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1. 发明授权

US09022045B2 Substrate liquid cleaning apparatus with controlled liquid port ejection angle 有权
标题翻译：具有受控液体端口喷射角度的底物液体清洗装置
公开(公告)号：US09022045B2
公开(公告)日：2015-05-05
申请号：US13337547
申请日：2011-12-27
申请人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
发明人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
IPC分类号： H01L21/67 , H01L21/687
CPC分类号： H01L21/67051 , H01L21/68728 , H01L21/68785 , H01L21/68792
摘要： Disclosed is a liquid treatment apparatus including a nozzle positioned below the substrate retained by a substrate retaining unit. The nozzle is capable of ejecting two fluids of a mixture of a liquid and a gas. The nozzle includes a plurality of liquid-ejecting passages for ejecting a liquid and a plurality of gas-ejecting passages for ejecting a gas, and also includes a plurality of liquid-ejecting ports each corresponding to one of the liquid-ejecting passages. The liquid-ejecting ports are arrayed on a horizontal line extending inwardly from a position below a peripheral portion of the substrate. The liquid-ejecting ports are configured to eject the liquid towards the lower surface of the substrate in an ejecting direction, and the ejecting direction is inclined at an inclination angle in a rotating direction of the substrate rotated by rotational driving unit with respect to a plane including the lower surface of the substrate.
摘要翻译：公开了一种液体处理装置，其包括位于基板保持单元保持的基板下方的喷嘴。喷嘴能够喷射液体和气体的混合物的两种流体。喷嘴包括用于喷射液体的多个喷液通道和用于喷射气体的多个气体喷射通道，并且还包括各自对应于一个喷液通道的多个液体喷射口。液体喷射口排列在从基板的周边部分下方的位置向内延伸的水平线上。液体喷射口被配置为沿喷射方向朝向基板的下表面喷射液体，并且喷射方向以相对于平面旋转的旋转驱动单元旋转的基板的旋转方向以倾斜角度倾斜包括基底的下表面。

2. 发明授权

US09048269B2 Substrate liquid treatment apparatus with lift pin plate 有权
标题翻译：带升降针板的基板液体处理装置
公开(公告)号：US09048269B2
公开(公告)日：2015-06-02
申请号：US13337533
申请日：2011-12-27
申请人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
发明人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
IPC分类号： H01L21/67 , H01L21/687
CPC分类号： H01L21/6708 , H01L21/67051 , H01L21/68728
摘要： Disclosed is a liquid treatment apparatus for processing a lower surface of the substrate. The apparatus includes a first nozzle disposed below a lower surface of the substrate retained by the substrate retaining unit to eject a treatment liquid towards the lower surface of the substrate, the first nozzle having a plurality of first ejection ports, which are arrayed from a position opposing a central portion of the substrate retained by the substrate retaining unit to a position opposing a peripheral portion of the substrate retained by the substrate retaining unit. An ejecting direction of the treatment liquid ejected from the first ejection port is inclined towards a rotation direction of the substrate rotated by the rotational driving unit.
摘要翻译：公开了一种用于处理基板的下表面的液体处理装置。该设备包括设置在基板保持单元保持的基板的下表面下方的第一喷嘴，以朝向基板的下表面喷射处理液体，第一喷嘴具有多个第一喷射口，其从位置将由基板保持单元保持的基板的中心部分相对于与由基板保持单元保持的基板的周边部分相对的位置。从第一喷射口喷出的处理液的排出方向朝着由旋转驱动单元旋转的基板的旋转方向倾斜。

3. 发明申请

US20120325274A1 TWO-FLUID NOZZLE AND SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSING METHOD 有权
标题翻译：双流体喷嘴和底层液体处理装置和底层液体处理方法
公开(公告)号：US20120325274A1
公开(公告)日：2012-12-27
申请号：US13529121
申请日：2012-06-21
申请人： Yoshihiro Kai , Satoshi Kaneko
发明人： Yoshihiro Kai , Satoshi Kaneko
IPC分类号： B08B3/02 , B05B7/04 , B08B5/00
CPC分类号： H01L21/67051
摘要： A two-fluid nozzle 34 for spraying, toward a processing target object, droplets of a processing solution which are formed by mixing the processing solution discharged from a liquid discharge portion 48 and a gas discharged from a gas discharge opening 52 can uniformly spray the droplets of the processing solution having small diameters. Here, the liquid discharge portion 48 includes a multiple number of liquid discharge openings 47 arranged along a circle inside the gas discharge opening 52, and the multiple number of liquid discharge openings 47 discharge the processing solution in an outward direction of the circle.
摘要翻译：用于向处理对象物体喷射通过混合从液体排出部分48排出的处理溶液和从气体排出口52排出的气体而形成的处理溶液的液滴的双流体喷嘴34可以均匀地喷射液滴的处理溶液。这里，液体排出部分48包括沿气体排出口52内的圆周排列的多个排液口47，并且多个排液孔47沿着圆的外侧方向排出处理液。

