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    • 2. 发明授权
    • Buried stripe type semiconductor laser device
    • 埋条式半导体激光器件
    • US5335241A
    • 1994-08-02
    • US751923
    • 1991-08-30
    • Toshiyuki OkumuraKazuhiko InoguchiFumihiro KonushiHaruhisa Takiguchi
    • Toshiyuki OkumuraKazuhiko InoguchiFumihiro KonushiHaruhisa Takiguchi
    • H01L33/00H01S5/22H01S5/227H01S5/323H01S3/19
    • H01S5/227H01L33/0062H01S5/2201H01S5/32391
    • A buried stripe type semiconductor laser device having a mesa stripe whose side faces are {111} facets and having a current confinement structure under epitaxial layers burying the mesa stripe is disclosed. The buried stripe type semiconductor laser device comprises a (100) semiconductor substrate having a stripe-shaped ridge in the direction, a multi-layer film of a double hetero structure formed on the upper surface of the stripe-shaped ridge. The mutil-layer film includes a laser oscillating active layer of a smaller width than that of the stripe-shaped ridge. The current confinement means are formed at both sides of the mesa stripe on the semiconductor substrate. In addition, a method of fabricating a buried stripe type semiconductor laser device having no raised portion above a mesa stripe of a substrate is disclosed. The laser device can be mounted in position with the epitaxial layer side down, without the mesa stripe being damaged or strained.
    • 公开了一种埋设条状半导体激光器件,其具有侧面为{111}面的台面条,并且在埋设台面条的外延层下具有电流限制结构。 掩埋条型半导体激光器件包括具有<011>方向上的条状脊的(100)半导体衬底,形成在条形脊的上表面上的双异质结的多层膜。 残膜层包括宽度小于条状脊的激光振荡活性层。 电流限制装置形成在半导体衬底上的台面条的两侧。 另外,公开了一种在衬底的台面条之上没有凸起部分的掩埋条状半导体激光器件的制造方法。 激光器件可以安装在外延层一侧的位置,而不会使台面条被损坏或变形。