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    • 6. 发明授权
    • Microelectromechanical high pressure gas microvalve
    • 微机电高压气体微阀
    • US06883774B2
    • 2005-04-26
    • US10277028
    • 2002-10-21
    • Matthew C. NielsenLaura J. MeyerTodd G. WetzelStanton E. WeaverJeffrey B. FortinRenato Guida
    • Matthew C. NielsenLaura J. MeyerTodd G. WetzelStanton E. WeaverJeffrey B. FortinRenato Guida
    • F15C5/00F16K99/00F16K7/12
    • F16K99/0001F15C5/00F16K99/0007F16K99/0015F16K99/0048F16K99/0057F16K2099/0074
    • A microvalve and a method of forming a microvalve. The microvalve comprises first and second layers, a diaphragm member and a switching means. The first and second layers are secured together to form a valve body that forms an inlet opening for receiving fluid, an outlet opening for conducting fluid from the valve body, and a flow channel for conducting fluid from the inlet to the outlet. The diaphragm is disposed between the layers, and is movable between open and closed positions. In these position, the diaphragm, respectively, allows and blocks the flow of fluid from the inlet to the flow channel. The diaphragm is biased to the closed position, and moves from the closed position to the open position when the pressure of fluid in the inlet reaches a preset value. The switching means is connected to the valve body for moving the diaphragm to the closed position against the pressure of fluid in the inlet. Preferably, the microvalve is constructed out of SiC and stainless steel materials, allowing the microvalve to be used in a harsh environment.
    • 一种微型阀和形成微型阀的方法。 微型阀包括第一和第二层,隔膜构件和开关装置。 第一层和第二层被固定在一起以形成阀体,其形成用于接收流体的入口开口,用于从阀体传导流体的出口,以及用于将流体从入口传导到出口的流动通道。 隔膜设置在层之间,并且可在打开位置和关闭位置之间移动。 在这些位置上,隔膜分别允许和阻止流体从入口到流动通道的流动。 隔膜被偏压到关闭位置,并且当入口中的流体的压力达到预设值时,隔膜从关闭位置移动到打开位置。 切换装置连接到阀体,用于抵抗入口中的流体的压力将隔膜移动到关闭位置。 优选地,微型阀由SiC和不锈钢材料制成,允许微型阀在恶劣的环境中使用。