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1. 发明授权

US07405402B1 Method and apparatus for aberration-insensitive electron beam imaging 有权
标题翻译：用于像差不敏感电子束成像的方法和装置
公开(公告)号：US07405402B1
公开(公告)日：2008-07-29
申请号：US11360930
申请日：2006-02-22
申请人： Srinivas Vedula , Amir Azordegan , Laurence Hordon , Alan D. Brodie , Gian Francesco Lorusso , Takuji Tada
发明人： Srinivas Vedula , Amir Azordegan , Laurence Hordon , Alan D. Brodie , Gian Francesco Lorusso , Takuji Tada
IPC分类号： G01N23/00 , G21K7/00 , H01J3/14
CPC分类号： G01N23/04 , H01J37/21 , H01J37/28 , H01J2237/0492 , H01J2237/153 , H01J2237/2817
摘要： One embodiment relates to an electron beam apparatus for automated imaging of a substrate surface. An electron source is configured to emit electrons, and a gun lens is configured to focus the electrons emitted by the electron source so as to form an electron beam. A condenser lens system is configured to receive the electron beam and to reduce its numerical aperture to an ultra-low numerical aperture. An objective lens is configured to focus the ultra-low numerical aperture beam onto the substrate surface. Other embodiments are also disclosed.
摘要翻译：一个实施例涉及用于衬底表面的自动成像的电子束装置。电子源被配置为发射电子，并且枪形透镜被配置为聚焦由电子源发射的电子以形成电子束。聚光透镜系统被配置为接收电子束并且将其数值孔径减小到超低数值孔径。物镜被配置为将超低数值孔径光束聚焦到衬底表面上。还公开了其他实施例。

2. 发明申请

US20120153177A1 RADIOGRAPHIC APPARATUS AND RADIOGRAPHIC SYSTEM 审中-公开
标题翻译：放射学设备和放射学系统
公开(公告)号：US20120153177A1
公开(公告)日：2012-06-21
申请号：US13306177
申请日：2011-11-29
申请人： Naoto Iwakiri , Takuji Tada
发明人： Naoto Iwakiri , Takuji Tada
IPC分类号： G01T1/24 , G01T1/16
CPC分类号： A61B6/4291 , A61B6/4021 , A61B6/484
摘要： A radiographic apparatus includes a first grating unit, a grating pattern unit, a radiological image detector. The first grating unit has a plurality of radiation shield units that shields the radiation emitted from the radiation source and a substrate on which the first radiation shield units are arranged and which enables the radiation emitted from the radiation source to penetrate therethrough. The grating pattern unit has a period that substantially coincides with a pattern period of a radiological image. The radiological image detector detects the radiological image masked by the grating pattern unit and has a plurality of pixels converting and accumulating the radiation into charges and a substrate. A thermal expansion coefficient of the substrate of the first grating unit is the substantially same as a thermal expansion coefficient of the substrate of the radiological image detector.
摘要翻译：放射线照相设备包括第一光栅单元，光栅图案单元，放射图像检测器。第一光栅单元具有屏蔽从辐射源发出的辐射的多个辐射屏蔽单元和布置有第一辐射屏蔽单元的基板，并且使得能够从辐射源发射的辐射穿过其中。光栅图案单元具有与放射图像的图案周期基本一致的周期。放射线图像检测器检测由光栅图案单元掩蔽的放射图像，并且具有将辐射转换并积累成电荷的多个像素和基板。第一光栅单元的基板的热膨胀系数与放射线图像检测器的基板的热膨胀系数基本相同。

