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1. 发明授权

US5142029A Silver halide photographic material containing a compound with variable development restraining ability 失效
标题翻译：含有可变发展限制能力的化合物的银色摄影材料
公开(公告)号：US5142029A
公开(公告)日：1992-08-25
申请号：US741229
申请日：1991-08-05
申请人： Keiichi Adachi , Shingo Sato , Shigeo Hirano , Koki Nakamura , Morio Yagihara , Isamu Ito , Tadashi Ikeda , Kenichi Kuwabara
发明人： Keiichi Adachi , Shingo Sato , Shigeo Hirano , Koki Nakamura , Morio Yagihara , Isamu Ito , Tadashi Ikeda , Kenichi Kuwabara
IPC分类号： C07C51/15 , C07C65/17 , C07D249/20 , C07D257/04 , C07D403/06 , G03C1/43 , G03C7/305
CPC分类号： C07D257/04 , C07C317/00 , C07C51/15 , C07C65/17 , C07D249/20 , C07D403/06 , G03C1/43 , G03C7/305 , G03C2005/168 , G03C7/30541 , Y10S430/156 , Y10S430/158
摘要： The compounds in a preferred form are represented by general formula (I): ##STR1## wherein A and A' are each a group which can be hydrolyzed by hydrogen or alkali; X, Y and Z are each hydrogen, a halogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted aryl group, a thioalkyl group or an electron-withdrawing group; PUG is a group released by a reaction with a light-exposed silver halide and/or the oxidized product of the developing agent, Time is a timing group; Time.sub.t PUG is a group released as .crclbar.TimePUG first when the oxidation-reduction moiety causes a cross reaction during the development and becomes an oxidized product, and is bonded to the benzene nucleus via a sulfur atom, a nitrogen atom or a selenium atom; and t is 0 or 1.
摘要翻译：优选形式的化合物由通式（I）表示：其中A和A'各自是可以被氢或碱水解的基团; X，Y和Z各自为氢，卤素原子，取代或未取代的烷基，取代或未取代的烷氧基，取代或未取代的芳基，硫代烷基或吸电子基团; PUG是通过与曝光的卤化银和/或显影剂的氧化产物反应释放的基团，时间是定时组; TimetPUG是当氧化还原部分在显影期间引起交叉反应而变成氧化产物时首先发布为（ - ）TimePUG的基团，并且通过硫原子，氮原子或硒原子与苯核键合; t为0或1。

2. 发明授权

US4830950A Silver halide photographic material 失效
标题翻译：卤化银照相材料
公开(公告)号：US4830950A
公开(公告)日：1989-05-16
申请号：US3341
申请日：1987-01-14
申请人： Kenichi Kuwabara , Toshiro Takahashi , Keiichi Adachi , Masahiro Okada
发明人： Kenichi Kuwabara , Toshiro Takahashi , Keiichi Adachi , Masahiro Okada
IPC分类号： G03C1/06 , G03C1/035 , G03C1/16 , G03C1/36 , G03C1/83
CPC分类号： G03C1/832 , Y10S430/15
摘要： A silver halide photographic material comprising a support having thereon at least one silver halide emulsion layer; wherein said emulsion layer comprises a silver chloride emulsion or a silver chlorobromide emulsion containing 90 mol % or more silver chloride, which is prepared in the presence of a water-soluble rhodium salt in an amount of 1.times.10.sup.-7 to 2.times.10.sup.-5 mol per mol of silver halide; and wherein at least one of said emulsion layer and hydrophilic colloidal layers of said material contains a dye compound represented by formula (I) ##STR1## wherein: R.sub.1 represents an alkyl group, an alkoxy group, a hydroxy group, an amino group, a substituted amino group, an alkoxycarbonyl group, a carboxy group, a cyano group, a carbamoyl group, a sulfamoyl group, an ureido group, a thioureido group, an acylamido group, a sulfonamido group or a phenyl group, Q represents a sulfoalkyl group, a sulfoalkoxyalkyl group, or an aryl group having at least one sulfo group; R.sub.2 represents a hydrogen atom, an alkyl group, an alkoxy group, a hydroxy group or a halogen atom, and R.sub.3 and R.sub.4, which may be the same or different, each represents an alkyl group or a substituted alkyl group, or when taken together, R.sub.3 and R.sub.4 may form a 5- to 6-membered ring, provided that R.sub.1, R.sub.3, and R.sub.4 do not represent a methyl group at the same time.
摘要翻译：一种卤化银照相材料，包括其上具有至少一个卤化银乳剂层的载体; 其中所述乳剂层包含氯化银乳剂或含有90mol％或更多氯化银的氯化银氯化银乳液，其在水溶性铑盐的存在下制备，其量为1×10 -7至2×10 -5 mol / mol 的卤化银; 并且其中所述材料的所述乳剂层和亲水胶体层中的至少一个含有由式（I）表示的染料化合物其中：R 1表示烷基，烷氧基，羟基，氨基基团，取代氨基，烷氧基羰基，羧基，氰基，氨基甲酰基，氨磺酰基，脲基，硫脲基，酰氨基，亚磺酰氨基或苯基，Q表示磺基烷基，磺基烷氧基烷基或具有至少一个磺基的芳基; R 2表示氢原子，烷基，烷氧基，羟基或卤素原子，R 3和R 4可以相同或不同，表示烷基或取代的烷基，或者一起 R 3和R 4可以形成5-至6-元环，条件是R 1，R 3和R 4不同时表示甲基。

