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1. 发明授权

US06442181B1 Extreme repetition rate gas discharge laser 有权
标题翻译：极端重复率气体放电激光
公开(公告)号：US06442181B1
公开(公告)日：2002-08-27
申请号：US09684629
申请日：2000-10-06
申请人： I. Roger Oliver , William N. Partlo , Richard M. Ness , Richard L. Sandstrom , Stuart L. Anderson , Alex P. Ivaschenko , James K. Howey , Vladimir Kulgeyko , Jean-Marc Hueber , Daniel L. Birx
发明人： I. Roger Oliver , William N. Partlo , Richard M. Ness , Richard L. Sandstrom , Stuart L. Anderson , Alex P. Ivaschenko , James K. Howey , Vladimir Kulgeyko , Jean-Marc Hueber , Daniel L. Birx
IPC分类号： H01S310
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08036 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/134 , H01S3/22 , H01S3/2207 , H01S3/225 , H03K3/57 , H03K17/80
摘要： A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater. Important improvements over prior art designs include: (1) a laser chamber having a gas flow path with a gradually increasing cross section downstream of the discharge electrodes to permit recovery a large percentage of the pressure drop in the discharge region, (2) a squirrel cage type fan for producing gas velocities through the discharge region of more than 76 m/s and capable of continuous trouble-free operation for several months, (3) a heat exchanger system capable of removing in excess of 16 kw of heat energy from the laser gas (4) a pulse power system capable of providing precisely controlled electrical pulses to the electrodes needed to produce laser pulses at the desired pulse energies in the range of 5 mJ to 10 mJ or greater at pulse repetition rates in the range of 4,000 Hz to 6,000 Hz or greater and (5) a laser beam measurement and control system capable of measuring pulse energy wavelength and bandwidth on a pulse-to-pulse laser with feedback pulse-to-pulse control of pulse energy and wavelength.
摘要翻译：一种气体放电激光器，能够以5mJ至10mJ或更大的脉冲能量在4000Hz至6,000Hz的脉冲频率下工作。与现有技术设计相比，重要的改进包括：（1）具有在放电电极下游具有逐渐增加的横截面的气体流动路径的激光室，以允许在放电区域中恢复大部分的压降，（2）松鼠通过排气区域超过76m / s产生气体速度的笼式风扇，能够连续无故障运行数月，（3）能够从其中除去超过16kw的热能的热交换器系统激光气体（4）脉冲电力系统，能够在脉冲重复频率为4,000Hz时以5mJ至10mJ或更大的范围内以期望的脉冲能量产生激光脉冲所需的电极提供精确控制的电脉冲至6,000Hz以上，（5）激光束测量和控制系统，其能够测量脉冲到脉冲激光器上的脉冲能量波长和带宽，其中反馈脉冲至脉冲控制脉冲能量和波长。

2. 发明授权

US06795474B2 Gas discharge laser with improved beam path 失效
标题翻译：气体放电激光器具有改进的光束路径
公开(公告)号：US06795474B2
公开(公告)日：2004-09-21
申请号：US10000991
申请日：2001-11-14
申请人： William N. Partlo , Richard L. Sandstrom , Holzer K. Glatzel , Raymond F. Cybulski , Peter C. Newman , James K. Howey , William G. Hulburd , John T. Melchior , Alex P. Ivaschenko
发明人： William N. Partlo , Richard L. Sandstrom , Holzer K. Glatzel , Raymond F. Cybulski , Peter C. Newman , James K. Howey , William G. Hulburd , John T. Melchior , Alex P. Ivaschenko
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2366
摘要： An excimer laser with a purged beam path capable of producing a high quality pulsed laser beam at pulse rates in excess of 2,000 Hz at pulse energies of about 5 mJ or greater. The entire purged beam path through the laser system is sealed to minimize contamination of the beam path. A preferred embodiment comprises a thermally decoupled LNP aperture element to minimize thermal distortions in the LNP. This preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter is provided with a special purge of a compartment exposed to the output laser beam.
摘要翻译：具有清除光束路径的准分子激光器，其能够以大约5mJ或更大的脉冲能量产生超过2000Hz的脉冲速率的高质量脉冲激光束。通过激光系统的整个清除的光束路径被密封以最小化光束路径的污染。优选实施例包括热去耦LNP孔元件以最小化LNP中的热失真。该优选实施例是专门设计为用于集成电路光刻的光源的ArF准分子激光器。改进的波形计提供了暴露于输出激光束的隔室的特殊吹扫。

