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1. 发明申请

US20070180889A1 Probe replacement method for scanning probe microscope 审中-公开
标题翻译：用于扫描探针显微镜的探头更换方法
公开(公告)号：US20070180889A1
公开(公告)日：2007-08-09
申请号：US10565509
申请日：2004-03-22
申请人： Ken Murayama , Yokio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Takashi Furutani
发明人： Ken Murayama , Yokio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Takashi Furutani
IPC分类号： G12B21/00 , G01N13/10
CPC分类号： G01Q10/06 , G01Q30/06 , G01Q70/02
摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.
摘要翻译：一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。在第一步中，从悬臂盒中选择悬臂，并安装在悬臂安装座上。在第二步骤中，移动光学显微镜，并且在将悬臂安装在扫描探针显微镜中之后，将安装的悬臂设置在视野中的规定位置。在第二步骤中，提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。

2. 发明授权

US07350404B2 Scanning type probe microscope and probe moving control method therefor 失效
标题翻译：扫描型探针显微镜及探头移动控制方法
公开(公告)号：US07350404B2
公开(公告)日：2008-04-01
申请号：US10569373
申请日：2004-08-27
申请人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
发明人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
IPC分类号： G21K7/00 , G01B5/18
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
摘要翻译：扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。

3. 发明申请

US20050012936A1 Scanning probe microscope and measurement method using the same 失效
标题翻译：扫描探针显微镜和测量方法使用相同
公开(公告)号：US20050012936A1
公开(公告)日：2005-01-20
申请号：US10893364
申请日：2004-07-19
申请人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号： G01B21/30 , G01B11/24 , G01B11/30 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q30/20 , G01Q60/24 , H01L21/66
CPC分类号： G01Q20/02 , G01Q30/06 , G01Q70/04
摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译：扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面样品。上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中，通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配测量姿势。

4. 发明授权

US07333191B2 Scanning probe microscope and measurement method using the same 失效
标题翻译：扫描探针显微镜和测量方法使用相同
公开(公告)号：US07333191B2
公开(公告)日：2008-02-19
申请号：US10893364
申请日：2004-07-19
申请人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号： G01B1/00
CPC分类号： G01Q20/02 , G01Q30/06 , G01Q70/04
摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译：扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面样品。上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中，通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配测量姿势。

5. 发明授权

US07388199B2 Probe manufacturing method, probe, and scanning probe microscope 失效
标题翻译：探针制造方法，探头和扫描探针显微镜
公开(公告)号：US07388199B2
公开(公告)日：2008-06-17
申请号：US10570198
申请日：2004-09-03
申请人： Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
发明人： Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
IPC分类号： G21K7/00
CPC分类号： G01Q70/12
摘要： A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.
摘要翻译：通过将碳纳米管12附着到安装基端13上，从而消除碳污染膜的影响，提高接合强度，提高探针的导电性，并通过涂覆全部纳米管的周长和基底与涂膜，而不是仅涂覆一面。在显微镜观察下进行安装碳纳米管和安装基端的工作。此外，通过电子显微镜形成的碳污染膜14在通过涂膜粘合之前的阶段被剥离。

6. 发明申请

US20060284083A1 Scanning type probe microscope and probe moving control method therefor 失效
标题翻译：扫描型探针显微镜及探头移动控制方法
公开(公告)号：US20060284083A1
公开(公告)日：2006-12-21
申请号：US10569373
申请日：2004-08-27
申请人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Yuuichi , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
发明人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Yuuichi , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
IPC分类号： G21K7/00
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
摘要翻译：扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。

