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1. 发明公开

US20240072765A1 STRUCTURE, PHYSICAL QUANTITY SENSOR, INERTIAL SENSOR, AND METHOD FOR MANUFACTURING STRUCTURE 审中-公开
公开(公告)号：US20240072765A1
公开(公告)日：2024-02-29
申请号：US18457830
申请日：2023-08-29
申请人： SEIKO EPSON CORPORATION
发明人： Kenta Sato , Masayuki Oto
IPC分类号： H03H9/215 , G01C19/5628 , G01P15/097
CPC分类号： H03H9/215 , G01C19/5628 , G01P15/097
摘要： A structure is a structure of a quartz crystal substrate having a slit. The structure includes, as an inner wall of the slit, a first side surface, a second side surface, a first end surface, and a second end surface. The first side surface extends along a first direction which is a longitudinal direction of the slit, and the second side surface extends along the first direction. The first end surface is continuous with the first side surface and extends along a first crystal plane of the quartz crystal substrate, and the second end surface is continuous with the second side surface and extends along a second crystal plane of the quartz crystal substrate. In a plan view of the quartz crystal substrate, an intersection point where a first straight line corresponding to the first end surface and a second straight line corresponding to the second end surface intersect each other is located inside the quartz crystal substrate.

2. 发明授权

US11662204B2 Vibrator device 有权
公开(公告)号：US11662204B2
公开(公告)日：2023-05-30
申请号：US17155418
申请日：2021-01-22
申请人： SEIKO EPSON CORPORATION
发明人： Seiichiro Ogura , Keiichi Yamaguchi , Ryuta Nishizawa
IPC分类号： H03H9/21 , G01C19/5628
CPC分类号： G01C19/5628 , H03H9/21
摘要： A vibrator device includes a vibrating body having a first surface, a package having a second surface opposed to the first surface of the vibrating body, a circuit board provided to the package so as to be opposed to the first surface of the vibrating body, a plurality of coupling electrodes provided to the first surface of the vibrating body, a first coupling line provided to the second surface of the package, a second coupling line provided to the circuit board, and a bonding material electrically coupling the coupling electrode and the first coupling line to each other, wherein the vibrating body has a protrusion protruding toward the package farther than the coupling electrode at the first surface side, and the protrusion has contact with the second surface of the package.

3. 发明授权

US11656078B2 Sensor element and angular velocity sensor 有权
公开(公告)号：US11656078B2
公开(公告)日：2023-05-23
申请号：US16641944
申请日：2018-08-24
申请人： KYOCERA Corporation
发明人： Munetaka Soejima
IPC分类号： G01C19/5642 , G01C19/5628 , G01C19/5607
CPC分类号： G01C19/5642 , G01C19/5607 , G01C19/5628
摘要： A sensor element includes a piezoelectric body and a plurality of electrodes. The piezoelectric body, when viewed on a plane, includes a base part and at least one arm part extending from the base part. The plurality of electrodes are located on a surface of the arm part. The piezoelectric body, when viewed on the plane, further includes a frame part which surrounds the base part and the at least one arm part and upon which the base part is bridged.

4. 发明申请

US20180245919A1 COMPOSITE SENSOR 审中-公开
公开(公告)号：US20180245919A1
公开(公告)日：2018-08-30
申请号：US15752915
申请日：2016-08-08
申请人： DENSO CORPORATION , SEIKO EPSON CORPORATION
发明人： Naoki YOSHIDA , Tsugio IDE
IPC分类号： G01C19/5621 , B81B3/00 , G01C19/5628 , G01P15/125 , H01L29/84 , H01L41/113
CPC分类号： G01C19/5621 , B81B3/00 , B81B7/0064 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , G01C19/5628 , G01C19/5783 , G01P1/023 , G01P15/125 , H01L29/84 , H01L41/113 , H01L41/1134
摘要： A composite sensor includes a first shield pattern that functions as a noise shield of a circuit board, a second shield pattern that functions as a noise shield of a first sensor, and a third shield pattern that functions as a noise shield of a second sensor. The first shield pattern has an impedance lower than the second shield pattern and the third shield pattern. The second shield pattern and the third shield pattern are electrically connected to each other through the first shield pattern. Accordingly, deterioration of detection accuracy caused by electrical noise is restricted.

