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1. 发明授权

US09478932B2 Method and apparatus for locking and scanning the output frequency from a laser cavity 有权
标题翻译：用于锁定和扫描来自激光腔的输出频率的方法和装置
公开(公告)号：US09478932B2
公开(公告)日：2016-10-25
申请号：US14404699
申请日：2013-05-22
申请人： M SQUARED LASERS LIMITED
发明人： Gareth Thomas Maker
IPC分类号： H01S3/10 , H01S3/105 , G02B26/00 , H01S3/083 , H01S3/139 , H01S3/081 , H01S3/106
CPC分类号： H01S3/105 , G02B26/001 , H01S3/0816 , H01S3/083 , H01S3/1062 , H01S3/1392 , H01S3/1394
摘要： A tunable reference cavity (3) with two independently controllable mirrors (15, 16) is disclosed. The mirrors are mounted on respective piezoelectric crystals (18, 19) so that thermal expansion of the piezoelectric crystals moves the cavity mirrors in the same direction along a longitudinal axis of the reference cavity thereby reducing a change of the cavity length. Also disclosed is a system for locking and scanning the output of a laser cavity (2). An error signal is generated between an output of the laser cavity (28) and the transmission (28) of the laser through the external reference cavity (3). A dual piezo-actuated mirror (6b) permits processing of the error signal (26) with separate signal processing circuits (29a, 29b) used to provide an electrical feedback signal to the dual piezoelectric crystal (22, 23b).
摘要翻译：公开了具有两个可独立控制的反射镜（15,16）的可调参考空腔（3）。反射镜安装在相应的压电晶体（18,19）上，使得压电晶体的热膨胀沿着基准腔的纵向轴线沿同一方向移动腔镜，从而减小腔长度的变化。还公开了一种用于锁定和扫描激光腔（2）的输出的系统。在激光腔（28）的输出与通过外部参考腔（3）的激光器的透射（28）之间产生误差信号。双压电致动反射镜（6b）允许用用于向双压电晶体（22,23b）提供电反馈信号的单独的信号处理电路（29a，29b）处理误差信号（26）。

2. 发明授权

US09270077B2 Laser with a self-monitoring controlled optical component system 有权
标题翻译：激光具有自我监控的光学元件系统
公开(公告)号：US09270077B2
公开(公告)日：2016-02-23
申请号：US14242334
申请日：2014-04-01
申请人： The Boeing Company
发明人： Steven F. Griffin , Jed E. Donaldson , Jeffrey T. Baker
IPC分类号： G08B21/00 , H01S3/105 , H01S3/16 , H01S3/107 , H01S3/139
CPC分类号： H01S3/105 , H01S3/107 , H01S3/1394 , H01S3/1398 , H01S3/16
摘要： A self-monitored controlled optical component system may include an electrostrictive actuator, a capacitor matched in capacitance to the electrostrictive actuator, a current source connected to the electrostrictive actuator and to the capacitor that supplies an electric current to the electrostrictive actuator and to the capacitor, an optical element connected to be moved by the electrostrictive actuator, and a comparator connected to receive a first output current from the electrostrictive actuator and a second output current from the capacitor, and output a differenced sensoriactuator signal proportional to the difference between the first output current and the second output current, the sensoriactuator signal representing a current associated with movement of the optical element by the electrostrictive actuator.
摘要翻译：自监控的受控光学部件系统可以包括电致伸缩致动器，与电致伸缩致动器的电容匹配的电容器，连接到电致伸缩致动器的电流源和向电致伸缩致动器和电容器提供电流的电容器，连接以由电致伸缩致动器移动的光学元件和连接成从电致伸缩致动器接收第一输出电流的比较器和来自电容器的第二输出电流，并输出与第一输出电流之间的差成比例的差分传感器致动器信号和第二输出电流，传感器致动器信号表示与电致伸缩致动器的光学元件的运动相关联的电流。

