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    • 1. 发明授权
    • Working process end point real time determination method
    • 工作流程终点实时确定方法
    • US06490497B1
    • 2002-12-03
    • US09489033
    • 2000-01-21
    • Hideo MitsuhashiKatsuhisa OkawaHiroshi Naka
    • Hideo MitsuhashiKatsuhisa OkawaHiroshi Naka
    • G06F1900
    • H01L22/26G05B2219/32078
    • A working process end point real time determination method by which a working process end point can be determined accurately without an error even if a working process measurement signal has such a great variation that; the variation cannot be removed fully from and still remains in resulting smoothed data is disclosed. In the method, a working process end point is estimated by extrapolation from the variation of the average gradient of the averaged data in a predetermined period of the working process measurement signal to perform determination of the end point. Where the working process does not allow such extrapolation, it is first determined that the working process is near the working process end point based on the absolute value of the average gradient of the averaged data, and then the working process end point is determined using a short time gradient calculated from a value at the present measurement point of time and another value in the nearest past of the averaged data of the working process measurement signal.
    • 一种工作过程终点实时确定方法,即使工作过程测量信号具有如此大的变化,也可以准确地确定工作过程终点,而无误差; 该变化不能从完全清除并且仍然保留在所得到的平滑数据中。 在该方法中,通过在工作过程测量信号的预定周期内的平均数据的平均梯度的变化进行外推来估计工作过程终点,以执行终点的确定。 在工作过程不允许这种外推的情况下,首先根据平均数据的平均梯度的绝对值确定工作过程在工作过程终点附近,然后使用 从当前测量时间点的值和工作过程测量信号的平均数据的最近过去的另一个值计算的短时间梯度。
    • 2. 发明授权
    • Analyzing apparatus and fine particle collecting apparatus
    • 分析装置和微粒收集装置
    • US07275453B2
    • 2007-10-02
    • US10773743
    • 2004-02-06
    • Masanori IshikawaNaoya SasakiKatsumi NagumoShigenori MorishimaHiroshi Naka
    • Masanori IshikawaNaoya SasakiKatsumi NagumoShigenori MorishimaHiroshi Naka
    • G01N1/00
    • G01N1/2214G01N1/2208G01N1/24G01N2001/022G01N2001/028G01N2001/2223
    • A simple and convenient analyzing apparatus is provided which easily, conveniently, and efficiently collects a material in the state of fine particles adhered to a target object, extracts the object to be analyzed, and analyzes the extracted object. An apparatus for detecting fine particles in a gas which sucks the gas under measurement from the target object by using a suction pump, extracts the fine particles contained in the gas under measurement, and performs measurement by using a spectrometer is embodied such that an inertial impactor for collecting the fine particles having diameters not less than a specified particle diameter is disposed upstream of the spectrometer, the fine particles are collected in the fine particle collector of the inertial impactor, the collector containing the collected fine particles is heated such that the collected fine particles are vaporized into a gas, and the vaporized fluid to be examined is supplied to the spectrometer to be measured thereby.
    • 提供了一种简单便利的分析装置,其容易地,方便地且有效地收集粘附到目标物体上的细小颗粒状态的材料,提取待分析物体,并分析提取的物体。 一种用于检测气体中的微粒的装置,其通过使用抽吸泵从目标物体吸取测量中的气体,提取测量气体中所含的微粒,并且通过使用光谱仪进行测量,使得惯性冲击器 为了收集直径不小于规定粒径的微粒,配置在光谱仪的上游侧,将微粒收集在惯性冲击器的微粒收集体中,将收集的微粒的收集体加热使得收集的细 将颗粒蒸发成气体,将待检测的汽化流体供给到待测量的光谱仪。
    • 7. 发明授权
    • Optoelectronic devices and manufacturing method thereof
    • 光电器件及其制造方法
    • US06476379B2
    • 2002-11-05
    • US09764287
    • 2001-01-19
    • Kazunori AndoShoichi TakahashiHiroshi Naka
    • Kazunori AndoShoichi TakahashiHiroshi Naka
    • G02B636
    • G02B6/4201G02B6/4212G02B6/4239G02B6/4243G02B6/4245G02B6/4253G02B6/4265G02B6/4274
    • It is a subject to realize an optoelectronic device for reliably monitoring a laser optical beam intensity by a photodetector. In the optoelectric device, a semiconductor laser chip, an optical fiber for taking a front laser beam of the semiconductor laser chip from the top end surface and a photodetector for receiving a rear laser beam of the semiconductor laser chip are fixed on a main surface of a platform, and each of the optical parts and portions including. an optical channels between each of the optical parts are covered with a silicone gel, wherein a portion of the main surface of the platform between the top end of the optical fiber and the semiconductor laser chip and between the photodetector and the semiconductor laser chip has concaves so that voids are not formed upon curing of the silicone gel. The edge of the concave on the side of the semiconductor laser chip is situated closer to the semiconductor laser chip than to the emitting facet of the semiconductor laser chip. The end of the bonding portion for fixing the semiconductor laser chip to the platform recedes inward of the emitting facet.
    • 实现用于通过光电检测器可靠地监测激光光束强度的光电子器件是一个主题。 在光电装置中,半导体激光芯片,从顶端面取出半导体激光芯片的前方激光束的光纤和用于接收半导体激光芯片的后方激光的光检测器固定在 平台,以及每个光学部件和部分。 在每个光学部件之间的光通道被硅凝胶覆盖,其中在光纤的顶端和半导体激光器芯片之间以及光电检测器和半导体激光器芯片之间的平台的主表面的一部分具有凹部 使得硅氧烷凝胶固化后不会形成空隙。 半导体激光芯片侧的凹部的边缘比半导体激光器芯片的发光面更靠近半导体激光器芯片。 用于将半导体激光芯片固定到平台的接合部分的末端在发射面的内侧后退。