3. 发明授权

US07346093B2 DUV light source optical element improvements 有权
标题翻译： DUV光源光学元件改进
公开(公告)号：US07346093B2
公开(公告)日：2008-03-18
申请号：US10808157
申请日：2004-03-23
申请人： Richard L. Sandstrom , John Martin Algots , Joshua C. Brown , Raymond F. Cybulski , John Dunlop , James K. Howey , Richard G. Morton , Xiaojiang Pan , William N. Partlo , Firas F. Putris , Tom A. Watson , Thomas A. Yager
发明人： Richard L. Sandstrom , John Martin Algots , Joshua C. Brown , Raymond F. Cybulski , John Dunlop , James K. Howey , Richard G. Morton , Xiaojiang Pan , William N. Partlo , Firas F. Putris , Tom A. Watson , Thomas A. Yager
IPC分类号： H01S3/08 , H01S3/22
CPC分类号： H01S3/02 , G01J1/429 , G01J9/02 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.
摘要翻译：公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座从柔性的安装框架开始，挠曲臂将挠性件附接到安装框架。该装置可以包括具有细长杆的挠曲力机构。力机构可以预应力挠曲。镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。光栅可以使用电磁感应元件或磁敏元件进行主动调谐。可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

4. 发明授权

US08259764B2 Bandwidth control device 有权
标题翻译：带宽控制装置
公开(公告)号：US08259764B2
公开(公告)日：2012-09-04
申请号：US11472088
申请日：2006-06-21
申请人： Igor V. Fomenkov , William N. Partlo , Daniel J. Reiley , James K. Howey , Stanley C. Aguilar
发明人： Igor V. Fomenkov , William N. Partlo , Daniel J. Reiley , James K. Howey , Stanley C. Aguilar
IPC分类号： H01S3/136
CPC分类号： H01S3/225 , H01S3/03 , H01S3/034 , H01S3/08009 , H01S3/137 , H01S3/2256
摘要： A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.
摘要翻译：公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。主动波前补偿机构可以包括气动驱动机构。

5. 发明申请

US20070297467A1 Bandwidth control device 有权
标题翻译：带宽控制装置
公开(公告)号：US20070297467A1
公开(公告)日：2007-12-27
申请号：US11472088
申请日：2006-06-21
申请人： Igor V. Fomenkov , William N. Partlo , Daniel J. Reiley , James K. Howey , Stanley C. Aguilar
发明人： Igor V. Fomenkov , William N. Partlo , Daniel J. Reiley , James K. Howey , Stanley C. Aguilar
IPC分类号： H01S3/10
CPC分类号： H01S3/225 , H01S3/03 , H01S3/034 , H01S3/08009 , H01S3/137 , H01S3/2256
摘要： A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.
摘要翻译：公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。主动波前补偿机构可以包括气动驱动机构。

6. 发明授权

US08639847B2 Systems and methods for scheduling data flow execution based on an arbitrary graph describing the desired data flow 有权
标题翻译：基于描述所需数据流的任意图来调度数据流执行的系统和方法
公开(公告)号：US08639847B2
公开(公告)日：2014-01-28
申请号：US13116977
申请日：2011-05-26
申请人： Michael A. Blaszczak , James K. Howey
发明人： Michael A. Blaszczak , James K. Howey
IPC分类号： G06F15/16
CPC分类号： G06F12/023
摘要： The data transformation system in one embodiment, comprises a capability to receive data, a data destination and a capability to store transformed data, and a data transformation pipeline that constructs complex end-to-end data transformation functionality by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes for transforming the data as it flows. Each component in the pipeline possesses predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense.The data transformation pipeline enables a user to develop complex end-to-end data transformation functionality by graphically describing and representing, via a GUI, a desired data flow from one or more sources to one or more destinations through various interconnected nodes (graph). Each node in the graph selected by the user represents predefined data transformation functionality, and connections between nodes define the data flow pathway.
摘要翻译：一个实施例中的数据转换系统包括接收数据，数据目的地和存储变换数据的能力的能力，以及通过流水线从一个或多个数据流流出的数据来构建复杂的端到端数据转换功能的数据变换流水线通过各种互连节点向一个或多个目的地发送数据，用于在数据流动时转换数据。管道中的每个组件具有预定义的数据转换功能，组件之间的逻辑连接在操作意义上定义数据流通路。数据转换流水线允许用户通过图形地描述和表示通过各种互连节点（图）从一个或多个源到一个或多个目的地的期望数据流来开发复杂的端到端数据变换功能。由用户选择的图中的每个节点表示预定义的数据变换功能，并且节点之间的连接定义数据流通路。

