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1. 发明授权

US07728294B2 Semiconductor wafer inspection tool and semiconductor wafer inspection method 失效
标题翻译：半导体晶圆检查工具和半导体晶圆检查方法
公开(公告)号：US07728294B2
公开(公告)日：2010-06-01
申请号：US11808247
申请日：2007-06-07
申请人： Takashi Hiroi , Kenji Tanimoto , Yuko Sasaki , Hiroshi Makino
发明人： Takashi Hiroi , Kenji Tanimoto , Yuko Sasaki , Hiroshi Makino
IPC分类号： H01J37/21 , H01J37/26
CPC分类号： H01J37/20 , G01R31/307 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/2008 , H01J2237/20235 , H01J2237/20292 , H01J2237/221 , H01J2237/24564 , H01J2237/24592 , H01J2237/28
摘要： A semiconductor wafer inspection tool and a semiconductor wafer inspection method capable of conducting an inspection under appropriate conditions in any one of an NVC (Negative Voltage Contrast) mode and a PVC (Positive Voltage Contrast) mode is provided. Primary electrons 2 are irradiated onto a wafer to be inspected 6 and the irradiation position thereof is scanned in an XY direction. Secondary electrons (or reflected electrons) 10 from the wafer to be inspected 6 are controlled by a charge control electrode 5 and detected by a sensor 11. An image processor converts a detection signal from the sensor 11 to a detected image, compares the detected image with a predetermined reference image, judges defects, an overall control section 14 selects inspection conditions from recipe information for each wafer to be inspected 6 and sets a voltage to be applied to the charge control electrode 5. A Z stage 8 sets the distance between the wafer to be inspected 6 and the charge control electrode 5 according to this voltage.
摘要翻译：提供能够在适当条件下进行NVC（负电压对比度）模式和PVC（正电压对比度）模式中的任一种的半导体晶片检查工具和半导体晶片检查方法。将一次电子2照射到要检查的晶片6上，并且其XY照射位置被扫描。来自待检查晶片的二次电子（或反射电子）10由充电控制电极5控制并由传感器11检测。图像处理器将来自传感器11的检测信号转换为检测图像，通过预定的参考图像判断缺陷，总体控制部分14从每个要检查的晶片的配方信息中选择检查条件6并设置要施加到充电控制电极5的电压.Za级8设置晶片之间的距离根据该电压检查6和充电控制电极5。

2. 发明授权

US07652248B2 Inspection apparatus and inspection method 有权
标题翻译：检验仪器和检验方法
公开(公告)号：US07652248B2
公开(公告)日：2010-01-26
申请号：US11692263
申请日：2007-03-28
申请人： Hiroshi Makino , Kenji Tanimoto , Zhaohui Cheng , Hikaru Koyama
发明人： Hiroshi Makino , Kenji Tanimoto , Zhaohui Cheng , Hikaru Koyama
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/265 , H01J2237/047 , H01J2237/0473 , H01J2237/0475 , H01J2237/2817
摘要： When performing an inspection using a charge control function in a SEM wafer inspection apparatus, acceleration voltage, control voltage and deceleration voltage are changed in conjunction so that incident energy determined by “acceleration voltage−deceleration voltage” and bias voltage determined by “deceleration voltage−control voltage” do not change. By this means, charge of a wafer can be controlled, while restraining electrostatic lens effect generated near a control electrode. As a result, an inspection using a charge control function at low incident energy and in a wide viewing field can be performed, and a highly sensitive inspection of semiconductor patterns subject to damages due to electron beam irradiation can be realized. Acceleration voltage, control voltage and deceleration voltage are changed in conjunction so that incident energy determined by “acceleration voltage−deceleration voltage” and bias voltage determined by “deceleration voltage−control voltage” do not change.
摘要翻译：当在SEM晶片检查装置中使用充电控制功能进行检查时，加速电压，控制电压和减速电压结合起来，使得由“加速电压 - 减速电压”确定的入射能量和由“减速电压 - 控制电压“不变。通过这种方式，可以控制晶片的电荷，同时抑制在控制电极附近产生的静电透镜效应。结果，可以执行使用低入射能量和宽视场中的电荷控制功能的检查，并且可以实现由于电子束照射而受到损害的半导体图案的高灵敏度检查。加速电压，控制电压和减速电压结合起来，使得由“加速电压 - 减速电压”确定的入射能量和由“减速电压控制电压”确定的偏置电压不变。

