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1. 发明授权

US06700916B1 E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems 失效
标题翻译：电子诊断，激光模拟器，用于光刻曝光辐射发生系统的光谱的自动测试和去卷积，例如准分子或分子氟激光或EUV源系统
公开(公告)号：US06700916B1
公开(公告)日：2004-03-02
申请号：US10259212
申请日：2002-09-26
申请人： Matthias Kramer , Günter Nowinski , Juergen Kleinschmidt , Marcus Serwazi
发明人： Matthias Kramer , Günter Nowinski , Juergen Kleinschmidt , Marcus Serwazi
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70525 , H01S3/036 , H01S3/08004 , H01S3/1055 , H01S3/134 , H01S3/1392 , H01S3/225
摘要： An E-Diagnostic system for monitoring a state of an excimer laser or molecular fluorine laser system includes a processing device and an interface. The processing device runs a program for outputting parameter requests to the laser system, receiving parameter values from the laser system in response to the parameter requests, and storing the parameter values such that a record of the state of the excimer or molecular fluorine laser system is kept. The interface signal-couples the processing device with the laser system permitting the outputting of the parameter requests and the receiving of the parameter values between the processing device and the laser system.
摘要翻译：用于监测准分子激光或分子氟激光系统的状态的电子诊断系统包括处理装置和界面。处理装置运行用于向激光系统输出参数请求的程序，响应于参数请求从激光系统接收参数值，并存储参数值，使得准分子或分子氟激光系统的状态记录为保持接口将处理装置与激光系统进行信号耦合，允许输出参数请求和接收处理装置与激光系统之间的参数值。

2. 发明授权

US06563853B2 Gas performance control system for gas discharge lasers 失效
公开(公告)号：US06563853B2
公开(公告)日：2003-05-13
申请号：US09842281
申请日：2001-04-24
申请人： Peter Heist , Matthias Kramer , Juergen Kleinschmidt , Sergei Govorkov , Marcus Serwazi , Thomas Jünemann
发明人： Peter Heist , Matthias Kramer , Juergen Kleinschmidt , Sergei Govorkov , Marcus Serwazi , Thomas Jünemann
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/038 , H01S3/134 , H01S3/22 , H01S3/225 , H01S3/2258
摘要： An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

3. 发明授权

US06597462B2 Laser wavelength and bandwidth monitor 失效
公开(公告)号：US06597462B2
公开(公告)日：2003-07-22
申请号：US09791496
申请日：2001-02-22
申请人： Matthias Kramer , Marcus Serwazi
发明人： Matthias Kramer , Marcus Serwazi
IPC分类号： G01B902
CPC分类号： G01J9/0246 , H01S3/1305 , H01S3/1392
摘要： A first method for determining the relative wavelength shift of a laser beam away from a known reference line, such as an absorption line of a gas in an opto-galvanic cell or a reference line of reference laser uses a monitor etalon. The FSR of the etalon used to calculate the wavelength shift is determined based on a calculated gap spacing between the etalon plates, or etalon constant. The gap spacing is determined based on a fit to measured values of wavelength deviations of the FSR as a function of the relative wavelength shift. The FSR used to calculate the wavelength shift is also based on the wavelength shift itself. A second method for measuring the absolute bandwidth and spectral purity of a tunable laser beam uses an opto-galvanic or absorption cell. The laser beam is directed to interact with a gas in the cell that undergoes an optical transition within the spectral tuning range of the laser. The beam is tuned through the optical transition line of the gas in the cell, and the opto-galvanic or absorption spectrum of the line is measured. The measured bandwidth and spectral purity are convoluted or broadened by the bandwidth of the laser beam used in the measurement. The bandwidth and spectral purity of the laser beam are determined based on the bandwidth and spectral purity, respectively, of the measured spectrum and a known correspondence between the measured convoluted bandwidth and spectral purity and the bandwidth and spectral purity, respectively, of the laser beam.

