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1. 发明申请

US20180245919A1 COMPOSITE SENSOR 审中-公开
公开(公告)号：US20180245919A1
公开(公告)日：2018-08-30
申请号：US15752915
申请日：2016-08-08
申请人： DENSO CORPORATION , SEIKO EPSON CORPORATION
发明人： Naoki YOSHIDA , Tsugio IDE
IPC分类号： G01C19/5621 , B81B3/00 , G01C19/5628 , G01P15/125 , H01L29/84 , H01L41/113
CPC分类号： G01C19/5621 , B81B3/00 , B81B7/0064 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , G01C19/5628 , G01C19/5783 , G01P1/023 , G01P15/125 , H01L29/84 , H01L41/113 , H01L41/1134
摘要： A composite sensor includes a first shield pattern that functions as a noise shield of a circuit board, a second shield pattern that functions as a noise shield of a first sensor, and a third shield pattern that functions as a noise shield of a second sensor. The first shield pattern has an impedance lower than the second shield pattern and the third shield pattern. The second shield pattern and the third shield pattern are electrically connected to each other through the first shield pattern. Accordingly, deterioration of detection accuracy caused by electrical noise is restricted.

2. 发明授权

US09933261B2 Physical quantity sensor, electronic apparatus and moving object 有权
公开(公告)号：US09933261B2
公开(公告)日：2018-04-03
申请号：US14987009
申请日：2016-01-04
申请人： Seiko Epson Corporation
发明人： Kenji Sato
IPC分类号： G01C19/5783 , G01C19/5628
CPC分类号： G01C19/5783 , G01C19/5628
摘要： A physical quantity sensor includes a vibration element that performs drive vibration, an acceleration detection chip that detects an acceleration, a semiconductor element which is electrically connected to at least one of the vibration element and the acceleration detection chip, and a package that has a storage space for storing the vibration element, the acceleration detection chip and the semiconductor element. The semiconductor element is fixed to the package, the acceleration detection chip is fixed to the package with the semiconductor element interposed therebetween, and at least a portion of the acceleration detection chip overlaps the vibration element when the package is seen in a plan view.

3. 发明授权

US09683843B2 Vibrator element and method of manufacturing the same 有权
公开(公告)号：US09683843B2
公开(公告)日：2017-06-20
申请号：US14225997
申请日：2014-03-26
申请人： Seiko Epson Corporation
发明人： Keiji Nakagawa , Ryuta Nishizawa
IPC分类号： G01C19/5607 , G01C19/5628 , H03H3/02
CPC分类号： G01C19/5628 , G01C19/5607 , H03H2003/026 , Y10T29/42
摘要： A vibrator element has a first vibration mode in which first and second detection portions perform flexural vibration in opposite directions in the opposite phase to first and second driving portions which vibrate in opposite directions according to a Coriolis force, and a second vibration mode in which the first and second detection portions perform flexural vibration in opposite directions in the same phase as the first and second driving portions which vibrate in opposite directions according to a Coriolis force. A ratio r=R2/R1 of equivalent series resistance R2 at the time of the second vibration mode to equivalent series resistance R1 at the time of the first vibration mode is set between 0.15 and 6.0.

4. 发明授权

US09660176B2 Method of manufacturing electronic device, electronic apparatus, and mobile apparatus 有权
公开(公告)号：US09660176B2
公开(公告)日：2017-05-23
申请号：US14031663
申请日：2013-09-19
申请人： Seiko Epson Corporation
发明人： Hideo Miyasaka
IPC分类号： B23K31/02 , H01L41/23 , H03H9/10 , B23K1/00 , B23K1/005 , G01C19/5628 , B23K101/36
CPC分类号： H01L41/23 , B23K1/0016 , B23K1/005 , B23K2101/36 , G01C19/5628 , H01L2924/16195 , H03H9/10 , H03H9/1021 , H03H9/1057 , H03H9/1071 , Y10T29/42
摘要： A method of manufacturing an electronic device including an electronic element, a base substrate, and a lid member, includes joining the lid member to the sealing part by application of an energy beam so that a plate thickness of the lid member may be larger in a part joined to the sealing part than in a part located inside of the part in a plan view along the thickness direction.

