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81. 发明申请

US20170074742A1 PRESSURE SENSOR WITH REAL TIME HEALTH MONITORING AND COMPENSATION 审中-公开
标题翻译：具有实时健康监测和补偿的压力传感器
公开(公告)号：US20170074742A1
公开(公告)日：2017-03-16
申请号：US15343975
申请日：2016-11-04
申请人： MKS Instruments, Inc.
发明人： Lei Gu , Paul Lucas , Stephen F. Bart , Phillip W. Sullivan
IPC分类号： G01L19/00 , G01L9/00
CPC分类号： G01L9/0072 , G01L9/0042 , G01L9/0044 , G01L9/0073 , G01L9/0075 , G01L19/0092 , G01L27/002 , G01L27/007
摘要： A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
摘要翻译：压力传感器可以测量气体或液体压力。腔室可以具有接收气体或液体的入口。柔性隔膜可以在室内，其具有在流过入口之后暴露于气体或液体的表面。压力传感器系统可以感测由气体或液体的压力变化引起的柔性隔膜的变化。压力敏感传感器系统可以感测柔性隔膜的不是由气体或液体的压力变化引起的变化。压力敏感传感器系统可能对由气体或液体的压力变化引起的柔性隔膜的变化不敏感。

82. 发明授权

US09513181B2 Flat covered leadless pressure sensor assemblies suitable for operation in extreme environments 有权
标题翻译：平面无铅压力传感器组件适用于极端环境中的操作
公开(公告)号：US09513181B2
公开(公告)日：2016-12-06
申请号：US14151775
申请日：2014-01-09
申请人： Kulite Semiconductor Products, Inc.
发明人： Alexander A. Ned , Joseph R. VanDeWeert , Leo Geras
IPC分类号： G01L13/02 , G01L15/00 , G01L9/00 , G01L19/06 , G01L19/00
CPC分类号： G01L19/0681 , G01L9/0044 , G01L9/0047 , G01L9/0048 , G01L9/0054 , G01L19/0076 , G01L19/0627 , Y10T29/49826
摘要： This disclosure provides example methods, devices and systems associated with flat covered leadless pressure sensor assemblies suitable for operation in extreme environments. In one embodiment, a system may comprise a semiconductor substrate having a first side and a second side; a diaphragm disposed on the first side of the semiconductor substrate; a first cover coupled to the first side of the semiconductor substrate such that it overlays at least the diaphragm, wherein a pressure applied at the first cover is transferred to the diaphragm; and a sensing element disposed on the second side of the semiconductor substrate, wherein the sensing element is used to measure the pressure.
摘要翻译：本公开提供了与适于在极端环境中操作的平面覆盖的无铅压力传感器组件相关联的示例性方法，装置和系统。在一个实施例中，系统可以包括具有第一侧和第二侧的半导体衬底; 设置在所述半导体衬底的第一侧上的隔膜; 第一盖，其耦合到所述半导体基板的所述第一侧，使得其至少覆盖所述隔膜，其中施加在所述第一盖处的压力传递到所述隔膜; 以及设置在所述半导体衬底的第二侧上的感测元件，其中所述感测元件用于测量所述压力。

