专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

US20240300805A1 IN-PLANE AND OUT-OF-PLANE ACCELEROMETER 审中-公开
公开(公告)号：US20240300805A1
公开(公告)日：2024-09-12
申请号：US18594944
申请日：2024-03-04
申请人： Murata Manufacturing Co., Ltd.
发明人： Ville-Pekka RYTKÖNEN , Matti LIUKKU , Anssi BLOMQVIST
IPC分类号： B81B3/00 , G01P15/08 , G01P15/125
CPC分类号： B81B3/0062 , G01P15/125 , B81B2201/0235 , B81B2203/0136 , B81B2203/0154 , B81B2203/051 , B81B2203/058 , G01P2015/0814 , G01P2015/084 , G01P2015/0848 , G01P2015/0877
摘要： A microelectromechanical accelerometer is provided that includes one or more proof masses. The accelerometer also includes four sets of stator combs that form a set of four measurement capacitors together with rotor combs. Some rotor combs have a positive offset in a direction in the device plane in relation to stator, while others have a negative offset. Some rotor combs have a negative offset in a direction perpendicular to the device plane in relation to stator combs. Moreover, some stator combs have a negative offset in the direction perpendicular to the device plane in relation to rotor combs.

2. 发明授权

US11962973B2 Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor 有权
公开(公告)号：US11962973B2
公开(公告)日：2024-04-16
申请号：US18165014
申请日：2023-02-06
申请人： Infineon Technologies AG
发明人： Christian Bretthauer , David Tumpold , Pradyumna Mishra , Daniel Neumaier
IPC分类号： H04R17/02 , B81B7/04 , G01H11/08 , G01P1/02 , G01P15/08 , G01P15/09 , G01P15/18 , H04R1/04 , H04R1/28 , H10N30/30 , H10N30/87 , H04R7/18 , H04R17/10
CPC分类号： H04R17/02 , B81B7/04 , G01H11/08 , G01P15/0802 , G01P15/09 , G01P15/18 , H04R1/28 , H10N30/302 , H10N30/308 , H10N30/87 , B81B2201/0235 , B81B2201/0257 , B81B2203/0127 , G01P1/023 , G01P2015/084 , H04R1/04 , H04R7/18 , H04R17/10 , H04R2201/003
摘要： A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

3. 发明申请

US20170341929A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
公开(公告)号：US20170341929A1
公开(公告)日：2017-11-30
申请号：US15541653
申请日：2015-02-24
申请人： Mitsubishi Electric Corporation
发明人： Mika OKUMURA
IPC分类号： B81B3/00 , B81C1/00 , G01P15/08 , G01P15/125
CPC分类号： B81B3/0051 , B81B2201/0235 , B81B2203/0118 , B81C1/00825 , B81C2201/0109 , B81C2201/013 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , G01P2015/084 , G01P2015/0871
摘要： A semiconductor device includes a substrate, a beam, a movable structural body, a first stopper member, a second stopper member and a third stopper member. The first stopper member is arranged with a first gap from the movable structural body in an in-plane direction. The second stopper member is arranged with a second gap from the movable structural body in an out-of-plane direction. The third stopper member is arranged opposite to the second stopper member with the movable structural body interposed therebetween in the out-of-plane direction, and is arranged with a third gap from the movable structural body. Consequently, there can be provided a semiconductor device in which excessive displacement of the movable structural body can be suppressed to thereby suppress damage to and breakage of the beam supporting the movable structural body, and a method of manufacturing the same.

