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1. 发明申请

US20190148905A1 GAS LASER DEVICE 审中-公开
公开(公告)号：US20190148905A1
公开(公告)日：2019-05-16
申请号：US16232637
申请日：2018-12-26
申请人： GIGAPHOTON INC.
发明人： Hiroshi UMEDA , Osamu WAKABAYASHI
IPC分类号： H01S3/097 , H01S3/0975 , H01S3/104
摘要： A discharge excitation gas laser device includes: first and second discharge electrodes disposed to face each other; a plurality of peaking capacitors connected to the first discharge electrode; a charger; a plurality of pulse power modules, each one of the pulse power modules including a charging capacitor to which a charged voltage is applied from the charger, a pulse compression circuit that pulse-compresses and outputs electrical energy stored in the charging capacitor as an output pulse to a corresponding peaking capacitor, and a switch disposed between the charging capacitor and the pulse compression circuit; a plurality of output pulse sensors, each one of the output pulse sensors detecting an output pulse output by a corresponding pulse power module; and a control unit configured to control, based on a detection result of each of the output pulse sensor, a tinting of a switch signal to be input to a corresponding switch.

2. 发明申请

US20180013258A1 LASER SYSTEM 有权
公开(公告)号：US20180013258A1
公开(公告)日：2018-01-11
申请号：US15713761
申请日：2017-09-25
申请人： Gigaphoton Inc.
发明人： Hiroshi UMEDA , Takeshi ASAYAMA , Osamu WAKABAYASHI
IPC分类号： H01S3/097 , H01L21/67 , H01S3/139 , B23K26/00 , H01L21/02 , H01S3/23 , H01S3/13 , H01S3/00 , H01S3/104 , H01S3/225
CPC分类号： H01S3/09702 , B23K26/00 , B23K26/0608 , H01L21/02686 , H01L21/67115 , H01S3/0057 , H01S3/104 , H01S3/1305 , H01S3/1394 , H01S3/225 , H01S3/2308 , H01S3/2383
摘要： The laser system may include a delay circuit unit, first and second trigger-correction units, and a clock generator. The delay circuit unit may receive a trigger signal, output a first delay signal obtained by delaying the trigger signal by a first delay time, and output a second delay signal obtained by delaying the trigger signal by a second delay time. The first trigger-correction unit may receive the first delay signal and output a first switch signal obtained by delaying the first delay signal by a first correction time. The second trigger-correction unit may receive the second delay signal and output a second switch signal obtained by delaying the second delay signal by a second correction time. The clock generator may generate a clock signal that is common to the delay circuit unit and the first and second trigger-correction units.

3. 发明申请

US20140008552A1 TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 有权
标题翻译：目标供应设备，室内和极端超紫外线发光装置
公开(公告)号：US20140008552A1
公开(公告)日：2014-01-09
申请号：US13929668
申请日：2013-06-27
申请人： Gigaphoton Inc.
发明人： Hiroshi UMEDA , Taku YAMAZAKI , Hakaru MIZOGUCHI , Toshihiro NISHISAKA
IPC分类号： G03F7/20
CPC分类号： H05G2/008 , G03F7/20 , G03F7/70033 , H05G2/001 , H05G2/006
摘要： A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber may include a target generator having a nozzle, a first pipe configured to cover the nozzle, a cover opening provided in the first pipe to allow the target material to pass through the first pipe, and a first valve configured to open and close the cover opening.
摘要翻译：安装在通过将目标材料和激光束引入室中而产生极紫外光的室中的目标供给装置可以包括具有喷嘴的目标发生器，被配置为覆盖喷嘴的第一管，允许目标材料通过第一管的第一管和构造成打开和关闭盖开口的第一阀。