3. 发明授权

US09190804B2 Pulse light source, and method for stably controlling phase difference between pulse laser lights 有权
标题翻译：脉冲光源和稳定控制脉冲激光相位差的方法
公开(公告)号：US09190804B2
公开(公告)日：2015-11-17
申请号：US14413443
申请日：2013-07-19
申请人： ADVANTEST CORPORATION
发明人： Tomoyu Yamashita , Akiyoshi Irisawa
IPC分类号： H01S3/13 , H01S3/137 , H01S3/10 , H01S3/139 , H01S3/23
CPC分类号： H01S3/13 , H01S3/10046 , H01S3/10053 , H01S3/1307 , H01S3/137 , H01S3/139 , H01S3/1394 , H01S3/23 , H01S3/2383
摘要： A pulse light source includes: a master laser that outputs a master laser light pulse whose repetition frequency is controlled to a predetermined value; a slave laser that outputs a slave laser light pulse; a phase comparator that detects a phase difference between an electric signal having a frequency of the predetermined value, and an electric signal based on a light intensity of the slave laser light pulse; a loop filter; an adder that adds a repetition frequency control signal having a certain repetition cycle, to an output from the loop filter; and a phase comparator that measures a pulse phase difference which is a phase difference between the master laser light pulse and the slave laser light pulse. A magnitude of the repetition frequency control signal is controlled such that the measured pulse phase difference matches with a target value of the pulse phase difference.
摘要翻译：脉冲光源包括：主激光器，其输出重复频率被控制为预定值的主激光脉冲; 从激光器输出从激光脉冲; 相位比较器，其检测具有预定值的频率的电信号与基于从激光光脉冲的光强度的电信号之间的相位差; 环路滤波器加法器，将具有一定重复周期的重复频率控制信号与来自所述环路滤波器的输出相加; 以及相位比较器，其测量作为主激光光脉冲和从激光脉冲之间的相位差的脉冲相位差。控制重复频率控制信号的大小，使得测得的脉冲相位差与脉冲相位差的目标值相匹配。

4. 发明申请

US20140112360A1 METHOD FOR GENERATING COHERENT-PHASE LIGHT FIELDS HAVING A PREDEFINABLE VALUE OF THE FREQUENCY THEREOF, AND OPTICAL FREQUENCY SYNTHESIZER 有权
标题翻译：用于产生具有可预期频率的相关相位光场的方法和光频合成器
公开(公告)号：US20140112360A1
公开(公告)日：2014-04-24
申请号：US13701125
申请日：2011-06-01
申请人： Harald Telle , Erik Benkler
发明人： Harald Telle , Erik Benkler
IPC分类号： H01S5/00
CPC分类号： H01S5/0085 , H01S3/109 , H01S3/1394 , H01S5/14
摘要： The invention relates to a method for generating coherent-phase light having a predefinable frequency value (νSoll), comprising the steps of generating working light with a working frequency (νSL), generating a frequency comb (10), which is a light field that consists of equidistant coherent-phase spectral lines, selecting a comb line (having the index m) from the frequency comb (10) having a frequency (νm), generating a frequency shift (Δν) of the frequency comb (10) and/or the working frequency (νSL) by means of time-dependent phase settings (φS(t)) modulo a multiple of 2π, in particular of 2π, and phase-coupling the possibly frequency-shifted fields of the working light (νSL) and the one possibly frequency-shifted frequency comb line (νm), so that the frequencies thereof are rigidly phase-coupled via the frequency shift (Δν), and working light having the desired frequency (νSoll) is obtained.
摘要翻译：本发明涉及一种用于产生具有预定频率值（＆ngr; Sol1）的相干相位光的方法，包括以下步骤：产生具有工作频率（＆lt; ngr; SL）的工作光，产生频率梳（10）由等距相干相位谱线组成的光场，从频率梳（10）选择具有频率（＆ngr; m）的梳状线（具有索引m），产生频移（＆Dgr; ngr）通过时间相关相位设置（＆phgr; S（t））模2的频率梳（10）和/或工作频率（＆ngr; SL），特别是2＆pgr的倍数;以及相位耦合工作光（＆ngr; SL）和一个可能的频移频率梳线（＆ngr; m）的可能的频移场，使得其频率经由频移（＆Dgr; ngr; m）刚性相位耦合。），并且获得具有期望频率（＆amp; Sol1）的工作光。