83. 发明申请

US20160273904A1 SILLICON BASED PRESSURE AND ACCELERATION OPTICAL INTERFEROMETRIC SENSORS WITH HOUSING ASSEMBLY 有权
标题翻译：基于SILICON的压力和加速光学干涉仪传感器与壳体组件
公开(公告)号：US20160273904A1
公开(公告)日：2016-09-22
申请号：US14664187
申请日：2015-03-20
申请人： Kulite Semiconductor Products, Inc.
发明人： Martin A. Sanzari
IPC分类号： G01B9/02
CPC分类号： G01B9/0207 , G01B2290/25 , G01L9/00 , G01L9/0044 , G01L9/0045 , G01L9/0047 , G01L9/0048 , G01L9/0079 , G01L19/04 , G01P15/093
摘要： A optical sensor assembly is disclosed that includes a sensor diaphragm configured to deflect responsive to an applied stimulus. The sensor assembly includes a first Extrinsic Fabry-Perot Interferometer (EFPI) having a first optical cavity in communication with at least a portion of the sensor diaphragm, the first EFPI is configured to interact with light to produce a combined measurement light signal and a first common-mode light signal, the measurement light signal corresponding to the applied stimulus. The sensor assembly also includes a second EFPI having a second optical cavity, the second EFPI is configured to interact with light to produce a second common mode light signal for error correction. The sensor assembly may further include a sensing optical fiber in communication with the first EFPI; a reference optical fiber in communication with the second EFPI; and a glass header configured to support the sensing optical fiber and the reference optical fiber.
摘要翻译：公开了一种光学传感器组件，其包括被配置为响应于所施加的刺激而偏转的传感器隔膜。传感器组件包括具有与传感器膜片的至少一部分连通的第一光学腔的第一外部法布里 - 珀罗干涉仪（EFPI），第一EFPI被配置为与光相互作用以产生组合的测量光信号和第一共模光信号，测量光信号对应于施加的刺激。传感器组件还包括具有第二光腔的第二EFPI，第二EFPI被配置为与光相互作用以产生用于纠错的第二共模光信号。传感器组件还可以包括与第一EFPI通信的感测光纤; 与第二EFPI通信的参考光纤; 以及玻璃接头，其被配置为支撑感测光纤和参考光纤。

84. 发明申请

US20160231186A1 PRESSURE SENSOR DIAPHRAGM 有权
标题翻译：压力传感器膜片
公开(公告)号：US20160231186A1
公开(公告)日：2016-08-11
申请号：US14615933
申请日：2015-02-06
申请人： Viatran Corporation
发明人： Surinder Sood , Joel D. Neri , William Wilson
IPC分类号： G01L9/00
CPC分类号： G01L9/0055 , G01L9/0044
摘要： A pressure sensor includes a pre-formed diaphragm located at the distal end of a pressure sensor. The diaphragm has a convex surface on a first side of the diaphragm which is exposed to a fluid to be measured. A strain gauge is attached to a second surface on the opposite side of the diaphragm. The diaphragm may be deformed to have the convex curvature on the first surface, and heat treated.
摘要翻译：压力传感器包括位于压力传感器的远端处的预先形成的隔膜。隔膜在隔膜的第一侧上具有暴露于待测流体的凸表面。应变计连接到隔膜相对侧上的第二表面。隔膜可以变形以在第一表面上具有凸曲率并进行热处理。

85. 发明授权

US09383271B2 Load detection device 有权
标题翻译：负载检测装置
公开(公告)号：US09383271B2
公开(公告)日：2016-07-05
申请号：US14394604
申请日：2013-05-22
申请人： AISIN SEIKI KABUSHIKI KAISHA
发明人： Yasukuni Ojima , Naoya Iesato
IPC分类号： G01L1/04 , G01L1/22 , G01L5/22 , G01L9/00 , G01L5/16
CPC分类号： G01L1/22 , G01L1/2231 , G01L5/161 , G01L5/223 , G01L9/0044 , G01L9/0051 , G01L9/0055
摘要： A highly sensitive load detection device includes a tubular peripheral wall portion; a disk-shaped disk portion that has a through hole formed coaxially with the peripheral wall portion and that is supported on an inner surface of the peripheral wall portion with a gap between the disk portion and a placement surface on which the peripheral wall portion is placed; a load input portion that is formed in a spherical shape having a diameter larger than an inside diameter of the through hole on at least a side thereof facing the through hole, that is placed on the through hole, and to which a load of an object to be detected is input; and sensors that are provided on the disk portion so as to be point-symmetric about the through hole, and that detect a strain corresponding to the load input to the load input portion.
摘要翻译：一种高灵敏度的载荷检测装置包括一个管状周壁部分; 盘形盘部，其具有与周壁部同轴地形成的贯通孔，并且在圆周部壁与放置面之间具有间隙地支撑在周壁部的内表面上 ; 负载输入部，其形成为直径大于通孔内径的球形，其至少一侧面向通孔，该通孔位于通孔上，并且物体的负载被检测的是输入; 以及设置在所述盘部上以使所述通孔为点对称的传感器，并且检测与向所述负载输入部输入的负载相对应的应变。

