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1. 发明授权

US06770867B2 Method and apparatus for scanned instrument calibration 有权
标题翻译：用于扫描仪器校准的方法和装置
公开(公告)号：US06770867B2
公开(公告)日：2004-08-03
申请号：US10186206
申请日：2002-06-27
申请人： Henri J. Lezec , Christian R. Musil
发明人： Henri J. Lezec , Christian R. Musil
IPC分类号： H01J3728
CPC分类号： G01N23/225 , H01J2237/28 , H01J2237/2826 , H01J2237/30444 , H01J2237/31749
摘要： Methods and apparatus for calibration of a scanned beam system are provided by sampling a calibration specimen containing an array of targets with a spacing between samples that is greater than the spacing between targets in the array and forming an image from the samples to reduce calibration specimen degradation and to magnify calibration errors to enable very fine calibration of the scanned beam system.
摘要翻译：用于校准扫描束系统的方法和装置通过对包含靶阵列的校准样本进行取样来提供，样本阵列之间的间距大于阵列中靶标之间的间距，并从样品中形成图像以减少校准样品降解并放大校准误差，以便对扫描光束系统进行非常精确的校准。

2. 发明授权

US07664566B2 Graphical automated machine control and metrology 有权
标题翻译：图形自动化机器控制和计量
公开(公告)号：US07664566B2
公开(公告)日：2010-02-16
申请号：US11932640
申请日：2007-10-31
申请人： David J. Tasker , Henri J. Lezec , David A. Head
发明人： David J. Tasker , Henri J. Lezec , David A. Head
IPC分类号： G06F19/00
CPC分类号： G05B19/40933 , G01N1/286 , G05B2219/36314 , G05B2219/36317 , G05B2219/36325 , H01J37/28 , H01J37/3023 , H01J37/3056 , H01J2237/2813 , H01J2237/30416 , H01J2237/30483 , H01J2237/31713 , H01J2237/31745 , H01J2237/31749 , Y02P90/265
摘要： A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.
摘要翻译：图形编程系统允许用户将几何形状放置在缩放的图像上，该形状具有对图像或其形成图像的对象进行操作的相关联的行为。在优选实施例中，形状是Microsoft Corporation在Visio程序中的对象。将形状从模板拖到由离子束或电子显微镜图像提供的图像上。形状调用软件或硬件来定位和测量图像上的特征，或者对被成像的对象执行诸如离子束铣削的操作。

3. 发明授权

US07308334B2 Graphical automated machine control and metrology 有权
标题翻译：图形自动化机器控制和计量
公开(公告)号：US07308334B2
公开(公告)日：2007-12-11
申请号：US11115751
申请日：2005-04-27
申请人： David J. Tasker , Henri J. Lezec , David A. Head
发明人： David J. Tasker , Henri J. Lezec , David A. Head
IPC分类号： G06F19/00
CPC分类号： G05B19/40933 , G01N1/286 , G05B2219/36314 , G05B2219/36317 , G05B2219/36325 , H01J37/28 , H01J37/3023 , H01J37/3056 , H01J2237/2813 , H01J2237/30416 , H01J2237/30483 , H01J2237/31713 , H01J2237/31745 , H01J2237/31749 , Y02P90/265
摘要： A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.
摘要翻译：图形编程系统允许用户将几何形状放置在缩放的图像上，该形状具有对图像或其形成图像的对象进行操作的相关联的行为。在优选实施例中，形状是Microsoft Corporation在Visio程序中的对象。将形状从模板拖到由离子束或电子显微镜图像提供的图像上。形状调用软件或硬件来定位和测量图像上的特征，或者对被成像的对象执行诸如离子束铣削的操作。