3. 发明授权

US4551424A Silver halide photographic light-sensitive material 失效
标题翻译：卤化银照相感光材料
公开(公告)号：US4551424A
公开(公告)日：1985-11-05
申请号：US681757
申请日：1984-12-14
申请人： Tadashi Ikeda , Kenichi Kuwabara , Kiyohiko Yamamuro , Tadayoshi Kokubo
发明人： Tadashi Ikeda , Kenichi Kuwabara , Kiyohiko Yamamuro , Tadayoshi Kokubo
IPC分类号： G03C1/06 , G03C1/18 , G03C1/28 , G03C1/29 , G03C1/38 , G03C1/02
CPC分类号： G03C1/29 , G03C1/18 , G03C1/38
摘要： A silver halide photographic light-sensitive material is described, comprising a support and at least one silver halide emulsion layer on the support, wherein the silver halide emulsion layer contains at least one specific type of sensitizing dye, at least one of the silver halide emulsion layer and other hydrophilic colloid layers contains at least one compound of four specific types of compounds and the silver halide grains contained in the silver halide emulsion are substantially tetradecahedral grains in which the proportion of (100) faces is at least 50%; this material is superior in both sensitivity and stain resistance.
摘要翻译：描述了一种卤化银照相感光材料，其包含载体和载体上的至少一种卤化银乳剂层，其中卤化银乳剂层含有至少一种特定类型的增感染料，至少一种卤化银乳剂层和其它亲水胶体层包含至少一种四种特定类型化合物的化合物，并且卤化银乳剂中所含的卤化银颗粒基本上为十四面体颗粒，其中（100）面的比例为至少50％; 这种材料在灵敏度和耐污染性方面都是优越的。

