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1. 发明申请

US20190173259A1 LASER APPARATUS 审中-公开
公开(公告)号：US20190173259A1
公开(公告)日：2019-06-06
申请号：US16266189
申请日：2019-02-04
申请人： Gigaphoton Inc.
发明人： Takeshi ASAYAMA , Hiroyuki MASUDA
IPC分类号： H01S3/097 , H01S3/038 , H01S3/036
摘要： A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.

2. 发明申请

US20170346252A1 EXCIMER LASER CHAMBER DEVICE 审中-公开
公开(公告)号：US20170346252A1
公开(公告)日：2017-11-30
申请号：US15680474
申请日：2017-08-18
申请人： Gigaphoton Inc.
发明人： Hisakazu KATSUUMI , Kazuya TAKEZAWA , Kouji KAKIZAKI , Hiroaki TSUSHIMA , Takeshi ASAYAMA
IPC分类号： H01S3/038 , H01S3/0977 , H01S3/09 , H01S3/225 , H01S3/036
CPC分类号： H01S3/038 , H01S3/032 , H01S3/036 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/08009 , H01S3/0906 , H01S3/09702 , H01S3/0971 , H01S3/0977 , H01S3/134 , H01S3/225
摘要： An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

3. 发明申请

US20160359291A1 GAS LASER DEVICE AND CONTROL METHOD THEREFOR 有权
标题翻译：气体激光器件及其控制方法
公开(公告)号：US20160359291A1
公开(公告)日：2016-12-08
申请号：US15240162
申请日：2016-08-18
申请人： Gigaphoton Inc.
发明人： Takeshi ASAYAMA , Hiroaki TSUSHIMA , Kouji KAKIZAKI , Osamu WAKABAYASHI
IPC分类号： H01S3/038 , H01S3/00 , H01S3/225 , H01S3/036
CPC分类号： H01S3/038 , G03F7/70025 , H01S3/0014 , H01S3/036 , H01S3/08009 , H01S3/09705 , H01S3/0971 , H01S3/1305 , H01S3/134 , H01S3/225
摘要： A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.
摘要翻译：气体激光装置包括：包含激光气体的腔室，设置在腔室内的一对电极;设置在腔室内的风扇;与风扇的旋转轴连接的电动机;以及旋转速度控制单元，基于该对电极的磨损参数来确定风扇的速度。

4. 发明申请

US20160190763A1 LASER APPARATUS 有权
标题翻译：激光装置
公开(公告)号：US20160190763A1
公开(公告)日：2016-06-30
申请号：US15060148
申请日：2016-03-03
申请人： GIGAPHOTON INC.
发明人： Kouji KAKIZAKI , Takeshi ASAYAMA , Osamu WAKABAYASHI
IPC分类号： H01S3/038 , H01S3/225
CPC分类号： H01S3/038 , H01S3/08009 , H01S3/134 , H01S3/225
摘要： There may be provided a laser apparatus including: an optical resonator including an output coupler; a laser chamber containing a laser medium and disposed in an optical path inside the optical resonator; a pair of discharge electrodes disposed inside the laser chamber; an electrode gap varying section configured to vary a gap between the discharge electrodes; a laser beam measurement section disposed in an optical path of a laser beam outputted from the output coupler, the laser beam resulting from electric discharge between the discharge electrodes; and a controller configured to control the gap between the discharge electrodes through activating the electrode gap varying section, based on a beam parameter of the laser beam measured by the laser beam measurement section.
摘要翻译：可以提供一种激光装置，包括：包括输出耦合器的光谐振器; 包含激光介质并设置在光学谐振器内的光路中的激光室; 设置在激光室内的一对放电电极; 电极间隙变化部，被配置为改变所述放电电极之间的间隙; 设置在从输出耦合器输出的激光束的光路中的激光束测量部分，由放电电极之间的放电产生的激光束; 以及控制器，被配置为基于由激光束测量部测量的激光束的光束参数来激活电极间隙变化部分来控制放电电极之间的间隙。

5. 发明公开

US20230318252A1 CONTROL METHOD OF LASER SYSTEM, LASER SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD 审中-公开
公开(公告)号：US20230318252A1
公开(公告)日：2023-10-05
申请号：US18332597
申请日：2023-06-09
申请人： Gigaphoton Inc.
发明人： Takeshi ASAYAMA
IPC分类号： H01S3/134 , H01S3/23 , H01S3/13 , G03F7/20
CPC分类号： H01S3/134 , H01S3/2308 , H01S3/1305 , G03F7/70025 , H01S3/225
摘要： A laser system includes an oscillation stage laser configured to output first laser light, and an amplification stage laser configured to amplify the first laser light and output second laser light. A control method of the laser system includes determining a condition under which an amplification characteristic of the amplification stage laser changes, acquiring relationship between pulse energy of the first laser light and a parameter of the second laser light when the condition is determined to be satisfied, and setting target pulse energy of the first laser light based on the relationship.

6. 发明申请

US20180013258A1 LASER SYSTEM 有权
公开(公告)号：US20180013258A1
公开(公告)日：2018-01-11
申请号：US15713761
申请日：2017-09-25
申请人： Gigaphoton Inc.
发明人： Hiroshi UMEDA , Takeshi ASAYAMA , Osamu WAKABAYASHI
IPC分类号： H01S3/097 , H01L21/67 , H01S3/139 , B23K26/00 , H01L21/02 , H01S3/23 , H01S3/13 , H01S3/00 , H01S3/104 , H01S3/225
CPC分类号： H01S3/09702 , B23K26/00 , B23K26/0608 , H01L21/02686 , H01L21/67115 , H01S3/0057 , H01S3/104 , H01S3/1305 , H01S3/1394 , H01S3/225 , H01S3/2308 , H01S3/2383
摘要： The laser system may include a delay circuit unit, first and second trigger-correction units, and a clock generator. The delay circuit unit may receive a trigger signal, output a first delay signal obtained by delaying the trigger signal by a first delay time, and output a second delay signal obtained by delaying the trigger signal by a second delay time. The first trigger-correction unit may receive the first delay signal and output a first switch signal obtained by delaying the first delay signal by a first correction time. The second trigger-correction unit may receive the second delay signal and output a second switch signal obtained by delaying the second delay signal by a second correction time. The clock generator may generate a clock signal that is common to the delay circuit unit and the first and second trigger-correction units.

