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    • 6. 发明申请
    • SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
    • 半导体器件制造方法和半导体器件
    • US20160329684A1
    • 2016-11-10
    • US15070669
    • 2016-03-15
    • Mitsubishi Electric Corporation
    • Hitoshi SAKUMA
    • H01S5/227H01S5/02
    • H01S5/2275H01S5/0201H01S5/2222H01S5/323H01S2301/176
    • A method of manufacturing a semiconductor device, includes a step of forming, on a semiconductor substrate, a mesa stripe including an active layer, and a semiconductor layer covering the mesa stripe, a masking step of forming, on the semiconductor layer, a mask pattern through which the semiconductor layer is exposed on opposite sides of the mesa stripe, an isotropic etching step of performing isotropic etching on the semiconductor layer exposed through the mask pattern so that concaves having a circular-arc sectional shape are formed in the semiconductor layer, and an anisotropic etching step of performing anisotropic etching on the semiconductor layer through the mask pattern after the isotropic etching step so that etching progresses to the semiconductor substrate.
    • 一种制造半导体器件的方法包括在半导体衬底上形成包括有源层的台面条和覆盖台面条的半导体层的步骤,在半导体层上形成掩模图案的掩模步骤 半导体层通过其暴露在台面条的相对侧上,各向同性蚀刻步骤对通过掩模图案曝光的半导体层进行各向同性蚀刻,使得在半导体层中形成具有圆弧截面形状的凹部,以及 各向异性蚀刻步骤,在各向同性蚀刻步骤之后通过掩模图案在半导体层上进行各向异性蚀刻,以使蚀刻进行到半导体衬底。
    • 8. 发明授权
    • Method for manufacturing semiconductor laser element
    • 制造半导体激光元件的方法
    • US09184566B2
    • 2015-11-10
    • US14530873
    • 2014-11-03
    • Mitsubishi Electric Corporation
    • Kazumasa Kishimoto
    • H01L21/28H01S5/227H01S5/02H01S5/22H01S5/20
    • H01S5/2275H01S5/0207H01S5/2086H01S5/209H01S5/2222
    • A method for manufacturing a semiconductor laser element includes forming an etching end point detection layer on part of a substrate, forming an substrate exposed portion and forming a lower cladding layer, an active layer, and an upper cladding layer on the etching end point detection layer and on the exposed portion, forming an insulating film pattern at a distance corresponding to a clearance region, from directly above a boundary between the substrate exposed portion and the etching end point detection layer, etching the upper clad layer, the active layer, and the lower cladding layer using the insulating film pattern as a mask and stopping etching at a time when the etching end point detection layer is exposed or after a predetermined time duration after the time.
    • 一种半导体激光元件的制造方法,在基板的一部分上形成刻蚀终点检测层,在蚀刻终点检测层上形成基板露出部,形成下包层,有源层和上包覆层 并且在暴露部分上形成距离对应于间隙区域的距离处的绝缘膜图案,从衬底暴露部分和蚀刻终点检测层之间的边界的正上方蚀刻上覆盖层,有源层和 使用绝缘膜图案作为掩模的下包层,并且在蚀刻终点检测层暴露时或在时间之后的预定持续时间之后停止蚀刻。
    • 10. 发明申请
    • METHOD FOR MANUFACTURING SEMICONDUCTOR LASER ELEMENT
    • 制造半导体激光元件的方法
    • US20150180198A1
    • 2015-06-25
    • US14530873
    • 2014-11-03
    • Mitsubishi Electric Corporation
    • Kazumasa Kishimoto
    • H01S5/00H01S5/22H01S5/30
    • H01S5/2275H01S5/0207H01S5/2086H01S5/209H01S5/2222
    • A method for manufacturing a semiconductor laser element includes forming an etching end point detection layer on part of a substrate, forming an substrate exposed portion and forming a lower cladding layer, an active layer, and an upper cladding layer on the etching end point detection layer and on the exposed portion, forming an insulating film pattern at a distance corresponding to a clearance region, from directly above a boundary between the substrate exposed portion and the etching end point detection layer, etching the upper clad layer, the active layer, and the lower cladding layer using the insulating film pattern as a mask and stopping etching at a time when the etching end point detection layer is exposed or after a predetermined time duration after the time.
    • 一种半导体激光元件的制造方法,在基板的一部分上形成刻蚀终点检测层,在蚀刻终点检测层上形成基板露出部,形成下包层,有源层和上包覆层 并且在暴露部分上形成距离对应于间隙区域的距离处的绝缘膜图案,从衬底暴露部分和蚀刻终点检测层之间的边界的正上方蚀刻上覆盖层,有源层和 使用绝缘膜图案作为掩模的下包层,并且在蚀刻终点检测层暴露时或在时间之后的预定持续时间之后停止蚀刻。