4. 发明授权

US4286044A Silver halide photographic materials 失效
标题翻译：卤化银照相材料
公开(公告)号：US4286044A
公开(公告)日：1981-08-25
申请号：US176442
申请日：1980-08-08
申请人： Yuji Mihara , Haruo Takei , Noriyuki Inoue , Tadashi Ikeda , Kenichi Kuwabara
发明人： Yuji Mihara , Haruo Takei , Noriyuki Inoue , Tadashi Ikeda , Kenichi Kuwabara
IPC分类号： G03C1/28 , G03C1/29 , G03C1/08
CPC分类号： G03C1/29
摘要： A lith-type silver halide photographic material having high sensitivity and providing good dot quality images comprising a support having coated thereon a silver halide emulsion containing a sensitizing dye of dimethine merocyanine type represented by formula (I) and a sensitizing dye represented by formula (II): ##STR1## wherein R.sub.1 represents a sulfoalkyl group, a carboxyalkyl group, a sulfoaralkyl group, or a carboxyaralkyl group; the alkyl moiety of each alkyl group contains up to 4 carbon atoms; R.sub.2 represents a substituted or unsubstituted alkyl group or an aryl group; R.sub.3 represents --(CH.sub.2).sub.n.sbsb.1 CONH(CH.sub.2).sub.m.sbsb.1 OH or --(CH.sub.2).sub.n.sbsb.2 O(CH.sub.2).sub.m.sbsb.2 OH (wherein m.sub.1, m.sub.2, n.sub.1, and n.sub.2 each is 1 to 7; m.sub.1 +n.sub.1 and m.sub.2 +n.sub.2 each is 8 or less); W represents a hydrogen atom, a halogen atom, a substituted or unsubstituted alkyl group, an alkoxy group or a substituted or unsubstituted phenyl group; ##STR2## wherein Z represents a non-metallic atomic group necessary to complete a thiazolidine ring or a 4-thiazoline ring; R.sub.4 and R.sub.5 each represent a substituted or unsubstituted alkyl group, an allyl group, or a substituted or unsubstituted phenyl group; at least one of R.sub.4 and R.sub.5 being a sulfoalkyl group or a carboxyalkyl group; and R.sub.6 represents a hydrogen atom, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted phenyl group.
摘要翻译：一种具有高灵敏度并且提供良好的点质量图像的锂离子型卤化银照相材料，其包含其上涂覆有包含式（I）表示的二甲亚砜部花青型敏化染料的卤化银乳剂的支持体和由式（II）表示的增感染料）：其中R1表示磺基烷基，羧基烷基，磺基烷基或羧基烷基的（Ⅰ）化合物。每个烷基的烷基部分含有至多4个碳原子; R2表示取代或未取代的烷基或芳基; R3表示 - （CH2）n1CONH（CH2）m1OH或 - （CH2）n2O（CH2）m2OH（其中m1，m2，n1和n2各自为1至7; m1 + n1和m2 + n2分别为8或更小） ; W表示氢原子，卤素原子，取代或未取代的烷基，烷氧基或取代或未取代的苯基; （II）其中Z表示完成噻唑烷环所需的非金属原子团或4-噻唑啉环; R4和R5各自表示取代或未取代的烷基，烯丙基或取代或未取代的苯基; R4和R5中的至少一个是磺基烷基或羧基烷基; R6表示氢原子，取代或未取代的烷基或取代或未取代的苯基。

5. 发明申请

US20130015158A1 DRY ETCHING METHOD 有权
标题翻译：干蚀刻方法
公开(公告)号：US20130015158A1
公开(公告)日：2013-01-17
申请号：US13210446
申请日：2011-08-16
申请人： Tomoyoshi Ichimaru , Kenichi Kuwabara , Go Saito
发明人： Tomoyoshi Ichimaru , Kenichi Kuwabara , Go Saito
IPC分类号： C23F1/02
CPC分类号： H01L21/28079 , H01J37/32192 , H01L21/31116 , H01L21/32137 , H01L29/66545
摘要： The present invention provides a dry etching method capable of readily providing rounded top edge portions, called top rounds, at trenches and vias formed by removal of a dummy material. The method of the present invention is a dry etching method for forming trenches or vias by removing a dummy material with its periphery surrounded by an interlayer oxide film, which method includes the steps of etching the dummy material to a predetermined depth, performing isotropic etching after the dummy material etching, and removing remaining part of the dummy material after the isotropic etching.
摘要翻译：本发明提供了一种干式蚀刻方法，其能够容易地提供在通过去除虚拟材料形成的沟槽和通孔处的称为顶部圆形的圆形顶部边缘部分。本发明的方法是通过去除其周围被层间氧化膜包围的虚拟材料形成沟槽或通孔的干蚀刻方法，该方法包括以下步骤：将虚拟材料蚀刻至预定深度，执行各向同性蚀刻虚拟材料蚀刻，并且在各向同性蚀刻之后除去虚拟材料的剩余部分。

6. 发明授权

US08143175B2 Dry etching method 失效
标题翻译：干蚀刻法
公开(公告)号：US08143175B2
公开(公告)日：2012-03-27
申请号：US12435787
申请日：2009-05-05
申请人： Satoshi Une , Masamichi Sakaguchi , Kenichi Kuwabara , Tomoyoshi Ichimaru
发明人： Satoshi Une , Masamichi Sakaguchi , Kenichi Kuwabara , Tomoyoshi Ichimaru
IPC分类号： H01L21/31
CPC分类号： H01L21/32139 , H01L21/0338 , H01L21/28123 , H01L21/31116 , H01L21/32137
摘要： The invention provides a dry etching method for performing a wiring process on a semiconductor substrate using a plasma etching apparatus, wherein the wiring process is performed without causing disconnection or deflection of the wiring. The invention provides a dry etching method for performing a wiring process on a semiconductor substrate using a plasma etching apparatus, wherein during a step for etching a material 12 to be etched using a mask pattern composed of a photoresist 15 and inorganic films 14 and 13 made of SiN, SiON, SiO and the like formed on the material 12 to be etched, a mixed gas formed of a halogen-based gas such as chlorine-containing gas or bromine-containing gas and at least one fluorine-containing gas selected from a group of fluorine-containing gases composed of CF4, CHF3, SF6 and NF3 is used to reduce the mask pattern and the processing dimension of the material to be etched substantially equally during processing of the material 12 to be etched.
摘要翻译：本发明提供了一种用于使用等离子体蚀刻装置在半导体衬底上进行布线处理的干蚀刻方法，其中进行布线处理而不引起布线的断开或偏转。本发明提供一种使用等离子体蚀刻装置对半导体衬底进行布线处理的干式蚀刻方法，其中在使用由光致抗蚀剂15和无机膜14和13构成的掩模图案来蚀刻要蚀刻的材料12的步骤期间，在被蚀刻材料12上形成的SiN，SiON，SiO等，由含氯气体或含溴气体的卤素系气体形成的混合气体和至少一种选自使用由CF4，CHF3，SF6和NF3组成的含氟气体组，在待蚀刻材料12的加工期间，基本上相同地减少掩模图案和待蚀刻材料的加工尺寸。