7. 发明申请

US20060284084A1 Probe manufacturing method, probe, and scanning probe microsope 失效
标题翻译：探头制造方法，探针和扫描探针微孔
公开(公告)号：US20060284084A1
公开(公告)日：2006-12-21
申请号：US10570198
申请日：2004-09-03
申请人： Takafumi Morimoto , Tooru Seinaki , Yoshiyuki Nag-No , Yukio Kenbou , Yuuichi Xunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashirara , Kishio Hidaka , Tadashi Fujieda
发明人： Takafumi Morimoto , Tooru Seinaki , Yoshiyuki Nag-No , Yukio Kenbou , Yuuichi Xunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashirara , Kishio Hidaka , Tadashi Fujieda
IPC分类号： G21K7/00
CPC分类号： G01Q70/12
摘要： A method of producing a probe by attaching a carbon nanotube etc. to a mounting base end and bonding it there using a carbon film etc., which method of producing a probe eliminates the effects of a carbon contamination film to increase the bonding strength, increases the conductivity of the probe, and strengthens the bonding performance by coating the entire circumference rather than coating one side, the probe, and a scanning probe microscope are provided. The method of producing a probe is a method of producing a probe comprised of a carbon nanotube 12, a mounting base ends 13 holding this carbon nanotube, and a coating film 17 bonding the carbon nanotube to a mounting base, comprising performing the mounting work of the carbon nanotube and mounting base end under observation by a microscope and stripping off the carbon contamination film 14 formed by an electron microscope at a stage before bonding by the coating film.
摘要翻译：通过使用碳膜等将碳纳米管等附接到安装基端并在其上进行接合来制造探针的方法，制造探针的方法消除了碳污染膜的作用，增加了接合强度，增加了提供探针的导电性，并且通过涂覆整个周边而不是涂覆一侧，探针和扫描探针显微镜来增强粘合性能。制造探针的方法是制造由碳纳米管12，保持该碳纳米管的安装基端13和将碳纳米管粘合到安装基底的涂膜17的探针的制造方法，其特征在于，碳纳米管和安装基端通过显微镜观察，并在通过涂膜粘合之前的阶段剥离由电子显微镜形成的碳污染膜14。

8. 发明申请

US20080236259A1 Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope 审中-公开
标题翻译：探针扫描控制方法及扫描探针显微镜探头扫描控制装置
公开(公告)号：US20080236259A1
公开(公告)日：2008-10-02
申请号：US11660271
申请日：2005-08-18
申请人： Tooru Kurenuma , Yukio Kenbou , Hiroaki Yanagimoto , Hiroshi Kuroda , Takafumi Morimoto
发明人： Tooru Kurenuma , Yukio Kenbou , Hiroaki Yanagimoto , Hiroshi Kuroda , Takafumi Morimoto
IPC分类号： G01B5/28
CPC分类号： G01Q10/065
摘要： A scanning probe microscope provided with a cantilever 21 having a probe 20 facing a sample 12, a measurement unit 24 measuring a physical quantity occurring between the probe and sample, and movement mechanisms 11, 29 changing a positional relationship between the probe and sample to cause a scanning operation and making the probe scan the surface of the sample by the movement mechanism and measure the surface of the sample by the measurement unit. This method is provided with a step of feeding the probe in a direction along the surface of the sample at a position separate from the surface at certain distances, a step of making the probe approach the sample at each of a plurality of measurement points determined at certain distances and perform measurement to obtain measurement values, then retract, and a step setting a measurement point at a position between a certain measurement point and next measurement point for measurement when a difference between a measurement value at the certain measurement point and a measurement value at the next measurement point is larger than a reference value.
摘要翻译：具有悬臂21的扫描探针显微镜，其具有面向样品12的探针20，测量在探针和样品之间发生的物理量的测量单元24和改变探针与样品之间的位置关系的移动机构11,29，扫描操作并使探针通过移动机构扫描样品的表面，并通过测量单元测量样品的表面。该方法具有以下步骤：沿着与样品表面在一定距离处分开的位置沿着样品表面的方向进给探针，使得探针在多个测量点中的每一个测量点处接近样品的步骤一定距离并进行测量以获得测量值，然后缩回，并且当在某个测量点处的测量值与测量值之间的差异时，将某个测量点和下一测量点之间的位置处的测量点设置为测量点在下一个测量点大于参考值。