4. 发明授权

US06649901B2 Enhanced optical transmission apparatus with improved aperture geometry 有权
标题翻译：具有改进孔径几何形状的增强光传输装置
公开(公告)号：US06649901B2
公开(公告)日：2003-11-18
申请号：US10098970
申请日：2002-03-14
申请人： Tineke Thio , Richard A. Linke , Kelly M. Pellerin , Thomas W. Ebbesen , Henri J. Lezec
发明人： Tineke Thio , Richard A. Linke , Kelly M. Pellerin , Thomas W. Ebbesen , Henri J. Lezec
IPC分类号： H01J516
CPC分类号： G02B5/008 , G01Q60/22 , G11B7/1387
摘要： An apparatus for enhanced light transmission is provided. The apparatus comprises a metal film having a first surface and a second surface, at least one aperture being provided in the metal film and extending from the first surface to the second surface. The at least one aperture comprises an entrance portion disposed on the first surface of the metal film and an exit portion disposed in the second surface of the metal film, each portion having a cross-sectional area in the plane of the corresponding metal film surface, wherein the cross-sectional area of the entrance portion is not equal to the cross-sectional area of the exit portion. A periodic surface topography is provided on at least one of the first and second surfaces of the metal film, the periodic surface topography comprising a plurality of surface features, wherein the geometry of each aperture entrance portion substantially matches the geometry of the surface features.
摘要翻译：提供一种用于增强光透射的装置。该装置包括具有第一表面和第二表面的金属膜，至少一个孔设置在金属膜中并从第一表面延伸到第二表面。所述至少一个孔包括设置在所述金属膜的第一表面上的入口部分和设置在所述金属膜的第二表面中的出口部分，每个部分在相应的金属膜表面的平面中具有横截面积，其中所述入口部分的横截面面积不等于所述出口部分的横截面面积。在金属膜的第一和第二表面中的至少一个表面上提供周期表面形貌，周期性表面形貌包括多个表面特征，其中每个孔入口部分的几何形状基本上与表面特征的几何形状相匹配。

5. 发明申请

US20100138028A1 GRAPHICAL AUTOMATED MACHINE CONTROL AND METROLOGY 有权
标题翻译：图形自动化机器控制和计量学
公开(公告)号：US20100138028A1
公开(公告)日：2010-06-03
申请号：US12697840
申请日：2010-02-01
申请人： DAVID J. TASKER , Henri J. Lezec , David A. Head
发明人： DAVID J. TASKER , Henri J. Lezec , David A. Head
IPC分类号： G05B15/00 , G06F19/00 , G09G5/00
CPC分类号： G05B19/40933 , G01N1/286 , G05B2219/36314 , G05B2219/36317 , G05B2219/36325 , H01J37/28 , H01J37/3023 , H01J37/3056 , H01J2237/2813 , H01J2237/30416 , H01J2237/30483 , H01J2237/31713 , H01J2237/31745 , H01J2237/31749 , Y02P90/265
摘要： A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.
摘要翻译：图形编程系统允许用户将几何形状放置在缩放的图像上，该形状具有对图像或其形成图像的对象进行操作的相关联的行为。在优选实施例中，形状是Microsoft Corporation在Visio程序中的对象。将形状从模板拖到由离子束或电子显微镜图像提供的图像上。形状调用软件或硬件来定位和测量图像上的特征，或者对被成像的对象执行诸如离子束铣削的操作。

6. 发明授权

US06889113B2 Graphical automated machine control and metrology 有权
标题翻译：图形自动化机器控制和计量
公开(公告)号：US06889113B2
公开(公告)日：2005-05-03
申请号：US10227619
申请日：2002-08-23
申请人： David J. Tasker , Henri J. Lezec , David A. Head
发明人： David J. Tasker , Henri J. Lezec , David A. Head
IPC分类号： G06T1/00 , G01Q60/00 , G05B19/4093 , G06F3/00 , G06T3/00 , G09G5/00 , G06F19/00
CPC分类号： G05B19/40933 , G01N1/286 , G05B2219/36314 , G05B2219/36317 , G05B2219/36325 , H01J37/28 , H01J37/3023 , H01J37/3056 , H01J2237/2813 , H01J2237/30416 , H01J2237/30483 , H01J2237/31713 , H01J2237/31745 , H01J2237/31749 , Y02P90/265
摘要： A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.
摘要翻译：图形编程系统允许用户将几何形状放置在缩放的图像上，该形状具有对图像或其形成图像的对象进行操作的相关联的行为。在优选实施例中，形状是Microsoft Corporation在Visio程序中的对象。将形状从模板拖到由离子束或电子显微镜图像提供的图像上。形状调用软件或硬件来定位和测量图像上的特征，或者对被成像的对象执行诸如离子束铣削的操作。