7. 发明申请

US20100288195A1 PLASMA PROCESSING METHOD AND APPARATUS 审中-公开
标题翻译：等离子体处理方法和装置
公开(公告)号：US20100288195A1
公开(公告)日：2010-11-18
申请号：US12846403
申请日：2010-07-29
申请人： Eiji IKEGAMI , Shoji Ikuhara , Takeshi Shimada , Kenichi Kuwabara , Takao Arase , Tsuyoshi Matsumoto
发明人： Eiji IKEGAMI , Shoji Ikuhara , Takeshi Shimada , Kenichi Kuwabara , Takao Arase , Tsuyoshi Matsumoto
IPC分类号： C23C16/00
CPC分类号： H01J37/32963 , H01J37/32082 , H01J37/32091 , H01J37/321 , H01J37/3211 , H01J37/32192 , H01J37/32917 , H01J37/32926 , H01J37/32935 , H01J37/32981 , H01J37/3299 , H01J2237/1825 , H01J2237/327 , H01L21/67069 , H01L21/67242 , H05H1/46
摘要： Plasma processing of plural substrates is performed in a plasma processing apparatus, which is provided with a plasma processing chamber having an antenna electrode and a lower electrode for placing and retaining the plural substrates in turn within the plasma processing chamber, a gas feeder for feeding processing gas into the processing chamber, a vacuum pump for discharging gas from the processing chamber via a vacuum valve, and a solenoid coil for forming a magnetic field within the processing chamber. At least one of the plural substrates is placed on the lower electrode, and the processing gas is fed into the processing chamber. RF power is fed to the antenna electrode via a matching network to produce a plasma within the processing chamber in which a magnetic field has been formed by the solenoid coil. This placing of at least one substrate and this feeding of the processing gas are then repeated until the plasma processing of all of the plural substrates is completed. An end of seasoning is determined when a parameter including an internal pressure of the processing chamber has become stable to a steady value with plasma processing time.
摘要翻译：在具有等离子体处理室的等离子体处理装置中进行多个基板的等离子体处理，该等离子体处理室具有用于在等离子体处理室内依次放置和保持多个基板的天线电极和下部电极，供给处理用气体供给装置气体进入处理室，用于经由真空阀从处理室排出气体的真空泵和用于在处理室内形成磁场的螺线管线圈。多个基板中的至少一个被放置在下电极上，并且处理气体被馈送到处理室中。 RF功率经由匹配网络馈送到天线电极，以在处理室内产生等离子体，其中已经由螺线管线圈形成了磁场。然后重复这种至少一个基板的放置和该处理气体的进料，直至完成所有多个基板的等离子体处理。当包括处理室的内部压力的参数在具有等离子体处理时间的稳定值变得稳定时，确定调味品的结束。

8. 发明授权

US07130832B2 Energy service business method and system 有权
公开(公告)号：US07130832B2
公开(公告)日：2006-10-31
申请号：US09843736
申请日：2001-04-30
申请人： Masaaki Bannai , Junichi Chiba , Kenichi Kuwabara , Sadakazu Kamo
发明人： Masaaki Bannai , Junichi Chiba , Kenichi Kuwabara , Sadakazu Kamo
IPC分类号： G06F17/00 , G06F9/44
CPC分类号： G06Q10/06 , G06Q10/06375 , G06Q50/06 , H02J3/008 , Y02E40/76 , Y02P80/10 , Y02P80/11 , Y02P90/86 , Y04S10/545 , Y04S50/00 , Y04S50/10
摘要： If the energy service enterprise is responsible for paying costs for applying energy-saving measures to the object facilities, measures the energy consumption after taking the energy-saving measures, calculates the amount of curtailed energy cost by comparing the measured value with the energy consumption before taking the energy-saving measures previously stored in the database, and receives at least a part of the curtailed amount, the customer is not required to plan equipment investment in energy-saving measures and collection thereof. Introduction of the energy-saving measures is thus made easier.

