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1. 发明授权

US06987790B2 Excimer or molecular fluorine laser with several discharge chambers 有权
标题翻译：具有多个放电室的准分子或分子氟激光
公开(公告)号：US06987790B2
公开(公告)日：2006-01-17
申请号：US10776137
申请日：2004-02-11
申请人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
发明人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
IPC分类号： H01S3/22 , H01S3/223 , H01S3/097
CPC分类号： H01S3/225 , H01S3/09713 , H01S3/2366
摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.
摘要翻译：使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。触发电离也可用于同步MOPA配置中双室的时序。在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

2. 发明授权

US07158553B2 Master oscillator/power amplifier excimer laser system with pulse energy and pointing control 有权
标题翻译：具有脉冲能量和指向控制的主振荡器/功率放大器准分子激光系统
公开(公告)号：US07158553B2
公开(公告)日：2007-01-02
申请号：US10776404
申请日：2004-02-11
申请人： Sergei V. Govorkov , Alexander O. Wiessner , Rainer Paetzel , Igor Bragin
发明人： Sergei V. Govorkov , Alexander O. Wiessner , Rainer Paetzel , Igor Bragin
IPC分类号： H01S3/22
CPC分类号： H01S3/2366 , H01S3/10 , H01S3/225 , H01S3/2333
摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.
摘要翻译：可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。

3. 发明申请

US20080291962A1 BANDWIDTH-LIMITED AND LONG PULSE MASTER OSCILLATOR POWER OSCILLATOR LASER SYSTEMS 有权
标题翻译： BANDWIDTH有限公司和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US20080291962A1
公开(公告)日：2008-11-27
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

4. 发明授权

US07760788B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US07760788B2
公开(公告)日：2010-07-20
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

5. 发明授权

US07245420B2 Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
公开(公告)号：US07245420B2
公开(公告)日：2007-07-17
申请号：US11654780
申请日：2007-01-18
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
IPC分类号： H01S3/00 , G02B27/14
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

6. 发明授权

US07418022B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US07418022B2
公开(公告)日：2008-08-26
申请号：US11142648
申请日：2005-06-01
申请人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

7. 发明授权

US08265117B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US08265117B2
公开(公告)日：2012-09-11
申请号：US12814334
申请日：2010-06-11
申请人： Sergei V. Govorkov , Alexander O. W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephen Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephen Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

8. 发明授权

US07227881B2 Master oscillator—power amplifier excimer laser system 有权
标题翻译：主振荡器 - 功率放大器准分子激光系统
公开(公告)号：US07227881B2
公开(公告)日：2007-06-05
申请号：US11371411
申请日：2006-03-09
申请人： Sergei V. Govorkov , Rainer Paetzel
发明人： Sergei V. Govorkov , Rainer Paetzel
IPC分类号： H01S3/22
CPC分类号： H01S3/2366 , H01S3/005 , H01S3/0057 , H01S3/225 , H01S3/2325 , H01S3/2333 , H01S3/235
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. A MOPA-based laser system can provide both high pulse energies and high spectral purity. A MOPA system can utilize a multi-pass PA, as well as a special beam path capable of reducing the amount of ASE (Amplified Spontaneous Emission) and feedback to the MO. Lithography scanner optics are primarily fused silica, such that the peak pulse power must be kept low to avoid material compaction when a MOPA system is used with lithography applications. This conflict between the demand for high average power and the low peak power requirement of the pulsed excimer laser source can be resolved by using a novel beam path to generate a sufficiently long pulse length.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。基于MOPA的激光系统可以提供高脉冲能量和高光谱纯度。 MOPA系统可以利用多通道PA，以及能够减少ASE（放大自发发射）量和向MO的反馈的特殊光束路径。平版印刷扫描仪光学器件主要是熔融石英，使得峰值脉冲功率必须保持较低，以避免当MOPA系统与光刻应用一起使用时的材料压实。可以通过使用新颖的光束路径来产生足够长的脉冲长度来解决脉冲准分子激光源的高平均功率需求和低峰值功率需求之间的这种冲突。

9. 发明授权

US07184204B2 Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
公开(公告)号：US07184204B2
公开(公告)日：2007-02-27
申请号：US10881103
申请日：2004-06-30
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
IPC分类号： H01S3/00 , H01S3/22
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

10. 发明授权

US07952603B2 Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage 有权
标题翻译：具有安装在可平移滑架上的单轴扫描镜的二极管激光标记
公开(公告)号：US07952603B2
公开(公告)日：2011-05-31
申请号：US12240126
申请日：2008-09-29
申请人： Sergei V. Govorkov , John H. Jerman
发明人： Sergei V. Govorkov , John H. Jerman
IPC分类号： B41J15/14 , B41J27/00
CPC分类号： B41J15/14 , B41J2/471 , G02B26/0858 , G02B26/105
摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image.
摘要翻译：用于在磁带上标记位图图像的设备包括可调制激光束的源。光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。振动镜将光束引导到安装在滑架上的聚焦透镜。聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。磁带是递增的，并且重复的滑动遍历被完成打印位图图像。

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