01L21/02 , H01L21/311 , C08F212/12
CPC分类号： G03F7/40 , C08F212/12 , C08G8/04 , C08G77/14 , C09D5/008 , C09D7/20 , C09D125/16 , C09D161/12 , C09D183/04 , C09D201/00 , G03F7/039 , G03F7/094 , G03F7/11 , G03F7/162 , G03F7/168 , G03F7/2006 , G03F7/322 , G03F7/38 , G03F7/405 , H01L21/0206 , H01L21/02118 , H01L21/0273 , H01L21/0332 , H01L21/31133 , C08F220/06 , C08F220/52 , C08F220/24 , C08F220/22
摘要： There is provided a new coating liquid for resist pattern coating. A coating liquid for resist pattern coating comprising a component A that is a polymer including at least one hydroxy group or carboxy group; a component B that is a sulfonic acid of A-SO3H (where A is a linear or branched alkyl group or fluorinated alkyl group having a carbon atom number of 1 to 16, an aromatic group having at least one of the alkyl group or the fluorinated alkyl group as a substituent, or a C4-16 alicyclic group optionally having a substituent); and a component C that is an organic solvent capable of dissolving the polymer and including ether or ketone compound of R1—O—R2 and/or R1—C(═O)—R2 (where R1 is a linear, branched, or cyclic alkyl group or fluorinated alkyl group having a carbon atom number of 3 to 16; and R2 is a linear, branched, or cyclic alkyl group or fluorinated alkyl group having a carbon atom number of 1 to 16), a method of forming a resist pattern using the coating liquid, and a method for forming a reverse pattern using the coating liquid.

3. 发明授权

US09334352B2 Semi-cured product, cured product and method for producing these, optical component, curable resin composition, and compound 有权
标题翻译：半固化产物，固化产物及其制备方法，光学组件，可固化树脂组合物和化合物
公开(公告)号：US09334352B2
公开(公告)日：2016-05-10
申请号：US14668474
申请日：2015-03-25
申请人： FUJIFILM Corporation
发明人： Ayumi Someya , Masataka Yoshizawa , Tatsuhiko Obayashi , Hiroyuki Naitou
IPC分类号： C08F2/46 , C08G61/04 , C08F222/20 , C07C69/54 , C08F220/30 , G02B1/04 , C08F222/10 , C07C13/66 , C07D311/96 , C07D333/78 , C07D263/52 , C07D277/60 , C07D209/58 , C07D307/77 , C07C323/19 , C07C323/66 , C07C233/20 , C07C69/602 , C08F212/34 , C08F12/26 , C08F12/32 , C08F12/34 , C08F212/32 , C09D125/16
CPC分类号： C08F222/20 , C07C13/66 , C07C69/54 , C07C69/602 , C07C233/20 , C07C323/19 , C07C323/66 , C07C2103/40 , C07C2103/52 , C07C2603/40 , C07C2603/52 , C07D209/58 , C07D263/52 , C07D277/60 , C07D307/77 , C07D311/96 , C07D333/78 , C08F12/26 , C08F12/32 , C08F12/34 , C08F212/32 , C08F212/34 , C08F220/30 , C08F222/1006 , C09D125/16 , G02B1/041 , C08L45/00 , C08F2222/205
摘要： A curable resin composition containing a compound of formula (1), a compound of formula (2) and a thermal- or photo-radical polymerization initiator is capable of producing a cured product having a low Abbe's number and capable of realizing burr reduction in molding the composition. Ar1 to Ar4 represent aryl or heteroaryl, at least one of Ar1 to Ar4 is aromatic condensed ring, and two or more of Ar1 to Ar4 have a polymerizable group, and at least one of R21 to R26 forms a ring, or at least two bond to each other to form a ring:
摘要翻译：含有式（1）化合物，式（2）化合物和热或光自由基聚合引发剂的固化性树脂组合物能够生产具有低阿贝数的固化产物，并且能够实现成型中的毛刺减少组成。 Ar 1〜Ar 4表示芳基或杂芳基，Ar 1〜Ar 4中的至少一个为芳香族稠合环，Ar 1〜Ar 4中的2个以上具有聚合性基团，R 21〜R 26中的至少一个为环，或至少2个以上彼此形成一个戒指：