7. 发明授权

US06873418B1 Optical mountings for gas discharge MOPA laser spectral analysis module 有权
标题翻译：用于气体放电MOPA激光光谱分析模块的光学安装
公开(公告)号：US06873418B1
公开(公告)日：2005-03-29
申请号：US10676224
申请日：2003-09-30
申请人： James K. Howey , Rajasekhar M. Rao
发明人： James K. Howey , Rajasekhar M. Rao
IPC分类号： G01B9/02 , G01J11/00 , G02B7/02 , G02B7/182 , H01S3/13
CPC分类号： G02B7/1825 , G01J11/00 , G02B7/021
摘要： A wavemeter for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000 Hz and above, is disclosed which may comprise an adjustable optic mounting containing an optic element having an assigned vertical optical plane in the wavemeter optical layout and comprising: a mounting dowel pin positioned on a platform holding the components of the wavemeter; a dowel receiving opening on the adjustable mirror mounting a tangent to which is in the assigned vertical optical plane. The adjustable optic mounting may contain a tilt mechanism incorporated into the adjustable optic mounting enabling tilting the optic element about an axis in a plane parallel to a platform holding components of the wavemeter. The mounting may also have an optic receiving recess indexed to the size of the optic element. The optic element may be retained by at least one spring clip and may be a flat rectangular mirror or a circular optic, e.g., a mirror or a lens. The mounting may also have an optic mounting frame containing an optical element; a slit assembly containing a microslit adapted to selectively pass a slit of the optical output of the optical diffusion element to a succeeding optical element, moveably mounted to the optic mounting frame; a microslit position adjustment mechanism moving the slit assembly from a retracted position exposing the optic diffusion element for purposes of alignment to a down position with the slit aligned and moving the microslit into alignment.
摘要翻译：一种用于具有输出激光束的高重复率气体放电激光器的波长计，其包括脉冲输出大于或等于15mJ /脉冲，亚纳米带宽调谐范围脉冲具有飞行器带宽精度和数十个飞行器带宽精度范围，用于以4000Hz及以上的脉冲重复频率在脉冲到脉冲基础上测量带宽，其可以包括可调光学安装件，其包含在波长计光学布局中具有指定的垂直光学平面的光学元件，并且包括：安装销钉位于保持波长计的组件的平台上; 可调节镜上的定位销接收开口安装在指定的垂直光学平面中的切线。可调节光学安装件可以包含结合到可调节光学安装件中的倾斜机构，使得可以在与保持波长计的部件的平台平行的平面中的轴线处倾斜光学元件。安装件还可以具有与光学元件的尺寸分度的光学接收凹部。光学元件可以由至少一个弹簧夹保持，并且可以是平面矩形镜或圆形光学器件，例如镜子或透镜。安装件还可以具有包含光学元件的光学安装框架; 狭缝组件，其包含适于选择性地将光扩散元件的光输出的狭缝传递到可移动地安装到光学安装框架的后续光学元件的微型灯; 微型位置调节机构使狭缝组件从缩回位置移动，该缩回位置暴露光学扩散元件，以便对准到下部位置，同时狭缝对准并将微光线移动到对准位置。

