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1. 发明授权

US06522716B1 Multilayer-film reflective mirrors, extreme UV microlithography apparatus comprising same, and microelectronic-device manufacturing methods utilizing same 失效
标题翻译：多层膜反射镜，包括该多层膜反射镜的极紫外微光刻设备以及利用其的微电子器件制造方法
公开(公告)号：US06522716B1
公开(公告)日：2003-02-18
申请号：US09684873
申请日：2000-10-06
申请人： Katsuhiko Murakami , Yutaka Ichihara
发明人： Katsuhiko Murakami , Yutaka Ichihara
IPC分类号： G21K500
CPC分类号： B82Y10/00 , G03F7/70233 , G03F7/70958 , G21K1/06 , G21K1/062
摘要： Microlithography apparatus and methods are disclosed for achieving high-resolution pattern transfer of a pattern onto a substrate, such as a semiconductor wafer, using extreme ultraviolet (EUV, also termed soft X-ray) radiation. The apparatus include an imaging-optical system (projection-optical system) capable of receiving pattern-encoding EUV light from a mask and forming an image of the pattern on the substrate. The desired wavelength of the EUV light is 20 nm to 50 nm, and the imaging-optical system includes multiple reflective mirrors having aspherical surficial profiles and multilayer-film reflective surfaces. The apparatus are configured especially to achieve a pattern-element resolution, of the projected image, of 70 nm or finer.
摘要翻译：公开了用于使用极紫外（EUV，也称为软X射线）辐射将图案高分辨率图案转印到诸如半导体晶片的基板上的微光刻设备和方法。该装置包括能够从掩模接收图案编码的EUV光并在基板上形成图案的图像的成像光学系统（投影光学系统）。 EUV光的期望波长为20nm至50nm，并且成像光学系统包括具有非球面表面轮廓和多层膜反射表面的多个反射镜。该装置被特别地配置为实现70nm或更细的投影图像的图案元素分辨率。

2. 发明申请

US20070076181A1 Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method 有权
标题翻译：投影光学系统检查方法和检查装置，以及投影光学系统制造方法
公开(公告)号：US20070076181A1
公开(公告)日：2007-04-05
申请号：US11606909
申请日：2006-12-01
申请人： Mikihiko Ishii , Yutaka Ichihara , Takashi Gemma
发明人： Mikihiko Ishii , Yutaka Ichihara , Takashi Gemma
IPC分类号： G03B27/42
CPC分类号： G01M11/0271 , G01M11/0214 , G01M11/0257 , G03F7/70341 , G03F7/706
摘要： In the inspection apparatus of this projection optical system, a folding glass member, comprising a flat surface part and a reflecting spherical surface part opposing to the flat surface part, is disposed on the image plane side of the projection optical system so that the flat surface part opposes to the projection optical system. Further, in a state wherein a liquid is supplied between the projection optical system and the folding glass member, a measuring beam emitted from an interferometer unit enters the projection optical system; the measuring beam that transmitted through the projection optical system and the liquid, and entered the folding glass member is reflected by the reflecting spherical surface part, and once again passes through the liquid and the projection optical system; and the interference fringes obtained from the measuring beam and the reference beam generated within the interferometer unit are detected.
摘要翻译：在该投影光学系统的检查装置中，在投影光学系统的像面侧设置有包括平面部和与该平面部相对的反射球面部的折叠玻璃部件，部分反对投影光学系统。此外，在投影光学系统和折叠玻璃构件之间供应液体的状态下，从干涉仪单元发射的测量光束进入投影光学系统; 穿过投影光学系统和液体并进入折叠玻璃构件的测量光被反射球面部反射，再次通过液体和投影光学系统; 并且检测从测量光束获得的干涉条纹和在干涉仪单元内产生的参考光束。

3. 发明授权

US5844728A Catadioptric reduction projection optical system 失效
公开(公告)号：US5844728A
公开(公告)日：1998-12-01
申请号：US670650
申请日：1996-06-26
申请人： Sumio Hashimoto , Yutaka Suenaga , Yutaka Ichihara
发明人： Sumio Hashimoto , Yutaka Suenaga , Yutaka Ichihara
IPC分类号： G02B1/02 , G02B17/08 , G03F7/20 , G02B17/00
CPC分类号： G02B17/08 , G02B17/0892 , G03F7/70225 , G03F7/70358 , G03F7/70566
摘要： A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.

