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    • 7. 发明授权
    • Multi-step removal of excess emitter material in fabricating
electron-emitting device
    • 在制造电子发射器件时多步去除过量的发射极材料
    • US6027632A
    • 2000-02-22
    • US904967
    • 1997-07-30
    • N. Johan KnallDuane A. HavenRoger W. BartonWilliam H. CreelChristopher J. Spindt
    • N. Johan KnallDuane A. HavenRoger W. BartonWilliam H. CreelChristopher J. Spindt
    • B81C1/00C25F3/14H01J9/02C25F3/02
    • H01J9/025
    • Excess emitter material (52B) is removed in multiple steps during the fabrication of an electron-emitting device. A structure is initially provided in which a dielectric layer (44) overlies a non-insulating region (42), control electrodes (80 or 46/80) overlie the dielectric layer, openings (48/50) extend through the control electrodes and dielectric layer, electron-emissive elements (52A) formed with emitter material are situated in the openings, and an excess layer (52B) of the emitter material overlies the control electrodes and the dielectric layer. Portions of the excess emitter material overlying the dielectric layer in the spaces between the control electrodes are initially removed, preferably with etchant that directly attacks the emitter material. Portions (52C) of the excess emitter material overlying the control electrodes above the electron-emissive elements are subsequently removed to expose the electron-emissive elements.
    • 在制造电子发射器件期间,多个发射极材料(52B)被多个步骤去除。 首先提供一种结构,其中介电层(44)覆盖在非绝缘区域(42)上,控制电极(80或46/80)覆盖在电介质层上,开口(48/50)延伸穿过控制电极和电介质 由发射体材料形成的层,电子发射元件(52A)位于开口中,发射极材料的过剩层(52B)覆盖在控制电极和电介质层上。 最初除去在控制电极之间的空间中覆盖电介质层的多余发射体材料的部分,最好用直接攻击发射极材料的蚀刻剂。 随后去除覆盖电子发射元件上方的控制电极的过量发射体材料的部分(52℃)以露出电子发射元件。
    • 10. 发明授权
    • Integrated metallization for displays
    • 显示器集成金属化
    • US6154188A
    • 2000-11-28
    • US846386
    • 1997-04-30
    • Arthur J. LearnDuane A. Haven
    • Arthur J. LearnDuane A. Haven
    • H01J5/32H01J29/90H01J31/12G09G3/22H01J1/62H01J15/00
    • H01J31/127H01J29/90H01J2329/90
    • A flat-panel display including a substrate, a viewing screen, a non-conductive ring, many row conductive electrodes, conductive pads and column buses. The ring vacuum-seals a cavity between the substrate and the viewing screen. Coupled to one surface of the substrate, the row conductive electrodes have a conductivity that is higher than the conductive pads. Each pad is connected to one row electrode, and each pad extends through the ring to allow electrical coupling to its corresponding row electrode from outside the cavity while vacuum is maintained inside the cavity. The row electrodes are substantially parallel to each other, and are substantially perpendicular to the column buses. The conductive electrodes are protected from exposure to the ring. In one embodiment, the ring is a frit seal, the row conductive electrodes are made of aluminum, and the column buses and the pads are made of chromium.
    • 一种平板显示器,包括基板,观察屏,非导电环,许多行导电电极,导电焊盘和列总线。 环形真空密封衬底和观察屏幕之间的空腔。 耦合到衬底的一个表面,行导电电极具有高于导电焊盘的电导率。 每个焊盘连接到一个行电极,并且每个焊盘延伸穿过环,以允许从腔外部电耦合到其对应的行电极,同时真空保持在腔内。 行电极基本上彼此平行,并且基本上垂直于列总线。 保护导电电极免受环境的影响。 在一个实施例中,环是玻璃料密封,行导电电极由铝制成,并且列总线和焊盘由铬制成。