4. 发明申请

US20120227770A1 TWO-FLUID NOZZLE, SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM FOR STORING SUBSTRATE LIQUID PROCESSING METHOD 审中-公开
标题翻译：双流体喷嘴，基板液体处理装置，基板液体处理方法和用于存储基板液体处理方法的计算机可读存储介质
公开(公告)号：US20120227770A1
公开(公告)日：2012-09-13
申请号：US13413788
申请日：2012-03-07
申请人： Satoshi Kaneko , Yoshihiro Kai
发明人： Satoshi Kaneko , Yoshihiro Kai
IPC分类号： B08B3/02 , B08B5/00 , B08B3/04
CPC分类号： H01L21/67051 , B05B7/061 , B05B7/0853 , B05B7/0892 , B05B7/10
摘要： There are provided a two-fluid nozzle for effectively performing a liquid process on a substrate while suppressing a damage on the substrate, and a substrate liquid processing apparatus, a substrate liquid processing method and a storage medium using the two-fluid nozzle. The two-fluid nozzle includes a first liquid discharge hole for discharging a first liquid and a gas discharge hole for discharging a gas, and discharges, toward a target object, a mixed fluid of the first liquid discharged from the first liquid discharge hole and the gas discharged from the gas discharge hole. The mixed fluid is mixed at an outside of the two-fluid nozzle. The two-fluid nozzle further includes a second liquid discharge hole for supplying a second liquid toward an outer periphery of a target spot on the target object or toward an inner side of the outer periphery of the target spot.
摘要翻译：提供了一种用于在抑制基板上的损坏的基板上有效地进行液体处理的二流体喷嘴，以及使用双流体喷嘴的基板液体处理装置，基板液体处理方法和存储介质。双流体喷嘴包括用于排出第一液体的第一液体排出孔和用于排出气体的气体排出孔，并且朝向目标物体排出从第一液体排出孔排出的第一液体的混合流体和气体从排气孔排出。混合流体在双流体喷嘴的外侧混合。双流体喷嘴还包括第二液体排出孔，用于向目标物体上的目标点的外周或朝向目标点的外周的内侧供给第二液体。

5. 发明授权

US09214365B2 Two-fluid nozzle and substrate liquid processing apparatus and substrate liquid processing method 有权
标题翻译：双流体喷嘴和基板液体处理装置和基板液体处理方法
公开(公告)号：US09214365B2
公开(公告)日：2015-12-15
申请号：US13529121
申请日：2012-06-21
申请人： Yoshihiro Kai , Satoshi Kaneko
发明人： Yoshihiro Kai , Satoshi Kaneko
IPC分类号： H01L21/67
CPC分类号： H01L21/67051
摘要： A two-fluid nozzle 34 for spraying, toward a processing target object, droplets of a processing solution which are formed by mixing the processing solution discharged from a liquid discharge portion 48 and a gas discharged from a gas discharge opening 52 can uniformly spray the droplets of the processing solution having small diameters. Here, the liquid discharge portion 48 includes a multiple number of liquid discharge openings 47 arranged along a circle inside the gas discharge opening 52, and the multiple number of liquid discharge openings 47 discharge the processing solution in an outward direction of the circle.
摘要翻译：用于向处理对象物体喷射通过混合从液体排出部分48排出的处理溶液和从气体排出口52排出的气体而形成的处理溶液的液滴的双流体喷嘴34可以均匀地喷射液滴的处理溶液。这里，液体排出部分48包括沿气体排出口52内的圆周排列的多个排液口47，并且多个排液孔47沿着圆的外侧方向排出处理液。