9. 发明授权

US06229607B1 Fine movement mechanism unit and scanning probe microscope 失效
标题翻译：精细运动机构单元和扫描探针显微镜
公开(公告)号：US06229607B1
公开(公告)日：2001-05-08
申请号：US09182048
申请日：1998-10-29
申请人： Takashi Shirai , Ken Murayama , Takafumi Morimoto , Hiroshi Kuroda , Harumasa Onozato
发明人： Takashi Shirai , Ken Murayama , Takafumi Morimoto , Hiroshi Kuroda , Harumasa Onozato
IPC分类号： G01B1114
CPC分类号： G01Q10/04 , Y10S977/87
摘要： A fine movement mechanism unit is configured by a supporting member, two fixed sections fixed to this supporting member, two pairs of parallel-plate flexural sections disposed between the two fixed sections, an X fine movement mechanism, a Y fine movement mechanism, and a Z fine movement mechanism. The X fine movement mechanism has an X moving section movable in an X direction, connected to each of the two fixed sections through the two pairs of parallel-plate flexural sections, and two X direction piezoelectric actuators causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections, a Y moving section movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator causing the Z moving section to move.
摘要翻译：精细运动机构单元由支撑构件构成，固定在该支撑构件上的两个固定部，设置在两个固定部之间的两对平行板弯曲部，X微移动机构，Y细移动机构和 Z精细机芯。 X精细机构具有可沿X方向移动的X移动部，通过两对平行板弯曲部连接到两个固定部中的每一个，以及使X移动部移动的两个X方向压电致动器。设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分，Y方向移动的Y移动部分，通过另外两对平行板弯曲部分连接到X移动部分以及两个Y方向的压电致动器，其使Y移动部相对于X移动部移动。配置在Y移动部上的Z细移动机构具有能够沿与X方向和Y方向垂直的Z方向移动的Z移动部，Z方向的压电致动器使Z移动部移动。

10. 发明授权

US06278113B1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US06278113B1
公开(公告)日：2001-08-21
申请号：US09166790
申请日：1998-10-06
申请人： Ken Murayama , Takashi Shirai , Takafumi Morimoto , Hiroshi Kuroda , Harumasa Onozato , Tsuyoshi Nishigaki
发明人： Ken Murayama , Takashi Shirai , Takafumi Morimoto , Hiroshi Kuroda , Harumasa Onozato , Tsuyoshi Nishigaki
IPC分类号： H01J3720
CPC分类号： G01Q10/02 , G01Q10/04 , G01Q30/06 , H01J2237/20221 , Y10S977/872
摘要： A scanning probe microscope is provided with a probe tip directed to a sample surface, an XYZ fine movement mechanism for providing a relative positional change between the sample and the probe tip, and a displacement detecting section for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism. Further, it comprises a moving section arranged on a standard surface of a microscope stage, which has the sample on an upper surface and moves along the standard surface based on a static pressure guide, a height-position control section for selectively supplying high-pressure fluid to the moving section so as to carry out the static pressure guide and controlling the height-position of the moving section to the standard surface, and an actuating mechanism for moving the moving section in directions parallel to the standard surface.
摘要翻译：扫描探针显微镜设置有指向样品表面的探针尖端，用于提供样品和探针尖端之间的相对位置变化的XYZ精细运动机构，以及用于检测探针尖端的位移的位移检测部。扫描探针显微镜通过使用控制信号测量样品的表面特性。该控制信号是从位移检测部输出的信号生成的，并且用于保持样品与探针尖端之间产生的相互作用的状态与预定状态相同，同时探针尖端基于样品的表面扫描关于XYZ精细机芯的操作。此外，它包括布置在显微镜载物台的标准表面上的移动部分，其具有在上表面上的样品并且基于静压导向件沿着标准表面移动;高度位置控制部分，用于选择性地供应高压流体移动到移动部分，以便执行静压引导件并将移动部分的高度位置控制到标准表面;以及致动机构，用于沿平行于标准表面的方向移动移动部分。

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