5. 发明申请

US20130329279A1 METHOD AND APPARATUS FOR CONTROLLING AND PROTECTING PULSED HIGH POWER FIBER AMPLIFIER SYSTEMS 审中-公开
标题翻译：用于控制和保护脉冲高功率光纤放大器系统的方法和装置
公开(公告)号：US20130329279A1
公开(公告)日：2013-12-12
申请号：US13967465
申请日：2013-08-15
申请人： IMRA AMERICA, INC.
发明人： Salvatore F. NATI , Otho E. ULRICH, JR. , Gyu C. CHO, JR. , Wayne A. GILLIS, JR. , Donald J. HARTER, JR. , Mark BENDETT, JR. , Ingmar HARTL, JR.
IPC分类号： H01S3/067 , H01S3/11
CPC分类号： H01S3/06779 , H01S3/06758 , H01S3/0941 , H01S3/10015 , H01S3/1003 , H01S3/10038 , H01S3/10046 , H01S3/105 , H01S3/1112 , H01S3/1305 , H01S3/1312 , H01S3/1394
摘要： An electronic circuit for controlling a laser system consisting of a pulse source and high power fiber amplifier is disclosed. The circuit is used to control the gain of the high power fiber amplifier system so that the amplified output pulses have predetermined pulse energy as the pulse width and repetition rate of the oscillator are varied. This includes keeping the pulse energy constant when the pulse train is turned on. The circuitry is also used to control the temperature of the high power fiber amplifier pump diode such that the wavelength of the pump diode is held at the optimum absorption wavelength of the fiber amplifier as the diode current is varied. The circuitry also provides a means of protecting the high power fiber amplifier from damage due to a loss of signal from the pulse source or from a pulse-source signal of insufficient injection energy.
摘要翻译：公开了一种用于控制由脉冲源和大功率光纤放大器组成的激光系统的电子电路。该电路用于控制高功率光纤放大器系统的增益，使得放大的输出脉冲具有预定的脉冲能量，因为振荡器的脉冲宽度和重复率是变化的。这包括当脉冲串打开时保持脉冲能量恒定。该电路还用于控制高功率光纤放大器泵浦二极管的温度，使得当二极管电流变化时，泵浦二极管的波长保持在光纤放大器的最佳吸收波长。电路还提供了保护大功率光纤放大器免受来自脉冲源的信号损失或由于注入能量不足的脉冲源信号的损害的手段。

6. 发明授权

US08306078B2 Repetition frequency control device 有权
标题翻译：重复频率控制装置
公开(公告)号：US08306078B2
公开(公告)日：2012-11-06
申请号：US13299568
申请日：2011-11-18
申请人： Tomoyu Yamashita , Akiyoshi Irisawa
发明人： Tomoyu Yamashita , Akiyoshi Irisawa
IPC分类号： H01S3/13
CPC分类号： H01S3/10046 , H01S3/1394
摘要： A repetition frequency control device includes a slave photoelectric conversion unit which converts a slave laser light pulse into a slave electrical signal, a master photoelectric conversion unit which converts a master laser light pulse into a master electrical signal, a frequency change unit which changes the repetition frequency of the master electric signal by a predetermined value, a phase comparator which detects a phase difference between the slave electric signal and the output from the frequency change unit, and a loop filter which removes a high frequency component of an output from the phase comparator, where the repetition frequency of the master laser does not undergo control based on one or both of the master electric signal and the slave electric signal.
摘要翻译：重复频率控制装置包括将从属激光光脉冲转换为从属电信号的从光电转换单元，将主激光光脉冲转换成主电信号的主光电转换单元，改变重复的频率改变单元主电信号的频率达预定值，检测从电信号与频率改变单元的输出之间的相位差的相位比较器，以及从相位比较器去除输出的高频分量的环路滤波器，其中主激光器的重复频率不基于主电信号和从电信号中的一个或两个进行控制。

