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1. 发明授权

US06597462B2 Laser wavelength and bandwidth monitor 失效
公开(公告)号：US06597462B2
公开(公告)日：2003-07-22
申请号：US09791496
申请日：2001-02-22
申请人： Matthias Kramer , Marcus Serwazi
发明人： Matthias Kramer , Marcus Serwazi
IPC分类号： G01B902
CPC分类号： G01J9/0246 , H01S3/1305 , H01S3/1392
摘要： A first method for determining the relative wavelength shift of a laser beam away from a known reference line, such as an absorption line of a gas in an opto-galvanic cell or a reference line of reference laser uses a monitor etalon. The FSR of the etalon used to calculate the wavelength shift is determined based on a calculated gap spacing between the etalon plates, or etalon constant. The gap spacing is determined based on a fit to measured values of wavelength deviations of the FSR as a function of the relative wavelength shift. The FSR used to calculate the wavelength shift is also based on the wavelength shift itself. A second method for measuring the absolute bandwidth and spectral purity of a tunable laser beam uses an opto-galvanic or absorption cell. The laser beam is directed to interact with a gas in the cell that undergoes an optical transition within the spectral tuning range of the laser. The beam is tuned through the optical transition line of the gas in the cell, and the opto-galvanic or absorption spectrum of the line is measured. The measured bandwidth and spectral purity are convoluted or broadened by the bandwidth of the laser beam used in the measurement. The bandwidth and spectral purity of the laser beam are determined based on the bandwidth and spectral purity, respectively, of the measured spectrum and a known correspondence between the measured convoluted bandwidth and spectral purity and the bandwidth and spectral purity, respectively, of the laser beam.

2. 发明授权

US06563853B2 Gas performance control system for gas discharge lasers 失效
公开(公告)号：US06563853B2
公开(公告)日：2003-05-13
申请号：US09842281
申请日：2001-04-24
申请人： Peter Heist , Matthias Kramer , Juergen Kleinschmidt , Sergei Govorkov , Marcus Serwazi , Thomas Jünemann
发明人： Peter Heist , Matthias Kramer , Juergen Kleinschmidt , Sergei Govorkov , Marcus Serwazi , Thomas Jünemann
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/038 , H01S3/134 , H01S3/22 , H01S3/225 , H01S3/2258
摘要： An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

3. 发明授权

US06760358B1 Line-narrowing optics module having improved mechanical performance 失效
标题翻译：线变窄的光学模块具有改进的机械性能
公开(公告)号：US06760358B1
公开(公告)日：2004-07-06
申请号：US10141625
申请日：2002-05-07
申请人： Kay Zimmermann , Konstantin Aab , Matthias Kramer , Marcus Serwazi
发明人： Kay Zimmermann , Konstantin Aab , Matthias Kramer , Marcus Serwazi
IPC分类号： H01S308
CPC分类号： H01S3/106 , H01S3/02 , H01S3/1055
摘要： An apparatus for adjusting an orientation of an optical component mounted within a laser resonator with suppressed hysteresis includes an electromechanical device, a drive element, and a mechano-optical device coupled to the mounted optical component. The drive element is configured to contact and apply a force to the mechano-optical device in such a way as to adjust the orientation of the mechano-optical device, and thereby that of the optical component, to a known orientation within the laser resonator. The optical component is mounted such that stresses applied by the mount to the optical component are homogeneous and substantially thermally-independent.
摘要翻译：用于调节安装在具有抑制滞后的激光谐振器内的光学部件的取向的装置包括耦合到所安装的光学部件的机电装置，驱动元件和机械光学装置。驱动元件被配置为以机械光学装置的方式接触和施加力，以便将机械光学装置的方位从而调整到激光谐振器内的已知取向。安装光学部件，使得由安装件施加到光学部件的应力是均匀的并且基本上是热独立的。

4. 发明授权

US06700916B1 E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems 失效
标题翻译：电子诊断，激光模拟器，用于光刻曝光辐射发生系统的光谱的自动测试和去卷积，例如准分子或分子氟激光或EUV源系统
公开(公告)号：US06700916B1
公开(公告)日：2004-03-02
申请号：US10259212
申请日：2002-09-26
申请人： Matthias Kramer , Günter Nowinski , Juergen Kleinschmidt , Marcus Serwazi
发明人： Matthias Kramer , Günter Nowinski , Juergen Kleinschmidt , Marcus Serwazi
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70525 , H01S3/036 , H01S3/08004 , H01S3/1055 , H01S3/134 , H01S3/1392 , H01S3/225
摘要： An E-Diagnostic system for monitoring a state of an excimer laser or molecular fluorine laser system includes a processing device and an interface. The processing device runs a program for outputting parameter requests to the laser system, receiving parameter values from the laser system in response to the parameter requests, and storing the parameter values such that a record of the state of the excimer or molecular fluorine laser system is kept. The interface signal-couples the processing device with the laser system permitting the outputting of the parameter requests and the receiving of the parameter values between the processing device and the laser system.
摘要翻译：用于监测准分子激光或分子氟激光系统的状态的电子诊断系统包括处理装置和界面。处理装置运行用于向激光系统输出参数请求的程序，响应于参数请求从激光系统接收参数值，并存储参数值，使得准分子或分子氟激光系统的状态记录为保持接口将处理装置与激光系统进行信号耦合，允许输出参数请求和接收处理装置与激光系统之间的参数值。

5. 发明授权

US06735225B2 Chirp compensation method and apparatus 失效
标题翻译：啁啾补偿方法及装置
公开(公告)号：US06735225B2
公开(公告)日：2004-05-11
申请号：US10165766
申请日：2002-06-06
申请人： Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
发明人： Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
IPC分类号： H01S310
CPC分类号： H01S3/225 , H01S3/1055 , H01S3/1062
摘要： A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate wavelength chirp at beginnings of succeeding bursts.
摘要翻译：用于以突发模式操作的准分子或分子氟激光系统的波长啁啾补偿方法包括对激光系统谐振器调谐光调节器的计算机进行预编程，以在脉冲串之间的暂停期间进行调整以补偿在后续脉冲串开始时的波长啁啾。

6. 发明授权

US06549555B2 Gas performance control system for gas discharge lasers 失效
公开(公告)号：US06549555B2
公开(公告)日：2003-04-15
申请号：US09865908
申请日：2001-05-24
申请人： Marcus Serwazi , Thomas Jünemann
发明人： Marcus Serwazi , Thomas Jünemann
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/038 , H01S3/134 , H01S3/22 , H01S3/225 , H01S3/2258
摘要： An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

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