4. 发明公开

US20240339797A1 GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD 审中-公开
公开(公告)号：US20240339797A1
公开(公告)日：2024-10-10
申请号：US18746278
申请日：2024-06-18
申请人： Gigaphoton Inc.
发明人： Yoichi SASAKI , Hiroshi UMEDA , Jeffrey P. SERCEL , Michael von DADELSZEN
IPC分类号： H01S3/038 , G03F7/00
CPC分类号： H01S3/038 , G03F7/70025
摘要： A gas laser device includes a laser chamber including an opening, an electrical insulating portion blocking the opening, a first electrode, and a second electrode facing the first electrode. The first electrode includes a contact region contacting the surface of the electrical insulating portion, an opposing surface facing the second electrode, and a first curved surface included in a region between the contact region and the opposing surface and convexly curved toward an outer side of the first electrode. In a cross section of the first electrode along a surface extending in a separation direction of the first electrode and the second electrode, the contact region is located on an inner side of the first electrode with respect to the first curved surface, and the first curved surface is a part of a circumference of a circle or an ellipse which does not intersect the electrical insulating portion.

5. 发明公开

US20230268710A1 GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD 审中-公开
公开(公告)号：US20230268710A1
公开(公告)日：2023-08-24
申请号：US18310089
申请日：2023-05-01
申请人： Gigaphoton Inc.
发明人： Youichi YAMANOUCHI , Hiroshi UMEDA , Kazuki NAGAI , Takeshi UEYAMA
IPC分类号： H01S3/0977 , H01S3/097
CPC分类号： H01S3/0977 , H01S3/09702
摘要： A gas laser apparatus according to an aspect of the present disclosure includes a main discharge circuit that supplies main discharge voltage that causes main discharge to a pair of main discharge electrodes, and a pre-ionization circuit that supplies pre-ionization voltage that causes corona discharge to a pre-ionization electrode. The main discharge circuit includes a step-up pulse transformer, a main capacitor and a switch connected to a primary side of the step-up pulse transformer, a first power source that charges the main capacitor, a first capacitor connected in parallel to a secondary side of the step-up pulse transformer, a first magnetic switch connected to the first capacitor, and a peaking capacitor connected in parallel to the first capacitor through the first magnetic switch and to the main discharge electrodes. An interval between start timings of the corona discharge and the main discharge is 30 ns to 60 ns inclusive.

6. 发明申请

US20170338618A1 HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS 审中-公开
公开(公告)号：US20170338618A1
公开(公告)日：2017-11-23
申请号：US15671572
申请日：2017-08-08
申请人： National University Corporation Nagaoka University of Technology , Gigaphoton Inc.
发明人： Weihua JIANG , Hiroshi UMEDA , Hakaru MIZOGUCHI , Takashi MATSUNAGA , Hiroaki TSUSHIMA , Tomoyuki OHKUBO
IPC分类号： H01S3/097 , H01S3/038 , H01S3/225 , H01S3/041 , H01S3/036
CPC分类号： H01S3/09702 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/08009 , H01S3/0971 , H01S3/10069 , H01S3/134 , H01S3/225
摘要： A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.

7. 发明申请

US20170033527A1 GAS LASER DEVICE AND CONDENSER 审中-公开
标题翻译：气体激光装置和冷凝器
公开(公告)号：US20170033527A1
公开(公告)日：2017-02-02
申请号：US15290518
申请日：2016-10-11
申请人： Gigaphoton Inc.
发明人： Akira SUWA , Kouji KAKIZAKI , Hiroaki TSUSHIMA , Tomoyuki OHKUBO , Hiroshi UMEDA , Hisakazu KATSUUMI
IPC分类号： H01S3/097 , H01S3/041 , H01G4/258 , H01G4/14 , H01G4/30
CPC分类号： H01S3/09702 , H01G4/14 , H01G4/18 , H01G4/258 , H01G4/30 , H01S3/0305 , H01S3/036 , H01S3/0385 , H01S3/041 , H01S3/097 , H01S3/2251 , H01S3/2256
摘要： A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.
摘要翻译：气体激光装置可以包括：包含激光气体的激光室; 设置在激光室中的第一放电电极; 第二放电电极，设置成与激光室中的第一放电电极相对; 以及包括聚酰亚胺电介质并且被配置为向第一放电电极和第二放电电极之间供电的电容器。

