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1. 发明授权

US09048269B2 Substrate liquid treatment apparatus with lift pin plate 有权
标题翻译：带升降针板的基板液体处理装置
公开(公告)号：US09048269B2
公开(公告)日：2015-06-02
申请号：US13337533
申请日：2011-12-27
申请人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
发明人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
IPC分类号： H01L21/67 , H01L21/687
CPC分类号： H01L21/6708 , H01L21/67051 , H01L21/68728
摘要： Disclosed is a liquid treatment apparatus for processing a lower surface of the substrate. The apparatus includes a first nozzle disposed below a lower surface of the substrate retained by the substrate retaining unit to eject a treatment liquid towards the lower surface of the substrate, the first nozzle having a plurality of first ejection ports, which are arrayed from a position opposing a central portion of the substrate retained by the substrate retaining unit to a position opposing a peripheral portion of the substrate retained by the substrate retaining unit. An ejecting direction of the treatment liquid ejected from the first ejection port is inclined towards a rotation direction of the substrate rotated by the rotational driving unit.
摘要翻译：公开了一种用于处理基板的下表面的液体处理装置。该设备包括设置在基板保持单元保持的基板的下表面下方的第一喷嘴，以朝向基板的下表面喷射处理液体，第一喷嘴具有多个第一喷射口，其从位置将由基板保持单元保持的基板的中心部分相对于与由基板保持单元保持的基板的周边部分相对的位置。从第一喷射口喷出的处理液的排出方向朝着由旋转驱动单元旋转的基板的旋转方向倾斜。

2. 发明申请

US20120227770A1 TWO-FLUID NOZZLE, SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM FOR STORING SUBSTRATE LIQUID PROCESSING METHOD 审中-公开
标题翻译：双流体喷嘴，基板液体处理装置，基板液体处理方法和用于存储基板液体处理方法的计算机可读存储介质
公开(公告)号：US20120227770A1
公开(公告)日：2012-09-13
申请号：US13413788
申请日：2012-03-07
申请人： Satoshi Kaneko , Yoshihiro Kai
发明人： Satoshi Kaneko , Yoshihiro Kai
IPC分类号： B08B3/02 , B08B5/00 , B08B3/04
CPC分类号： H01L21/67051 , B05B7/061 , B05B7/0853 , B05B7/0892 , B05B7/10
摘要： There are provided a two-fluid nozzle for effectively performing a liquid process on a substrate while suppressing a damage on the substrate, and a substrate liquid processing apparatus, a substrate liquid processing method and a storage medium using the two-fluid nozzle. The two-fluid nozzle includes a first liquid discharge hole for discharging a first liquid and a gas discharge hole for discharging a gas, and discharges, toward a target object, a mixed fluid of the first liquid discharged from the first liquid discharge hole and the gas discharged from the gas discharge hole. The mixed fluid is mixed at an outside of the two-fluid nozzle. The two-fluid nozzle further includes a second liquid discharge hole for supplying a second liquid toward an outer periphery of a target spot on the target object or toward an inner side of the outer periphery of the target spot.
摘要翻译：提供了一种用于在抑制基板上的损坏的基板上有效地进行液体处理的二流体喷嘴，以及使用双流体喷嘴的基板液体处理装置，基板液体处理方法和存储介质。双流体喷嘴包括用于排出第一液体的第一液体排出孔和用于排出气体的气体排出孔，并且朝向目标物体排出从第一液体排出孔排出的第一液体的混合流体和气体从排气孔排出。混合流体在双流体喷嘴的外侧混合。双流体喷嘴还包括第二液体排出孔，用于向目标物体上的目标点的外周或朝向目标点的外周的内侧供给第二液体。

