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1. 发明申请

US20120043857A1 ACTUATOR AND METHOD FOR DRIVING ACTUATOR 有权
标题翻译：执行器和驱动执行器的方法
公开(公告)号：US20120043857A1
公开(公告)日：2012-02-23
申请号：US13282089
申请日：2011-10-26
申请人： Michihito UEDA , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Michihito UEDA , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/18
CPC分类号： H01L41/094 , H01L41/042 , H01L41/187 , H01L41/316
摘要： The purpose of the present invention is to provide a method for driving an actuator in which unnecessary deformation is suppressed.The present invention provides a method for driving an actuator, comprising the following steps (a) and (b): a step (a) of preparing the actuator, wherein the actuator comprises a first electrode, a piezoelectric layer composed of (Bi,Na,Ba)TiO3, and a second electrode, the piezoelectric layer is interposed between the first electrode and the second electrode, +X direction, +Y direction, and +Z direction denote [100] direction, [01-1] direction, and [011] direction, respectively, and the piezoelectric layer is preferentially oriented along the +Z direction; and a step (b) of applying a potential difference between the first electrode and the second electrode to drive the actuator.
摘要翻译：本发明的目的是提供一种驱动致动器的方法，其中不必要的变形被抑制。本发明提供一种用于驱动致动器的方法，包括以下步骤（a）和（b）：制备致动器的步骤（a），其中致动器包括第一电极，由（Bi，Na ，Ba）TiO 3和第二电极，压电层插入在第一电极和第二电极之间，+ X方向，+ Y方向和+ Z方向表示[100]方向，[01-1]方向，以及方向，并且压电层优先沿着+ Z方向取向; 以及在第一电极和第二电极之间施加电位差以驱动致动器的步骤（b）。

2. 发明授权

US08217555B2 Actuator and method for driving actuator 有权
标题翻译：执行机构及其驱动方法
公开(公告)号：US08217555B2
公开(公告)日：2012-07-10
申请号：US13282089
申请日：2011-10-26
申请人： Michihito Ueda , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Michihito Ueda , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/187 , H01L41/24
CPC分类号： H01L41/094 , H01L41/042 , H01L41/187 , H01L41/316
摘要： The purpose of the present invention is to provide a method for driving an actuator in which unnecessary deformation is suppressed.The present invention provides a method for driving an actuator, comprising the following steps (a) and (b): a step (a) of preparing the actuator, wherein the actuator comprises a first electrode, a piezoelectric layer composed of (Bi,Na,Ba)TiO3, and a second electrode, the piezoelectric layer is interposed between the first electrode and the second electrode, +X direction, +Y direction, and +Z direction denote [100] direction, [01-1] direction, and [011] direction, respectively, and the piezoelectric layer is preferentially oriented along the +Z direction; and a step (b) of applying a potential difference between the first electrode and the second electrode to drive the actuator.
摘要翻译：本发明的目的是提供一种驱动致动器的方法，其中不必要的变形被抑制。本发明提供一种用于驱动致动器的方法，包括以下步骤（a）和（b）：制备致动器的步骤（a），其中致动器包括第一电极，由（Bi，Na ，Ba）TiO 3和第二电极，压电层插入在第一电极和第二电极之间，+ X方向，+ Y方向和+ Z方向表示[100]方向，[01-1]方向，以及方向，并且压电层优先沿着+ Z方向取向; 以及在第一电极和第二电极之间施加电位差以驱动致动器的步骤（b）。