8. 发明申请

US20160227638A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD FOR EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 有权
标题翻译：极光超紫外光发生装置及极光紫外线发光装置的控制方法
公开(公告)号：US20160227638A1
公开(公告)日：2016-08-04
申请号：US15096769
申请日：2016-04-12
申请人： GIGAPHOTON INC.
发明人： Tsukasa HORI , Fumio IWAMOTO , Hiroshi UMEDA
IPC分类号： H05G2/00
CPC分类号： H05G2/006 , H05G2/005 , H05G2/008
摘要： In an example of the present invention is an extreme ultraviolet light generation apparatus including: a droplet supply device configured to successively supply droplets; a charging electrode being configured to control charging of droplets supplied from the droplet supply unit; and a target controller configured to control electric polarities of the droplets supplied from the droplet supply unit by controlling potential of the charging electrode in such a way that successive droplets join together to become a target droplet, wherein the droplets controlled in charging by the charging electrode include a plurality of groups each composed of successive droplets, and, in each of the groups, a droplet at one end is charged positively or negatively, a droplet at the other end is uncharged or charged in a polarity being the same as a polarity of an adjacent droplet in a group adjacent to the droplet at the other end.
摘要翻译：本发明的一个实例是一种极紫外光发生装置，包括：液滴供给装置，被配置为连续供应液滴; 充电电极被配置为控制从液滴供应单元供应的液滴的充电; 以及目标控制器，其被配置为通过控制充电电极的电位来控制从液滴供给单元提供的液滴的电极性，使得连续的液滴接合在一起成为目标液滴，其中通过充电电极控制的液滴包括多个由连续的液滴组成的组，并且在每个组中，一端的液滴是正或负的，另一端的液滴不带电或充电，极性与极性相同在另一端与液滴相邻的组中的相邻液滴。

9. 发明申请

US20140138561A1 TARGET SUPPLY DEVICE 有权
标题翻译：目标供应装置
公开(公告)号：US20140138561A1
公开(公告)日：2014-05-22
申请号：US14084558
申请日：2013-11-19
申请人： GIGAPHOTON INC.
发明人： Hiroshi UMEDA , Takashi OHARA , Osamu WAKABAYASHI
IPC分类号： G01J3/10
CPC分类号： H05G2/006 , H05G2/005 , H05G2/008
摘要： A target supply device may include a tank having a nozzle, a first electrode provided with a first through-hole, a second electrode provided with a second through-hole, a third electrode disposed within the tank, an anchoring portion configured to anchor the first electrode and the second electrode to the tank so that insulation among the nozzle, the first electrode, and the second electrode is maintained, and so that a center axis of the nozzle is positioned within the first through-hole and the second through-hole, a first projecting portion that is an integrated part of at least one of the first electrode and the second electrode and that is configured to project toward the nozzle, and a second projecting portion that is an integrated part of at least the second electrode and that is configured to project so as to be positioned between the first electrode and the second electrode.
摘要翻译：目标供给装置可以包括具有喷嘴的罐，设置有第一通孔的第一电极，设置有第二通孔的第二电极，设置在罐内的第三电极，锚定部分，电极和第二电极连接到罐，使得保持喷嘴，第一电极和第二电极之间的绝缘，并且使得喷嘴的中心轴线位于第一通孔和第二通孔内，第一突出部，其是第一电极和第二电极中的至少一个的一体部分，并且被构造成朝向喷嘴突出;第二突出部，其是至少第二电极的一体部分，被配置成突出以便定位在第一电极和第二电极之间。

10. 发明申请

US20210367394A1 HIGH-VOLTAGE PULSE GENERATOR, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE 有权
公开(公告)号：US20210367394A1
公开(公告)日：2021-11-25
申请号：US17397375
申请日：2021-08-09
申请人： National University Corporation Nagaoka University of Technology , Gigaphoton Inc.
发明人： Weihua JIANG , Hiroshi UMEDA
IPC分类号： H01S3/097 , H01S3/0975 , H01S3/038
摘要： A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

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