3. 发明申请

US20120325274A1 TWO-FLUID NOZZLE AND SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSING METHOD 有权
标题翻译：双流体喷嘴和底层液体处理装置和底层液体处理方法
公开(公告)号：US20120325274A1
公开(公告)日：2012-12-27
申请号：US13529121
申请日：2012-06-21
申请人： Yoshihiro Kai , Satoshi Kaneko
发明人： Yoshihiro Kai , Satoshi Kaneko
IPC分类号： B08B3/02 , B05B7/04 , B08B5/00
CPC分类号： H01L21/67051
摘要： A two-fluid nozzle 34 for spraying, toward a processing target object, droplets of a processing solution which are formed by mixing the processing solution discharged from a liquid discharge portion 48 and a gas discharged from a gas discharge opening 52 can uniformly spray the droplets of the processing solution having small diameters. Here, the liquid discharge portion 48 includes a multiple number of liquid discharge openings 47 arranged along a circle inside the gas discharge opening 52, and the multiple number of liquid discharge openings 47 discharge the processing solution in an outward direction of the circle.
摘要翻译：用于向处理对象物体喷射通过混合从液体排出部分48排出的处理溶液和从气体排出口52排出的气体而形成的处理溶液的液滴的双流体喷嘴34可以均匀地喷射液滴的处理溶液。这里，液体排出部分48包括沿气体排出口52内的圆周排列的多个排液口47，并且多个排液孔47沿着圆的外侧方向排出处理液。

4. 发明授权

US09214365B2 Two-fluid nozzle and substrate liquid processing apparatus and substrate liquid processing method 有权
标题翻译：双流体喷嘴和基板液体处理装置和基板液体处理方法
公开(公告)号：US09214365B2
公开(公告)日：2015-12-15
申请号：US13529121
申请日：2012-06-21
申请人： Yoshihiro Kai , Satoshi Kaneko
发明人： Yoshihiro Kai , Satoshi Kaneko
IPC分类号： H01L21/67
CPC分类号： H01L21/67051
摘要： A two-fluid nozzle 34 for spraying, toward a processing target object, droplets of a processing solution which are formed by mixing the processing solution discharged from a liquid discharge portion 48 and a gas discharged from a gas discharge opening 52 can uniformly spray the droplets of the processing solution having small diameters. Here, the liquid discharge portion 48 includes a multiple number of liquid discharge openings 47 arranged along a circle inside the gas discharge opening 52, and the multiple number of liquid discharge openings 47 discharge the processing solution in an outward direction of the circle.
摘要翻译：用于向处理对象物体喷射通过混合从液体排出部分48排出的处理溶液和从气体排出口52排出的气体而形成的处理溶液的液滴的双流体喷嘴34可以均匀地喷射液滴的处理溶液。这里，液体排出部分48包括沿气体排出口52内的圆周排列的多个排液口47，并且多个排液孔47沿着圆的外侧方向排出处理液。

5. 发明授权

US09022045B2 Substrate liquid cleaning apparatus with controlled liquid port ejection angle 有权
标题翻译：具有受控液体端口喷射角度的底物液体清洗装置
公开(公告)号：US09022045B2
公开(公告)日：2015-05-05
申请号：US13337547
申请日：2011-12-27
申请人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
发明人： Jiro Higashijima , Nobuhiro Ogata , Satoshi Kaneko , Shuichi Nagamine , Yoshihiro Kai
IPC分类号： H01L21/67 , H01L21/687
CPC分类号： H01L21/67051 , H01L21/68728 , H01L21/68785 , H01L21/68792
摘要： Disclosed is a liquid treatment apparatus including a nozzle positioned below the substrate retained by a substrate retaining unit. The nozzle is capable of ejecting two fluids of a mixture of a liquid and a gas. The nozzle includes a plurality of liquid-ejecting passages for ejecting a liquid and a plurality of gas-ejecting passages for ejecting a gas, and also includes a plurality of liquid-ejecting ports each corresponding to one of the liquid-ejecting passages. The liquid-ejecting ports are arrayed on a horizontal line extending inwardly from a position below a peripheral portion of the substrate. The liquid-ejecting ports are configured to eject the liquid towards the lower surface of the substrate in an ejecting direction, and the ejecting direction is inclined at an inclination angle in a rotating direction of the substrate rotated by rotational driving unit with respect to a plane including the lower surface of the substrate.
摘要翻译：公开了一种液体处理装置，其包括位于基板保持单元保持的基板下方的喷嘴。喷嘴能够喷射液体和气体的混合物的两种流体。喷嘴包括用于喷射液体的多个喷液通道和用于喷射气体的多个气体喷射通道，并且还包括各自对应于一个喷液通道的多个液体喷射口。液体喷射口排列在从基板的周边部分下方的位置向内延伸的水平线上。液体喷射口被配置为沿喷射方向朝向基板的下表面喷射液体，并且喷射方向以相对于平面旋转的旋转驱动单元旋转的基板的旋转方向以倾斜角度倾斜包括基底的下表面。

