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    • 6. 发明申请
    • DYNAMIC QUANTITY SENSOR DEVICE AND MANUFACTURING METHOD OF THE SAME
    • 动态数量传感器装置及其制造方法
    • US20120299127A1
    • 2012-11-29
    • US13479393
    • 2012-05-24
    • Tetsuo FUJIIKeisuke GOTOHKenichi AO
    • Tetsuo FUJIIKeisuke GOTOHKenichi AO
    • H01L27/20H01L21/70
    • G01L9/0073B60C23/0488B81B7/02B81B2201/025B81B2207/015G01L9/0085G01L19/0092G01P1/023G01P15/08G01P15/125
    • A dynamic quantity sensor device includes: first and second dynamic quantity sensors having first and second dynamic quantity detecting units; and first and second substrates, which are bonded to each other to provide first and second spaces. The first and second units are air-tightly accommodated in the first and second spaces, respectively. A SOI layer of the first substrate is divided into multiple semiconductor regions by trenches. First and second parts of the semiconductor regions provide the first and second units, respectively. The second part includes: a second movable semiconductor region having a second movable electrode, which is provided by a sacrifice etching of the embedded oxide film; and a second fixed semiconductor region having a second fixed electrode. The second sensor detects the second dynamic quantity by measuring a capacitance between the second movable and fixed electrodes, which is changeable in accordance with the second dynamic quantity.
    • 动态量传感器装置包括:具有第一和第二动态量检测单元的第一和第二动态量传感器; 以及彼此结合以提供第一和第二空间的第一和第二基板。 第一和第二单元分别气密地容纳在第一和第二空间中。 第一衬底的SOI层被沟槽分成多个半导体区域。 半导体区域的第一和第二部分分别提供第一和第二单元。 第二部分包括:具有第二可移动电极的第二可移动半导体区域,其通过对嵌入的氧化膜的牺牲蚀刻而提供; 以及具有第二固定电极的第二固定半导体区域。 第二传感器通过测量可根据第二动态量改变的第二可动电极和固定电极之间的电容来检测第二动态量。