3. 发明授权

US09001969B2 Radiation imaging system 有权
标题翻译：辐射成像系统
公开(公告)号：US09001969B2
公开(公告)日：2015-04-07
申请号：US13522010
申请日：2011-02-02
申请人： Dai Murakoshi , Takuji Tada , Toshitaka Agano , Kenji Takahashi
发明人： Dai Murakoshi , Takuji Tada , Toshitaka Agano , Kenji Takahashi
IPC分类号： G01N23/00 , G01N23/04 , A61B6/02 , A61B6/00 , G21K1/06 , A61B6/03 , A61B6/06
CPC分类号： A61B6/484 , A61B6/022 , A61B6/03 , A61B6/06 , A61B6/4233 , A61B6/4291 , A61B6/4441 , A61B6/4464 , A61B6/502 , A61B6/5241 , G21K1/06 , G21K1/067 , G21K2201/06 , G21K2207/005
摘要： An X-ray imaging system is provided with an X-ray source (11), first and second absorption gratings (31, 32), and a flat panel detector (FPD) (30), and obtains a phase contrast image of an object H by performing imaging while moving the second absorption grating (32) in x direction relative to the first absorption grating (31). The following mathematical expression is satisfied where p1′ denotes a period of a first pattern image at a position of the second absorption grating (32), and p2′ denotes a substantial grating pitch of the second absorption grating (32), and DX denotes a dimension, in the x-direction, of an X-ray imaging area of each pixel of the FPD (30). Here, “n” denotes a positive integer. DX≠n×(p1′×p2′)/|p1′−p2′|
摘要翻译： X射线成像系统设置有X射线源（11），第一和第二吸收光栅（31,32）和平板检测器（FPD）（30），并且获得物体的相位对比图像 H，通过在相对于第一吸收光栅（31）的x方向上移动第二吸收光栅（32）的同时执行成像。满足以下数学表达式，其中p1'表示第二吸收光栅（32）的位置处的第一图案图像的周期，p2'表示第二吸收光栅（32）的实质光栅间距，DX表示在所述FPD（30）的每个像素的X射线成像区域的x方向上的尺寸。这里，“n”表示正整数。 DX≠n×（p1'×p2'）/ | p1'-p2'|

4. 发明授权

US08451975B2 Radiographic system, radiographic method and computer readable medium 失效
标题翻译：射线照相系统，射线照相方法和计算机可读介质
公开(公告)号：US08451975B2
公开(公告)日：2013-05-28
申请号：US13035551
申请日：2011-02-25
申请人： Takuji Tada
发明人： Takuji Tada
IPC分类号： G01D18/00 , G01N23/201
CPC分类号： G01N23/04 , A61B6/4291 , A61B6/4464 , A61B6/484 , A61B6/583 , G01N2223/1016 , G01N2223/3035
摘要： A radiographic system which detects a radiation image transmitted through a subject with a radiation image detector and generates a phase contrast image of the subject, includes: a calculation section that calculates a distribution of refraction angles of radiation incident on the radiation image detector and generates the phase contrast image on the basis of the distribution of refraction angles; and a storage section that stores a correction coefficient of each pixel for making sensitivities of pixels equal. The calculation section performs sensitivity correction on a refraction angle of radiation incident on each pixel of the radiation image detector, which is calculated by imaging the subject, using the correction coefficient of the pixel stored in the storage section and generates the phase contrast image of the subject on the basis of the distribution of corrected refraction angles.
摘要翻译：一种放射线照相系统，其利用放射线图像检测器检测通过被检体透射的放射线图像，生成被检体的相位差图像，包括：计算部，其计算入射在所述放射线图像检测器上的放射线的折射角的分布，基于折射角分布的相位对比图像; 以及存储部，其存储用于使像素的灵敏度相等的每个像素的校正系数。计算部使用存储在存储部中的像素的校正系数，对入射到放射线图像检测器的各像素上的放射线的折射角进行灵敏度校正，该折射角通过对被摄体成像而计算出，并生成相位差图像在校正折射角分布的基础上进行。

5. 发明申请

US20130010926A1 RADIATION DETECTION DEVICE, RADIOGRAPHIC APPARATUS AND RADIOGRAPHIC SYSTEM 审中-公开
标题翻译：辐射检测装置，放射性设备和放射性系统
公开(公告)号：US20130010926A1
公开(公告)日：2013-01-10
申请号：US13634861
申请日：2011-03-29
申请人： Takuji Tada
发明人： Takuji Tada
IPC分类号： G21K1/06 , G01N23/04
CPC分类号： A61B6/06 , A61B6/4291 , A61B6/484 , G21K2201/06 , G21K2207/005
摘要： A radiographic system includes an X-ray source, a first transmission type grating, a second transmission type grating, a scanning mechanism, and a flat panel detector, and an arithmetic processing section. The first transmission type grating is constituted by connecting a plurality of first grating pieces in a first direction, and the second transmission type grating is constituted by connecting a plurality of second grating pieces in the first direction. In projection onto the flat panel detector with the focus of the X-ray source as a viewpoint, at least one pixel is interposed between each pixel of the flat panel detector onto which a connection point of two adjacent first grating pieces is projected and each pixel onto which a connection portion of two adjacent second grating pieces is projected.
摘要翻译：射线照相系统包括X射线源，第一透射型光栅，第二透射型光栅，扫描机构和平板检测器，以及算术处理部。第一透射型光栅通过沿第一方向连接多个第一光栅片而构成，第二透射型光栅通过沿第一方向连接多个第二光栅片而构成。在将X射线源的焦点作为视点投影到平板检测器上时，在平板检测器的每个像素之间插入至少一个像素，其中两个相邻的第一光栅片的连接点投射到其上，并且每个像素两个相邻的第二光栅片的连接部分投射到其上。