7. 发明授权

US06236033B1 Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography 有权
标题翻译：利用具有孔径和周期性表面形貌的金属膜的增强型光传输装置
公开(公告)号：US06236033B1
公开(公告)日：2001-05-22
申请号：US09208116
申请日：1998-12-09
申请人： Thomas W. Ebbesen , Daniel E. Grupp , Tineke Thio , Henri J. Lezec
发明人： Thomas W. Ebbesen , Daniel E. Grupp , Tineke Thio , Henri J. Lezec
IPC分类号： H01J314
CPC分类号： G02B6/1226 , G01Q60/22 , G02B5/008 , G02B5/204
摘要： An apparatus for enhanced light transmission is provided. The apparatus comprises a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface, and a periodic surface topography provided on at least one of the first and second surface of the metal film. Light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film. The apparatus may have a single aperture or a plurality of periodically arranged apertures. Wavelength-selective optical filters, spatial optical filters, light collectors, near-field scanning optical microscope probes and photolithographic masks are also provided.
摘要翻译：提供一种用于增强光透射的装置。该装置包括具有第一表面和第二表面的金属膜，设置在金属膜中并且从第一表面延伸到第二表面的至少一个孔，以及设置在第一和第二表面中的至少一个上的周期性表面形貌金属膜表面。入射到金属膜的一个表面上的光在金属膜的至少一个表面上与表面等离子体激发模式相互作用，从而增强透过金属膜中的至少一个孔的光的透过。该装置可以具有单个孔或多个周期性布置的孔。还提供了波长选择性滤光器，空间光学滤光器，光收集器，近场扫描光学显微镜探针和光刻掩模。

8. 发明授权

US08095231B2 Graphical automated machine control and metrology 有权
标题翻译：图形自动化机器控制和计量
公开(公告)号：US08095231B2
公开(公告)日：2012-01-10
申请号：US12697840
申请日：2010-02-01
申请人： David J. Tasker , Henri J. Lezec , David A. Head
发明人： David J. Tasker , Henri J. Lezec , David A. Head
IPC分类号： G06F19/00
CPC分类号： G05B19/40933 , G01N1/286 , G05B2219/36314 , G05B2219/36317 , G05B2219/36325 , H01J37/28 , H01J37/3023 , H01J37/3056 , H01J2237/2813 , H01J2237/30416 , H01J2237/30483 , H01J2237/31713 , H01J2237/31745 , H01J2237/31749 , Y02P90/265
摘要： A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.
摘要翻译：图形编程系统允许用户将几何形状放置在缩放的图像上，该形状具有对图像或其形成图像的对象进行操作的相关联的行为。在优选实施例中，形状是Microsoft Corporation在Visio程序中的对象。将形状从模板拖到由离子束或电子显微镜图像提供的图像上。形状调用软件或硬件来定位和测量图像上的特征，或者对被成像的对象执行诸如离子束铣削的操作。

9. 发明授权

US06834027B1 Surface plasmon-enhanced read/write heads for optical data storage media 失效
标题翻译：用于光学数据存储介质的表面等离子体增强型读/写头
公开(公告)号：US06834027B1
公开(公告)日：2004-12-21
申请号：US09721694
申请日：2000-11-27
申请人： Mitsuhito Sakaguchi , Tineke Thio , Richard A. Linke , Thomas W. Ebbesen , Henri J. Lezec
发明人： Mitsuhito Sakaguchi , Tineke Thio , Richard A. Linke , Thomas W. Ebbesen , Henri J. Lezec
IPC分类号： G11B1100
CPC分类号： G11B7/1353 , B82Y10/00 , G02B5/008 , G11B7/124 , G11B7/127 , G11B7/1384 , G11B7/1387 , G11B7/14
摘要： A read/write head for an optical storage medium is provided. The read/write head comprises a waveguide having an end face and a plasmon-enhanced device provided on the end face of the waveguide. The plasmon-enhanced device comprises a metal film having a first surface and a second surface, the first surface being fixed to the waveguide end face, the metal film having an aperture provided therethrough. The metal film has a periodic surface topography provided on at least one of the first and second surfaces of the metal film. Light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the aperture in the metal film which is directed onto and/or collected from the optical storage medium. A read/write head with an integral light source is also provided. The invention also provides an array of precisely aligned read/write heads, and an array of precisely aligned read/write heads with integral light sources, as well as side-emitting lasers and vertical cavity surface emitting lasers (VCSELs) with enhanced transmission.
摘要翻译：提供了一种用于光学存储介质的读/写头。读/写头包括具有端面的波导和设置在波导的端面上的等离子体增强器件。所述等离子体增强装置包括具有第一表面和第二表面的金属膜，所述第一表面固定到波导端面，所述金属膜具有通过其设置的孔。金属膜具有在金属膜的第一和第二表面中的至少一个上提供的周期性表面形貌。入射到金属膜的一个表面上的光在金属膜的至少一个表面上与表面等离子体激发模式相互作用，从而增强了透过金属膜中的孔的光的透过率，该光通过金属膜被引导和/或从其中收集光存储介质。还提供了具有集成光源的读/写头。本发明还提供精确对准的读/写头阵列，以及具有整体光源的精确排列的读/写头阵列，以及具有增强的透射的侧发射激光器和垂直腔表面发射激光器（VCSEL）。

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