3. 发明申请

US20090166557A1 Charge control apparatus and measurement apparatus equipped with the charge control apparatus 有权
标题翻译：装有充电控制装置的充电控制装置和测量装置
公开(公告)号：US20090166557A1
公开(公告)日：2009-07-02
申请号：US11338843
申请日：2006-01-25
申请人： Hiroshi Makino , Zhaohui Cheng , Kenji Tanimoto , Hideo Todokoro
发明人： Hiroshi Makino , Zhaohui Cheng , Kenji Tanimoto , Hideo Todokoro
IPC分类号： G21K5/10 , G01N23/00
CPC分类号： H01J37/073 , H01J37/026 , H01J37/28 , H01J2237/0048 , H01J2237/0635 , H01J2237/24564 , H01J2237/2594
摘要： The invention solves charge nonuniformity of a specimen surface resulting from emission variation of a carbon nanotube electron source and individual difference of emission characteristics. During charge control processing, charge of the specimen surface is measured in real time. As means for solving charge nonuniformity resulting from nonuniformity of electron illumination density, electrons illuminating the specimen and the specimen are moved relatively to average electron illumination density. Moreover, an absorption current flowing into the specimen and the numbers of secondary electrons emitted from the specimen and of backscattered electrons are measured as means for monitoring charge of the specimen surface in real time.
摘要翻译：本发明解决了由碳纳米管电子源的发射变化引起的样品表面的电荷不均匀性和发射特性的个体差异。在充电控制处理期间，实时测量样品表面的电荷。作为解决由电子照射密度不均匀引起的电荷不均匀的手段，照射样品和样品的电子相对于平均电子照射密度移动。此外，测量流入样本的吸收电流和从样本和背散射电子发射的二次电子的数量作为用于实时监测样品表面的电荷的装置。

4. 发明申请

US20090031737A1 Refrigeration System 审中-公开
标题翻译：制冷系统
公开(公告)号：US20090031737A1
公开(公告)日：2009-02-05
申请号：US11922579
申请日：2006-07-03
申请人： Takeo Ueno , Masaaki Takegami , Koichi Kita , Kenji Tanimoto , Yoshinari Oda , Kazuyoshi Nomura , Azuma Kondo
发明人： Takeo Ueno , Masaaki Takegami , Koichi Kita , Kenji Tanimoto , Yoshinari Oda , Kazuyoshi Nomura , Azuma Kondo
IPC分类号： F25D21/06 , F25B1/10 , F25B41/00 , F25D21/14 , F25B43/02
CPC分类号： F25B13/00 , F25B1/10 , F25B47/025 , F25B2313/006 , F25B2313/0233 , F25B2313/02741 , F25B2400/0401 , F25B2400/075 , F25B2400/13 , F25B2400/22
摘要： A refrigerant circuit (20) includes a low stage compressor (101, 102, 121, 122), a high stage compressor (41, 42, 43), an outdoor heat exchanger (44) and a utilization side heat exchanger (83, 93). During a defrosting operation of the refrigeration system (10), the high stage compressor (41, 42, 43) is driven. Refrigerant discharged from the high stage compressor (41, 42, 43) is pumped into the utilization side heat exchanger (83, 93) to heat frost on it from its inside. Thereafter, the refrigerant evaporates in the outdoor heat exchanger (44), is then compressed by the high stage compressor (41, 42, 43) and is sent again to the utilization side heat exchanger (83, 93).
摘要翻译：制冷剂回路20包括低级侧压缩机101,102,121,122，高级侧压缩机41,42,43，室外热交换器44和利用侧热交换器83,93 ）。在制冷系统（10）的除霜运转中驱动高级压缩机（41,42,43）。从高级压缩机（41,42,43）排出的制冷剂被泵送到利用侧热交换器（83,93）中以从其内部加热霜。此后，制冷剂在室外热交换器44中蒸发，然后被高级侧压缩机41,42,43压缩，再次送到利用侧热交换器83,393。

