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    • 4. 发明授权
    • Ceramic probe card and method for reducing leakage current
    • 陶瓷探针卡和减少漏电流的方法
    • US5532608A
    • 1996-07-02
    • US417623
    • 1995-04-06
    • Abbas Behfar-RadCharles H. PerryKrishna G. Sachdev
    • Abbas Behfar-RadCharles H. PerryKrishna G. Sachdev
    • G01R31/26G01R1/073H05K3/28H05K9/00G01R15/12
    • G01R1/07307
    • An electrical probe card for parametric testing of microelectronics having reduced leakage current, includes a hydrophobic layer of a self curing silicone material coating the entire exposed surface of the ceramic card between exposed conductors. The hydrophobic layer has a thickness of less than 1 micrometer, preferably less than 0.1 micrometer and most preferably between 0.01 and 0.001 micrometers. The hydrophobic layer does not interfere with subsequent soldering to the contacts on the card, is inexpensive, solvent resistant and easily applied to new and pre-existing probe cards. The method of application involves applying an excess of the hydrophobic silicone material in its uncured state, followed by vigorously wiping excess material off to thin the layer, produce a good bond and clean the exposed conductors on the probe card.
    • 用于具有减小的漏电流的微电子学参数测试的电探针卡包括在裸露导体之间涂覆陶瓷卡的整个暴露表面的自固化硅氧烷材料的疏水层。 疏水层的厚度小于1微米,优选小于0.1微米,最优选为0.01至0.001微米。 疏水层不会干扰随后焊接到卡上的触点,价格低廉,耐溶剂性,并且易于应用于新的和预先存在的探针卡。 施用方法包括将过量的疏水性硅氧烷材料应用于其未固化状态,然后剧烈擦拭多余的材料以使层变薄,产生良好的粘结并清洁探针卡上的暴露的导体。