6. 发明授权

US10642207B2 Image forming apparatus 有权
公开(公告)号：US10642207B2
公开(公告)日：2020-05-05
申请号：US16181668
申请日：2018-11-06
申请人： Satoshi Kaneko , Yuuichiroh Uematsu , Terumichi Ochi
发明人： Satoshi Kaneko , Yuuichiroh Uematsu , Terumichi Ochi
IPC分类号： G03G15/00 , G03G15/06 , G03G15/02 , G03G15/043
CPC分类号： G03G15/5041 , G03G15/0266 , G03G15/043 , G03G15/065 , G03G15/5058
摘要： An image forming apparatus includes a latent image bearer, a charger to charge the latent image bearer with a charging bias obtained by superimposing a charge fluctuation voltage to reduce an image density fluctuation on a direct current charging voltage, a writing device to write a latent image on the latent image bearer with writing intensity obtained by superimposing fluctuating writing intensity to reduce an image density fluctuation on constant writing intensity, a developing sleeve to which a developing bias obtained by superimposing a fluctuating developing voltage to reduce an image density fluctuation on a direct current developing voltage is applied to develop the latent image, and circuitry to control the charging bias, the writing intensity, and the developing bias. The circuitry changes the charge fluctuation voltage and the fluctuating developing voltage depending on whether the writing device writes the latent image with the fluctuating writing intensity.

7. 发明授权

US10474056B2 Image forming apparatus 有权
公开(公告)号：US10474056B2
公开(公告)日：2019-11-12
申请号：US16227980
申请日：2018-12-20
申请人： Yuuichiroh Uematsu , Satoshi Kaneko , Terumichi Ochi , Shuji Hirai
发明人： Yuuichiroh Uematsu , Satoshi Kaneko , Terumichi Ochi , Shuji Hirai
IPC分类号： G03G15/04 , G03G15/043 , G03G15/00
摘要： An image forming apparatus includes a latent image bearer; a writing device configured to write a latent image onto the latent image bearer; a detection device configured to detect, at a plurality of positions, a density of a toner image obtained through development of the latent image; and a controller configured to correct a writing intensity of the writing device to correct an uneven density based on detection values of the detection device. The controller determines whether each of the detection values is pass or fail. In response to a determination that a detection value is fail, the controller corrects the wiring intensity based on another detection value determined to be pass at a position different from a position at which the detection value is determined to be fail, instead of correcting the writing intensity based on the detection value determined to be fail.

8. 发明授权

US09052663B2 Image forming apparatus 有权
标题翻译：图像形成装置
公开(公告)号：US09052663B2
公开(公告)日：2015-06-09
申请号：US14227169
申请日：2014-03-27
申请人： Shingo Suzuki , Satoshi Kaneko , Shuji Hirai , Koichi Kudo , Jun Yamane , Shinji Kato
发明人： Shingo Suzuki , Satoshi Kaneko , Shuji Hirai , Koichi Kudo , Jun Yamane , Shinji Kato
IPC分类号： G03G15/00 , G03G15/06
CPC分类号： G03G15/5025 , G03G15/065 , G03G15/5058
摘要： An image forming apparatus includes an image carrier; an image forming unit; a processor for controlling the image forming unit according to a predetermined image forming condition setting data; an image density sensor to detect an image density of the toner pattern formed on the image carrier; a reference rotary position detector; an image density fluctuation data acquisition unit to obtain an image density fluctuation data of more than one circumferential length of the photoreceptor drum with reference to the reference rotary position detected by the reference rotary position detector based on a result related to the toner pattern formed on the image carrier detected by the image density sensor; and a correction data generator to generate a correction data to correct a reference image forming condition setting data with a correction amount corresponding to each rotary position of the rotary member to thus reduce the image density fluctuation.
摘要翻译：图像形成装置包括图像载体; 图像形成单元; 根据预定图像形成条件设置数据控制图像形成单元的处理器; 图像浓度传感器，用于检测形成在图像载体上的调色剂图案的图像浓度; 参考旋转位置检测器; 图像浓度波动数据获取单元，基于与在基准旋转位置检测器上形成的调色剂图案相关的结果，参考由基准旋转位置检测器检测到的参考旋转位置，获得感光鼓的多于一个圆周长度的图像浓度波动数据由图像密度传感器检测的图像载体; 以及校正数据生成器，用于生成校正数据，以校正与旋转构件的每个旋转位置相对应的校正量的参考图像形成条件设置数据，从而减小图像浓度波动。

