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1. 发明授权

US07834994B2 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
标题翻译：用于动态检测基板破损和移动基板未对准的传感器
公开(公告)号：US07834994B2
公开(公告)日：2010-11-16
申请号：US12255629
申请日：2008-10-21
申请人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
发明人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
IPC分类号： G01N21/00
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.
摘要翻译：提供了一种结合至少两个检测基板存在的传感器的装置和方法。在一个实施例中，描述了用于在处理系统中传送衬底的方法。该方法包括将基板定位在第一室中的末端执行器上，沿着基板行进路径使基板移动通过第一室和第二室之间的开口，并使用至少两个传感器来检测基板行进路径的相对侧至少两个传感器中的每一个限定了当边缘区域的至少一部分穿过光束路径时被引导通过衬底的相对边缘区域的光束路径。

2. 发明申请

US20090050270A1 SENSORS FOR DYNAMICALLY DETECTING SUBSTRATE BREAKAGE AND MISALIGNMENT OF A MOVING SUBSTRATE 有权
标题翻译：用于动态检测基板破损和移动基板缺失的传感器
公开(公告)号：US20090050270A1
公开(公告)日：2009-02-26
申请号：US12255629
申请日：2008-10-21
申请人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
发明人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
IPC分类号： C23F1/08 , C23C16/00 , C23C14/34 , G01B11/14 , H01L21/67
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.
摘要翻译：提供了一种结合至少两个检测基板存在的传感器的装置和方法。在一个实施例中，描述了用于在处理系统中传送衬底的方法。该方法包括将基板定位在第一室中的末端执行器上，沿着基板行进路径使基板移动通过第一室和第二室之间的开口，并使用至少两个传感器来检测基板行进路径的相对侧至少两个传感器中的每一个限定了当边缘区域的至少一部分穿过光束路径时被引导通过衬底的相对边缘区域的光束路径。

3. 发明授权

US07440091B2 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
标题翻译：用于动态检测基板破损和移动基板未对准的传感器
公开(公告)号：US07440091B2
公开(公告)日：2008-10-21
申请号：US10973116
申请日：2004-10-26
申请人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
发明人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
IPC分类号： G01N21/00
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.
摘要翻译：一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面。在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

4. 发明申请

US20060087647A1 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
标题翻译：用于动态检测基板破损和移动基板未对准的传感器
公开(公告)号：US20060087647A1
公开(公告)日：2006-04-27
申请号：US10973116
申请日：2004-10-26
申请人： William Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Larson , Makoto Inagawa , James Hoffman , Billy Leung
发明人： William Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Larson , Makoto Inagawa , James Hoffman , Billy Leung
IPC分类号： G01N21/88
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.
摘要翻译：一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面。在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

5. 发明授权

US06824343B2 Substrate support 有权
标题翻译：基材支持
公开(公告)号：US06824343B2
公开(公告)日：2004-11-30
申请号：US10084762
申请日：2002-02-22
申请人： Shinichi Kurita , Wendell T. Blonigan , Suhail Anwar , Toshio Kiyotake , Hung T. Nguyen
发明人： Shinichi Kurita , Wendell T. Blonigan , Suhail Anwar , Toshio Kiyotake , Hung T. Nguyen
IPC分类号： B65G4724
CPC分类号： H01L21/68 , H01L21/68728 , H01L21/68778 , H01L21/68792 , Y10S414/136 , Y10S414/139 , Y10S414/141
摘要： A method and apparatus for supporting a substrate is generally provided. In one aspect, an apparatus for supporting a substrate includes a support plate having a first body disposed proximate thereto. A first pushing member is radially coupled to the first body and adapted to urge the substrate in a first direction parallel to the support plate when the first body rotates. In another aspect, a load lock chamber having a substrate support that supports a substrate placed thereon includes a cooling plate that is moved to actuate at least one alignment mechanism. The alignment mechanism includes a pushing member that urges the substrate in a first direction towards a center of the support. The pushing member may additionally rotate about an axis perpendicular to the first direction.
摘要翻译：通常提供用于支撑衬底的方法和装置。在一个方面，一种用于支撑衬底的装置包括具有靠近其设置的第一主体的支撑板。第一推动构件径向耦合到第一主体并且适于在第一主体旋转时沿平行于支撑板的第一方向推动基板。在另一方面，具有支撑其上放置的基板的基板支撑件的装载锁定室包括移动以致动至少一个对准机构的冷却板。对准机构包括推动构件，其沿朝向支撑件的中心的第一方向推动基板。推动构件可以另外围绕垂直于第一方向的轴旋转。