5. 发明申请

US20170074653A1 PHYSICAL QUANTITY SENSOR 审中-公开
标题翻译：物理量传感器
公开(公告)号：US20170074653A1
公开(公告)日：2017-03-16
申请号：US15308866
申请日：2015-06-11
申请人： DENSO CORPORATION
发明人： Takeru KANAZAWA , Minekazu SAKAI , Naoki YOSHIDA , Kiyomasa SUGIMOTO , Nobuaki KUZUYA
IPC分类号： G01C19/5621 , G01P15/125
CPC分类号： G01C19/5621 , B81B7/02 , G01C19/5628 , G01C19/5783 , G01P15/125 , G01P2015/0814 , H01L41/053 , H01L41/0825 , H01L41/113 , H01L41/311 , H01L41/313
摘要： Within a housing portion in which a recessed portion is formed, a circuit board is arranged on the bottom surface of the recessed portion, through a first connecting member. An acceleration sensor is stacked on the circuit board, through a second connecting member. Hence, sections that function as three or more springs, i.e., an anti-vibration portion, the first connecting member, and the second connecting member, are situated between an angular velocity sensor and the acceleration sensor. For this reason, transmission of vibration of the vibrating element in the angular velocity sensor to the acceleration sensor can be restricted, and reduction in the detection accuracy of the acceleration sensor can be restricted.
摘要翻译：在形成有凹部的收纳部内，通过第一连接部件在凹部的底面上配置电路基板。加速度传感器通过第二连接构件堆叠在电路板上。因此，用作三个或更多个弹簧的部分，即防振部分，第一连接部件和第二连接部件，位于角速度传感器和加速度传感器之间。因此，可以限制角速度传感器中的振动元件的振动传递到加速度传感器，能够抑制加速度传感器的检测精度的降低。

6. 发明授权

US09448068B2 Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US09448068B2
公开(公告)日：2016-09-20
申请号：US14745686
申请日：2015-06-22
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Takashi Uchida , Toshio Yamazaki , Tomohiro Mitani
IPC分类号： G01C19/56 , G01C19/5607 , G01C19/5628 , G01C19/5769 , B81B7/00 , G01C19/574
CPC分类号： G01C19/5607 , B81B7/0016 , B81B2201/0242 , G01C19/5628 , G01C19/574 , G01C19/5769
摘要： A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.
摘要翻译：配置构件通过与端子电连接的端子从外部被支撑，并且X轴方向延伸部分，Y轴方向延伸部分和Z轴方向延伸部分是在终端提供。这种结构提供了一种角速度传感器，其中消除了从外部施加的Y轴方向和Z轴方向振动不能被阻尼的问题，并且可以抑制三轴方向上的所有振动。

7. 发明申请

US20160231111A1 ANGULAR VELOCITY SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR USING SAME 审中-公开
标题翻译：角速度传感器元件和角速度传感器
公开(公告)号：US20160231111A1
公开(公告)日：2016-08-11
申请号：US15098818
申请日：2016-04-14
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Kensaku YAMAMOTO
IPC分类号： G01C19/5663
CPC分类号： G01C19/5663 , G01C19/5607 , G01C19/5628 , G01C19/5747
摘要： An angular velocity sensor element includes a fixing part, an extension part, a twisted extension part, a drive vibrator, a detection vibrator, and a counter beam. The extension part has a first end coupled to the fixing part, and a second end. The twisted extension part has a first end coupled to the second end of the extension part, and a second end. The drive vibrator has a first end coupled to the second end of the twisted extension part, and a second end. The drive vibrator is provided with a drive electrode. The detection vibrator is coupled to the second end of the drive vibrator, and is provided with a first detection electrode. The counter beam is coupled to the second end of the twisted extension part, disposed substantially parallel to the drive vibrator, and configured to vibrate in a direction opposite to a vibration direction of the drive vibrator.
摘要翻译：角速度传感器元件包括固定部分，延伸部分，扭转延伸部分，驱动振动器，检测振动器和反向束。延伸部分具有联接到固定部分的第一端和第二端。扭转的延伸部分具有联接到延伸部分的第二端的第一端和第二端。驱动振动器具有联接到扭转延伸部分的第二端的第一端和第二端。驱动振动器设置有驱动电极。检测振动器耦合到驱动振动器的第二端，并且设置有第一检测电极。相对梁耦合到扭转的延伸部分的第二端，该第二端基本上平行于驱动振动器设置，并被配置成沿与驱动振动器的振动方向相反的方向振动。

8. 发明授权

US09287488B2 Piezoelectric actuator device and method for manufacturing same 有权
标题翻译：压电致动器装置及其制造方法
公开(公告)号：US09287488B2
公开(公告)日：2016-03-15
申请号：US14362574
申请日：2013-01-29
申请人： PANASONIC CORPORATION
发明人： Soichiro Hiraoka , Kazuki Komaki , Shinsuke Nakazono , Akira Kurozuka , Toshiaki Horie
IPC分类号： H01L41/08 , H01L41/083 , H01H57/00 , H01L41/22 , G02B26/08 , G01C19/5621 , G01C19/5628 , H01L41/09 , H01L41/04 , H01L41/047 , H01L41/053 , H01L41/27 , H01L41/297 , B06B1/06
CPC分类号： H01L41/083 , B06B1/0603 , G01C19/5621 , G01C19/5628 , G02B26/0858 , H01H57/00 , H01H2057/006 , H01L41/042 , H01L41/0471 , H01L41/053 , H01L41/0913 , H01L41/094 , H01L41/0953 , H01L41/22 , H01L41/27 , H01L41/297 , Y10T29/42
摘要： A piezoelectric actuator device includes a vibrator and a driver to vibrate the vibrator. The vibrator includes a lower vibration layer configured to vibrate and an upper vibration layer coupled to an upper surface of the lower vibration layer and configured to vibrate together with the lower vibration layer. The driver includes an upper electrode layer on a lower surface of the lower vibration layer, a piezoelectric layer on a lower surface of the upper electrode layer, and a lower electrode layer on a lower surface of the piezoelectric layer. The lower vibration layer of the vibrator is made of organic material. The upper vibration layer is mainly made of inorganic material. The lower vibration layer has a smaller longitudinal elastic modulus than the upper vibration layer. The piezoelectric actuator device has a large resistance to disturbance vibrations and a large warping amount of the vibrator without increasing power consumption.
摘要翻译：压电致动器装置包括振动器和使振动器振动的驱动器。振动器包括被配置为振动的下振动层和耦合到下振动层的上表面并被配置为与下振动层一起振动的上振动层。驱动器包括在下振动层的下表面上的上电极层，在上电极层的下表面上的压电层和压电层的下表面上的下电极层。振动器的下部振动层由有机材料制成。上振动层主要由无机材料制成。较低的振动层具有比上部振动层更小的纵向弹性模量。压电致动器装置在不增加功率消耗的情况下具有较大的抗干扰振动阻抗和较大的翘曲量的振动器。