9. 发明授权

US08977148B2 Image forming apparatus and image forming method 有权
标题翻译：图像形成装置及图像形成方法
公开(公告)号：US08977148B2
公开(公告)日：2015-03-10
申请号：US13753859
申请日：2013-01-30
申请人： Satoshi Kaneko , Jun Yamane , Koichi Kudo , Shinji Kato , Hitoshi Ishibashi , Shuji Hirai , Shingo Suzuki
发明人： Satoshi Kaneko , Jun Yamane , Koichi Kudo , Shinji Kato , Hitoshi Ishibashi , Shuji Hirai , Shingo Suzuki
IPC分类号： G03G15/00 , G03G13/22
CPC分类号： G03G13/22 , G03G15/5037 , G03G15/5041
摘要： An image forming apparatus includes a rotatable image carrier that carries a toner image having a length corresponding to at least a circumferential length of the carrier; an image density detector that detects a density of the image; a potential detector that detects, over at least the circumferential length, a surface potential of the carrier before toner adheres thereto; a first image forming device that adjusts the density with a first factor, and forms an image based on a first condition of the first factor; a second image forming device that adjusts the density with a second factor, and forms an image based on a second condition of the second factor; a first determining device that determines the first condition based on uneven density; and a second determining device that determines the second condition based on uneven density and a potential distribution of the surface potential.
摘要翻译：图像形成装置包括可转动的图像载体，其承载具有对应于载体的至少周长的长度的调色剂图像; 图像浓度检测器，其检测图像的浓度; 在调色剂附着于其之前，至少在圆周长度上检测载体的表面电位的电位检测器; 第一图像形成装置，其以第一因子调整所述浓度，并且基于所述第一因子的第一条件形成图像; 第二图像形成装置，其利用第二因子调整所述浓度，并且基于所述第二因子的第二条件形成图像; 第一确定装置，其基于不均匀密度来确定第一条件; 以及第二确定装置，其基于不均匀密度和表面电位的电位分布来确定第二条件。

10. 发明授权

US08401347B2 Photoelectric composite wiring module and method for manufacturing the same 有权
标题翻译：光电复合布线模块及其制造方法
公开(公告)号：US08401347B2
公开(公告)日：2013-03-19
申请号：US12623686
申请日：2009-11-23
申请人： Naoki Matsushima , Norio Chujo , Yasunobu Matsuoka , Toshiki Sugawara , Madoka Minagawa , Saori Hamamura , Satoshi Kaneko , Tsutomu Kono
发明人： Naoki Matsushima , Norio Chujo , Yasunobu Matsuoka , Toshiki Sugawara , Madoka Minagawa , Saori Hamamura , Satoshi Kaneko , Tsutomu Kono
IPC分类号： G02B6/12
CPC分类号： G02B6/4214 , H05K1/0274 , H05K1/185 , H05K3/4602 , H05K3/4644
摘要： A photoelectric composite wiring module includes a circuit substrate, an optical device, an LSI (device) having a driver and an amplifier for the optical device, and a thin film wiring layer having an electrical wiring. The optical device is connected with the LSI by means of the electrical wiring. The optical device is formed on the circuit substrate and optically coupled to an optical waveguide formed in the circuit substrate. The thin film wiring layer is formed on the optical device to ensure that the optical device is electrically connected with the electrical wiring of the thin film wiring layer. The LSI is mounted on and electrically connected with the thin film wiring layer.
摘要翻译：光电复合布线模块包括电路基板，光学装置，具有用于光学装置的驱动器和放大器的LSI（器件）以及具有电布线的薄膜布线层。光学器件通过电线与LSI连接。光学器件形成在电路基板上，并且光耦合到形成在电路基板中的光波导。在光学器件上形成薄膜布线层，以确保光学器件与薄膜布线层的电气布线电连接。 LSI与薄膜布线层安装在电连接上。

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