6. 发明申请

US20070256637A1 METHODS AND APPARATUS FOR USING A REINFORCED DIFFUSER IN SUBSTRATE PROCESSING 审中-公开
标题翻译：在基板加工中使用增强扩散器的方法和装置
公开(公告)号：US20070256637A1
公开(公告)日：2007-11-08
申请号：US11741745
申请日：2007-04-28
申请人： William Bagley , Toshio Kiyotake , Masahiko Kowaka
发明人： William Bagley , Toshio Kiyotake , Masahiko Kowaka
IPC分类号： C23C16/00
CPC分类号： C23C16/45565
摘要： The invention provides methods and apparatus for using a reinforced gas diffuser in substrate processing. A gas diffuser for use in a PECVD processes includes an aluminum plate with reinforcement material embedded within the aluminum plate. The reinforcement material is adapted to support the aluminum plate and maintain a flatness of the aluminum plate. Numerous other aspects are disclosed.
摘要翻译：本发明提供了在衬底处理中使用增强气体扩散器的方法和装置。用于PECVD工艺的气体扩散器包括铝板，其具有嵌入在铝板内的增强材料。加强材料适于支撑铝板并保持铝板的平整度。公开了许多其他方面。

7. 发明申请

US20050220604A1 Substrate support bushing 有权
标题翻译：基板支撑衬套
公开(公告)号：US20050220604A1
公开(公告)日：2005-10-06
申请号：US11044245
申请日：2005-01-27
申请人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
发明人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
IPC分类号： H01L21/68 , B65G49/06 , C03C17/00 , C23C16/458 , F16C29/00 , F16C29/04 , H01L21/00 , H01L21/205 , H01L21/683 , G01V8/00
CPC分类号： F16C29/046 , B65G49/061 , B65G2249/02 , C03C17/002 , C23C16/4584 , F16C29/045 , H01L21/00
摘要： An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
摘要翻译：提供了一种用于在处理室内支撑衬底的装置。在一个方面，提供了一种基板支撑构件，其包括具有穿过其中形成的孔的壳体，至少部分地设置在孔内的支撑销和围绕壳体设置的多个轴承元件。在一个方面，轴承元件包括具有穿过其形成的中心孔的辊，外形轮廓和至少部分地设置穿过中心孔的轴。在另一方面，轴承元件包括球组件，该球组件包括较大球形构件和围绕较大球形构件布置的四个较小球形构件。

8. 发明授权

US08216422B2 Substrate support bushing 有权
标题翻译：基板支撑衬套
公开(公告)号：US08216422B2
公开(公告)日：2012-07-10
申请号：US11044245
申请日：2005-01-27
申请人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
发明人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
IPC分类号： C23C16/00 , C23C16/458 , H01L21/3065 , G01V8/00
CPC分类号： F16C29/046 , B65G49/061 , B65G2249/02 , C03C17/002 , C23C16/4584 , F16C29/045 , H01L21/00
摘要： An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
摘要翻译：提供了一种用于在处理室内支撑衬底的装置。在一个方面，提供了一种基板支撑构件，其包括具有穿过其中形成的孔的壳体，至少部分地设置在孔内的支撑销和围绕壳体设置的多个轴承元件。在一个方面，轴承元件包括具有穿过其形成的中心孔的辊，外形轮廓和至少部分地设置穿过中心孔的轴。在另一方面，轴承元件包括球组件，该球组件包括较大球形构件和围绕较大球形构件布置的四个较小球形构件。

9. 发明申请

US20050180737A1 Substrate support bushing 有权
公开(公告)号：US20050180737A1
公开(公告)日：2005-08-18
申请号：US10779130
申请日：2004-02-12
申请人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
发明人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
IPC分类号： H01L21/68 , B65G49/06 , C03C17/00 , C23C16/458 , F16C29/00 , F16C29/04 , H01L21/00 , H01L21/205 , H01L21/683 , F26B3/30
CPC分类号： F16C29/046 , B65G49/061 , B65G2249/02 , C03C17/002 , C23C16/4584 , F16C29/045 , H01L21/00
摘要： An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.

10. 发明授权

US08033245B2 Substrate support bushing 有权
标题翻译：基板支撑衬套
公开(公告)号：US08033245B2
公开(公告)日：2011-10-11
申请号：US10779130
申请日：2004-02-12
申请人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
发明人： Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
IPC分类号： C23C16/50 , C23C16/503 , C23C16/505 , C23C16/458 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22 , F16C29/02 , F16C19/00 , F16C19/50 , F16C43/06 , F16C33/38
CPC分类号： F16C29/046 , B65G49/061 , B65G2249/02 , C03C17/002 , C23C16/4584 , F16C29/045 , H01L21/00
摘要： An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
摘要翻译：提供了一种用于在处理室内支撑衬底的装置。在一个方面，提供了一种基板支撑构件，其包括具有穿过其中形成的孔的壳体，至少部分地设置在孔内的支撑销和围绕壳体设置的多个轴承元件。在一个方面，轴承元件包括具有穿过其形成的中心孔的辊，外形轮廓和至少部分地设置穿过中心孔的轴。在另一方面，轴承元件包括球组件，该球组件包括较大球形构件和围绕较大球形构件布置的四个较小球形构件。

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