5. 发明申请

US20080282728A1 Refrigerating Apparatus 审中-公开
标题翻译：制冷装置
公开(公告)号：US20080282728A1
公开(公告)日：2008-11-20
申请号：US10585575
申请日：2005-08-04
申请人： Masaaki Takegami , Kenji Tanimoto , Azuma Kondo
发明人： Masaaki Takegami , Kenji Tanimoto , Azuma Kondo
IPC分类号： F25B1/00 , F25D11/00 , F25B41/00 , F25B7/00
CPC分类号： F25B1/10 , F25B5/02 , F25B13/00 , F25B2313/0231 , F25B2313/02331 , F25B2313/0314 , F25B2400/13 , F25B2400/22 , F25B2600/021 , F25B2600/2507 , F25B2700/1933 , F25B2700/2104 , F25B2700/21151 , F25B2700/21152 , Y02B30/741
摘要： In order that an indoor heat exchanger (41), a cold storage heat exchanger (45), and a freeze storage heat exchanger (51) may differ in their refrigerant evaporating temperature, a refrigerant circuit (1E) is provided with a suction side three way switching valve (102) capable of switching of flow paths between the heat exchangers (41, 45, 51) and a compressor (2).
摘要翻译：为了使室内热交换器41，冷藏热交换器45和冷冻储存热交换器51的制冷剂蒸发温度不同，制冷剂回路（1E）设有吸入侧能够切换热交换器（41,45,51）与压缩机（2）之间的流路的三通切换阀（102）。

6. 发明申请

US20080110199A1 Refrigerating Apparatus 审中-公开
标题翻译：制冷装置
公开(公告)号：US20080110199A1
公开(公告)日：2008-05-15
申请号：US11794319
申请日：2005-12-22
申请人： Masaaki Takegami , Satoru Sakae , Kenji Tanimoto , Kazuyoshi Nomura , Yoshinari Oda , Azuma Kondo
发明人： Masaaki Takegami , Satoru Sakae , Kenji Tanimoto , Kazuyoshi Nomura , Yoshinari Oda , Azuma Kondo
IPC分类号： F25B1/00
CPC分类号： F25B5/02 , F25B2400/22 , F25B2500/01
摘要： The loss of refrigerant pressure which is caused in a return-side interconnecting piping line (19) comprising return-side interconnecting piping lines respectively extending from outlet ports (24, 34, 44) of single-stage side utilization units (12, 13, 14) to an inlet port (61) of a heat source unit (11) is set such that the lowest valued refrigerant pressure loss is caused by a said return-side interconnecting piping line of the return-side interconnecting piping line (19) that is connected to the lowest of the single-stage side utilization units (12, 13, 14) in compartment preset temperature.
摘要翻译：在包括分别从单级侧利用单元（12,13,13）的出口（24,34,44）延伸的回流侧互连管道的回流侧互连管路（19）中引起的制冷剂压力的损失， 14）到热源单元（11）的入口（61）被设定为使得最低值的制冷剂压力损失由返回侧互连管道（19）的所述返回侧互连管道引起，在室内预设温度下连接到最低级的单级侧利用单元（12,13,14）。