4. 发明申请

US20160139173A1 COMBINED MAGNETOMETER ACCELEROMETER MEMS DEVICES AND METHODS 审中-公开
标题翻译：组合磁力计加速度计MEMS器件及方法
公开(公告)号：US20160139173A1
公开(公告)日：2016-05-19
申请号：US14943498
申请日：2015-11-17
申请人： Mourad El-Gamal , Mohannad Elsayed , Paul-Vahe Cicek , Frederic Nabki
发明人： Mourad El-Gamal , Mohannad Elsayed , Paul-Vahe Cicek , Frederic Nabki
IPC分类号： G01P15/125 , B81C1/00 , G01R33/028 , B81B7/00
CPC分类号： G01P15/125 , B81B3/0021 , B81B7/008 , B81B2201/0221 , B81B2201/0235 , B81B2201/0292 , B81B2203/0109 , B81B2203/0307 , B81C1/00015 , B81C2203/0735 , B81C2203/0771 , G01P15/18 , G01P2015/084 , G01R33/0286
摘要： Considerations for selecting capacitive sensors include accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, integration options with other sensors and/or electronics, and cost effectiveness. It is beneficial if such sensors are amenable to above-IC integration with associated control/readout circuitry for reduced parasitics and reduced footprint through area sharing. The inventors have established a combined Lorentz force based magnetometer and accelerometer MEMS sensor exploiting a low temperature, above-IC-compatible fabrication process operating without requiring vacuum packaging. By switching an electrical current between two perpendicular directions on the device structure a 2D in-plane magnetic field measurement can be achieved whilst concurrently, the device serves as a 1D accelerometer for out-of-plane acceleration, by switching the current off and by monitoring the structure's capacitive change in response to acceleration. The design can thus separate magnetic and inertial force measurements, utilizing a single compact device.
摘要翻译：选择电容式传感器的注意事项包括精度，重复性，长期稳定性，校准容易性，对化学和物理污染物的抵抗力，尺寸，包装，与其他传感器和/或电子设备的集成选项以及成本效益。如果这样的传感器适合于与相关的控制/读出电路的IC集成以减少寄生效应并且通过区域共享来减少占地面积是有益的。本发明人已经建立了一种组合的洛仑兹力量磁力计和加速度计MEMS传感器，利用低温，高于IC的兼容制造工艺，而不需要真空包装。通过在器件结构上切换两个垂直方向之间的电流，可以在同时进行2D平面内磁场测量，同时通过切断电流和监测器件，作为用于超平面加速度的1D加速度计结构的电容变化响应加速度。因此，该设计可以利用单个紧凑装置分离磁力和惯性力测量。

5. 发明申请

US20150344292A1 MICRO ELECTRO MECHANICAL SYSTEMS COMPONENT AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：微电子机械系统组件及其制造方法
公开(公告)号：US20150344292A1
公开(公告)日：2015-12-03
申请号：US14307259
申请日：2014-06-17
申请人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人： Jung Won Lee , Jong Woon Kim , Seung Hun Han , Min Kyu Choi
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81B3/0021 , B81B2201/0235 , B81B2201/025 , B81B2203/0127 , B81C1/00158 , B81C2201/013 , G01P15/09 , G01P2015/084
摘要： Disclosed herein is a MEMS component including: a membrane; a mass body connected to the membrane; and a support connected to the membrane and supporting the mass body in a floated state to be displaced, wherein the membrane has an upper electrode and an upper piezoelectric material disposed on one side thereof and has a lower electrode and a lower piezoelectric material disposed on the other side thereof, based on an insulating adhesive layer.
摘要翻译：本文公开了一种MEMS部件，包括：膜; 连接到膜的质量体; 以及支撑体，其连接到所述膜并且以悬浮状态支撑所述质量体以被移位，其中所述膜具有设置在其一侧上的上电极和上压电材料，并且具有设置在所述膜上的下电极和下压电材料其另一侧，基于绝缘粘合剂层。

