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    • 9. 发明授权
    • Electrostatic chuck with reduced arcing
    • 静电卡盘减少电弧
    • US08270141B2
    • 2012-09-18
    • US12884967
    • 2010-09-17
    • Michael D. WillwerthDavid PalagashviliDouglas A. Buchberger, Jr.Michael G. Chafin
    • Michael D. WillwerthDavid PalagashviliDouglas A. Buchberger, Jr.Michael G. Chafin
    • H02T23/00
    • H01L21/6833Y10T279/23
    • Embodiments of electrostatic chucks are provided herein. In some embodiments, an electrostatic chuck may include a body having a notched upper peripheral edge, defined by a first surface perpendicular to a body sidewall and a stepped second surface disposed between the first surface and a body upper surface, and a plurality of holes disposed through the body along the first surface; a plurality of fasteners disposed through the plurality of holes to couple the body to a base disposed beneath the body; a dielectric member disposed above the body upper surface to electrostatically retain a substrate; an insulator ring disposed about the body within the notched upper peripheral edge and having a stepped inner sidewall that mates with the stepped second surface to define a non-linear interface therebetween; and an edge ring disposed over the insulator ring, the non-linear interface limiting arcing between the edge ring and the fastener.
    • 本文提供了静电卡盘的实施例。 在一些实施例中,静电吸盘可以包括具有切口的上周边边缘的主体,该顶部边缘由垂直于主体侧壁的第一表面和设置在第一表面和主体上表面之间的阶梯状第二表面限定, 沿着第一面穿过身体; 多个紧固件,其布置成穿过所述多个孔,以将所述主体连接到设置在所述主体下方的底座; 设置在所述主体上表面上方的电介质部件,以静电保持基板; 绝缘体环,其围绕所述主体设置在所述凹口的上周边边缘内并且具有与所述阶梯状的第二表面配合的阶梯状的内侧壁,以在其间界定非线性界面; 以及设置在所述绝缘体环上的边缘环,所述非线性界面限制所述边缘环和所述紧固件之间的电弧。