4. 发明授权

US06760358B1 Line-narrowing optics module having improved mechanical performance 失效
标题翻译：线变窄的光学模块具有改进的机械性能
公开(公告)号：US06760358B1
公开(公告)日：2004-07-06
申请号：US10141625
申请日：2002-05-07
申请人： Kay Zimmermann , Konstantin Aab , Matthias Kramer , Marcus Serwazi
发明人： Kay Zimmermann , Konstantin Aab , Matthias Kramer , Marcus Serwazi
IPC分类号： H01S308
CPC分类号： H01S3/106 , H01S3/02 , H01S3/1055
摘要： An apparatus for adjusting an orientation of an optical component mounted within a laser resonator with suppressed hysteresis includes an electromechanical device, a drive element, and a mechano-optical device coupled to the mounted optical component. The drive element is configured to contact and apply a force to the mechano-optical device in such a way as to adjust the orientation of the mechano-optical device, and thereby that of the optical component, to a known orientation within the laser resonator. The optical component is mounted such that stresses applied by the mount to the optical component are homogeneous and substantially thermally-independent.
摘要翻译：用于调节安装在具有抑制滞后的激光谐振器内的光学部件的取向的装置包括耦合到所安装的光学部件的机电装置，驱动元件和机械光学装置。驱动元件被配置为以机械光学装置的方式接触和施加力，以便将机械光学装置的方位从而调整到激光谐振器内的已知取向。安装光学部件，使得由安装件施加到光学部件的应力是均匀的并且基本上是热独立的。

5. 发明授权

US06735225B2 Chirp compensation method and apparatus 失效
标题翻译：啁啾补偿方法及装置
公开(公告)号：US06735225B2
公开(公告)日：2004-05-11
申请号：US10165766
申请日：2002-06-06
申请人： Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
发明人： Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
IPC分类号： H01S310
CPC分类号： H01S3/225 , H01S3/1055 , H01S3/1062
摘要： A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate wavelength chirp at beginnings of succeeding bursts.
摘要翻译：用于以突发模式操作的准分子或分子氟激光系统的波长啁啾补偿方法包括对激光系统谐振器调谐光调节器的计算机进行预编程，以在脉冲串之间的暂停期间进行调整以补偿在后续脉冲串开始时的波长啁啾。

6. 发明授权

US06476987B1 Excimer laser with line narrowing 失效
标题翻译：准分子激光线变窄
公开(公告)号：US06476987B1
公开(公告)日：2002-11-05
申请号：US09629256
申请日：2000-07-31
申请人： Juergen Kleinschmidt , Peter Heist , Matthias Kramer
发明人： Juergen Kleinschmidt , Peter Heist , Matthias Kramer
IPC分类号： G02B504
CPC分类号： G02B5/04 , H01S3/0811 , H01S3/223 , H01S3/225
摘要： A line narrowing unit for use within an excimer or molecular fluorine laser resonator includes a dispersive prism having antireflection coatings on entrance and exit surfaces. Entrance and exit angles and an apex angle are increased to enhance the dispersive power of the prism, while the antireflective coatings limit reflective losses. Preferably, a laser beam makes a non-symmetric pass through said prism. The apex angle is preferably greater than 65°, or even 75°, and the angle of incidence and the exit angle of the beam are each preferably greater than 65°. A beam expanding prism configured for enhanced beam expansion has an apex angle between within a range of 37.5° and 42.5°, and a beam incidence angle at the entrance surface of more than 65°, and an antireflection coating on preferably both the entrance and exit surfaces.
摘要翻译：在准分子或分子氟激光谐振器内使用的线窄化单元包括在入射和出射表面上具有抗反射涂层的分散棱镜。增加出入角和顶角以增强棱镜的分散力，而抗反射涂层则限制了反射损耗。优选地，激光束使不对称通过所述棱镜。顶角优选大于65°或甚至75°，并且梁的入射角和出射角各自优选地大于65°。配置用于增强光束膨胀的光束扩张棱镜具有在37.5°和42.5°之间的范围内的顶角和大于65°的入射面处的光束入射角，并且优选地，入射和出射两者的抗反射涂层表面。

7. 发明授权

US07075963B2 Tunable laser with stabilized grating 失效
公开(公告)号：US07075963B2
公开(公告)日：2006-07-11
申请号：US09771366
申请日：2001-01-25
申请人： Dirk Basting , Wolfgang Zschocke , Thomas Schröeder , Juergen Kleinschmidt , Matthias Kramer , Uwe Stamm
发明人： Dirk Basting , Wolfgang Zschocke , Thomas Schröeder , Juergen Kleinschmidt , Matthias Kramer , Uwe Stamm
IPC分类号： H01S3/22
CPC分类号： H01S3/08009 , H01S3/08004 , H01S3/1055 , H01S3/106 , H01S3/1062 , H01S3/225
摘要： A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating and/or other elements of the line-narrowing module. The pressure in the enclosure is adjusted for tuning the wavelength. Preferably, the pressure is controlled by controlling the flow of an inert gas through the enclosure. A pump may be used, or an overpressure flow may be used. Alternatively, a prism of the beam expander or an etalon may be rotatable for tuning the wavelength.

