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    • 8. 发明授权
    • Mobile communication unit and mobile communication system
    • 移动通信单元和移动通信系统
    • US06671509B1
    • 2003-12-30
    • US09339835
    • 1999-06-25
    • Masaki TanakaKenzo UrabeSeigo MiyoshiYoshikuni ItohHideto Yamaguchi
    • Masaki TanakaKenzo UrabeSeigo MiyoshiYoshikuni ItohHideto Yamaguchi
    • H04Q732
    • H04W8/245H04W8/183
    • A mobile station (mobile communication unit) receives system software from a base station via an antenna and a transmitter/receiver, and stores the received system software in a memory. A digital signal processor in the mobile station then performs communication processing according to the system software stored in the memory. By transmitting various system software from the base station, the single mobile station can easily be adapted to different communication principles. The base station also receives system software from a center via a public exchange network, and stores the received system software in a memory. A digital signal processor in the base station then performs communication processing according to the system software stored in the memory.
    • 移动站(移动通信单元)经由天线和发射机/接收机从基站接收系统软件,并将接收到的系统软件存储在存储器中。 然后,移动站中的数字信号处理器根据存储在存储器中的系统软件执行通信处理。 通过从基站发送各种系统软件,单个移动台可以容易地适应不同的通信原理。 基站还通过公共交换网从中心接收系统软件,并将接收到的系统软件存储在存储器中。 然后,基站中的数字信号处理器根据存储在存储器中的系统软件执行通信处理。
    • 9. 发明授权
    • Substrate processing apparatus capable of switching control mode of heater
    • 能够切换加热器的控制模式的基板处理装置
    • US09418881B2
    • 2016-08-16
    • US13192784
    • 2011-07-28
    • Shinobu SugiuraMasaaki UenoKazuo TanakaMasashi SugishitaHideto YamaguchiKenji Shirako
    • Shinobu SugiuraMasaaki UenoKazuo TanakaMasashi SugishitaHideto YamaguchiKenji Shirako
    • H01L21/67G05D23/19G05D23/20C23C14/54C23C16/458C23C16/52G05D23/22
    • H01L21/67248C23C14/541C23C16/4584C23C16/52G05D23/1931G05D23/22H01L21/67109
    • Provided is a substrate processing apparatus capable of suppressing inferiority when heat treatment is controlled using a temperature sensor. The substrate processing apparatus includes a heating means configured to heat a process chamber wherein a substrate is accommodated; a first temperature detection means configured to detect a temperature about the substrate using a first thermocouple; a second temperature detection means configured to detect a temperature about the heating means using a second thermocouple; a control unit configured to control the heating means based on the temperature detected by the first temperature detection means and the temperature detected by the second temperature detection means; and a control switching means configured to control the control unit based on the temperatures detected by the first temperature detection means and the second temperature detection means such that the control unit is switched between a first control mode and a second control mode, wherein a heat resistance of the first thermocouple is greater than that of the second thermocouple, and a temperature detection performance of the second thermocouple is higher than that of the first thermocouple.
    • 提供一种当使用温度传感器控制热处理时能够抑制劣化的基板处理装置。 基板处理装置包括加热装置,其构造成加热容纳基板的处理室; 第一温度检测装置,被配置为使用第一热电偶检测关于所述基板的温度; 第二温度检测装置,被配置为使用第二热电偶检测关于加热装置的温度; 控制单元,被配置为基于由第一温度检测装置检测的温度和由第二温度检测装置检测的温度来控制加热装置; 以及控制切换装置,被配置为基于由第一温度检测装置和第二温度检测装置检测到的温度来控制控制单元,使得控制单元在第一控制模式和第二控制模式之间切换,其中耐热性 的第一热电偶的温度检测性能高于第一热电偶的温度检测性能。