6. 发明授权

US09542031B2 Input device using detection of both capacitance and pressure, and capacitance-system hybrid touch panel equipped with pressure-sensitive function 有权
标题翻译：输入装置采用电容和压力检测，电容式混合触摸屏配有压敏功能
公开(公告)号：US09542031B2
公开(公告)日：2017-01-10
申请号：US14128819
申请日：2012-06-19
申请人： Junichi Shibata , Ryomei Omote , Yoshihiro Kai , Yuko Endo
发明人： Junichi Shibata , Ryomei Omote , Yoshihiro Kai , Yuko Endo
IPC分类号： G09G5/00 , G06F3/041 , G06F3/044 , G06F3/045
CPC分类号： G06F3/0416 , G06F3/0414 , G06F3/044 , G06F3/045
摘要： An input device of the present invention is configured in the following manner: an input part includes electrode parts, which are contactable arranged with facing each other and one of which is to be an operation object, and a pressure-sensitive layer disposed between the electrode parts facing each other; a charge/discharge waveform forming part includes a charge/discharge circuit having a constant current source, a switching element, a capacitor and a resistor, and forms a charge/discharge waveform with a capacitance detection part and a resistance detection part connected; a charge/discharge waveform calculating part detects the change of a capacitance and of a pressure in the input part based on the charge/discharge waveform formed by the charge/discharge waveform forming part, and calculates an operation state, an operation position and an operation pressure.
摘要翻译：本发明的输入装置以如下方式构成：输入部包括可彼此面对地布置并且其中一个作为操作对象的电极部分和设置在电极之间的压敏层零件面对面; 充电/放电波形形成部分包括具有恒流源，开关元件，电容器和电阻器的充电/放电电路，并且与电容检测部分和电阻检测部分连接形成充电/放电波形; 充放电波形计算部根据由充放电波形形成部形成的充放电波形来检测输入部的电容和压力的变化，并计算运转状态，运转位置和运转压力。

7. 发明授权

US08749508B2 Protective panel and electronic device 有权
标题翻译：保护板和电子设备
公开(公告)号：US08749508B2
公开(公告)日：2014-06-10
申请号：US13699344
申请日：2011-05-16
申请人： Yuichiro Takai , Takao Hashimoto , Kazuhiro Nishikawa , Yoshihiro Kai , Yuko Endo
发明人： Yuichiro Takai , Takao Hashimoto , Kazuhiro Nishikawa , Yoshihiro Kai , Yuko Endo
IPC分类号： G06F3/041
CPC分类号： G06F3/045 , G06F3/0414 , G06F2203/04105 , H01H1/029 , H01H13/785 , H01H2201/036 , H01H2231/016
摘要： A pressure sensitive conductive member is arranged in a through hole of a base-material bonding layer so as to be in contact with a peripheral-switch upper electrode and a peripheral-switch lower electrode, and when a force applied to a peripheral switch is transmitted to the pressure sensitive conductive member through an upper electrode base material and the upper electrode, a current flows, so that the upper electrode and the lower electrode are electrically connected.
摘要翻译：压敏导电部件布置在基材接合层的通孔中，以与外围开关上电极和外围开关下电极接触，并且当施加到外围开关的力被传输时通过上电极基材和上电极到压敏导电构件，电流流动，使得上电极和下电极电连接。

8. 发明授权

US08614689B2 Lead wire connection method for touch panel 有权
标题翻译：触摸屏引线连接方法
公开(公告)号：US08614689B2
公开(公告)日：2013-12-24
申请号：US11791721
申请日：2006-01-16
申请人： Kazuhiro Nishikawa , Yoshihiro Kai , Kazuto Nakamura
发明人： Kazuhiro Nishikawa , Yoshihiro Kai , Kazuto Nakamura
IPC分类号： G06F3/045
CPC分类号： G06F3/045 , G06F2203/04103 , H01H2207/01 , H01H2207/014 , H01R4/04 , H01R12/62 , H05K3/321 , H05K3/361 , H05K3/368 , H05K2201/10303 , H05K2201/10424 , H05K2201/10871
摘要： In a method for connecting lead wires to a touch panel, the method includes the steps of: providing through holes 9a to 9d the number of which corresponds to the number of electrode ends by perforation in a lower electrode plate 3; using a metal-pin 11 having a pin-shaft 11b and a disk shaped pin-head 11a with a diameter larger than an outer diameter of the pin-shaft; inserting the pin-shaft 11b into a metal-pin fixing hole formed corresponding to the through hole 9a at a circuit 10c in a connector tail of a lead wire 10, whereby the pin-shaft 11b is erectly provided on the connector tail of the lead wire 10; and inserting the pin-shafts 11b to 14b into the through holes 9a to 9d, and in addition, electrically connecting the pin-shaft inserted into a lower electrode plate 3 through a conductive adhesive 15 to electrode ends 6c, 7c, 6d, 7d.
摘要翻译：在将引线连接到触摸面板的方法中，该方法包括以下步骤：在下电极板3中通过穿孔提供数量对应于电极端数的通孔9a至9d; 使用具有销轴11b的金属销11和直径大于销轴的外径的盘形销头11a; 在引线10的连接器尾部的电路10c处将针轴11b插入与通孔9a形成的金属针固定孔中，由此将引脚轴11b竖立地设置在引线的连接器尾部电线10; 并将销轴11b至14b插入到通孔9a至9d中，此外，通过导电粘合剂15将插入下电极板3的销轴电连接到电极端6c，7c，6d，7d。