9. 发明授权

US09123881B2 Electronic device and electronic apparatus 有权
标题翻译：电子设备和电子设备
公开(公告)号：US09123881B2
公开(公告)日：2015-09-01
申请号：US13864470
申请日：2013-04-17
申请人： Seiko Epson Corporation
发明人： Kenji Sato , Norifumi Shimizu
IPC分类号： H01L41/047 , G01C19/5783 , G01C19/5628
CPC分类号： H01L41/0474 , G01C19/5628 , G01C19/5783 , H01L2224/16225 , H01L2924/16195
摘要： A sensor device includes an IC chip, a package which includes a base in which the IC chip is provided and houses the IC chip, the base having a through hole provided in a position that overlaps with the IC chip in the plan view, and a spacer which is provided between the IC chip and the base, and has an aperture communicating the through hole with the space on the opposite side to the base with respect to the IC chip in the package between the IC chip and the space.
摘要翻译：传感器装置包括IC芯片，包括设置有IC芯片的基座并容纳IC芯片的封装体，该基座具有设置在俯视图中与IC芯片重叠的位置的通孔，以及间隔件，其设置在IC芯片和基座之间，并且具有使通孔与IC芯片与空间之间的封装中的IC芯片相对于基座的相对侧的空间连通的孔。

10. 发明授权

US09082978B2 Piezoelectric film and method of manufacturing the piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电薄膜及制造压电薄膜的方法，喷墨头，喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法压电发生元件
公开(公告)号：US09082978B2
公开(公告)日：2015-07-14
申请号：US14029638
申请日：2013-09-17
申请人： PANASONIC CORPORATION
发明人： Yoshiaki Tanaka , Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
IPC分类号： B41J2/045 , H02N2/00 , H01L41/187 , C30B29/32 , G01C19/5628 , B41J2/14 , B41J2/16 , G01C19/5621 , H01L41/047 , H01L41/08 , H01L41/09 , H01L41/113 , H01L41/316 , G01C19/56 , H02N2/18 , C30B23/02
CPC分类号： H01L41/1878 , B41J2/14201 , B41J2/14233 , B41J2/161 , B41J2/1642 , B41J2/1646 , B41J2202/03 , C30B23/02 , C30B29/32 , G01C19/56 , G01C19/5621 , G01C19/5628 , H01L41/0477 , H01L41/0805 , H01L41/0973 , H01L41/1136 , H01L41/187 , H01L41/316 , H02N2/18 , Y10T428/12493
摘要： In order to provide a non-lead piezoelectric film having high crystalline orientation, low dielectric loss, high polarization-disappear temperature, and high piezoelectric constant, the present invention is a piezoelectric film comprising: a NaxM1-x layer 13 having a (001) orientation only; and a (1-α) (Bi, Na, Ba) TiO3-αBiQO3 layer 15 having a (001) orientation only. The (1-α) (Bi, Na, Ba) TiO3-αBiQO3 layer 15 is formed on the NaxM1-x layer 13. M represents Pt, Ir, or PtIr. Q represents Fe, Co, Zn0.5Ti0.5, or Mg0.5Ti0.5. x represents a value of not less than 0.002 and not more than 0.02. α represents a value of not less than 0.20 and not more than 0.50.
摘要翻译：为了提供具有高结晶取向性，低介电损耗，高偏振消失温度和高压电常数的非铅压电薄膜，本发明是一种压电薄膜，其包括：具有（001）层的NaxM1-x层13，只有方向; 和具有（001）取向的（1-α）（Bi，Na，Ba）TiO 3 -AlBO 3层15。（1-α）（Bi，Na，Ba）TiO3-αBiQO3层15形成在NaxM1-x层13上.M表示Pt，Ir或PtIr。 Q表示Fe，Co，Zn0.5Ti0.5或Mg0.5Ti0.5。 x表示不小于0.002且不大于0.02的值。 α表示不小于0.20且不大于0.50的值。

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