3. 发明授权

US08093784B2 Piezoelectric power generating element, and method of generating electric power using the piezoelectric power generating element 有权
标题翻译：压电发电元件，以及使用压电发电元件发电的方法
公开(公告)号：US08093784B2
公开(公告)日：2012-01-10
申请号：US13191139
申请日：2011-07-26
申请人： Takakiyo Harigai , Michihito Ueda , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Michihito Ueda , Hideaki Adachi , Eiji Fujii
IPC分类号： H02N2/00 , H01L41/107
CPC分类号： H02N2/186 , H01L41/1134
摘要： Provided is a relatively easy-to-fabricate piezoelectric power generating element capable of generating a large amount of electric power while comprising a bridge-type vibration beam that is resistant to damage from external vibration. This element comprises a support member, a strip-shaped vibration beam, a piezoelectric layer, and electrodes. The first and second ends of the vibration beam are fixed to the support member. The piezoelectric layer and the electrodes are provided on the surface of the vibration beam. The vibration beam extends in a plane when it is not vibrating. The vibration beam has a first portion that extends from the first end fixed to the support member, a second portion that extends from the second end fixed to the support member, and a third portion that connects the end of the first portion opposite to the first end and the end of the second portion opposite to the second end. The vibration beam has a shape such that, when viewed in a direction perpendicular to the plane, a first direction in which the first portion extends is a direction closer to the second end, and a second direction in which the second portion extends is a direction closer to the first end, the first and second directions each make an angle of more than 0° and less than 90° with respect to a straight line connecting the center of the first end and the center of the second end, and the third portion intersects once the straight line.
摘要翻译：提供一种相对容易制造的能够产生大量电力的压电发电元件，同时包括耐外部振动损坏的桥式振动梁。该元件包括支撑构件，条形振动梁，压电层和电极。振动梁的第一和第二端固定在支撑构件上。压电层和电极设置在振动梁的表面上。当振动梁不振动时，振动梁在平面内延伸。振动梁具有从固定到支撑构件的第一端延伸的第一部分，从固定到支撑构件的第二端延伸的第二部分，以及连接第一部分的与第一部分相对的端部的第三部分端部和第二部分的与第二端相对的端部。所述振动梁具有这样的形状：当从垂直于所述平面的方向观察时，所述第一部分延伸的第一方向是更靠近所述第二端的方向，并且所述第二部分延伸的第二方向是方向更靠近第一端，第一和第二方向相对于连接第一端的中心和第二端的中心的直线大于0°且小于90°，并且第三部分相交一次直线。

4. 发明授权

US08393719B2 Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电膜，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件产生电力的方法
公开(公告)号：US08393719B2
公开(公告)日：2013-03-12
申请号：US13280022
申请日：2011-10-24
申请人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： B41J2/045 , H01L41/00 , H02N2/00
CPC分类号： H01L41/187 , B41J2/14032 , G01C19/5621 , G01C19/5628 , H01L41/0478 , H01L41/0815 , H01L41/0973 , H01L41/1136 , H01L41/316
摘要： The purpose of the present invention is to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a NaxLa1-xNiO3-x layer with a (001) orientation and a (Na,Bi)TiO3—BaTiO3 layer with a (001) orientation, wherein x is not less than 0.01 and not more than 0.1, and the NaxLa1-xNiO3-x layer (0.01≦x≦0.1) and the (Na,Bi)TiO3—BaTiO3 layer are laminated.
摘要翻译：本发明的目的是提供一种包含无铅铁电材料的无铅压电膜，其具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电膜的方法。本发明涉及一种包括具有（001）取向的NaxLa1-xNiO3-x层和（001）取向的（Na，Bi）TiO3-BaTiO3层的压电膜，其中x不小于0.01而不是大于0.1，NaxLa1-xNiO3-x层（0.01＆nlE; x＆nlE; 0.1）和（Na，Bi）TiO3-BaTiO3层层叠。

5. 发明授权

US08390179B2 Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法压电发电元件
公开(公告)号：US08390179B2
公开(公告)日：2013-03-05
申请号：US13551018
申请日：2012-07-17
申请人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/08
CPC分类号： C01G23/006 , B41J2/14274 , C01G29/006 , C01P2002/50 , C01P2002/52 , C01P2002/72 , C01P2006/32 , C01P2006/40 , C23C14/0021 , C23C14/025 , C23C14/088 , G01C19/5621 , G01C19/5628 , H01L41/0973 , H01L41/1136 , H01L41/1871
摘要： It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer with a (111) orientation, where 0.30≦x≦0.46 and 0.51≦y≦0.62.
摘要翻译：本发明的目的是提供一种无铅压电薄膜，其包括无铅铁电材料，并且具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电薄膜的方法。本发明涉及一种包括具有（111）取向的（NaxBiy）TiO0.5x + 1.5y + 2-BaTiO3层的压电膜，其中0.30和n1E; x和nlE; 0.46和0.51≤n1E; y＆nlE; 0.62。

