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    • 1. 发明授权
    • Method of forming micro-via
    • 形成微孔的方法
    • US06395633B1
    • 2002-05-28
    • US09871206
    • 2001-05-31
    • Jao-Chin ChengChang-Chin HsiehChih-Peng FanChin-Chung Chang
    • Jao-Chin ChengChang-Chin HsiehChih-Peng FanChin-Chung Chang
    • H01L2144
    • H05K3/4647H05K3/108H05K3/243H05K2203/0542H05K2203/0733
    • A method of forming a micro-via, for fabrication and design of a layout of a circuit board. A patterned conductive wiring layer is formed on the substrate. A copper layer is plated onto the substrate and the conductive wiring layer. A photoresist layer is formed on the copper layer. A part of the photoresist layer is removed to expose a part of the copper layer. Using the copper layer as a seed layer, a conductive pillar is formed on the exposed part of the copper layer. The photoresist layer is removed. The exposed plated copper layer is removed. An insulation layer is formed on surfaces of the substrate and the conductive pillar. A part of the insulation layer is removed to expose the conductive pillar. A patterned conductive wiring layer is formed on the conductive pillar.
    • 一种形成微通孔的方法,用于制造和设计电路板的布局。 在基板上形成有图案的导电布线层。 将铜层镀在基板和导电布线层上。 在铜层上形成光致抗蚀剂层。 去除光致抗蚀剂层的一部分以露出铜层的一部分。 使用铜层作为种子层,在铜层的露出部分上形成导电柱。 去除光致抗蚀剂层。 暴露的镀铜层被去除。 在基板和导电柱的表面上形成绝缘层。 去除绝缘层的一部分以露出导电柱。 在导电柱上形成有图案的导电布线层。
    • 4. 发明授权
    • Method of forming IC package having downward-facing chip cavity
    • 形成具有向下的芯片腔的IC封装的方法
    • US06506632B1
    • 2003-01-14
    • US10078211
    • 2002-02-15
    • Jao-Chin ChengChih-Peng FanDavid C. H. Cheng
    • Jao-Chin ChengChih-Peng FanDavid C. H. Cheng
    • H01L2144
    • H01L24/82H01L21/568H01L21/6835H01L23/49816H01L23/5389H01L24/24H01L24/97H01L2224/45144H01L2224/73267H01L2224/82005H01L2224/82039H01L2224/82047H01L2224/97H01L2924/01029H01L2924/01033H01L2924/01075H01L2924/01078H01L2924/01079H01L2924/01082H01L2924/014H01L2924/10253H01L2924/14H01L2924/15311H01L2924/181H01L2924/18162H01L2224/82H01L2924/00
    • A method of forming an integrated circuit package with a downward-facing chip cavity. A substrate comprising an insulating core layer and a conductive layer is provided. A through-hole is formed in the substrate and an adhesive tape is attached to the surface of the conductive layer. A silicon chip is attached to the exposed adhesive tape surface at the bottom of the first opening. The chip has an active surface and a back surface. The chip further includes a plurality of bonding pads on the active surface. The back surface of the chip is attached to the adhesive tape. A patterned dielectric layer is formed filling the first opening and covering a portion of the adhesive tape, the active surface, the bonding pad and the insulating core layer. The patterned dielectric layer has a plurality of openings that exposes the bonding pads and some through holes. A metallic layer is formed over the exposed surface of the openings and the upper surface of the patterned dielectric layer by electroplating. The adhesive tape is removed. The metallic layer and the conductive layer are patterned. A patterned solder resistant layer is formed over the metallic layer and the conductive layer. The patterned solder resistant layer has a plurality of openings that expose a portion of the conductive layer. A solder ball implant is conducted to form electrical connection between the solder balls and the conductive layer.
    • 一种形成具有朝下的芯片腔的集成电路封装的方法。 提供了包括绝缘芯层和导电层的衬底。 在基板中形成通孔,并且在导电层的表面上附着粘合带。 硅芯片附着在第一开口底部的暴露的胶带表面上。 芯片具有活性表面和背面。 所述芯片还包括在所述有源表面上的多个接合焊盘。 芯片的背面附着在胶带上。 形成图案化的介电层,填充第一开口并覆盖粘合带,活性表面,接合焊盘和绝缘芯层的一部分。 图案化电介质层具有暴露接合焊盘和一些通孔的多个开口。 通过电镀在开口的暴露表面和图案化电介质层的上表面上形成金属层。 去除胶带。 金属层和导电层被图案化。 在金属层和导电层之上形成图案化的阻焊层。 图案化的阻焊层具有暴露导电层的一部分的多个开口。 导电焊球植入物以形成焊球和导电层之间的电连接。
    • 8. 发明申请
    • PACKAGE SUBSTRATE HAVING EMBEDDED CAPACITOR
    • 具有嵌入式电容器的封装衬底
    • US20080121417A1
    • 2008-05-29
    • US11623553
    • 2007-01-16
    • Chih-Peng Fan
    • Chih-Peng Fan
    • H05K1/16
    • H05K1/162H05K3/4602H05K3/4623H05K3/4644H05K2201/0355H05K2201/09536H05K2201/09763
    • A package substrate having embedded capacitor is provided. The package substrate includes a first core circuit board, at least one embedded capacitor, a second core circuit board and a dielectric layer. At least one metal layer is disposed on a surface of the first core circuit board and at least one first conductive through hole of the first core circuit board is connected to the metal layer. The embedded capacitor is embedded in the first core circuit board and connected to the metal layer. A wiring layer is disposed on a surface of the second core circuit board and at least one second conductive through hole of the second core circuit board is connected to the wiring layer. The dielectric layer is laminated between the first and the second core circuit boards.