8. 发明授权

US6023486A Soldered fan assembly for electric discharge laser 有权
标题翻译：用于放电激光的焊接风扇组件
公开(公告)号：US6023486A
公开(公告)日：2000-02-08
申请号：US311680
申请日：1999-05-12
申请人： Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski
发明人： Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski
IPC分类号： G03F7/20 , H01S3/036 , H01S3/225 , H01S3/22
CPC分类号： H01S3/036 , G03F7/708 , H01S3/225
摘要： A tangential fan with cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential positions of blade members can shift monotonically or reversibly between ends. Blade members can be formed into air foil shapes and are stiffened by one or more transverse annular hub members. Processes for making tangential fans include soldering, casting, and machining from a solid block. Monolithic structures can be joined, typically by soldering or electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Soldering produces substantially silicon-free assemblies. Tangential fans produced in accordance with the invention have improved mechanical rigidity, accurate tolerances, and low contaminant concentrations.
摘要翻译：具有用于再循环激光气体混合物的切断组件的切向风扇具有叶片构件，其从端到端逐步地沿周向位置变化，和/或锥形阳极组件。刀片构件的数量可以在端部之间是恒定的或可变的。叶片构件的圆周位置可以在端部之间单调地或可逆地移动。叶片构件可以形成为空气箔形状并且被一个或多个横向环形毂构件加固。制造切向风扇的过程包括从固体块进行焊接，铸造和加工。通常可以通过焊接或电子束焊接来连接整体结构。铸造，焊接和加工过程不会引起额外的污染物。焊接产生基本无硅组件。根据本发明生产的切向风扇具有改善的机械刚性，精确的公差和低的污染物浓度。

9. 发明授权

US07970746B2 Declarative management framework 有权
标题翻译：声明式管理框架
公开(公告)号：US07970746B2
公开(公告)日：2011-06-28
申请号：US11535358
申请日：2006-09-26
申请人： Praveen Seshadri , Michiel J. Wories , Hongfei Guo , Ciprian Gerea , Daniel T. Jones , James A. Holt , Grigory Pogulsky , Sethu Srinivasan , James K. Howey
发明人： Praveen Seshadri , Michiel J. Wories , Hongfei Guo , Ciprian Gerea , Daniel T. Jones , James A. Holt , Grigory Pogulsky , Sethu Srinivasan , James K. Howey
IPC分类号： G06F7/00
CPC分类号： G06F9/44505 , G06F11/1458 , H04L41/024 , H04L63/20
摘要： User productivity can be facilitated by providing an interface between a high-level intent and low-level settings that should be configured to achieve the intent. The intent can be expressed in declarative language. The intent can be verified to determine if it conforms to a target, a policy, or both. Policy binding can provide a relationship between the target and the policy. An application view can be provided that allows the user to view a server having one or more databases.
摘要翻译：通过提供应该配置为实现意图的高级意图和低级设置之间的接口，可以促进用户生产力。意图可以用声明语言表达。可以验证意图以确定其是否符合目标，策略或两者。策略绑定可以提供目标与策略之间的关系。可以提供允许用户查看具有一个或多个数据库的服务器的应用程序视图。

10. 发明授权

US07953891B2 Systems and methods for scheduling data flow execution based on an arbitrary graph describing the desired data flow 有权
标题翻译：基于描述所需数据流的任意图来调度数据流执行的系统和方法
公开(公告)号：US07953891B2
公开(公告)日：2011-05-31
申请号：US10391726
申请日：2003-03-18
申请人： Michael A. Blaszczak , James K. Howey
发明人： Michael A. Blaszczak , James K. Howey
IPC分类号： G06F15/16
CPC分类号： G06F12/023
摘要： The data transformation system in one embodiment, comprises a capability to receive data, a data destination and a capability to store transformed data, and a data transformation pipeline that constructs complex end-to-end data transformation functionality by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes for transforming the data as it flows. Each component in the pipeline possesses predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense.The data transformation pipeline enables a user to develop complex end-to-end data transformation functionality by graphically describing and representing, via a GUI,a desired data flow from one or more sources to one or more destinations through various interconnected nodes (graph). Each node in the graph selected by the user represents predefined data transformation functionality, and connections between nodes define the data flow pathway.
摘要翻译：一个实施例中的数据转换系统包括接收数据，数据目的地和存储变换数据的能力的能力，以及通过流水线从一个或多个数据流流出的数据来构建复杂的端到端数据转换功能的数据变换流水线通过各种互连节点向一个或多个目的地发送数据，用于在数据流动时转换数据。管道中的每个组件具有预定义的数据转换功能，组件之间的逻辑连接在操作意义上定义数据流通路。数据转换流水线允许用户通过图形地描述和表示通过各种互连节点（图）从一个或多个源到一个或多个目的地的期望数据流来开发复杂的端到端数据变换功能。由用户选择的图中的每个节点表示预定义的数据变换功能，并且节点之间的连接定义数据流通路。

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