7. 发明申请

US20070137231A1 Refrigeration system 审中-公开
标题翻译：制冷系统
公开(公告)号：US20070137231A1
公开(公告)日：2007-06-21
申请号：US10580335
申请日：2005-09-13
申请人： Masaaki Takegami , Satoru Sakae , Kenji Tanimoto
发明人： Masaaki Takegami , Satoru Sakae , Kenji Tanimoto
IPC分类号： F25B49/00 , F25B1/10
CPC分类号： F25B1/10 , F25B5/02 , F25B2400/22 , F25B2500/31 , F25B2600/01 , F25B2700/1933 , F25D2700/12
摘要： When a guard timer of a compressor (141) expires, an R2 signal from a control section (140) of an outdoor unit is turned on (Action I). If a control section (120) of a freezer unit recognizes from an inside temperature detected by a temperature sensor (124) that the R2 signal is turned on and a request for a shift to a freezer thermo-on state is raised (Action II), a freezer electromagnetic valve (121) is opened (Action III). In general, when the electromagnetic valve (121) is opened, it is supposed that an increase in refrigerant suction pressure is detected by a pressure sensor (146) and then the compressor (141) is actuated. However, if an outside air temperature is low, the refrigerant suction pressure remains lower than a predetermined value. Therefore, the control section (120) actuates a booster compressor (131) (Action IV) to raise the refrigerant suction pressure of the compressor (141).
摘要翻译：当压缩机（141）的保护定时器期满时，来自室外机的控制部（140）的R 2信号被接通（动作I）。如果冷冻装置的控制部分（120）从由温度传感器（124）检测到的内部温度识别出R 2信号被接通并且提出转换到冷冻热接通状态的请求（动作II ），打开冷冻电磁阀（121）（动作III）。通常，当电磁阀（121）打开时，假设通过压力传感器（146）检测制冷剂吸入压力的增加，然后压缩机（141）被致动。然而，如果外部空气温度低，则制冷剂吸入压力保持低于预定值。因此，控制部（120）启动增压压缩机（131）（动作IV），以提高压缩机141的制冷剂吸入压力。

8. 发明申请

US20070074523A1 Refrigerating apparatus 审中-公开
标题翻译：制冷装置
公开(公告)号：US20070074523A1
公开(公告)日：2007-04-05
申请号：US10577011
申请日：2005-09-02
申请人： Masaaki Takegami , Satoru Sakae , Kenji Tanimoto , Kazuyoshi Nomura , Azuma Kondo , Yoshinari Oda
发明人： Masaaki Takegami , Satoru Sakae , Kenji Tanimoto , Kazuyoshi Nomura , Azuma Kondo , Yoshinari Oda
IPC分类号： F25D21/06 , G05D23/32 , F25D21/00
CPC分类号： F25B13/00 , F25B1/10 , F25B47/02 , F25B2313/0231 , F25B2400/075 , F25B2400/22
摘要： A refrigerator circuit (110) and a freezing circuit (30) are connected to an outdoor circuit (40) in parallel in a refrigerant circuit (20), and a freezer circuit (130) and a booster circuit (140) are connected in series in the freezing circuit (30). The booster circuit (140) includes a booster compressor (141) and three-way switching mechanisms (142, 160). During cooling operation of a freezing heat exchanger (131), first operation is performed in the three-way switching mechanisms (142, 160) so that the refrigerant evaporated in the freezing heat exchanger (131) is compressed in the booster compressor (141) and is sucked into a variable capacity compressor (41). During defrosting of the freezing heat exchanger (131), second operation is performed in the three-way switching mechanisms (142, 160) so that the refrigerant evaporated in the refrigeration heat exchanger (111) is compressed in the booster compressor (141), is supplied to the freezing heat exchanger (131), and then, is sent back to the refrigeration heat exchanger (111).
摘要翻译：冰箱回路（110）和冷冻回路（30）在制冷剂回路（20）中并联连接到室外回路（40），冷冻回路（130）和升压回路（140）串联连接在冷冻回路（30）中。升压电路（140）包括增压压缩机（141）和三通切换机构（142,160）。在冷冻热交换器（131）的制冷运转时，在三通切换机构（142,160）中进行第一操作，使得在冷冻热交换器（131）中蒸发的制冷剂在增压压缩机141中被压缩，并被吸入变容量压缩机（41）。在冷冻热交换器（131）的除霜期间，在三通切换机构（142,160）中进行第二操作，使得在增压压缩机（141）中在制冷用热交换器（111）中蒸发的制冷剂被压缩，供给到冷冻热交换器（131），然后被送回制冷用热交换器（111）。