6. 发明授权

US08884385B2 Physical quantity sensor with son structure, and manufacturing method thereof 有权
标题翻译：具有子结构的物理量传感器及其制造方法
公开(公告)号：US08884385B2
公开(公告)日：2014-11-11
申请号：US13712062
申请日：2012-12-12
申请人： Fuji Electric Co., Ltd.
发明人： Mutsuo Nishikawa , Kazunori Saito
IPC分类号： G01L9/00 , H01L29/84 , H01L29/06 , G01P15/12 , G01P15/08
CPC分类号： H01L29/84 , G01L9/0042 , G01L9/0045 , G01L9/0048 , G01P15/123 , G01P2015/084 , H01L29/0649 , Y10S257/925
摘要： Provided by some aspects of the invention is a relatively low-cost, relatively highly accurate physical quantity sensor, and a manufacturing method thereof, that relaxes thermal stress from an outer peripheral portion of a diaphragm in a silicon-on-nothing (“SON”) structure. By providing a stress relaxation region (trench groove) in an outer peripheral portion of a diaphragm in a SON structure, there can be, in some aspects of the invention, a benefit of relaxing the transmission to the diaphragm of thermal stress generated by the difference in linear expansion coefficient between a package and chip, and it is possible to relax the transmission to an electronic circuit disposed in an outer peripheral portion of mechanical stress generated by a measured pressure. As a result of this, it is possible to provide a highly accurate physical quantity sensor.
摘要翻译：通过本发明的某些方面提供了一种相对低成本，相对高度精确的物理量传感器及其制造方法，其在无硅无极（“SON”）中松弛来自隔膜的外周部分的热应力，）结构体。通过在SON结构中的隔膜的外周部设置应力松弛区域（沟槽），在本发明的一些方面，可以有利于放松由隔膜产生的热应力对隔膜的传递在封装和芯片之间的线膨胀系数，并且可以放松到设置在由测量压力产生的机械应力的外周部分中的电子电路的传输。作为其结果，可以提供高精度的物理量传感器。

7. 发明申请

US20140300375A1 CAPACITANCE DETECTION CIRCUIT 有权
标题翻译：电容检测电路
公开(公告)号：US20140300375A1
公开(公告)日：2014-10-09
申请号：US14350808
申请日：2012-11-19
申请人： FUJI ELECTRIC CO., LTD.
发明人： Masami Kishiro
IPC分类号： G01R27/26 , G01P15/00
CPC分类号： G01R27/2605 , G01D5/2417 , G01P15/00 , G01P15/125 , G01P2015/082 , G01P2015/084 , H05K1/0256 , H05K3/3452 , H05K2201/09972 , H05K2201/10151
摘要： A capacitance detection circuit has at least a carrier signal generating circuit that supplies a carrier signal to one of a movable or a fixed electrode of a sensor, an operational amplifier with one of the movable or fixed electrode as an input and ground as another input, and a printed circuit board on which the physical quantity sensor, the carrier signal generating circuit, and the operational amplifier are mounted. An insulation-secured area on the printed circuit board is configured as a moisture absorption reduction area, including at least an electrode connection part of the physical quantity sensor, an input-side connection part of the operational amplifier, and a connection part connected to the input side of the operational amplifier out of connection parts of input-side circuit components connected between the electrode connection part and the input-side connection part.
摘要翻译：电容检测电路至少具有载波信号发生电路，其将载波信号提供给传感器的可移动或固定电极中的一个，可移动或固定电极之一作为输入的运算放大器作为另一输入，以及其上安装有物理量传感器，载波信号发生电路和运算放大器的印刷电路板。印刷电路板上的绝缘保护区域被构造为吸湿减少区域，该区域至少包括物理量传感器的电极连接部分，运算放大器的输入侧连接部分和连接部分连接在电极连接部和输入侧连接部之间的输入侧电路部件的连接部分的运算放大器的输入侧。

