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1. 发明授权

US06490497B1 Working process end point real time determination method 有权
标题翻译：工作流程终点实时确定方法
公开(公告)号：US06490497B1
公开(公告)日：2002-12-03
申请号：US09489033
申请日：2000-01-21
申请人： Hideo Mitsuhashi , Katsuhisa Okawa , Hiroshi Naka
发明人： Hideo Mitsuhashi , Katsuhisa Okawa , Hiroshi Naka
IPC分类号： G06F1900
CPC分类号： H01L22/26 , G05B2219/32078
摘要： A working process end point real time determination method by which a working process end point can be determined accurately without an error even if a working process measurement signal has such a great variation that; the variation cannot be removed fully from and still remains in resulting smoothed data is disclosed. In the method, a working process end point is estimated by extrapolation from the variation of the average gradient of the averaged data in a predetermined period of the working process measurement signal to perform determination of the end point. Where the working process does not allow such extrapolation, it is first determined that the working process is near the working process end point based on the absolute value of the average gradient of the averaged data, and then the working process end point is determined using a short time gradient calculated from a value at the present measurement point of time and another value in the nearest past of the averaged data of the working process measurement signal.
摘要翻译：一种工作过程终点实时确定方法，即使工作过程测量信号具有如此大的变化，也可以准确地确定工作过程终点，而无误差; 该变化不能从完全清除并且仍然保留在所得到的平滑数据中。在该方法中，通过在工作过程测量信号的预定周期内的平均数据的平均梯度的变化进行外推来估计工作过程终点，以执行终点的确定。在工作过程不允许这种外推的情况下，首先根据平均数据的平均梯度的绝对值确定工作过程在工作过程终点附近，然后使用从当前测量时间点的值和工作过程测量信号的平均数据的最近过去的另一个值计算的短时间梯度。

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