6. 发明申请

US20100292538A1 ENDOSCOPE 审中-公开
公开(公告)号：US20100292538A1
公开(公告)日：2010-11-18
申请号：US12777571
申请日：2010-05-11
申请人： Hidetoshi HIRATA , Tsuyoshi Ashida , Takayuki Nakamura , Osamu Kuroda , Yasunori Ohta , Kazuyoshi Hara , Kazumi Koike , Takuji Tada , Shinichi Yamakawa
发明人： Hidetoshi HIRATA , Tsuyoshi Ashida , Takayuki Nakamura , Osamu Kuroda , Yasunori Ohta , Kazuyoshi Hara , Kazumi Koike , Takuji Tada , Shinichi Yamakawa
IPC分类号： A61B1/00
CPC分类号： A61B1/00071 , A61B1/0008 , A61B1/05 , A61B1/051 , A61B1/0669 , A61B1/128 , G02B23/2461 , G02B23/2476
摘要： A front end rigid portion constitutes a front end of an endoscope insertion unit in an endoscope. The front end rigid portion is provided with an illumination optical system irradiating an observation target area with illumination light and an imaging optical system having an imaging element imaging the observation target area. The endoscope includes a heat emission member which is connected to the front end rigid portion and extends in the longitudinal direction of the endoscope insertion unit. The heat emission member is formed by mixing fiber-piece-shaped fillers with a resin material.
摘要翻译：前端刚性部构成内窥镜中的内窥镜插入单元的前端。前端刚性部分设有照明光学系统，用照明光照射观察目标区域，以及成像光学系统，其具有对观察目标区域成像的成像元件。内窥镜包括与前端刚性部连接并沿内窥镜插入单元的长度方向延伸的散热构件。散热构件通过将纤维片状填料与树脂材料混合而形成。

7. 发明授权

US08591108B2 Radiation imaging system and apparatus and method for detecting defective pixel 失效
标题翻译：用于检测缺陷像素的放射成像系统及其装置和方法
公开(公告)号：US08591108B2
公开(公告)日：2013-11-26
申请号：US13016759
申请日：2011-01-28
申请人： Takuji Tada
发明人： Takuji Tada
IPC分类号： G01D18/00
CPC分类号： G01T7/005 , A61B6/00 , A61B6/4021 , A61B6/4291 , A61B6/484 , A61B6/585 , G01T1/2985
摘要： An X-ray imaging system includes an X-ray source, first and second absorption gratings, and an FPD. The first absorption grating passes X-ray emitted from the X-ray source to form a G1 image. The second absorption grating modulates intensity of the G1 image at each of relative positions to form two or more fringe images. The relative positions differ in phase with respect to a period pattern of the G1 image. The FPD detects two or more frames of image data of the fringe images. A defective pixel detector reads two or more frames of image data stored in a memory and obtains a characteristic value of an intensity modulated signal on a pixel-by-pixel basis based on the read image data. The defective pixel detector detects a defective pixel based on the characteristic value obtained.
摘要翻译： X射线成像系统包括X射线源，第一和第二吸收光栅以及FPD。第一吸收光栅通过从X射线源发射的X射线以形成G1图像。第二吸收光栅在每个相对位置处调制G1图像的强度，以形成两个或更多条纹图像。相对于G1图像的周期图案，相对位置不同。 FPD检测边缘图像的两帧或多帧图像数据。缺陷像素检测器读取存储在存储器中的两个或更多个图像数据帧，并且基于读取的图像数据逐像素地获得强度调制信号的特性值。缺陷像素检测器基于获得的特征值来检测缺陷像素。

