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    • 2. 发明授权
    • Proportional micromechanical device
    • 比例微机械装置
    • US06761420B2
    • 2004-07-13
    • US10024963
    • 2001-12-18
    • Nadim I. MalufKirt R. WilliamsBert P. van DrieënhuizenEdward Nelson FullerRichard J. Barron
    • Nadim I. MalufKirt R. WilliamsBert P. van DrieënhuizenEdward Nelson FullerRichard J. Barron
    • B60T836
    • F16K99/0001B81B3/0024F15C5/00F16K99/0011F16K99/0044F16K2099/0074F16K2099/008F16K2099/0098Y10T137/0396
    • The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member are in the plane of the layer.
    • 本发明提供具有第一层,第二层和第三层并具有高纵横比几何形状的比例微型阀。 第一层限定具有入口和出口的空腔。 掺杂为具有低电阻率并且接合在第一和第三层之间的第二层限定了具有允许流体在入口和出口之间流动的流动面积的空腔。 第二层进一步限定可致动的可移动构件,以及一个或多个热致动器,用于将可移动构件致动到打开和关闭位置之间并包括打开位置和关闭位置,以允许或阻塞流体流动。 第三层提供腔的一个壁,并提供用于电加热可热膨胀致动器的电触点。 热致动器和可移位构件具有高纵横比,并且通过深反应离子蚀刻形成,使得它们可在第二层的平面中移位,同时非常刚性地离开平面。 因此,可移动构件的致动和位移都在该层的平面内。
    • 8. 发明授权
    • Laminated manifold for microvalve
    • 用于微型阀的层压歧管
    • US06581640B1
    • 2003-06-24
    • US09640132
    • 2000-08-16
    • Richard J. Barron
    • Richard J. Barron
    • F15C106
    • F16K99/0001F15C5/00F16K99/0015F16K2099/0074F16K2099/0076G01N2035/00247Y10T137/2224
    • A manifold for distributing a fluid. The manifold can be used to distribute a fluid to and from a microvalve. The manifold includes a first plate having a groove formed in one face thereof. A second plate is fixed to the first plate so as to cover the groove to form a fluid passage through the groove. First and second bores are formed through at least one of the first plate and the second plate to form an inlet and an outlet, respectively, of the fluid passage. According to a method of manufacturing, etching the first plate forms the groove. Preferably, an etching process also forms the first and second bores. Also, preferably, the first plate is one of a plurality of plates formed from a single sheet of material. Preferably the sheet of material is a standard sized sheet with locating indicia enabling assembly of the manifold with standard pick and place equipment. Specifically, a method of assembling the manifold includes forming a plurality of first plates from a single sheet; a plurality of second plates from a second sheet; applying a braze material to selected portions of one of the first and second sheets; clamping the sheets together with each of the first plates aligned with a corresponding one of the second plates; heating the first and second sheets, and braze material therebetween, to braze each of the first plates to the corresponding one of the second plates to form a manifold; detaching each manifold from the first and second sheets; and assembling the manifold to a fluid circuit. Optionally, a microvalve is attached to each manifold before the manifold is detached from the first and second sheets.
    • 用于分配流体的歧管。 歧管可以用于将流体分配到微型阀和从微型阀分出。 歧管包括在其一个表面上形成有凹槽的第一板。 第二板被固定到第一板上以覆盖槽,以形成通过槽的流体通道。 第一和第二孔通过第一板和第二板中的至少一个形成,以分别形成流体通道的入口和出口。 根据制造方法,蚀刻第一板形成凹槽。 优选地,蚀刻工艺也形成第一和第二孔。 此外,优选地,第一板是由单片材料形成的多个板中的一个。 优选地,该材料片是标准尺寸的片材,其具有定位标记,使得能够使用标准拾取和放置设备组装歧管。 具体地,组装歧管的方法包括从单张片形成多个第一板; 多个第二板从第二片; 将钎焊材料施加到所述第一和第二片材中的一个的选定部分; 将片材夹紧在一起,其中每个第一板与对应的一个第二板对准; 加热第一和第二片材,并在其间钎焊材料,以将每个第一板钎焊到相应的一个第二板以形成歧管; 从第一和第二片分离每个歧管; 并将歧管组装到流体回路上。 可选地,在歧管与第一和第二片材分离之前,微型阀连接到每个歧管。