4. 发明授权

US5774240A Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques 失效
标题翻译：用于使用全息技术将掩模图案再现到基板的光敏表面上的曝光装置
公开(公告)号：US5774240A
公开(公告)日：1998-06-30
申请号：US441802
申请日：1995-05-16
申请人： Akihiro Goto , Takashi Genma , Yutaka Ichihara , Nobutaka Magome , Naomasa Shiraishi , Toshio Matsuura , Hiroshi Shirasu , Masami Ebi
发明人： Akihiro Goto , Takashi Genma , Yutaka Ichihara , Nobutaka Magome , Naomasa Shiraishi , Toshio Matsuura , Hiroshi Shirasu , Masami Ebi
IPC分类号： G03F7/20 , G03H1/00 , G03H1/20
CPC分类号： G03F7/70058 , G03H1/0005 , G03H1/0408 , G03H2001/0094 , G03H2001/0491 , G03H2260/12
摘要： An exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate uses holographic techniques. The apparatus includes support for holding a hologram recording plate at a predetermined position during both a recording operation and a reconstructing operation. A first illuminating optical system introduces a light beam from a coherent light source to a mask and irradiates a subject beam produced from the mask into the recording plate. A second illuminating optical system irradiates the light beam from a coherent light source as a reference beam into the recording plate, a carrier apparatus disposes during the reconstructing operation, a substrate at the position of the mask, in place of the mask. A third illuminating optical system for irradiates a conjugate beam with the reference beam into the recording plate, in which a hologram has been formed by the recording operation, to form an image of the hologram on the photo-sensitive surface of the substrate. A controler for for selectively controlling the first, second and third illuminating optical systems puts an at least a selected one of the optical system into an operative condition so as to irradiate a fixing light beam into the recording plate in order to fix the hologram.
摘要翻译：用于将掩模图案再现到基板的光敏表面上的曝光装置使用全息技术。该装置包括在记录操作和重建操作期间将全息图记录板保持在预定位置的支撑件。第一照明光学系统将来自相干光源的光束引入到掩模，并将从掩模产生的被摄体光束照射到记录板中。第二照明光学系统将来自相干光源的光束作为参考光束照射到记录板中，载体设备在重建操作期间将掩模的位置处的基板代替掩模。第三照明光学系统，用于将具有参考光束的共轭光束照射到通过记录操作形成全息图的记录板中，以在基板的光敏表面上形成全息图像。用于选择性地控制第一，第二和第三照明光学系统的控制器将光学系统中的至少一个所选择的一个放入操作状态，以便将固定光束照射到记录板中以固定全息图。

5. 发明授权

US5563706A Interferometric surface profiler with an alignment optical member 失效
标题翻译：具有对准光学构件的干涉表面轮廓仪
公开(公告)号：US5563706A
公开(公告)日：1996-10-08
申请号：US292956
申请日：1994-08-22
申请人： Masato Shibuya , Yutaka Ichihara , Takashi Gemma , Shuji Toyonaga , Keiji Inada
发明人： Masato Shibuya , Yutaka Ichihara , Takashi Gemma , Shuji Toyonaga , Keiji Inada
IPC分类号： G01B9/02
CPC分类号： G01B9/02061 , G01B9/02039 , G01B9/02042 , G01B9/02057 , G01B9/02072 , G01B2290/70
摘要： In an interferometer, reflected light from a reference surface and a subject surface are introduced to an imaging optical system through a beam splitter, and an interference fringe formed from light reflected from the both surfaces is observed with a detection optical system. An alignment optical member is disposed in an optical path between the imaging optical system and an image plane of the interference fringe such that the rear focal point of the alignment optical member is located at the image plane. The alignment optical member is inserted in the optical path in aligning the subject surface and is removed in measuring the interference fringe. Accurate alignment of the subject surface is easily attained. A beam expander is interposed between a polarizing beam splitter and the subject surface and a 90.degree. retarder is interposed between the beam expander and the subject surface. The 90.degree. retarder is constructed of one or a plurality of reflecting mirrors formed of dielectric multilayer films. Noise introduced to the imaging optical system is minimized.
摘要翻译：在干涉仪中，通过分束器将来自参考面和被摄体表面的反射光引入成像光学系统，并且用检测光学系统观察由从两个表面反射的光形成的干涉条纹。对准光学构件设置在成像光学系统和干涉条纹的像平面之间的光路中，使得对准光学构件的后焦点位于像平面。对准光学构件在对准该物体表面的光路中被插入，并且在测量干涉条纹时被移除。容易实现对象表面的准确对准。光束扩展器插入在偏振分束器和被摄体表面之间，并且90度延迟器插入在光束扩展器和被摄体表面之间。 90度缓凝剂由由电介质多层膜形成的一个或多个反射镜构成。引入到成像光学系统的噪声被最小化。