9. 发明授权

US07112805B2 Vacuum processing apparatus and vacuum processing method 失效
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US07112805B2
公开(公告)日：2006-09-26
申请号：US10875231
申请日：2004-06-25
申请人： Yoshitaka Kai , Kenichi Kuwabara , Takeo Uchino , Yasuhiro Nishimori , Takeshi Oono , Takeshi Shimada
发明人： Yoshitaka Kai , Kenichi Kuwabara , Takeo Uchino , Yasuhiro Nishimori , Takeshi Oono , Takeshi Shimada
IPC分类号： G01F23/00 , G01K5/08
CPC分类号： H01L21/67207 , H01L21/67167
摘要： The invention provides a semiconductor fabrication apparatus capable of preventing increase of carriage time of samples, deterioration of sample output, increase of footprint and increase of investment costs. The vacuum processing apparatus comprises a plurality of vacuum processing chambers for subjecting a sample to vacuum processing; a vacuum carriage for carrying the sample into and out of the vacuum processing chamber; a switchable chamber capable of being switched between atmosphere and vacuum for carrying the sample into and out of the vacuum processing chamber; a cassette support for supporting a plurality of cassettes and a controller for controlling carrying of the sample from a cassette through the switchable chambers, the vacuum carriage means into and out of the vacuum processing chamber. The vacuum processing chamber is equipped with an etching chamber and a critical dimension measurement chamber for critical dimension inspection of the sample.
摘要翻译：本发明提供一种半导体制造装置，其能够防止样品的携带时间增加，样品输出的劣化，占地面积的增加和投资成本的增加。真空处理装置包括用于对样品进行真空处理的多个真空处理室; 用于将样品进入和离开真空处理室的真空托架; 能够在大气和真空之间切换以将样品进出真空处理室的可切换室; 用于支撑多个盒的盒支撑件和控制器，用于控制样品从盒通过可切换室的携带，真空托架装置进入和离开真空处理室。真空处理室配有蚀刻室和临界尺寸测量室，用于对样品进行临界尺寸检验。

10. 发明申请

US20100285669A1 DRY ETCHING METHOD 有权
标题翻译：干蚀刻方法
公开(公告)号：US20100285669A1
公开(公告)日：2010-11-11
申请号：US12512103
申请日：2009-07-30
申请人： Takeshi SHIMA , Kenichi Kuwabara , Tomoyoshi Ichimaru , Kenji Imamoto
发明人： Takeshi SHIMA , Kenichi Kuwabara , Tomoyoshi Ichimaru , Kenji Imamoto
IPC分类号： H01L21/3065
CPC分类号： H01L21/32139 , H01L21/02071 , H01L21/02115 , H01L21/02274
摘要： After etching a polysilicon film, when a protective film made of a carbon polymer is formed on a sidewall of the polysilicon film using plasma containing carbons, a metallic material as a lower film is etched using plasma containing a halogen gas under an etching condition in which volatility is improved due to the rise in a wafer temperature or the low pressure of a processing pressure, thereby preventing a side etching and unevenness of a sidewall of the polysilicon film. Further, by using the protective film made of a carbon polymer, metallic substances scattered at the time of etching the metallic material are not directly attached to the polysilicon film, but can be simply removed along with the protective film made of a carbon polymer in an asking step.
摘要翻译：在蚀刻多晶硅膜之后，当使用含有碳的等离子体在多晶硅膜的侧壁上形成由碳聚合物制成的保护膜时，在蚀刻条件下，使用含有卤素气体的等离子体蚀刻作为下部膜的金属材料，其中由于晶片温度的上升或处理压力的低压，挥发性提高，从而防止多晶硅膜的侧壁蚀刻和不均匀。此外，通过使用由碳聚合物制成的保护膜，在蚀刻金属材料时分散的金属物质不直接附着在多晶硅膜上，而是可以简单地与由碳聚合物制成的保护膜一起除去问一步

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