7. 发明授权

US08237122B2 Optical scanning and imaging systems based on dual pulsed laser systems 有权
标题翻译：基于双脉冲激光系统的光学扫描和成像系统
公开(公告)号：US08237122B2
公开(公告)日：2012-08-07
申请号：US13399392
申请日：2012-02-17
申请人： Martin E. Fermann , Ingmar Hartl
发明人： Martin E. Fermann , Ingmar Hartl
IPC分类号： G01J5/02
CPC分类号： H01S3/10046 , G01B9/02001 , G01N21/31 , G01N2021/317 , G02B6/02304 , H01S3/0675 , H01S3/06754 , H01S3/08054 , H01S3/1067 , H01S3/1068 , H01S3/11 , H01S3/1115 , H01S3/13 , H01S3/1307 , H01S3/1392 , H01S3/1394 , H01S3/2383
摘要： The invention relates to scanning pulsed laser systems for optical imaging. Coherent dual scanning laser systems (CDSL) are disclosed and some applications thereof. Various alternatives for implementation are illustrated, including highly integrated configurations. In at least one embodiment a coherent dual scanning laser system (CDSL) includes two passively modelocked fiber oscillators. The oscillators are configured to operate at slightly different repetition rates, such that a difference δfr in repetition rates is small compared to the values fr1 and fr2 of the repetition rates of the oscillators. The CDSL system also includes a non-linear frequency conversion section optically connected to each oscillator. The section includes a non-linear optical element generating a frequency converted spectral output having a spectral bandwidth and a frequency comb comprising harmonics of the oscillator repetition rates. A CDSL may be arranged in an imaging system for one or more of optical imaging, microscopy, micro-spectroscopy and/or THz imaging.
摘要翻译：本发明涉及用于光学成像的扫描脉冲激光系统。公开了相干双扫描激光系统（CDSL）及其一些应用。示出了用于实现的各种替代方案，包括高度集成的配置。在至少一个实施例中，相干双扫描激光系统（CDSL）包括两个被动锁模光纤振荡器。振荡器被配置为以稍微不同的重复率操作，使得与振荡器的重复率的值fr1和fr2相比，重复率的差δfr小。 CDSL系统还包括与每个振荡器光学连接的非线性频率转换部分。该部分包括产生具有频谱带宽的频率转换频谱输出和包括振荡器重复频率的谐波的频率梳的非线性光学元件。可以在成像系统中布置CDSL以用于光学成像，显微镜，微光谱和/或THz成像中的一种或多种。

8. 发明授权

US08120778B2 Optical scanning and imaging systems based on dual pulsed laser systems 有权
公开(公告)号：US08120778B2
公开(公告)日：2012-02-21
申请号：US12399435
申请日：2009-03-06
申请人： Martin E. Fermann , Ingmar Hartl
发明人： Martin E. Fermann , Ingmar Hartl
IPC分类号： G01B9/02 , G01J3/45 , H01S3/13
CPC分类号： H01S3/10046 , G01B9/02001 , G01N21/31 , G01N2021/317 , G02B6/02304 , H01S3/0675 , H01S3/06754 , H01S3/08054 , H01S3/1067 , H01S3/1068 , H01S3/11 , H01S3/1115 , H01S3/13 , H01S3/1307 , H01S3/1392 , H01S3/1394 , H01S3/2383
摘要： The invention relates to scanning pulsed laser systems for optical imaging. Coherent dual scanning laser systems (CDSL) are disclosed and some applications thereof. Various alternatives for implementation are illustrated, including highly integrated configurations. In at least one embodiment a coherent dual scanning laser system (CDSL) includes two passively modelocked fiber oscillators. The oscillators are configured to operate at slightly different repetition rates, such that a difference δfr in repetition rates is small compared to the values fr1 and fr2 of the repetition rates of the oscillators. The CDSL system also includes a non-linear frequency conversion section optically connected to each oscillator. The section includes a non-linear optical element generating a frequency converted spectral output having a spectral bandwidth and a frequency comb comprising harmonics of the oscillator repetition rates. A CDSL may be arranged in an imaging system for one or more of optical imaging, microscopy, micro-spectroscopy and/or THz imaging.

