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    • 1. 发明申请
    • SCANNING PROBE MICROSCOPE AND ACTIVE DAMPING DRIVE CONTROL DEVICE
    • 扫描探针显微镜和主动阻尼驱动控制装置
    • US20090276924A1
    • 2009-11-05
    • US12439700
    • 2007-07-27
    • Toshio Ando
    • Toshio Ando
    • G12B21/00
    • G01Q10/065
    • There is provided a scanning probe microscope that allows active damping to be advantageously carried out.A Z scan control section functions as a driving control section to control a Z scanner that is a controlled object. Driving control is performed by supplying the controlled object with a driving signal processed by an adjustment function. The adjustment function adjusts the driving signal by using a simulated transfer function that simulates an actual transfer function indicative of an actual frequency characteristic of the controlled object so that executing processing of the simulated transfer function on the adjusted driving signal results in decrease of vibration of an output signal from the simulated transfer function. The adjustment function processing is configured so as to execute processing of the simulated transfer function G(s) on the driving signal, to execute processing of an inverse target transfer function K(s) corresponding to the inverse of the target transfer function on an output from the G(s), to determine the difference between the driving signal and the output of K(s), to apply a gain g to the difference, and to add the signal after the gain is applied to the driving signal. Therefore, the output from the G(s) approximates to the target transfer function which is the inverse of the K(s).
    • 提供了可以有利地进行主动阻尼的扫描探针显微镜。 Z扫描控制部分用作驱动控制部分,以控制作为受控对象的Z扫描器。 通过向受控对象提供通过调整功能处理的驱动信号来执行驱动控制。 调整功能通过模拟传递函数来调整驱动信号,模拟传递函数模拟表示受控对象的实际频率特性的实际传递函数,使得对调整后的驱动信号执行模拟传递函数的处理导致 输出信号从模拟传递函数。 调整功能处理被配置为执行对驱动信号的仿真传递函数G(s)的处理,以在输出上执行对应于目标传递函数的倒数的反目标传递函数K(s)的处理 从G(s)开始,确定驱动信号和K(s)的输出之间的差异,以将增益g应用于该差值,并且将增益应用于驱动信号后加上该信号。 因此,G(s)的输出近似于K(s)的倒数的目标传递函数。
    • 8. 发明申请
    • Digital control of quality factor in resonant systems including cantilever based instruments
    • 谐振系统中的质量因数的数字控制,包括基于悬臂的仪器
    • US20050188752A1
    • 2005-09-01
    • US10926787
    • 2004-08-25
    • Dan BocekJason Cleveland
    • Dan BocekJason Cleveland
    • G01Q30/06G01Q60/32G01Q60/34G05B15/00G12B21/00G01N13/10
    • G01Q60/34G01Q60/32
    • a digital system for controlling the quality factor in a resonant device. The resonant device can be any mechanically driven resonant device, but more particularly can be a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. One of the controls can use a direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives eight lookup table to produce a cosine or sign output wave. The output wave is created, but the number is also adjusted to form a second number of the drives a second lookup table to create an adjustment factor. The adjustment factor is used to adjusts the output from the cosine table, to create an adjusted digital signal. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.
    • 用于控制谐振装置中的品质因数的数字系统。 谐振装置可以是任何机械驱动的谐振装置,但更具体地可以是在其系统内包括悬臂的装置,例如原子力显微镜。 质量因数可以数字控制,以避免模拟组件中的噪声影响。 其中一个控件可以使用以提供对相位累加器的输出的访问的方式实现的直接数字合成器。 该输出是通常驱动八个查找表产生余弦或符号输出波的数字。 创建输出波,但也调整该数量以形成第二数量的驱动器第二查找表以创建调整因子。 调整因子用于调整余弦值的输出,以创建调整后的数字信号。 调整后的数字信号驱动DA转换器,产生悬臂的输出驱动。
    • 9. 发明申请
    • Afm cantilevers and methods for making and using same
    • Afm悬臂和制造和使用相同的方法
    • US20050011256A1
    • 2005-01-20
    • US10478394
    • 2002-03-29
    • Jan Hoh
    • Jan Hoh
    • G01Q60/40G01Q70/12G01Q70/14G01Q70/16G12B21/00B82B3/00G01N13/10
    • G01Q60/38
    • The invention provides high performance cantilevers with optimal combinations of high resonant frequency and low force constant. In one aspect, AFM cantilevers with spring constants in the range 1-10−6 N/m with (fundamental) resonant frequencies in aqueous solutions of 0.1-100 MHz are provided. A high performance cantilever may be made by focused ion beam milling or electron deposition. The high performance cantilevers allow faster scanning, increase the temporal resolution of force measurement, improve measurement sensitivity by reducing cantilever noise, and improve sensitivity by reducing cantilever spring constant.
    • 本发明提供了具有高谐振频率和低力常数的最佳组合的高性能悬臂。 在一个方面,提供弹簧常数在1-10 -6 N / m范围内的AFM悬臂,其中0.1-100MHz的水溶液中的(基本)共振频率。 可以通过聚焦离子束研磨或电子沉积来制造高性能悬臂。 高性能悬臂允许更快的扫描,增加力测量的时间分辨率,通过减小悬臂噪声来提高测量灵敏度,并通过减小悬臂弹簧常数来提高灵敏度。
    • 10. 发明授权
    • Radio-frequency reflectometry scanning tunneling microscope
    • 射频反射扫描隧道显微镜
    • US08863311B1
    • 2014-10-14
    • US14037024
    • 2013-09-25
    • National Taiwan University
    • Woei-Wu PaiHuan-Hsin LiI-Jan Chen
    • G12B21/00G01Q60/16
    • G01Q60/16
    • An RF reflectometry scanning tunneling microscope is suitable for observing a surface of an object, and includes a probe that cooperates with the object to form a tunneling resistor therebetween, an RF resonant circuit that cooperates with the tunneling resistor to form a LCR resonant circuit including an inductor connected to a parallel connection of a capacitor, a resistor and the tunneling resistor, an RF signal generator that outputs an RF signal via a directional coupler to the LCR resonant circuit, and an RF signal measuring device that generates a scanning result associated with the surface of the object based on a reflected RF signal resulting from reflection of the RF signal by the LCR resonant circuit.
    • RF反射扫描隧道显微镜适用于观察物体的表面,并且包括与物体配合以在其间形成隧道电阻的探针,与隧道电阻器配合的RF谐振电路,以形成LCR谐振电路,其包括 电感器连接到电容器,电阻器和隧道电阻器的并联连接器,经由定向耦合器向LCR谐振电路输出RF信号的RF信号发生器,以及RF信号测量装置,其产生与 基于由LCR谐振电路反射RF信号而产生的反射RF信号,物体的表面。