4. 发明申请

US20150267046A1 COMPOSITION FOR FILM FORMATION, RESIST UNDERLAYER FILM, AND FORMING METHOD OF RESIST UNDERLAYER FILM, AND PATTERN-FORMING METHOD 有权
标题翻译：电影形成用组合物，电阻膜，电阻膜形成方法和图案形成方法
公开(公告)号：US20150267046A1
公开(公告)日：2015-09-24
申请号：US14662642
申请日：2015-03-19
申请人： JSR CORPORATION
发明人： Hayato NAMAI , Goji WAKAMATSU
IPC分类号： C08L47/00 , G03F7/09 , B05D3/02 , G03F7/20
CPC分类号： H01L21/0332 , B05D3/0254 , C08F12/32 , C08F12/34 , C08L47/00 , C09D125/16 , G03F7/09 , G03F7/091 , G03F7/094 , G03F7/20 , H01L21/02118 , H01L21/0271 , H01L21/0276 , H01L21/31144
摘要： A composition for film formation includes a compound represented by formula (1), and a solvent. R1 represents a monovalent group including an aromatic ring. n is an integer of 3 to 6. At least one monovalent group represented by R1 further includes a group including an ethylenic double bond. a plurality of R1s are identical or different. A part or all of hydrogen atoms on the benzene ring in the formula (1) and on the aromatic ring are unsubstituted or substituted with a halogen atom or an alkyl group having 1 to 10 carbon atoms.
摘要翻译：用于成膜的组合物包括由式（1）表示的化合物和溶剂。 R 1表示包含芳环的一价基团。 n为3〜6的整数。由R 1表示的至少一个一价基团还包括含有烯属双键的基团。多个R1相同或不同。式（1）中苯环上和芳香环上的一部分或全部氢原子是未取代的或被卤原子或具有1-10个碳原子的烷基取代。

5. 发明申请

US20150210793A1 CROSSLINKABLE POLYMERS AND UNDERLAYER COMPOSITIONS 审中-公开
标题翻译：可交联聚合物和底层组合物
公开(公告)号：US20150210793A1
公开(公告)日：2015-07-30
申请号：US14588385
申请日：2014-12-31
申请人： Rohm and Haas Electronic Materials LLC , Dow Global Technologies LLC
发明人： Jong Keun PARK , Jibin SUN , Christopher D. GILMORE , Jieqian ZHANG , Phillip D. HUSTAD , Peter TREFONAS, III , Kathleen M. O'Connell
IPC分类号： C08F212/08 , C08F212/12 , C09D133/10 , C09D133/12 , C09D125/16 , C08F220/18 , C09D125/14
CPC分类号： C08F212/08 , C08F12/22 , C08F12/26 , C08F12/30 , C08F12/32 , C08F212/12 , C09D125/14 , C09D125/16 , C09D133/06 , C08F212/32 , C08F2220/302
摘要： A crosslinkable polymer comprising: a first unit of the following general formula (I-A) or (I-B): wherein: P is a polymerizable functional group; L is a single bond or an m+1-valent linking group; X1 is a monovalent electron donating group; X2 is a divalent electron donating group; Ar1 and Ar2 are trivalent and divalent aryl groups, respectively, and carbon atoms of the cyclobutene ring are bonded to adjacent carbon atoms on the same aromatic ring of Ar1 or Ar2; m and n are each an integer of 1 or more; and each R1 is independently a monovalent group; and a second unit chosen from general formulae (III) and (IV): wherein R7 is chosen from hydrogen, fluorine, C1-C3 alkyl and C1-C3 fluoroalkyl, R8 is chosen from optionally substituted C1 to C10 alkyl, and Ar3 is an optionally substituted aryl group. Underlayer compositions comprise the crosslinkable polymer and a solvent. The crosslinkable polymers and underlayer compositions find particular applicability in the manufacture of semiconductor devices or data storage devices for the formation of high resolution patterns.
摘要翻译：一种可交联聚合物，其包含：以下通式（I-A）或（I-B）的第一单元：其中：P为可聚合官能团; L是单键或m + 1价连接基团; X1是单价给电子基团; X2是二价给电子基团; Ar1和Ar2分别为三价和二价芳基，环丁烯环的碳原子与Ar1或Ar2的相同芳环上的相邻碳原子键合; m和n分别为1以上的整数，并且每个R 1独立地是一价基团; 和选自通式（III）和（IV）的第二单元：其中R 7选自氢，氟，C 1 -C 3烷基和C 1 -C 3氟烷基，R 8选自任选取代的C 1至C 10烷基，Ar 3是任选取代的芳基。底层组合物包含可交联聚合物和溶剂。可交联聚合物和底层组合物特别适用于制造用于形成高分辨率图案的半导体器件或数据存储装置。