86. 发明申请

US20160146685A1 PIEZORESISTIVE PRESSURE SENSOR DEVICE 有权
标题翻译： PIEZORESISTIVE压力传感器装置
公开(公告)号：US20160146685A1
公开(公告)日：2016-05-26
申请号：US14931034
申请日：2015-11-03
申请人： Continental Automotive Systems, Inc.
发明人： Jen-Huang Albert Chiou , Shiuh-Hui Steven Chen
IPC分类号： G01L9/00 , B81C1/00
CPC分类号： B81C1/00158 , B81B3/007 , B81B2201/0264 , B81B2203/0127 , B81C2201/013 , G01L9/0044 , G01L9/0045 , G01L9/0047 , G01L9/0052 , G01L9/0054
摘要： The voltages output from a low-pressure MEMS sensor are increased by increasing the sensitivity of the sensor. Sensitivity is increased by thinning the diaphragm of the low pressure sensor device. Nonlinearity increased by thinning the diaphragm is reduced by simultaneously creating a cross stiffener on the top side of the diaphragm. An over-etch of the top side further increases sensitivity.
摘要翻译：通过提高传感器的灵敏度，可以提高从低压MEMS传感器输出的电压。通过减薄低压传感器装置的隔膜来增加灵敏度。通过在隔膜的上侧同时产生交叉加强筋来减小隔膜增加的非线性增加。顶侧的过度蚀刻进一步增加灵敏度。

87. 发明申请

US20150241465A1 PIEZORESISTIVE MEMS SENSOR 审中-公开
标题翻译： PIEZORESISTIVE MEMS传感器
公开(公告)号：US20150241465A1
公开(公告)日：2015-08-27
申请号：US14712004
申请日：2015-05-14
申请人： Murata Manufacturing Co., Ltd.
发明人： Takahiro KONISHI
IPC分类号： G01P15/12 , B81B3/00 , G01L9/00
CPC分类号： G01P15/123 , B81B3/0072 , B81B3/0086 , B81B2201/0235 , B81B2201/0264 , B81B2203/0109 , G01L9/0044 , G01L9/0052 , G01L9/0054 , G01P15/0802 , H01L29/84
摘要： A pressure sensor includes a SOI substrate that includes a Si substrate, a SiO2 layer, and a surface Si film. An opening portion is formed in the Si substrate through etching, and a displacement portion having a membrane structure is defined by the surface Si film and the SiO2 layer in this area. A piezoresistive element is provided in the displacement portion. The displacement portion bends in response to a pressure to be detected and a resistance value of the piezoresistive element changes in response thereto. A thickness of the membrane-structure displacement portion is not less than about 1 μm and not greater than about 10 μm, and a depth of a peak of an impurity concentration of the piezoresistive element is greater than about 0.5 μm and at a position less than about ½ of the depth of the thickness of the displacement portion.
摘要翻译：压力传感器包括SOI衬底，其包括Si衬底，SiO 2层和表面Si膜。通过蚀刻在Si衬底中形成开口部分，并且在该区域中由表面Si膜和SiO 2层限定具有膜结构的位移部分。压电元件设置在位移部分中。位移部分响应于待检测的压力弯曲，并且压阻元件的电阻值响应于此而变化。膜结构位移部分的厚度不小于约1μm且不大于约10μm，并且压阻元件的杂质浓度的峰值深度大于约0.5μm，并且在小于约为位移部分厚度的一半。