    • 提供具有嵌入式电容器的封装基板。 封装衬底包括第一核心电路板,至少一个嵌入式电容器,第二核心电路板和电介质层。 至少一个金属层设置在第一芯电路板的表面上,并且第一芯电路板的至少一个第一导电通孔连接到金属层。 嵌入式电容器嵌入第一个核心电路板并连接到金属层。 布线层设置在第二芯电路板的表面上,并且第二芯电路板的至少一个第二导电通孔连接到布线层。 介电层层叠在第一和第二核心电路板之间。
    • 9. 发明授权
    • Package substrate having embedded capacitor
    • 封装衬底具有嵌入式电容器
    • US08289725B2
    • 2012-10-16
    • US12851795
    • 2010-08-06
    • Chih-Peng Fan
    • Chih-Peng Fan
    • H05K7/00
    • H05K1/162H05K3/4602H05K3/4623H05K3/4644H05K2201/0355H05K2201/09536H05K2201/09763
    • A package substrate having embedded capacitor is provided. The package substrate includes a core circuit board, at least one dielectric layer, at least one embedded capacitor, and at least one metal layer. The core circuit board has at least one wiring layer, and the core circuit board has at least one conductive through hole connected to the wiring layer. At least one dielectric layer covers the wiring layer, and the dielectric layer has at least one conductive through hole. At least one embedded capacitor is embedded in the dielectric layer. At least one metal layer covers the dielectric layer and connected to the embedded capacitor, wherein the metal layer is connected to the wiring layer through the conductive through hole.
    • 提供具有嵌入式电容器的封装基板。 封装衬底包括芯电路板,至少一个电介质层,至少一个嵌入式电容器和至少一个金属层。 核心电路板具有至少一个布线层,并且核心电路板具有连接到布线层的至少一个导电通孔。 至少一个电介质层覆盖布线层,电介质层具有至少一个导电通孔。 至少一个嵌入式电容器嵌入电介质层。 至少一个金属层覆盖电介质层并连接到嵌入式电容器,其中金属层通过导电通孔连接到布线层。
    • 10. 发明授权
    • Method of making a circuit structure
    • 制作电路结构的方法
    • US08186049B2
    • 2012-05-29
    • US12181556
    • 2008-07-29
    • Chih-Peng FanYen-Ti Chia
    • Chih-Peng FanYen-Ti Chia
    • H05K3/02
    • H05K1/111H01L2224/16225H05K3/108H05K3/243H05K3/3452H05K3/4007H05K2201/0367H05K2201/0989H05K2201/10674H05K2203/0574Y02P70/611Y10T29/49126Y10T29/4913Y10T29/49155Y10T29/49165
    • A manufacturing method of a circuit structure is provided as follows. Firstly, a base conductive layer is formed on the carrier board and a first patterned plating-resistant layer having at least one trench for exposing a part of the base conductive layer is formed on the base conductive layer. A first patterned conductive layer is then formed in the trench and a second patterned plating-resistant layer is formed which covers a part of the first patterned conductive layer and a part of the first patterned plating-resistant layer. A second patterned conductive layer is formed on the exposed first patterned conductive layer. The first and the second patterned plating-resistant layers and the base conductive layer exposed by the first patterned conductive layer are removed. Then, a patterned solder mask is formed for covering a part of the first patterned conductive layer.
    • 电路结构的制造方法如下所述。 首先,在载体板上形成基底导电层,在基底导电层上形成具有至少一个露出基底导电层的一部分的沟槽的第一图案化电镀层。 然后在沟槽中形成第一图案化导电层,并且形成覆盖第一图案化导电层的一部分和第一图案化电镀层的一部分的第二图案化电镀层。 在暴露的第一图案化导电层上形成第二图案化导电层。 去除第一和第二图案化电镀层和由第一图案化导电层暴露的基底导电层。 然后,形成图案化的焊料掩模以覆盖第一图案化导电层的一部分。