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    • 4. 发明申请
    • MONITORING CRANE COMPONENT OVERSTRESS
    • 监控起重机组件超大
    • US20100044332A1
    • 2010-02-25
    • US12196805
    • 2008-08-22
    • John F. Cameron
    • John F. Cameron
    • B66C13/16
    • B66C15/065B66C23/905
    • In a method for monitoring overstress conditions experienced by a crane component, a wireless signal is received. The wireless signal is indicative of an overstress condition experienced by a crane of which the crane component constitutes an assembled portion. In response to receiving the wireless signal, a record of the overstress condition is stored in a storage module mechanically coupled with the crane component. Information from the record is provided via a wireless communication to facilitate monitoring of occurrence of overstress conditions experienced by the crane component.
    • 在用于监视起重机部件所经历的过应力条件的方法中,接收无线信号。 无线信号表示起重机部件构成组装部分的起重机所经历的过应力状态。 响应于接收到无线信号,过载状态的记录被存储在与起重机部件机械耦合的存储模块中。 来自记录的信息通过无线通信提供,以便于监测起重机部件经历的过应力条件的发生。
    • 5. 发明申请
    • AUTOMATED RECORDATION OF CRANE INSPECTION ACTIVITY
    • 自动记录起重机检查活动
    • US20100039319A1
    • 2010-02-18
    • US12411064
    • 2009-03-25
    • John F. Cameron
    • John F. Cameron
    • G01S1/00G06F17/30
    • B66C13/16
    • In a method for creating a record of crane inspection activity, a wireless inspection communication between a component monitor and a component information unit is initiated in response to a crane inspection activity. The component information unit is mechanically coupled with a crane component. An inspection record related to the crane component is automatically storing within the component monitor. The inspection record includes a geostamp and a timestamp associated with the inspection communication. The geostamp and timestamp are stored in the inspection record in conjunction with a component identification that is associated the crane component and that is received from the component information unit as part of the wireless inspection communication.
    • 在用于创建起重机检查活动的记录的方法中,响应于起重机检查活动而启动部件监视器和部件信息单元之间的无线检查通信。 部件信息单元与起重机部件机械联接。 与起重机部件相关的检查记录自动存储在部件监视器内。 检查记录包括地理标记和与检查通信相关联的时间戳。 地理标记和时间戳与作为无线检测通信的一部分的从起重机部件相关联并从部件信息单元接收的部件标识结合存储在检查记录中。
    • 7. 发明授权
    • Electrostatic chuck with fluid flow regulator
    • 带流体流量调节器的静电吸盘
    • US5883778A
    • 1999-03-16
    • US503790
    • 1995-07-18
    • Semyon SherstinskyJohn F. CameronShamouil ShamouilianManoocher BirangAlfred MakSimon W. TamRobert E. Ryan
    • Semyon SherstinskyJohn F. CameronShamouil ShamouilianManoocher BirangAlfred MakSimon W. TamRobert E. Ryan
    • B23Q3/15C23C16/458H01L21/00H01L21/683H02N13/00
    • H02N13/00C23C16/4586H01L21/67109H01L21/6831H01L21/6833Y10T279/23
    • An electrostatic chuck 20 of the present invention is capable of maintaining substantially uniform temperatures across a substrate 30. The chuck 20 comprises an electrostatic member 35 that includes (i) an insulator 45 covering an electrode 40, (ii) a substantially planar and conformal contact surface 50 capable of conforming to a substrate 30, and (iii) conduits 105 terminating at the contact surface 50 for providing heat transfer fluid to the contact surface 50. Application of a voltage to the electrode 40 of the electrostatic member 35 electrostatically holds the substrate 30 on the conformal contact surface 50 to define an outer periphery 110 having (1) leaking portions 115 where heat transfer fluid leaks out, and (2) sealed portions 130 where heat transfer fluid substantially does not leak out. A fluid flow regulator 135 is provided for flowing heat transfer fluid at different flow rates through the conduits 105 in the electrostatic member 35 to provide (i) first flow rates of heat transfer fluid through the conduits 105 adjacent to the sealed portions 130 of the outer periphery 110 of the electrostatic member 35, and (ii) second flow rates of heat transfer fluid through the conduits 105 adjacent to the leaking portions 115, the second flow rates being higher than the first flow rates, to maintain substantially uniform temperatures across the substrate 30 held on the chuck 20.
    • 本发明的静电卡盘20能够在基板30上保持基本均匀的温度。卡盘20包括静电部件35,静电部件35包括(i)覆盖电极40的绝缘体45,(ii)基本上平面和保形接触 能够与衬底30相符的表面50,以及(iii)终止于接触表面50处的导管105,用于将热传递流体提供给接触表面50.施加电压到静电构件35的电极40,静电地保持衬底 30,以形成具有(1)泄漏部分115(其中传热流体泄漏)的外周110,以及(2)传热流体基本上不会泄漏的密封部分130。 提供流体流量调节器135,用于使不同流速的传热流体流过静电构件35中的管道105,以提供(i)传热流体通过与外部的密封部分130相邻的导管105的第一流量 静电构件35的周边110,以及(ii)通过与泄漏部分115相邻的导管105的传热流体的第二流量,第二流速高于第一流速,以保持基本上均匀的温度 30夹在卡盘20上。
    • 10. 发明授权
    • Apparatus for measuring a departure from flatness or straightness of a
nominally-plane mirror for a precision X-Y movable-stage
    • 用于测量与用于精密X-Y可移动台的标称平面镜的平直度或平直度偏差的装置
    • US5363196A
    • 1994-11-08
    • US819424
    • 1992-01-10
    • John F. Cameron
    • John F. Cameron
    • G01B11/30G03F7/20G01B9/02
    • G03F7/70691G01B11/306
    • By providing redundant interferometer laser-metering devices, either one of which is capable by itself of providing measurement data of the angular value .theta. of rotation of the X-Y movable stage of a wafer stepper about a vertical Z axis for use by a computer-controlled servo devices that controls the operation of the X-Y movable stage, the servo devices, in a calibration mode, may receive data of specific measurements defining the respective values of undesired departures from flatness or straightness of the nominally-plane mirror surfaces of the the X-Y movable stage. These specific measurements, which may be made quickly at any time without disturbing the stage's mirrors, will also include those departures induced only at the point of use of the mirror and permit the stored control data used by the computer-controlled servo devices to be modified in order to compensate for these undesired departures from flatness or straightness of the nominally-plane mirror surfaces of the X-Y movable stage.
    • 通过提供冗余的干涉仪激光计量装置,其中之一本身能够提供晶圆步进器的XY可移动台的旋转角度值θ的关于垂直Z轴的测量数据,以供计算机控制的伺服 控制XY移动台(伺服装置)在校准模式中的操作的装置可以接收特定测量数据,该数据限定与XY可移动台的标称平面镜面的平坦度或平直度不相符的偏差值 。 可以在任何时候快速进行而不干扰载物台的反射镜的这些具体测量值也将包括仅在反射镜使用时引起的偏差,并允许由计算机控制的伺服装置使用的存储的控制数据被修改 以便补偿这些与XY可移动台的标称面镜面的平坦度或平直度不一致的偏离。