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    • 3. 发明申请
    • Method for fabricating semiconductor device
    • 制造半导体器件的方法
    • US20060035418A1
    • 2006-02-16
    • US11187958
    • 2005-07-25
    • Koji YoshidaKeita TakahashiFumihiko NoroMasatoshi AraiNobuyoshi Takahashi
    • Koji YoshidaKeita TakahashiFumihiko NoroMasatoshi AraiNobuyoshi Takahashi
    • H01L21/84H01L21/00
    • H01L27/115H01L27/11568
    • First, on a semiconductor region of a first conductivity type, a trapping film is formed which stores information by accumulating charges. Then, the trapping film is formed with a plurality of openings, and impurity ions of a second conductivity type are implanted into the semiconductor region from the formed openings, thereby forming a plurality of diffused layers of the second conductivity type in portions of the semiconductor region located below the openings, respectively. An insulating film is formed to cover edges of the trapping film located toward the openings, and then the semiconductor region is subjected to a thermal process in an atmosphere containing oxygen to oxidize upper portions of the diffused layers. Thereby, insulating oxide films are formed in the upper portions of the diffused layers, respectively. Subsequently, a conductive film is formed over the trapping film including the edges thereof to form an electrode.
    • 首先,在第一导电类型的半导体区域上,形成通过累积电荷来存储信息的捕获膜。 然后,捕获膜形成有多个开口,并且第二导电类型的杂质离子从形成的开口注入到半导体区域中,从而在半导体区域的部分中形成多个第二导电类型的扩散层 分别位于开口下方。 形成绝缘膜以覆盖位于开口的捕获膜的边缘,然后在含氧气氛中对半导体区域进行热处理,以氧化扩散层的上部。 因此,绝缘氧化膜分别形成在扩散层的上部。 随后,在包括其边缘的捕获膜上形成导电膜以形成电极。
    • 4. 发明授权
    • Method for fabricating semiconductor device
    • 制造半导体器件的方法
    • US07951679B2
    • 2011-05-31
    • US11187958
    • 2005-07-25
    • Koji YoshidaKeita TakahashiFumihiko NoroMasatoshi AraiNobuyoshi Takahashi
    • Koji YoshidaKeita TakahashiFumihiko NoroMasatoshi AraiNobuyoshi Takahashi
    • H01L21/336
    • H01L27/115H01L27/11568
    • First, on a semiconductor region of a first conductivity type, a trapping film is formed which stores information by accumulating charges. Then, the trapping film is formed with a plurality of openings, and impurity ions of a second conductivity type are implanted into the semiconductor region from the formed openings, thereby forming a plurality of diffused layers of the second conductivity type in portions of the semiconductor region located below the openings, respectively. An insulating film is formed to cover edges of the trapping film located toward the openings, and then the semiconductor region is subjected to a thermal process in an atmosphere containing oxygen to oxidize upper portions of the diffused layers. Thereby, insulating oxide films are formed in the upper portions of the diffused layers, respectively. Subsequently, a conductive film is formed over the trapping film including the edges thereof to form an electrode.
    • 首先,在第一导电类型的半导体区域上,形成通过累积电荷来存储信息的捕获膜。 然后,捕获膜形成有多个开口,并且第二导电类型的杂质离子从形成的开口注入到半导体区域中,从而在半导体区域的部分中形成多个第二导电类型的扩散层 分别位于开口下方。 形成绝缘膜以覆盖位于开口的捕获膜的边缘,然后在含氧气氛中对半导体区域进行热处理,以氧化扩散层的上部。 因此,绝缘氧化膜分别形成在扩散层的上部。 随后,在包括其边缘的捕获膜上形成导电膜以形成电极。
    • 5. 发明申请
    • Semiconductor memory device and method for manufacturing the same
    • 半导体存储器件及其制造方法
    • US20070152265A1
    • 2007-07-05
    • US11637939
    • 2006-12-13
    • Yoshiya MoriyamaYuji HaradaKeita Takahashi
    • Yoshiya MoriyamaYuji HaradaKeita Takahashi
    • H01L29/792
    • H01L27/115H01L27/11521H01L27/11568
    • A semiconductor memory device includes: a memory cell array region formed in a semiconductor region of a first conductivity type and having a plurality of memory cells arranged in rows and columns; a plurality of word lines each of which collectively connects ones of the plurality of memory cells aligned in the same row; and a protective diode region formed in the semiconductor region to be separated from the memory cell array region. In the protective diode region, a protective diode element is constructed by making a junction between a first diffusion layer of a second conductivity type formed in the upper portion of the semiconductor region and the semiconductor region. Each of the word lines extends to the protective diode region and is brought into direct connection to the first diffusion layer of the second conductivity type, thereby making electrical connection to the protective diode element.
    • 半导体存储器件包括:存储单元阵列区域,形成在第一导电类型的半导体区域中,并具有以行和列排列的多个存储单元; 多个字线,其各自共同连接在同一行中排列的多个存储单元中的一个; 以及形成在半导体区域中以与存储单元阵列区域分离的保护二极管区域。 在保护二极管区域中,通过在半导体区域的上部形成的第二导电类型的第一扩散层与半导体区域之间形成接合来构成保护二极管元件。 每条字线延伸到保护二极管区,并与第二导电类型的第一扩散层直接连接,从而与保护二极管元件电连接。
    • 6. 发明授权
    • Semiconductor memory device and method for manufacturing the same
    • 半导体存储器件及其制造方法
    • US07474548B2
    • 2009-01-06
    • US11637939
    • 2006-12-13
    • Yoshiya MoriyamaYuji HaradaKeita Takahashi
    • Yoshiya MoriyamaYuji HaradaKeita Takahashi
    • G11C5/06
    • H01L27/115H01L27/11521H01L27/11568
    • A semiconductor memory device includes: a memory cell array region formed in a semiconductor region of a first conductivity type and having a plurality of memory cells arranged in rows and columns; a plurality of word lines each of which collectively connects ones of the plurality of memory cells aligned in the same row; and a protective diode region formed in the semiconductor region to be separated from the memory cell array region. In the protective diode region, a protective diode element is constructed by making a junction between a first diffusion layer of a second conductivity type formed in the upper portion of the semiconductor region and the semiconductor region. Each of the word lines extends to the protective diode region and is brought into direct connection to the first diffusion layer of the second conductivity type, thereby making electrical connection to the protective diode element.
    • 半导体存储器件包括:存储单元阵列区域,形成在第一导电类型的半导体区域中,并具有以行和列排列的多个存储单元; 多个字线,其各自共同连接在同一行中排列的多个存储单元中的一个; 以及形成在半导体区域中以与存储单元阵列区域分离的保护二极管区域。 在保护二极管区域中,通过在半导体区域的上部形成的第二导电类型的第一扩散层与半导体区域之间形成接合来构成保护二极管元件。 每条字线延伸到保护二极管区,并与第二导电类型的第一扩散层直接连接,从而与保护二极管元件电连接。