9. 发明申请

US20130201150A1 Pressure Detection Unit and Information Input Device Having the Pressure Detection Unit 有权
标题翻译：具有压力检测单元的压力检测单元和信息输入装置
公开(公告)号：US20130201150A1
公开(公告)日：2013-08-08
申请号：US13701689
申请日：2011-04-13
申请人： Takahiro Suzuki , Yoshihiro Kai , Yuko Endo , Seiko Hirai
发明人： Takahiro Suzuki , Yoshihiro Kai , Yuko Endo , Seiko Hirai
IPC分类号： G06F3/045
CPC分类号： G06F3/045 , G06F3/03547 , G06F3/0414
摘要： A pressure detection unit is disposed in a peripheral portion of a panel member of an information input device for detecting a press operation to the panel member. The pressure detection unit includes a first substrate, a second substrate disposed to face the first substrate, a pressure sensitive layer disposed between the first substrate and the second substrate, and a first electrode provided on the first substrate and a second electrode provided on the second substrate for detecting resistance change via the pressure sensitive layer, the first electrode and the second electrode being provided at positions not facing each other along normal lines of the first substrate and the second substrate. The first electrode, the second electrode and the pressure sensitive layer together form a series circuit in the form of a loop.
摘要翻译：压力检测单元设置在用于检测对面板构件的按压操作的信息输入装置的面板构件的周边部分中。压力检测单元包括第一基板，与第一基板相对设置的第二基板，设置在第一基板和第二基板之间的压敏层，以及设置在第一基板上的第一电极和设置在第二基板上的第二电极用于通过压敏层检测电阻变化的基板，第一电极和第二电极设置在沿着第一基板和第二基板的法线彼此不相对的位置。第一电极，第二电极和压敏层一起形成循环形式的串联电路。

10. 发明申请

US20130169589A1 Pressure Detection Unit and Information Input Device Having the Pressure Detection Unit 审中-公开
标题翻译：具有压力检测单元的压力检测单元和信息输入装置
公开(公告)号：US20130169589A1
公开(公告)日：2013-07-04
申请号：US13639386
申请日：2011-04-05
申请人： Takahiro Suzuki , Yoshihiro Kai , Yuko Endo , Kazumasa Takahashi , Yuichiro Takai
发明人： Takahiro Suzuki , Yoshihiro Kai , Yuko Endo , Kazumasa Takahashi , Yuichiro Takai
IPC分类号： G06F3/045
CPC分类号： G06F3/045 , G06F3/041 , G06F2203/04105
摘要： A pressure detection unit is disposed in a peripheral portion of a panel member of an information input device in order to detect a press operation to the panel member. The pressure detection unit includes a first substrate, a second substrate disposed to face the first substrate, pressure sensitive layers disposed between the first substrate and the second substrate and a first electrode provided on the first substrate and a second electrode provided on the second substrate for detecting resistance change via the pressure sensitive layers, respectively, the first electrode and the second electrode being provided at positions not facing each other on normal lines of the first substrate and the second substrate.
摘要翻译：压力检测单元设置在信息输入装置的面板构件的周边部分中，以便检测对面板构件的按压操作。压力检测单元包括第一基板，设置为面对第一基板的第二基板，设置在第一基板和第二基板之间的压敏层和设置在第一基板上的第一电极和设置在第二基板上的第二电极，分别通过压敏层检测电阻变化，第一电极和第二电极设置在第一基板和第二基板的法线上彼此不相对的位置。

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