6. 发明申请

US20150105528A1 LOW VISCOSITY HIGH SOLIDS COPOLYMER 有权
标题翻译：低粘度高固体共聚物
公开(公告)号：US20150105528A1
公开(公告)日：2015-04-16
申请号：US14575576
申请日：2014-12-18
申请人： Valspar Sourcing, Inc.
发明人： Carl Lewis Cavallin
IPC分类号： C08F220/28
CPC分类号： C08F220/28 , C08F212/08 , C08F212/12 , C08F220/18 , C08F222/06 , C08F2220/281 , C09D125/16 , C08F2220/1825
摘要： A copolymer is made by feeding one or more added olefinic monomers into a reaction vessel containing a non-homopolymerizable olefinic monomer heated to a temperature of at least about 100° C. The process may be performed in a batch or continuous fashion, may use an unpressurized reactor, may be performed without added solvent, and may form a copolymer whose number average molecular weight is less than about 4,000 amu and whose polydispersity is less than about 3.
摘要翻译：通过将一种或多种添加的烯属单体进料到含有加热到至少约100℃的不可均聚烯烃单体的反应容器中来制备共聚物。该方法可以以批次或连续方式进行，可以使用非加压反应器，可以在没有添加溶剂的情况下进行，并且可以形成数均分子量小于约4,000amu并且其多分散性小于约3的共聚物。

