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    • 5. 发明授权
    • Method for sputtering multi-component thin-film
    • 溅射多组分薄膜的方法
    • US4731172A
    • 1988-03-15
    • US856783
    • 1986-04-17
    • Hideaki AdachiHidetaka HigashinoTsuneo MitsuyuOsamu Yamazaki
    • Hideaki AdachiHidetaka HigashinoTsuneo MitsuyuOsamu Yamazaki
    • C23C14/02C23C14/08C23C14/22C23C14/35H01L21/314H01L21/316C23C14/34
    • C23C14/225C23C14/024C23C14/088C23C14/352H01L21/02197H01L21/02266H01L21/31691
    • A underlying layer of multi-component material of a first formula is deposited on a substrate by controlling the amounts of sputtering materials evaporated respectively from a plurality of sputtering sources. A transition layer of multi-component material is subsequently formed on the underlying layer by controlling the amounts of the sputtering materials so that the transition layer is given a second, variable formula varying in a range from the first formula at the boundary between the underlying layer and the transition layer to a third formula. An overlying layer of multi-component material of the third formula is subsequently formed on the transition layer by controlling the amounts of the sputtering materials. Specifically, the first formula is [Pb.sub.1-(x/100) La.sub.x/100 ][Zr.sub.y/100 Ti.sub.z/100 ].sub.w O.sub.3, in which 10.ltoreq.x.ltoreq.40, y.ltoreq.5, w=1-(x/400) and y+z=100, and the third formula is [Pb.sub.1-(X/100) La.sub.X/100 ] [Zr.sub.Y/100 Ti.sub.Z/100 ].sub.W O.sub.3, in which X.ltoreq.20, 40.ltoreq.Y.ltoreq.90, W=1-(X/400) and Y+Z=100.
    • 通过控制分别从多个溅射源蒸发的溅射材料的量,将第一配方的多组分材料的下层沉积在基板上。 随后通过控制溅射材料的量,在底层上形成多组分材料的过渡层,使得过渡层被赋予第二个可变公式,其变化范围从第一公式在下层 和过渡层到第三个公式。 随后通过控制溅射材料的量在过渡层上形成第三配方的多组分材料的上覆层。 具体地说,第一公式为[Pb1-(x / 100)Lax / 100] [Zry / 100Tiz / 100] wO3,其中10≤x≤40,y = 5,w = 1-( x / 400)和y + z = 100,第三式为[Pb1-(X / 100)LaX / 100] [ZrY / 100TiZ / 100] WO3,其中X = 20,40 <
    • 6. 发明授权
    • Tunnel-type Josephson element and method for manufacturing the same
    • 隧道式约瑟夫逊元件及其制造方法
    • US5856204A
    • 1999-01-05
    • US721976
    • 1996-09-27
    • Masahiro SakaiHidetaka HigashinoHideaki AdachiKentaro Setsune
    • Masahiro SakaiHidetaka HigashinoHideaki AdachiKentaro Setsune
    • H01L39/22H01L21/00
    • H01L39/225
    • A plurality of single crystal grains made of Bi.sub.2 Sr.sub.2 Ca.sub.1 Cu.sub.2 O.sub.8 which are heat treated at a temperature that is equal to or higher than the crystallization temperature of an oxide high-temperature superconductor made of Bi.sub.2 Sr.sub.2 Ca.sub.1 Cu.sub.2 O.sub.8 and are surrounded by a grain boundary are formed on a substrate made of a MgO single crystal. A convex portion having a sectional area of 400 .mu.m.sup.2 or less and a height which is equal to or less than ten times as much as a space between block layers of Bi.sub.2 Sr.sub.2 Ca.sub.1 Cu.sub.2 O.sub.8 is formed on the upper face portion of the single crystal grain. A first electrode made of Au is formed on the upper face of the convex portion of the single crystal grain, and a second electrode is formed in a region other than the convex portion in the single crystal grain. The first electrode is insulated from the second electrode by an insulating film made of CaF.sub.2.
    • 由Bi2Sr2Ca1Cu2O8制成的多个由Bi2Sr2Ca1Cu2O8构成的氧化物高温超导体的晶化温度以上的温度进行热处理并被晶界包围的单晶粒子形成在由 MgO单晶。 在单晶粒的上表面上形成有截面积为400μm或更小的凸部,其高度等于或小于Bi2Sr2Ca1Cu2O8的阻挡层之间的间隔的十倍。 在单晶粒的凸部的上表面上形成由Au构成的第一电极,在单晶粒的凸部以外的区域形成第二电极。 第一电极通过由CaF 2制成的绝缘膜与第二电极绝缘。