6. 发明授权

US5289312A Catadioptric reduction projection optical system 失效
标题翻译：反射折射减光投影光学系统
公开(公告)号：US5289312A
公开(公告)日：1994-02-22
申请号：US948327
申请日：1992-09-22
申请人： Sumio Hashimoto , Yutaka Ichihara
发明人： Sumio Hashimoto , Yutaka Ichihara
IPC分类号： G02B1/02 , G02B17/08 , G03F7/20 , H01L21/027 , G02B27/28
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225
摘要： A catadioptric reduction projection optical system is of a construction in which an on-axis light beam is used in a catadioptric system, and is designed such that resolving power is not deteriorated and a stop can be disposed. The catadioptric reduction projection optical system has a first lens unit G1 having negative refractive power and diffusing a light beam from a reticle 1, a semi-transparent mirror 2 for transmitting therethrough or reflecting the light beam from the first lens unit G1, a second lens unit G2 having negative refractive power and widening the light beam reflected from the semi-transparent mirror 2, a concave reflecting mirror 4 for returning the light beam from the second lens unit G2 to the semi-transparent mirror 2 through the second lens unit G2 while converging that light beam, a third lens unit G3 having positive refractive power and converging the light beam returned to and transmitted through the semi-transmitted mirror 2 on a wafer 5, and a stop 6 disposed between the semi-transparent mirror 2 and the third lens unit G3.
摘要翻译：折反射折射投影光学系统是在反射折射系统中使用轴上光束的结构，并且被设计成使分辨能力不劣化并且可以设置停止。折反射折射投影光学系统具有第一透镜单元G1，该第一透镜单元G1具有负折光力并且扩散来自标线片1的光束，用于透射的半透明反射镜2或反射来自第一透镜单元G1的光束;第二透镜具有负屈光力并扩大从半透明反射镜2反射的光束的单元G2，用于将来自第二透镜单元G2的光束通过第二透镜单元G2将光束返回到半透明反射镜2的凹面反射镜4，会聚该光束，具有正折光力的第三透镜单元G3，并且使通过半透射反射镜2返回并透射到晶片5的光束会聚;以及设置在半透明反射镜2和第三透镜镜头单元G3。

7. 发明授权

US08791989B2 Image processing apparatus, image processing method, recording method, and recording medium 有权
标题翻译：图像处理装置，图像处理方法，记录方法和记录介质
公开(公告)号：US08791989B2
公开(公告)日：2014-07-29
申请号：US13187497
申请日：2011-07-20
申请人： Yoshijiro Ushio , Yutaka Ichihara
发明人： Yoshijiro Ushio , Yutaka Ichihara
IPC分类号： H04N13/04 , G02B27/22
CPC分类号： H04N13/398 , G02B27/0172 , G02B27/22 , G02B2027/0134 , G02B2027/014 , G02B2027/0178 , H04N13/122 , H04N13/128 , H04N13/261 , H04N13/305 , H04N13/31 , H04N13/383
摘要： Provided is an image processing apparatus that stereoscopically displays a two-dimensional image, comprising a generating section that generates a left-side image and a right-side image by shifting the two-dimensional image left and right in a display region; a right-edge processing section that attaches a right-edge image, which is displayed within a prescribed range from a right edge of the display region, to a right side of the left-side image; a left-edge processing section that attaches a left-edge image, which is displayed within a prescribed range from a left edge of the display region, to a left side of the right-side image; and an output section that outputs the left-side image with the right-edge image attached thereto to a left eye of a user and outputs the right-side image with the left-edge image attached thereto to a right eye of the user.
摘要翻译：提供一种立体显示二维图像的图像处理装置，包括通过在显示区域中左右移动二维图像来生成左侧图像和右侧图像的生成部分; 右边缘处理部，将从显示区域的右边缘的规定范围内显示的右边缘图像附加到左侧图像的右侧; 左边缘处理部，其将从显示区域的左边缘在规定范围内显示的左边缘图像附加到右侧图像的左侧; 输出部分，其将附着有右边图像的左侧图像输出到用户的左眼，并将附着有左侧图像的右侧图像输出到用户的右眼。