8. 发明申请

US20140144236A1 ACCELERATION SENSOR 审中-公开
标题翻译：加速传感器
公开(公告)号：US20140144236A1
公开(公告)日：2014-05-29
申请号：US13845094
申请日：2013-03-18
申请人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人： Chang Hyun Lim , Seung Hun Han , Jung Won Lee , Sung Jun Lee , Jeong Suong Yang
IPC分类号： G01P15/18
CPC分类号： G01P15/18 , G01P15/123 , G01P2015/084
摘要： Disclosed herein is an accelerator sensor, including: a mass body; a flexible beam that is provided with a piezoresistive element configured of an X-axis resistive element, a Y-axis resistive element, and a Z-axis resistive element having both ends connected with contact pads and is connected with the mass body; and a support portion that is connected with the flexible beam and supports the flexible beam so as to float the mass body, wherein the flexible beam has a slit provided between one-axis resistive element and the other axis resistive element adjacent to each other and the slit is extendedly formed from the contact pads connected with ends of the one axis resistive element and the other axis resistive element to the contact pads connected with the other ends thereof.
摘要翻译：这里公开了一种加速器传感器，包括：质量体; 具有由X轴电阻元件，Y轴电阻元件和Z轴电阻元件构成的压阻元件的柔性梁，其两端与接触焊盘连接并与质量体连接; 以及支撑部，其与柔性梁连接并支撑柔性梁以使质量体浮起，其中柔性梁具有设置在彼此相邻的一个轴电阻元件和另一个轴电阻元件之间的狭缝，狭缝从与单轴电阻元件的端部连接的接触焊盘和另一个轴电阻元件延伸地形成到与其另一端连接的接触焊盘。

9. 发明申请

US20140137670A1 DYNAMIC QUANTITY SENSOR AND DYNAMIC QUANTITY SENSOR SYSTEM 有权
标题翻译：动态数量传感器和动态数量传感器系统
公开(公告)号：US20140137670A1
公开(公告)日：2014-05-22
申请号：US14081732
申请日：2013-11-15
申请人： Toyota Jidosha Kabushiki Kaisha , Tohoku University , Kabushiki Kaisha Toyota Chuo Kenkyusho
发明人： Yoshiyuki Hata , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi , Teruhisa Akashi , Yoshiteru Omura , Takahiro Nakayama , Ui Yamaguchi , Hitoshi Yamada , Shuji Tanaka , Masayoshi Esashi , Masanori Muroyama , Mitsutoshi Makihata
IPC分类号： G01L1/04
CPC分类号： G01L1/144 , G01L1/148 , G01P15/125 , G01P15/18 , G01P2015/084
摘要： A dynamic quantity sensor includes a force receiving portion, a first movable portion that rotates in a first rotational direction around a first rotational axis according to dynamic quantity in a first direction that the force receiving portion receives, and rotates in the first rotational direction around the first rotational axis according to dynamic quantity in a second direction different from the first direction that the force receiving portion receives; and a second movable portion that rotates in a second rotational direction around a second rotational axis according to the dynamic quantity in the first direction that the force receiving portion receives, and rotates in an opposite direction to the second rotational direction around the second rotational axis according to the dynamic quantity in the second direction that the force receiving portion receives.
摘要翻译：动力传感器包括力接收部，第一可动部，其沿着第一旋转方向围绕第一旋转轴线，沿着受力部接收的第一方向上的动力量旋转，并且沿着第一旋转方向围绕第一旋转轴线，其在与受力部接收的第一方向不同的第二方向上的动量; 以及第二可动部，其沿第二旋转方向围绕第二旋转轴线旋转，根据受力部接收的第一方向的动量，沿与第二旋转轴相反的第二旋转方向相反的方向旋转，相对于力接收部接收的第二方向的动量。

10. 发明申请

US20140102194A1 TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERENTIAL OUTPUT SIGNALS 审中-公开
标题翻译：具有单个防伪质量和完全差异输出信号的三轴加速度计
公开(公告)号：US20140102194A1
公开(公告)日：2014-04-17
申请号：US13831040
申请日：2013-03-14
申请人： Robert Bosch GmbH
发明人： Zhiyu PAN , Christoph LANG , Gary YAMA , Matthias METZ , Markus ULM
IPC分类号： G01P15/09
CPC分类号： G01P15/09 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
摘要翻译：三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧包括感测单元。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式