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    • 3. 发明授权
    • Method for fabricating side drive electrostatic micromotor
    • 制造侧驱静电微电机的方法
    • US5043043A
    • 1991-08-27
    • US542435
    • 1990-06-22
    • Roger T. HoweJeffrey H. LangMartin F. SchlechtMartin A. SchmidtStephen D. SenturiaMehran MehreganyLee S. Tavrow
    • Roger T. HoweJeffrey H. LangMartin F. SchlechtMartin A. SchmidtStephen D. SenturiaMehran MehreganyLee S. Tavrow
    • H02N1/00
    • H02N1/004
    • An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.
    • 静电微电机采用侧驱设计。 定子在一个减法器上方的平面中工作,并且可移动构件位于定子的平面内并移动。 产生并维持操作强度的静电场,而不会在定子和可移动构件的边缘之间的平面内发生故障。 三个制造工艺使得能够在定子的操作平面中形成可移动构件并且与定子隔开微米量。 一个制造工艺沉积和图案化结构层,以在牺牲层上形成定子和可移动构件。 第二制造工艺蚀刻第一结构层中的通道以勾勒定子,可移动构件,并且如果需要,轮廓轴承。 衬底连接到结构层的侧面,通道通过该侧被蚀刻并且相对侧被研磨到通道的端部,以形成凸出的定子,转子以及如果需要的话承载结构。 第三制造工艺通过在衬底的蚀刻腔中的局部氧化来生长牺牲层。 然后在衬底和牺牲层上沉积和图案化结构层,以在公共平面中形成定子和可移动构件。 还通过制造工艺提供了谐波侧驱动微电机。
    • 4. 发明授权
    • Electrostatic micromotor
    • 静电微电机
    • US4997521A
    • 1991-03-05
    • US342952
    • 1989-04-25
    • Roger T. HoweJeffrey H. LangMartin F. SchlechtMartin A. SchmidtStephen D. Senturia
    • Roger T. HoweJeffrey H. LangMartin F. SchlechtMartin A. SchmidtStephen D. Senturia
    • H02N1/00
    • H02N1/004
    • An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element within the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
    • 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留​​下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障,并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极,该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间,轴承与定子内的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件,电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门,光学调制器,陀螺仪和空气泵。
    • 5. 发明授权
    • Electrostatic micromotor
    • 静电微电机
    • US4943750A
    • 1990-07-24
    • US376208
    • 1989-07-03
    • Roger T. HoweJeffrey H. LangMartin F. SchlechtMartin A. SchmidtStephen D. Senturia
    • Roger T. HoweJeffrey H. LangMartin F. SchlechtMartin A. SchmidtStephen D. Senturia
    • H02N1/00
    • H02N1/004
    • An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
    • 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留​​下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障,并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极,该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间,轴承与具有定子的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件,电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门,光学调制器,陀螺仪和空气泵。
    • 6. 发明授权
    • Turbulent shear force microsensor
    • 湍流剪切力微传感器
    • US4896098A
    • 1990-01-23
    • US273106
    • 1988-11-16
    • Joseph H. HaritonidisRoger T. HoweMartin A. SchmidtStephen D. Senturia
    • Joseph H. HaritonidisRoger T. HoweMartin A. SchmidtStephen D. Senturia
    • G01N13/00
    • G01N13/00
    • A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate is suspended by arms to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate. The cavity beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer. The cavity is formed by a selective etchant removing the sacrificial layer and leaving the rest of the microbridge structure suspended above the substrate. In a differential capacitance readout scheme, a conducting layer in the plate of the microbridge is capacitively coupled with conductors in the substrate. A sensed change in capacitive coupling generates an indication of plate deflection and thereby shear stress independent of vertical movement. Optic readout schemes may also be employed and are readily incorporated in the fabrication process. A mounting member presses the microbridge sensor into a holding plate which fits in a matching slot flush with the target wall.
    • 在存在波动压力的情况下,使用微桥来精确测量时变剪切力。 通过臂悬挂微尺寸板以形成微桥。 微尺寸使得能够在板的整个表面均匀地感测到感兴趣的最小湍流尺度。 微桥下面的空腔很小,使得在空腔内的空气中产生粘性阻力并阻尼板的正常运动。 结合腔的阻尼效应的微尺寸使得传感器对压力基本上不敏感,并因此感测与法向力无关的侧向力。 微桥传感器通过表面微加工制造。 牺牲层沉积在衬底上。 沉积并图案化结构层以在牺牲层上形成板和支撑臂。 通过选择性蚀刻剂除去该牺牲层并使悬浮在衬底上方的微桥结构的其余部分形成空腔。 在差分电容读出方案中,微桥板中的导电层与衬底中的导体电容耦合。 感测到的电容耦合变化产生板偏转的指示,从而产生与垂直运动无关的剪切应力。 也可以采用光学读出方案,并且容易地结合在制造过程中。 安装构件将微桥传感器压入保持板,该保持板适合与目标壁齐平的匹配槽。