8. 发明申请

US20120274556A1 DISPLAY APPARATUS AND DISPLAY METHOD 有权
标题翻译：显示装置和显示方法
公开(公告)号：US20120274556A1
公开(公告)日：2012-11-01
申请号：US13545984
申请日：2012-07-11
申请人： Yoshikazu Suglyama , Yutaka Ichihara
发明人： Yoshikazu Suglyama , Yutaka Ichihara
IPC分类号： G06F3/038 , G06F3/01 , G02B27/26
CPC分类号： H04N13/312 , G02B27/2214 , G02B27/26 , G09G3/003 , G09G3/20 , H04N13/32
摘要： A display apparatus comprising a display panel including first and second display regions arranged in an alternating manner and respectively passing a first polarization component light and a second polarization component of incident light; a light source panel including first and second light sources arranged in an alternating manner and respectively emitting light of the first polarization component and light of the second polarization component to the back surface of the display panel; and a lenticular lens that is positioned between the display panel and the light source panel, refracts light from the first light sources in a direction of a first viewpoint to provide the first viewpoint with the light passed by the first display regions, and refracts light from the second light sources in a direction of a second viewpoint to provide the second viewpoint with the light passed by the second display regions.
摘要翻译：一种显示装置，包括：显示面板，包括以交替方式布置并分别通过入射光的第一偏振分量光和第二偏振分量的第一和第二显示区域; 光源面板，包括以交替方式布置并分别将第一偏振分量的光和第二偏振分量的光发射到显示面板的后表面的第一和第二光源; 以及位于显示面板和光源面板之间的双凸透镜，从第一视点的方向折射来自第一光源的光，以使第一视点与通过第一显示区域的光线相互折射，并将来自所述第二光源在第二视点的方向上，以通过第二显示区域提供第二视点。

9. 发明申请

US20110310097A1 IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, RECORDING METHOD, AND RECORDING MEDIUM 有权
标题翻译：图像处理装置，图像处理方法，记录方法和记录介质
公开(公告)号：US20110310097A1
公开(公告)日：2011-12-22
申请号：US13187493
申请日：2011-07-20
申请人： Yoshijiro Ushio , Yutaka Ichihara
发明人： Yoshijiro Ushio , Yutaka Ichihara
IPC分类号： G06T15/00
CPC分类号： H04N13/261 , G02B27/2221
摘要： Provided is an image processing apparatus that stereoscopically displays a two-dimensional image, comprising a generating section that generates a left-side image and a right-side image by shifting the two-dimensional image left and right in a display region; and an output section that outputs the left-side image to a left eye of the user and the right-side image to a right eye of the user. The generating section generates the left-side image and the right-side image by shifting the two-dimensional image to the left and right within the display region by a distance no greater than a distance between pupils of a user.
摘要翻译：提供一种立体显示二维图像的图像处理装置，包括通过在显示区域中左右移动二维图像来生成左侧图像和右侧图像的生成部分; 以及输出部，其向用户的左眼输出左侧图像，将右侧图像右眼图像输出到用户的右眼。生成部通过将二维图像在显示区域内左右移动距离不大于用户的瞳孔之间的距离来生成左侧图像和右侧图像。

10. 发明授权

US5712735A Catadioptric reduction projection optical system 失效
标题翻译：反射折射减光投影光学系统
公开(公告)号：US5712735A
公开(公告)日：1998-01-27
申请号：US670660
申请日：1996-06-26
申请人： Sumio Hashimoto , Yutaka Suenaga , Yutaka Ichihara
发明人： Sumio Hashimoto , Yutaka Suenaga , Yutaka Ichihara
IPC分类号： G02B1/02 , G02B17/08 , G03F7/20 , G02B17/00
CPC分类号： G02B17/08 , G02B17/0892 , G03F7/70225 , G03F7/70358 , G03F7/70566
摘要： A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.
摘要翻译：一种反折射减小投影光学系统，具有具有负屈光力的第一透镜单元和来自光罩的光束，用于透射来自第一透镜单元的光束的棱镜型分束器，用于使光束返回的凹面反射镜从分束器到分束器的同时会聚;以及第二透镜单元，其具有正折光力并且会聚返回到分束器并由分束器反射的光束，并且在分划板上形成图案的缩小图像在晶圆上。

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