7. 发明授权

US07417091B2 Polymer binder for intumescent coatings 有权
标题翻译：膨胀型涂料用聚合物粘合剂
公开(公告)号：US07417091B2
公开(公告)日：2008-08-26
申请号：US11517623
申请日：2006-09-08
申请人： Serge Magnet , Sophie Duquesne , René Delobel , Charaf Jama
发明人： Serge Magnet , Sophie Duquesne , René Delobel , Charaf Jama
IPC分类号： C08L25/02 , C08L33/04 , C08L35/02
CPC分类号： C09D125/14 , C08K3/013 , C08K5/0008 , C08L25/14 , C08L25/16 , C08L2205/02 , C09D5/185 , C09D125/16 , C08L2666/04
摘要： The present invention discloses a copolymer composition for use in or as a polymeric binder in an intumescent coating, said copolymer composition comprising a blend of a Newtonian copolymer and of a reticulated copolymer, wherein the Newtonian copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units, and wherein the reticulated copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units. The present invention further reveals a method of manufacturing an intumescent coating comprising the step of (a) dissolving a Newtonian and a reticulated copolymer in a solvent, wherein the Newtonian copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units, wherein the reticulated copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units, and wherein the solvent is selected from the group consisting of organic solvents and water, (b) optionally, adding a chlorinated paraffin to the solvent, (c) homogenizing the mixture in the solvent, wherein one or more additives selected from the group consisting of conventional reactive pigments systems, dispersants, plasticizers, defoamers, thickeners, chlorinated paraffin solvents, waxes, fillers, fibers, and anti-settling agents are added to the solvent during the homogenizing step.
摘要翻译：本发明公开了一种用于膨胀型涂料中或作为聚合物粘合剂的共聚物组合物，所述共聚物组合物包含牛顿共聚物和网状共聚物的共混物，其中牛顿共聚物由对甲基苯乙烯重复单元和2 乙基己基丙烯酸酯重复单元，并且其中网状共聚物由对甲基苯乙烯重复单元和丙烯酸2-乙基己酯重复单元组成。本发明还揭示了一种制造膨胀型涂层的方法，其包括以下步骤：（a）将牛顿和网状共聚物溶解在溶剂中，其中牛顿共聚物由对甲基苯乙烯重复单元和丙烯酸2-乙基己酯重复单元组成，其中网状共聚物由对甲基苯乙烯重复单元和丙烯酸2-乙基己酯重复单元组成，其中溶剂选自有机溶剂和水，（b）任选地，将氯代石蜡加入到溶剂中，（c）使混合物在溶剂中均化，其中将一种或多种选自常规活性颜料体系，分散剂，增塑剂，消泡剂，增稠剂，氯化石蜡溶剂，蜡，填料，纤维和抗沉降剂的添加剂加入到溶剂在均化步骤中。

8. 发明申请

US20060264591A1 Fluorine-containing compounds and their polymers useful for anti-relfection film materials and resist compositions 有权
标题翻译：含氟化合物及其聚合物可用于抗再剥离膜材料和抗蚀剂组合物
公开(公告)号：US20060264591A1
公开(公告)日：2006-11-23
申请号：US11492057
申请日：2006-07-25
申请人： Shinichi Sumida , Haruhiko Komoirya , Kazuhiko Maeda
发明人： Shinichi Sumida , Haruhiko Komoirya , Kazuhiko Maeda
IPC分类号： C08F214/18
CPC分类号： C08F20/30 , C08F14/18 , C08F20/28 , C08F216/1408 , C08F220/24 , C08F220/30 , C09D125/16 , C09D133/16 , Y10S430/108 , Y10S430/111 , C08F2/00
摘要： The invention relates to a fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, 1 is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
摘要翻译：本发明涉及由式1表示的含氟化合物，其中R 1是甲基或三氟甲基，R 2和R 3均为独立地是氢原子或含有（a）具有直链，支链或环状的碳原子数为1-25或（b）芳族烃基的烃基的基团，该基团任选地含有氟原子，氧原子和羰基键中的至少一个，1为0〜2的整数，m和n分别为1-5的整数，以满足m + n < = 6，并且当R 1，R 2和R 3 3中的至少一个为多个时，R中的至少一个 R 1，R 2，R 3和R 3可以彼此相同或不同。