9. 发明授权

US07910871B2 Injection-locked laser, interferometer, exposure apparatus, and device manufacturing method 有权
标题翻译：注射锁定激光，干涉仪，曝光装置和装置制造方法
公开(公告)号：US07910871B2
公开(公告)日：2011-03-22
申请号：US12548100
申请日：2009-08-26
申请人： Yoshiyuki Kuramoto
发明人： Yoshiyuki Kuramoto
IPC分类号： G01J1/32
CPC分类号： H01S3/1394 , G03F7/706 , H01S3/005 , H01S3/083 , H01S3/094038 , H01S3/10092 , H01S3/1305 , H01S3/1392 , H01S3/1398
摘要： An injection-locked laser is disclosed. The injection-locked laser comprises a seed laser, an oscillator into which a certain component of light output from the seed laser is injected as seed laser light, a frequency converter which shifts a frequency of the remaining component of the light output from the seed laser, a photodetector which detects light obtained by synthesizing the light output from the oscillator and the light output from the frequency converter, and a controller which controls an optical path length of the oscillator based on a beat signal component contained in the signal output from the photodetector.
摘要翻译：公开了一种注射锁定激光器。注入锁定激光器包括种子激光器，将从种子激光器输出的特定分量的光注入其中的振荡器作为种子激光，将从种子激光器输出的光的剩余分量的频率偏移的频率转换器检测通过合成从振荡器输出的光和从变频器输出的光获得的光的光检测器，以及基于从光电检测器输出的信号中包含的拍频信号成分来控制振荡器的光路长度的控制器。

10. 发明授权

US07701555B2 Exposure apparatus, exposure method, device manufacturing method, and system 有权
标题翻译：曝光装置，曝光方法，装置制造方法和系统
公开(公告)号：US07701555B2
公开(公告)日：2010-04-20
申请号：US11662591
申请日：2006-06-30
申请人： Masayoshi Arai
发明人： Masayoshi Arai
IPC分类号： G03B27/42 , G03B27/52
CPC分类号： G03F7/70458 , G03F7/7005 , G03F7/70525 , G03F7/70558 , G03F7/70575 , G03F7/70625 , H01S3/10069 , H01S3/1055 , H01S3/1394 , H01S3/225 , H01S2301/08
摘要： An exposure apparatus is equipped with a laser unit that emits a laser beam, a memory that stores a first information which shows a first relation indicating a relation between a linewidth error of a pattern formed on a wafer and a spectral characteristic of the laser beam emitted from the laser unit, and a main controller that controls the spectral width of the laser beam via a laser controller, based on the first information and on information related to a reticle that is to be used. Main controller performs spectral width control of the laser beam so as to suppress linewidth error, based on the first information and on the information related to the reticle that is to be used.
摘要翻译：曝光装置配备有发射激光束的激光单元，存储第一信息的存储器，该第一信息表示表示晶片上形成的图案的线宽误差与发射的激光束的光谱特性之间的关系的第一关系以及通过激光控制器控制激光束的光谱宽度的主控制器，基于第一信息和与要使用的掩模版有关的信息。主控制器根据第一信息和与要使用的掩模版有关的信息，进行激光束的光谱宽度控制，以抑制线宽误差。

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