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    • 1. 发明授权
    • Water soluble negative-working photoresist composition
    • 水溶性负性光刻胶组合物
    • US5998092A
    • 1999-12-07
    • US85880
    • 1998-05-27
    • Iain McCullochAnthony J. EastMing KangRichard KeosianHyun-Nam Yoon
    • Iain McCullochAnthony J. EastMing KangRichard KeosianHyun-Nam Yoon
    • C08F12/22C08F16/12C08F16/36C08F18/14C08F20/58C08F246/00G03F7/004G03F7/038G03F7/039H01L21/027G03F7/032C08F24/00
    • C08F246/00G03F7/038G03F7/039G03F7/0045
    • A water soluble polymer that when used with a suitable photoacid generator (PAG) forms a negative working water soluble photoresist. The polymer comprises of a backbone, such as polyvinyl ether, coupled by a linkage group to an acetal protected .beta.-keto acid group. With the addition of a number of commercially available photo acid generators, the polymer formulation forms a negative working photoresist that is water soluble. Exposure to radiation will cause a photoacid catalyzed deprotection of the acetal group, yielding a .beta.-keto acid which, upon heating, will undergo decarboxylation, which results in a water insoluble photoproduct and evolution of CO.sub.2 as a byproduct. This photochemically induced reaction results in a significant change in the polymer solubility parameter, and the product is no longer soluble in water. As this solubility change does not require crosslinking, there will be no swelling of the resist images on exposure to the aqueous base during development, and hence no loss of resolution. This enables the photoresist to be used at fine resolutions at i-line and deep UV wavelengths.
    • 当与合适的光酸产生剂(PAG)一起使用时,水溶性聚合物形成负性工业水溶性光致抗蚀剂。 聚合物包括主链,例如聚乙烯醚,通过连接基团与缩醛保护的β-酮酸基团偶联。 通过添加许多市售的光酸产生剂,聚合物配方形成水溶性的负性光致抗蚀剂。 暴露于辐射将导致缩醛基的光酸催化脱保护,产生β-酮酸,其在加热时将经历脱羧,这导致水不溶性光产物和作为副产物的CO 2的释放。 这种光化学诱导反应导致聚合物溶解度参数的显着变化,并且产物不再溶于水。 由于该溶解度变化不需要交联,因此在显影期间暴露于碱性水溶液时,抗蚀剂图像不会溶胀,因此没有分辨率的损失。 这使得光致抗蚀剂可以在i线和深紫外波长处以高分辨率使用。