9. 发明申请

US20070022777A1 Supercooling apparatus 审中-公开
标题翻译：过冷却装置
公开(公告)号：US20070022777A1
公开(公告)日：2007-02-01
申请号：US10570879
申请日：2005-06-09
申请人： Masaaki Takegami , Kenji Tanimoto , Satoru Sakae , Iwao Shinohara , Azuma Kondo
发明人： Masaaki Takegami , Kenji Tanimoto , Satoru Sakae , Iwao Shinohara , Azuma Kondo
IPC分类号： F25B1/00 , F25B25/00
CPC分类号： F25B13/00 , F25B7/00 , F25B40/02 , F25B2313/02331 , F25B2400/22 , F25B2600/0251 , F25B2600/23 , F25B2700/2103 , F25B2700/2106
摘要： A subcooling unit (200) includes a refrigerant passage (205) connected to liquid side communication pipes (21, 22) of a refrigerating apparatus (10). When a subcooling compressor (221) is operated, subcooling refrigerant circulates in the subcooling refrigerant circuit (220) to perform a refrigeration cycle, thereby cooling refrigerant of the refrigerating apparatus (10) which flows in the refrigerant passage (205). A controller (240) of the subcooling unit (200) receives the detection value of a suction pressure sensor (234) and a refrigerant temperature sensor (236). The controller (240) utilizes input signals from the sensors (234, 236) to control driving operation of the subcooling compressor (221) on the basis of information obtained within the subcooling unit (200). Thus, the operation of the subcooling compressor (221) can be controlled without sending and receiving a singal to and from the refrigerating apparatus (10) to which the subcooling unit (200) is incorporated.
摘要翻译：过冷却单元（200）包括与制冷装置（10）的液体侧连通管（21,22）连接的制冷剂通路（205）。当过冷却压缩机221运转时，过冷却制冷剂在过冷却制冷剂回路220中循环，进行制冷循环，从而冷却在制冷剂通路205中流动的制冷装置10的制冷剂。过冷却单元（200）的控制器（240）接收吸入压力传感器（234）和制冷剂温度传感器（236）的检测值。控制器（240）利用来自传感器（234,236）的输入信号，根据在过冷却单元（200）内获得的信息来控制过冷却压缩机（221）的驱动操作。因此，可以控制过冷却压缩机（221）的运转，而不会向从过冷却装置（200）装入的制冷装置（10）发送和接收单体。

10. 发明申请

US20060243908A1 Method of inspecting a circuit pattern and inspecting instrument 失效
标题翻译：检查电路图案和检查仪器的方法
公开(公告)号：US20060243908A1
公开(公告)日：2006-11-02
申请号：US11452989
申请日：2006-06-15
申请人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
发明人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
IPC分类号： G21K7/00
CPC分类号： G01N23/225 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： An apparatus for inspecting a sample using a scanning electron microscope includes a sample stage, a first electron-optical system to scan an electron beam of a first beam current on the sample, a second electron-optical system to scan an electron beam of a second beam current smaller than the first beam current on the sample, a mechanism to move the sample stage, a detector provided in each of the first and second electron-optical systems to detect a secondary electron. The first electron-optical system is operable in a first mode and the second electron-optical system is operable in a second mode with higher resolution than that of the first mode. In the first mode, the sample is observed while the sample stage is moved continuously, and in the second mode, the sample is observed by detecting a secondary electron using the detector while the sample stage is held stationary.
摘要翻译：使用扫描电子显微镜检查样品的装置包括样品台，用于扫描样品上的第一束电流的电子束的第一电子 - 光学系统，用于扫描第二电子束的电子束的第二电子 - 光学系统光束电流小于样品上的第一光束电流，移动样品台的机构，设置在每个第一和第二电子光学系统中的检测二次电子的检测器。第一电子 - 光学系统可在第一模式中操作，并且第二电子 - 光学系统可以以比第一模式更高的分辨率在第二模式中操作。在第一模式中，在样品台连续移动时观察样品，在第二模式中，通过在样品台保持静止时使用检测器检测二次电子来观察样品。

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