6. 发明授权

US09000655B2 Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电膜，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件发电的方法
公开(公告)号：US09000655B2
公开(公告)日：2015-04-07
申请号：US13926794
申请日：2013-06-25
申请人： Yoshiaki Tanaka , Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
发明人： Yoshiaki Tanaka , Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/18 , H02N2/18 , B41J2/045 , B41J2/055 , C04B35/462 , G01C19/5628 , H01L41/09 , H01L41/113 , H01L41/187 , H01L41/316 , B41J2/14 , C23C14/08 , G01C19/56 , G01C19/5607 , C23C14/34 , C30B23/02 , C30B29/22 , B32B18/00 , C04B35/468 , C04B35/475 , C04B35/50
CPC分类号： H02N2/18 , B32B18/00 , B41J2/045 , B41J2/055 , B41J2/14233 , C04B35/462 , C04B35/468 , C04B35/475 , C04B35/50 , C04B2235/3201 , C04B2235/3215 , C04B2235/3227 , C04B2235/3262 , C04B2235/3272 , C04B2235/3279 , C04B2235/3281 , C04B2235/3298 , C04B2235/787 , C23C14/08 , C23C14/3414 , C30B23/02 , C30B29/22 , G01C19/56 , G01C19/5607 , G01C19/5628 , H01L41/0478 , H01L41/0815 , H01L41/0973 , H01L41/113 , H01L41/1132 , H01L41/1136 , H01L41/1871 , H01L41/1873 , H01L41/1878 , H01L41/316 , H02N2/186 , Y10T428/12667
摘要： The present invention provides a non-lead piezoelectric film having high crystalline orientation, the low dielectric loss, the high polarization-disappear temperature, the high piezoelectric constant, and the high linearity between an applied electric field and an amount of displacement. The present invention is a piezoelectric film comprising: a NaxLa1-x+yNi1-yO3-x layer having only an (001) orientation and a (1-α) (Bi, Na, Ba) TiO3-αBiQO3 layer having only an (001) orientation. The (1-α) (Bi, Na, Ba) TiO3-αBiQO3 layer is formed on the NaxLa1-x+yNi1-yO3-x layer. The character of Q represents Fe, Co, Zn0.5Ti0.5, or Mg0.5Ti0.5 The character of x represents a value of not less than 0.01 and not more than 0.05. The character of y represents a value of not less than 0.05 and not more than 0.20. The character of α represents a value of not less than 0.20 and not more than 0.50.
摘要翻译：本发明提供一种具有高结晶取向，低介电损耗，高偏振消失温度，高压电常数以及施加电场与位移量之间的高线性度的非铅压电薄膜。本发明是一种压电薄膜，它包括仅具有（001）取向的NaxLa1-x + yNi1-yO3-x层和仅具有（001）取向的（001）取向的（001）取向和（1-α）（Bi，Na，Ba）TiO3-αBiQO3层）方向。在NaxLa1-x + yNi1-yO3-x层上形成（1-α）（Bi，Na，Ba）TiO3-αBiQO3层。 Q的特性表示Fe，Co，Zn0.5Ti0.5或Mg0.5Ti0.5 x的特征值不小于0.01且不大于0.05。 y的特征表示不小于0.05且不大于0.20的值。 α的字符表示不小于0.20且不大于0.50的值。

7. 发明授权

US08562113B2 Piezoelectric thin film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电薄膜，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件产生电力的方法
公开(公告)号：US08562113B2
公开(公告)日：2013-10-22
申请号：US13280000
申请日：2011-10-24
申请人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/22 , H01L41/00 , H04R17/00 , H02N2/00 , B41J2/045
CPC分类号： B41J2/14032 , C23C14/088 , H01L41/0815 , H01L41/0973 , H01L41/1136 , H01L41/187 , H01L41/316 , H01L41/319
摘要： The present invention provides a piezoelectric thin film comprising an electrode film with a (001) orientation, a (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film with a (001) orientation (x represents not less than 0.29 and not more than 0.4) and a (Na,Bi)TiO3—BaTiO3 piezoelectric layer, the electrode film, the (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film, and the (Na,Bi)TiO3—BaTiO3 piezoelectric layer being laminated in this order.The lead-free piezoelectric thin film of the present invention has low dielectric loss and high piezoelectric performance.
摘要翻译：本发明提供一种压电薄膜，其包括具有（001）取向的电极膜，具有（001）取向的（NaxBi0.5）TiO0.5x + 2.75-BaTiO3膜（x表示不小于0.29且不大于 0.4）和（Na，Bi）TiO 3-BaTiO 3压电层，电极膜，（NaxBi0.5）TiO0.5x + 2.75-BaTiO3膜和（Na，Bi）TiO3-BaTiO3压电层订购。本发明的无铅压电薄膜具有低介电损耗和高压电性能。