88. 发明申请

US20150192487A1 LOW PRESSURE SENSORS AND FLOW SENSORS 审中-公开
标题翻译：低压传感器和流量传感器
公开(公告)号：US20150192487A1
公开(公告)日：2015-07-09
申请号：US14150019
申请日：2014-01-08
申请人： General Electric Company
发明人： Nickolai S. Belov , Lihua Li , Kim Vu , Dinh Vu
IPC分类号： G01L9/06 , B81C1/00 , G01L9/00
CPC分类号： B81C1/00158 , B81B3/0072 , B81B2201/0264 , B81B2203/0127 , B81C2201/0133 , G01L9/0044 , G01L9/0047 , G01L19/0092 , G01L19/0618
摘要： Low pressure sensors and flow sensors are provided. In some embodiments, a pressure sensor can include a sensor die that includes a substrate and a cavity that is formed in a bottom side of the substrate and that defines an elastic element including a thin diaphragm area and a rigid island. A maximum thickness of the rigid island can be substantially smaller than a thickness of the substrate and can be greater than a thickness of the thin diaphragm area. Side walls of the rigid island can be substantially parallel to one another and can be substantially perpendicular to top and bottom surfaces of the wafer and substantially perpendicular to top and bottom surfaces of the die. The side walls of the at least one rigid island can be formed by wet etching the cavity into the die. The wafer can have an impurity diffused in one or more portions thereof prior to the wet etching such that the one or more portions are doped.
摘要翻译：提供低压传感器和流量传感器。在一些实施例中，压力传感器可以包括传感器管芯，其包括衬底和形成在衬底的底侧中并且限定包括薄隔膜区域和刚性岛的弹性元件的空腔。刚性岛的最大厚度可以基本上小于衬底的厚度，并且可以大于薄隔膜面积的厚度。刚性岛的侧壁可以基本上彼此平行，并且可以基本上垂直于晶片的顶表面和底表面并且基本垂直于管芯的顶表面和底表面。至少一个刚性岛的侧壁可以通过将腔浸入模具中而形成。在湿蚀刻之前，晶片可以具有在其一个或多个部分中扩散的杂质，使得一个或多个部分被掺杂。

89. 发明授权

US08776608B2 Coplanar process fluid pressure sensor module 有权
标题翻译：共面工艺流体压力传感器模块
公开(公告)号：US08776608B2
公开(公告)日：2014-07-15
申请号：US13285775
申请日：2011-10-31
申请人： Robert C. Hedtke , David A. Broden
发明人： Robert C. Hedtke , David A. Broden
IPC分类号： G01L13/02
CPC分类号： G01L13/026 , G01L9/00 , G01L9/0044 , G01L13/025 , G01L19/0038 , G01L19/142
摘要： A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.
摘要翻译：提供了共面工艺流体压力传感器模块。模块包括共面基座和壳体。共面基座具有一对工艺流体压力入口，每个具有隔离膜。壳体在共面基座和壳体之间的界面处联接到共面基座。差压传感器可操作地耦合到一对工艺流体压力入口，并且设置在壳体内部的共面底座附近。

90. 发明申请

US20140090486A1 PRESSURE SENSOR, AUDIO MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权
标题翻译：压力传感器，音频麦克风，血压传感器和触控面板
公开(公告)号：US20140090486A1
公开(公告)日：2014-04-03
申请号：US13927886
申请日：2013-06-26
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yoshihiko FUJI , Hideaki FUKUZAWA , Michiko HARA , Yoshihiro HIGASHI , Akio HORI , Tomohiko NAGATA , Shiori KAJI , Akiko YUZAWA
IPC分类号： G01L1/12
CPC分类号： G01L1/12 , G01L9/0044 , G01L9/0048 , G01L9/16 , H04R1/00 , H04R15/00 , H04R2410/00
摘要： According to one embodiment, a pressure sensor includes a substrate, a first electrode, a second electrode, a first magnetic layer, a second magnetic, a spacer layer, a third magnetic layer. The substrate includes a first region and a second region. The first electrode is provided on the first region. The second electrode is provided on the first electrode. The first magnetic layer is provided between the first electrode and the second electrode. The second magnetic layer is provided between the first electrode and the first magnetic layer or between the first magnetic layer and the second electrode. The spacer layer is provided between the first magnetic layer and the second magnetic layer in a stacking direction of layers from the first electrode to the second electrode. The third magnetic layer is provided continuously with the second magnetic layer on the second region.
摘要翻译：根据一个实施例，压力传感器包括基板，第一电极，第二电极，第一磁性层，第二磁性体，间隔层，第三磁性层。衬底包括第一区域和第二区域。第一电极设置在第一区域上。第二电极设置在第一电极上。第一磁性层设置在第一电极和第二电极之间。第二磁性层设置在第一电极和第一磁性层之间或第一磁性层和第二电极之间。间隔层在从第一电极到第二电极的层的堆叠方向上设置在第一磁性层和第二磁性层之间。第三磁性层与第二区域上的第二磁性层连续地提供。

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