5. 发明授权

US09933261B2 Physical quantity sensor, electronic apparatus and moving object 有权
公开(公告)号：US09933261B2
公开(公告)日：2018-04-03
申请号：US14987009
申请日：2016-01-04
申请人： Seiko Epson Corporation
发明人： Kenji Sato
IPC分类号： G01C19/5783 , G01C19/5628
CPC分类号： G01C19/5783 , G01C19/5628
摘要： A physical quantity sensor includes a vibration element that performs drive vibration, an acceleration detection chip that detects an acceleration, a semiconductor element which is electrically connected to at least one of the vibration element and the acceleration detection chip, and a package that has a storage space for storing the vibration element, the acceleration detection chip and the semiconductor element. The semiconductor element is fixed to the package, the acceleration detection chip is fixed to the package with the semiconductor element interposed therebetween, and at least a portion of the acceleration detection chip overlaps the vibration element when the package is seen in a plan view.

6. 发明授权

US09683843B2 Vibrator element and method of manufacturing the same 有权
公开(公告)号：US09683843B2
公开(公告)日：2017-06-20
申请号：US14225997
申请日：2014-03-26
申请人： Seiko Epson Corporation
发明人： Keiji Nakagawa , Ryuta Nishizawa
IPC分类号： G01C19/5607 , G01C19/5628 , H03H3/02
CPC分类号： G01C19/5628 , G01C19/5607 , H03H2003/026 , Y10T29/42
摘要： A vibrator element has a first vibration mode in which first and second detection portions perform flexural vibration in opposite directions in the opposite phase to first and second driving portions which vibrate in opposite directions according to a Coriolis force, and a second vibration mode in which the first and second detection portions perform flexural vibration in opposite directions in the same phase as the first and second driving portions which vibrate in opposite directions according to a Coriolis force. A ratio r=R2/R1 of equivalent series resistance R2 at the time of the second vibration mode to equivalent series resistance R1 at the time of the first vibration mode is set between 0.15 and 6.0.

7. 发明授权

US09660176B2 Method of manufacturing electronic device, electronic apparatus, and mobile apparatus 有权
公开(公告)号：US09660176B2
公开(公告)日：2017-05-23
申请号：US14031663
申请日：2013-09-19
申请人： Seiko Epson Corporation
发明人： Hideo Miyasaka
IPC分类号： B23K31/02 , H01L41/23 , H03H9/10 , B23K1/00 , B23K1/005 , G01C19/5628 , B23K101/36
CPC分类号： H01L41/23 , B23K1/0016 , B23K1/005 , B23K2101/36 , G01C19/5628 , H01L2924/16195 , H03H9/10 , H03H9/1021 , H03H9/1057 , H03H9/1071 , Y10T29/42
摘要： A method of manufacturing an electronic device including an electronic element, a base substrate, and a lid member, includes joining the lid member to the sealing part by application of an energy beam so that a plate thickness of the lid member may be larger in a part joined to the sealing part than in a part located inside of the part in a plan view along the thickness direction.