8. 发明授权

US08511799B2 Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法压电发电元件
公开(公告)号：US08511799B2
公开(公告)日：2013-08-20
申请号：US13551058
申请日：2012-07-17
申请人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： B41J2/045
CPC分类号： H01L41/1871 , B41J2/14233 , C23C14/0021 , C23C14/025 , C23C14/088 , G01C19/5621 , G01C19/5628 , G01P3/44 , H01L41/0477 , H01L41/0973 , H01L41/1136
摘要： It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer with a (110) orientation, where 0.30≦x≦0. 46 and 0.51≦y≦0.62.
摘要翻译：本发明的目的是提供一种无铅压电薄膜，其包括无铅铁电材料，并且具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电薄膜的方法。本发明涉及一种包括具有（110）取向的（NaxBiy）TiO0.5x + 1.5y + 2-BaTiO3层的压电膜，其中0.30≤x≤0.0。 46和0.51 @ y @ 0.62。

9. 发明授权

US08511162B2 Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法压电发电元件
公开(公告)号：US08511162B2
公开(公告)日：2013-08-20
申请号：US13550994
申请日：2012-07-17
申请人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： B41J2/045 , H01L41/02 , G01P15/09
CPC分类号： G01P15/09 , B41J2/14233 , B41J2002/14258 , G01C19/56 , G01C19/5628 , H01L41/0478 , H01L41/0805 , H01L41/0973 , H01L41/1136 , H01L41/187 , H01L41/1878 , H01L41/316
摘要： The purpose of the present invention is to provide an angular velocity sensor capable of measuring an exact angular velocity, an ink jet head capable of producing an exact amount of ink, and a piezoelectric generating element capable of generating electric power due to positive piezoelectric effect.In the present invention, a piezoelectric film comprising a first electrode, a piezoelectric layer, and a second electrode is used. The first electrode comprises an electrode layer having a (001) orientation. The piezoelectric layer comprises a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer (0.30≦x≦0.46 and 0.51≦y≦0.62) having a (001) orientation.
摘要翻译：本发明的目的是提供一种能够测量精确角速度的角速度传感器，能够产生精确量的墨水的喷墨头，以及能够由于正的压电效应产生电力的压电发生元件。在本发明中，使用包括第一电极，压电层和第二电极的压电膜。第一电极包括具有（001）取向的电极层。压电层包括具有（001）取向的（NaxBiy）TiO0.5x + 1.5y + 2-BaTiO3层（0.30 @ x @ 0.46和0.51 @ y @ 0.62）。

10. 发明授权

US08591009B2 Piezoelectric film, ink jet head, angular velocity sensor and piezoelectric generating element 有权
标题翻译：压电膜，喷墨头，角速度传感器和压电发生元件
公开(公告)号：US08591009B2
公开(公告)日：2013-11-26
申请号：US13616125
申请日：2012-09-14
申请人： Yoshiaki Tanaka , Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
发明人： Yoshiaki Tanaka , Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/00 , H02N2/00 , B41J2/045
CPC分类号： B41J2/14233 , B41J2202/03 , G01C19/5621 , H01L41/0815 , H01L41/1136 , H01L41/187 , H01L41/316
摘要： The purpose of the present invention is to provide a BNT-BT piezoelectric film having a higher crystalline orientation, a higher piezoelectric constant, and a higher ferroelectric property. The present invention is directed to a piezoelectric film comprising a first electrode having only a (110) orientation; a (NaxBi0.5)TiO0.5x+2.75—BaTiO layer having only a (110) orientation, a (Bi,Na)TiO3—BaTiO3 layer having only a (110) orientation, and a second electrode, wherein a value of x is not less than 0.29 and not more than 0.40, and the first electrode, the (NaxBi0.5)TiO0.5x+2.75—BaTiO3 layer, the (Bi,Na)TiO3—BaTiO3 layer, and the second electrode are laminated in this order.
摘要翻译：本发明的目的是提供一种具有较高结晶取向，较高压电常数和较高铁电性能的BNT-BT压电薄膜。本发明涉及一种包括仅具有（110）取向的第一电极的压电膜; 仅具有（110）取向的（NaxBi0.5）TiO0.5x + 2.75-BaTiO层，仅具有（110）取向的（Bi，Na）TiO3-BaTiO3层和第二电极，其中x 不小于0.29且不大于0.40，第一电极，（NaxBi0.5）TiO0.5x + 2.75-BaTiO3层，（Bi，Na）TiO3-BaTiO3层和第二电极层叠在该订购。

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