7. 发明申请

US20130126762A1 EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS 审中-公开
标题翻译：极光紫外线光源设备
公开(公告)号：US20130126762A1
公开(公告)日：2013-05-23
申请号：US13742276
申请日：2013-01-15
申请人： GIGAPHOTON INC.
发明人： Masato MORIYA , Hiroshi KOMORI , Takeshi ASAYAMA
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70916 , H05G2/005 , H05G2/008
摘要： An extreme ultra violet light source apparatus in which debris moving within a chamber are prevented from reducing reflectance or transmittance of optical elements of an EUV collector mirror, etc, and extreme ultra violet light can stably be generated in a long period. The apparatus includes: a target supply unit for supplying a target to a predetermined position within a chamber; a driver laser for applying a laser beam to the target to generate first plasma; a collector mirror provided within the chamber, for collecting extreme ultra violet light radiated from the first plasma; a gas supply unit for supplying a gas into the chamber; an excitation unit for exciting the gas to generate second plasma around a region where the first plasma is generated; and an exhaust unit for exhausting the chamber and ejecting debris emitted from the first plasma to outside of the chamber.
摘要翻译：能够防止在室内移动的碎屑减少EUV收集镜等的光学元件的反射率或透射率的极端紫外线光源装置，能够长时间稳定地产生极紫外光。该装置包括：目标供给单元，用于将目标供给到室内的预定位置; 用于将激光束施加到所述靶以产生第一等离子体的驱动器激光器; 设置在室内的收集器反射镜，用于收集从第一等离子体辐射的极紫外光; 气体供应单元，用于将气体供应到所述室中; 用于激发气体以在产生第一等离子体的区域周围产生第二等离子体的激励单元; 以及排气单元，用于排出室并将从第一等离子体发射的碎屑喷射到室外。

8. 发明申请

US20180048109A1 EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM 审中-公开
公开(公告)号：US20180048109A1
公开(公告)日：2018-02-15
申请号：US15792111
申请日：2017-10-24
申请人： Gigaphoton Inc.
发明人： Takeshi ASAYAMA , Osamu WAKABAYASHI , Kouji KAKIZAKI
IPC分类号： H01S3/036 , H01S3/134 , H01S3/225 , H01S3/038
CPC分类号： H01S3/036 , H01S3/038 , H01S3/134 , H01S3/225
摘要： The excimer laser apparatus may include a laser chamber configured to contain gas, a pair of electrodes provided in the laser chamber, a power source unit configured to supply a pulse voltage between the pair of electrodes, a gas supply unit configured to supply gas into the laser chamber, a gas exhaust unit configured to partially exhaust gas from within the laser chamber, and a gas control unit configured to control the gas supply unit and the gas exhaust unit, where a replacement ratio of gas to be replaced from within the laser chamber increases as deterioration of the pair of electrodes progresses, the deterioration being represented by a deterioration parameter of the pair of electrodes.

9. 发明申请

US20160365696A1 LASER CHAMBER 有权
标题翻译：激光室
公开(公告)号：US20160365696A1
公开(公告)日：2016-12-15
申请号：US15245245
申请日：2016-08-24
申请人： Gigaphoton Inc.
发明人： Hiroaki TSUSHIMA , Kouji KAKIZAKI , Takashi MATSUNAGA , Takeshi ASAYAMA , Hisakazu KATSUUMI , Hiroshi UMEDA , Hiroyuki IKEDA
IPC分类号： H01S3/036 , H01S3/225 , H01S3/038 , H01S3/041 , H01S3/04
CPC分类号： H01S3/036 , H01S3/038 , H01S3/0384 , H01S3/0407 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/09702 , H01S3/09713 , H01S3/134 , H01S3/225
摘要： A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.
摘要翻译：包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。

10. 发明申请

US20150194781A1 LASER APPARATUS 审中-公开
标题翻译：激光装置
公开(公告)号：US20150194781A1
公开(公告)日：2015-07-09
申请号：US14663086
申请日：2015-03-19
申请人： Gigaphoton Inc.
发明人： Takeshi ASAYAMA , Hakaru MIZOGUCHI , Kouji KAKIZAKI , Hiroaki TSUSHIMA , Osamu WAKABAYASHI , Kazuya TAKEZAWA
IPC分类号： H01S3/038 , H01S3/08 , H01S3/104 , H01S3/225 , H01S3/034
CPC分类号： H01S3/038 , H01S3/03 , H01S3/034 , H01S3/036 , H01S3/0388 , H01S3/08009 , H01S3/09702 , H01S3/104 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： A laser apparatus according to embodiments may include a laser chamber including a laser gain medium; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber; and a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed.
摘要翻译：根据实施例的激光装置可以包括包括激光增益介质的激光室; 电源; 从电源施加电压的第一电极和接地的第二电极，第一和第二电极设置在激光室中; 以及连接到所述电源的连接器，并且以允许所述第一电极向所述第二电极设置的一侧移动的方式支撑所述第一电极。

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