9. 发明授权

US07105605B2 Polymer binder for intumescent coatings 有权
标题翻译：膨胀型涂料用聚合物粘合剂
公开(公告)号：US07105605B2
公开(公告)日：2006-09-12
申请号：US10742536
申请日：2003-12-19
申请人： Serge Magnet , Sophie Duquesne , René Delobel , Charaf Jama
发明人： Serge Magnet , Sophie Duquesne , René Delobel , Charaf Jama
IPC分类号： C08L25/16 , C08L33/08 , C08L35/02
CPC分类号： C09D125/14 , C08K3/013 , C08K5/0008 , C08L25/14 , C08L25/16 , C08L2205/02 , C09D5/185 , C09D125/16 , C08L2666/04
摘要： The present invention discloses a copolymer composition for use in or as a polymeric binder in an intumescent coating, said copolymer composition comprising a blend of a Newtonian copolymer and of a reticulated copolymer, wherein the Newtonian copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units, and wherein the reticulated copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units. The present invention further reveals a method of manufacturing an intumescent coating comprising the step of (a) dissolving a Newtonian and a reticulated copolymer in a solvent, wherein the Newtonian copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units, wherein the reticulated copolymer is comprised of p-methylstyrene repeat units and 2-ethylhexylacrylate repeat units, and wherein the solvent is selected from the group consisting of organic solvents and water, (b) optionally, adding a chlorinated paraffin to the solvent, (c) homogenizing the mixture in the solvent, wherein one or more additives selected from the group consisting of conventional reactive pigments systems, dispersants, plasticizers, defoamers, thickeners, chlorinated paraffin solvents, waxes, fillers, fibers, and anti-settling agents are added to the solvent during the homogenizing step.
摘要翻译：本发明公开了一种用于膨胀型涂料中或作为聚合物粘合剂的共聚物组合物，所述共聚物组合物包含牛顿共聚物和网状共聚物的共混物，其中牛顿共聚物由对甲基苯乙烯重复单元和2 乙基己基丙烯酸酯重复单元，并且其中网状共聚物由对甲基苯乙烯重复单元和丙烯酸2-乙基己酯重复单元组成。本发明还揭示了一种制造膨胀型涂层的方法，其包括以下步骤：（a）将牛顿和网状共聚物溶解在溶剂中，其中牛顿共聚物由对甲基苯乙烯重复单元和丙烯酸2-乙基己酯重复单元组成，其中网状共聚物由对甲基苯乙烯重复单元和丙烯酸2-乙基己酯重复单元组成，其中溶剂选自有机溶剂和水，（b）任选地，将氯代石蜡加入到溶剂中，（c）使混合物在溶剂中均化，其中将一种或多种选自常规活性颜料体系，分散剂，增塑剂，消泡剂，增稠剂，氯化石蜡溶剂，蜡，填料，纤维和抗沉降剂的添加剂加入到溶剂在均化步骤中。

10. 发明授权

US3957497A Polymeric based composition 失效
标题翻译：基于聚合物的组合物
公开(公告)号：US3957497A
公开(公告)日：1976-05-18
申请号：US95329
申请日：1970-12-04
申请人： Don N. Gray , John D. Grier
发明人： Don N. Gray , John D. Grier
IPC分类号： C03C27/00 , C04B37/00 , C04B41/50 , C04B41/51 , C08K3/00 , C09D5/24 , C09D125/16 , C03C5/02
CPC分类号： C08K3/0033 , C03C27/00 , C04B35/63432 , C04B37/005 , C04B37/008 , C04B37/025 , C04B37/028 , C04B37/045 , C04B37/047 , C04B41/5022 , C04B41/5188 , C09D125/16 , C09D5/24 , C04B2237/06 , C04B2237/062 , C04B2237/064 , C04B2237/10 , C04B2237/12 , C04B2237/123 , C04B2237/124 , C04B2237/125 , C04B2237/30 , C04B2237/32 , C04B2237/341 , C04B2237/343 , C04B2237/345 , C04B2237/346 , C04B2237/348 , C04B2237/363 , C04B2237/401 , C04B2237/402 , C04B2237/403 , C04B2237/525 , C04B2237/592 , C04B2237/64 , C04B2237/70 , C04B2237/708
摘要： There is disclosed the preparation of a polymeric based composition comprising a finely divided, particulate inorganic material dispersed in a low molecular weight, low vapor pressure, liquid having a relatively constant viscosity and thixotropic character and capable of being decomposed or pyrolyzed completely to gaseous products at a relatively low temperature without forming a carbonaceous or like residue having a deleterious effect(s) in the application of the composition to a substrate.
摘要翻译：公开了一种聚合物基组合物的制备，其包含以低分子量，低蒸气压分散的细分散的颗粒状无机材料，具有相对恒定的粘度和触变特性的液体，并能够完全分解或热解为气态产物相对较低的温度，而不形成在将组合物施用于基材中具有有害作用的碳质或类似残余物。

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