8. 发明申请

US20120288056A1 RADIATION IMAGING SYSTEM 有权
标题翻译：辐射成像系统
公开(公告)号：US20120288056A1
公开(公告)日：2012-11-15
申请号：US13522010
申请日：2011-02-02
申请人： Dai Murakoshi , Takuji Tada , Toshitaka Agano , Kenji Takahashi
发明人： Dai Murakoshi , Takuji Tada , Toshitaka Agano , Kenji Takahashi
IPC分类号： G01N23/04 , A61B6/00
CPC分类号： A61B6/484 , A61B6/022 , A61B6/03 , A61B6/06 , A61B6/4233 , A61B6/4291 , A61B6/4441 , A61B6/4464 , A61B6/502 , A61B6/5241 , G21K1/06 , G21K1/067 , G21K2201/06 , G21K2207/005
摘要： An X-ray imaging system is provided with an X-ray source (11), first and second absorption gratings (31, 32), and a flat panel detector (FPD) (30), and obtains a phase contrast image of an object H by performing imaging while moving the second absorption grating (32) in x direction relative to the first absorption grating (31). The following mathematical expression is satisfied where p1′ denotes a period of a first pattern image at a position of the second absorption grating (32), and p2′ denotes a substantial grating pitch of the second absorption grating (32), and DX denotes a dimension, in the x-direction, of an X-ray imaging area of each pixel of the FPD (30). Here, “n” denotes a positive integer. DX≠n×(p1′×p2′)/|p1′−p2′|
摘要翻译： X射线成像系统设置有X射线源（11），第一和第二吸收光栅（31,32）和平板检测器（FPD）（30），并且获得物体的相位对比图像 H，通过在相对于第一吸收光栅（31）的x方向上移动第二吸收光栅（32）的同时执行成像。满足以下数学表达式，其中p1'表示第二吸收光栅（32）的位置处的第一图案图像的周期，p2'表示第二吸收光栅（32）的实质光栅间距，DX表示在所述FPD（30）的每个像素的X射线成像区域的x方向上的尺寸。这里，n表示正整数。 DX≠n×（p1'×p2'）/ | p1'-p2'|

9. 发明申请

US20120163554A1 RADIOLOGICAL IMAGE DETECTION APPARATUS, RADIOGRAPHIC APPARATUS AND RADIOGRAPHIC SYSTEM 审中-公开
标题翻译：放射图像检测装置，放射性装置和放射性系统
公开(公告)号：US20120163554A1
公开(公告)日：2012-06-28
申请号：US13306305
申请日：2011-11-29
申请人： Takuji Tada
发明人： Takuji Tada
IPC分类号： G21K1/10
CPC分类号： A61B6/4233 , A61B5/45 , A61B6/06 , A61B6/4021 , A61B6/4035 , A61B6/4291 , A61B6/4452 , A61B6/4464 , A61B6/484 , A61B6/502
摘要： A radiological image detection apparatus includes a first grating unit, a grating pattern unit, a radiological image detector, and an anti-scatter grating. The grating pattern unit has a period that substantially coincides with a pattern period of a radiological image formed by radiation having passed through the first grating unit. The radiological image detector detects the radiological image masked by the grating pattern unit. The anti-scatter grating is arranged on a path of the radiation incident onto the radiological image detector and removes scattered radiation. A smoothing process is performed for at least one of a surface and a backside of the anti-scatter grating intersecting with a traveling direction of the radiation.
摘要翻译：放射线图像检测装置包括第一光栅单元，光栅图案单元，放射图像检测器和防散射光栅。光栅图案单元具有与通过第一光栅单元的辐射形成的放射线图像的图案周期基本一致的周期。放射线图像检测器检测由光栅图案单元掩蔽的放射图像。防散射光栅布置在入射到放射图像检测器上的辐射的路径上，并去除散射的辐射。对与辐射的行进方向相交的防散射光栅的表面和背面中的至少一个进行平滑处理。

10. 发明授权

US08175373B2 Use of design information and defect image information in defect classification 有权
标题翻译：在缺陷分类中使用设计信息和缺陷图像信息
公开(公告)号：US08175373B2
公开(公告)日：2012-05-08
申请号：US12371863
申请日：2009-02-16
申请人： Gordon Abbott , Christophe Fouquet , Ori Tadmor , Takuji Tada
发明人： Gordon Abbott , Christophe Fouquet , Ori Tadmor , Takuji Tada
IPC分类号： G06K9/00
CPC分类号： G06T7/0006 , G06K2209/19 , G06T2207/10061 , G06T2207/30148
摘要： Defects observed by imaging tools may be classified by automatic comparison of features observed in a defect image with design information relating to corresponding portions of the image. Defect information may be generated from a defect image from a defect imaging tool. Design information relating to one or more structures to be formed on the substrate in a vicinity of the defect may be retrieved. The defect may be classified based on a combination of the defect information from the defect image and design information relating to one or more structures to be formed on the substrate in the vicinity of the defect.
摘要翻译：通过成像工具观察到的缺陷可以通过将缺陷图像中观察到的特征与与图像的对应部分有关的设计信息进行自动比较来分类。可以从缺陷成像工具的缺陷图像生成缺陷信息。可以检索与在缺陷附近形成在基板上的一个或多个结构相关的设计信息。可以基于来自缺陷图像的缺陷信息和与要在缺陷附近的基板上形成的一个或多个结构相关的设计信息的组合来分类缺陷。

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