8. 发明申请

US20170074653A1 PHYSICAL QUANTITY SENSOR 审中-公开
标题翻译：物理量传感器
公开(公告)号：US20170074653A1
公开(公告)日：2017-03-16
申请号：US15308866
申请日：2015-06-11
申请人： DENSO CORPORATION
发明人： Takeru KANAZAWA , Minekazu SAKAI , Naoki YOSHIDA , Kiyomasa SUGIMOTO , Nobuaki KUZUYA
IPC分类号： G01C19/5621 , G01P15/125
CPC分类号： G01C19/5621 , B81B7/02 , G01C19/5628 , G01C19/5783 , G01P15/125 , G01P2015/0814 , H01L41/053 , H01L41/0825 , H01L41/113 , H01L41/311 , H01L41/313
摘要： Within a housing portion in which a recessed portion is formed, a circuit board is arranged on the bottom surface of the recessed portion, through a first connecting member. An acceleration sensor is stacked on the circuit board, through a second connecting member. Hence, sections that function as three or more springs, i.e., an anti-vibration portion, the first connecting member, and the second connecting member, are situated between an angular velocity sensor and the acceleration sensor. For this reason, transmission of vibration of the vibrating element in the angular velocity sensor to the acceleration sensor can be restricted, and reduction in the detection accuracy of the acceleration sensor can be restricted.
摘要翻译：在形成有凹部的收纳部内，通过第一连接部件在凹部的底面上配置电路基板。加速度传感器通过第二连接构件堆叠在电路板上。因此，用作三个或更多个弹簧的部分，即防振部分，第一连接部件和第二连接部件，位于角速度传感器和加速度传感器之间。因此，可以限制角速度传感器中的振动元件的振动传递到加速度传感器，能够抑制加速度传感器的检测精度的降低。

9. 发明授权

US09448068B2 Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US09448068B2
公开(公告)日：2016-09-20
申请号：US14745686
申请日：2015-06-22
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Takashi Uchida , Toshio Yamazaki , Tomohiro Mitani
IPC分类号： G01C19/56 , G01C19/5607 , G01C19/5628 , G01C19/5769 , B81B7/00 , G01C19/574
CPC分类号： G01C19/5607 , B81B7/0016 , B81B2201/0242 , G01C19/5628 , G01C19/574 , G01C19/5769
摘要： A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.
摘要翻译：配置构件通过与端子电连接的端子从外部被支撑，并且X轴方向延伸部分，Y轴方向延伸部分和Z轴方向延伸部分是在终端提供。这种结构提供了一种角速度传感器，其中消除了从外部施加的Y轴方向和Z轴方向振动不能被阻尼的问题，并且可以抑制三轴方向上的所有振动。

10. 发明申请

US20160231111A1 ANGULAR VELOCITY SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR USING SAME 审中-公开
标题翻译：角速度传感器元件和角速度传感器
公开(公告)号：US20160231111A1
公开(公告)日：2016-08-11
申请号：US15098818
申请日：2016-04-14
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Kensaku YAMAMOTO
IPC分类号： G01C19/5663
CPC分类号： G01C19/5663 , G01C19/5607 , G01C19/5628 , G01C19/5747
摘要： An angular velocity sensor element includes a fixing part, an extension part, a twisted extension part, a drive vibrator, a detection vibrator, and a counter beam. The extension part has a first end coupled to the fixing part, and a second end. The twisted extension part has a first end coupled to the second end of the extension part, and a second end. The drive vibrator has a first end coupled to the second end of the twisted extension part, and a second end. The drive vibrator is provided with a drive electrode. The detection vibrator is coupled to the second end of the drive vibrator, and is provided with a first detection electrode. The counter beam is coupled to the second end of the twisted extension part, disposed substantially parallel to the drive vibrator, and configured to vibrate in a direction opposite to a vibration direction of the drive vibrator.
摘要翻译：角速度传感器元件包括固定部分，延伸部分，扭转延伸部分，驱动振动器，检测振动器和反向束。延伸部分具有联接到固定部分的第一端和第二端。扭转的延伸部分具有联接到延伸部分的第二端的第一端和第二端。驱动振动器具有联接到扭转延伸部分的第二端的第一端和第二端。驱动振动器设置有驱动电极。检测振动器耦合到驱动振动器的第二端，并且设置有第一检测电极。相对梁耦合到扭转的延伸部分的第二端，该第二端基本上平行于驱动振动器设置，并被配置成沿与驱动振动器的振动方向相反的方向振动。

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