8. 发明授权

US08203784B2 Multispectral lighting apparatus 有权
标题翻译：多光照明装置
公开(公告)号：US08203784B2
公开(公告)日：2012-06-19
申请号：US12445132
申请日：2007-10-06
申请人： Andreas Nolte , Matthias Kramer , Michael Brehm , Christian Boeker
发明人： Andreas Nolte , Matthias Kramer , Michael Brehm , Christian Boeker
IPC分类号： G02B21/06 , F21V9/00
CPC分类号： G02B27/1006 , G01J3/02 , G01J3/0208 , G01J3/10 , G01N21/6458 , G02B21/16 , G02B27/145
摘要： The invention is directed to a multispectral illumination device for a microscope or for a reader. According to the invention, the illumination device comprises at least three receptacle positions for lighting modules and at least one receptacle position for coupling modules, the mechanical devices for connecting the lighting modules or coupling modules at the receptacle positions to the illumination device being designed in such a way that the lighting modules or coupling modules can be easily changed. Further, the receptacle positions are arranged in such a way that, with suitable selection of the lighting modules and coupling modules, all individual spectra of the lighting modules in a total spectrum are available simultaneously at the output of the illumination device.
摘要翻译：本发明涉及用于显微镜或读取器的多光谱照明装置。根据本发明，照明装置包括用于照明模块的至少三个插座位置和用于耦合模块的至少一个插座位置，用于将插座位置处的照明模块或耦合模块连接到照明装置的机械装置被设计为照明模块或耦合模块可以方便地更换的方式。此外，插座位置被布置成使得通过适当地选择照明模块和耦合模块，总体光谱中的照明模块的所有单独光谱可在照明装置的输出处同时获得。

9. 发明申请

US20060109459A1 Microscope with laser light source and protective device for preventing eye damage 有权
标题翻译：具有激光光源的显微镜和防止眼睛损伤的保护装置
公开(公告)号：US20060109459A1
公开(公告)日：2006-05-25
申请号：US11254879
申请日：2005-10-19
申请人： Matthias Kramer , Bruene Venus
发明人： Matthias Kramer , Bruene Venus
IPC分类号： G01J3/44
CPC分类号： G02B21/0076 , G02B5/223
摘要： The invention is directed to a microscope in which laser light is used to irradiate a sample to be examined and which is outfitted with a protective device for preventing eye damage due to laser light. It is the object of the invention to provide a protective device for microscopes of the type described above which ensures protection against eye damage and visibility of the sample. According to the invention, the protective device has at least one area which is not transparent to harmful radiation components, but which is transparent to harmless, visible radiation components, so that an observer can see the sample through this area without risk of eye damage.
摘要翻译：本发明涉及一种显微镜，其中使用激光照射被检样品，并配备有用于防止由于激光引起的眼睛损伤的保护装置。本发明的目的是提供一种用于上述类型的显微镜的保护装置，其确保防止眼睛损伤和样品的可见性。根据本发明，保护装置具有至少一个对有害辐射部件不透明但对无害的可见辐射分量透明的区域，使得观察者可以通过该区域观察样品，而没有眼睛损伤的风险。

10. 发明申请

US20100137599A1 PROCESS FOR PREPARING 1,4-BUTANDIOL MONITRATE 审中-公开
标题翻译：制备1,4-丁二醇监测剂的方法
公开(公告)号：US20100137599A1
公开(公告)日：2010-06-03
申请号：US12665664
申请日：2008-06-18
申请人： Achim Hack , Gunter Weingarner , Matthias Kramer
发明人： Achim Hack , Gunter Weingarner , Matthias Kramer
IPC分类号： C07D491/04 , C07C205/00 , C07C69/003 , C07C69/66 , C07D491/052 , C07D231/10 , C07D207/30 , C07D261/06 , C07C229/00 , C07D487/02 , C07C381/00 , C07D209/04 , C07D333/22 , C07D209/44 , C07D209/82 , C07D313/10 , C07D337/12
CPC分类号： C07C201/02 , C07C67/08 , C07C227/18 , C07C315/04 , C07C2601/08 , C07C2601/14 , C07C2602/08 , C07D207/337 , C07D209/18 , C07D209/46 , C07D209/86 , C07D231/12 , C07D261/08 , C07D313/14 , C07D333/24 , C07D337/14 , C07D487/04 , C07D491/04 , C07C69/003 , C07C317/44 , C07C229/42 , C07C69/28 , C07C203/04
摘要： The present invention relates to a process for the preparation of 1,4-butanediol mononitrate as intermediate for large scale preparation of high purity nitrooxybutyl ester of pharmaceutically active compounds.
摘要翻译：本发明涉及一种制备1,4-丁二醇单硝酸酯作为大规模制备药学活性化合物的高纯度硝基氧丁基酯的中间体的方法。

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